TW200914811A - Size-changeable stage and inspection apparatus for liquid crystal substrate - Google Patents

Size-changeable stage and inspection apparatus for liquid crystal substrate Download PDF

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Publication number
TW200914811A
TW200914811A TW097126256A TW97126256A TW200914811A TW 200914811 A TW200914811 A TW 200914811A TW 097126256 A TW097126256 A TW 097126256A TW 97126256 A TW97126256 A TW 97126256A TW 200914811 A TW200914811 A TW 200914811A
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Taiwan
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frame
sliding
base
auxiliary
variable
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TW097126256A
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Chinese (zh)
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TWI426253B (en
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Tomohiro Akada
Kaoru Akiyama
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Otsuka Denshi Kk
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Publication of TWI426253B publication Critical patent/TWI426253B/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513Liquid crystal panels

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Liquid Crystal (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Apparatus For Radiation Diagnosis (AREA)

Abstract

The size-changeable stage of this invention includes: base frames BF11, BF21 that are disposed in parallel and can approach to and leave from each other; and at least one slide frame SF1 bridging between the base frames BF11, BF21. Connecting members C11, C21 are provided with a slide mechanism sliding along the longitudinal direction of the base frames BF11, BF21 and a rotating mechanism capable of changing the angle of the slide frame SF1 relative to the base frames BF11, BF21. Moreover, the connecting members C11, C21 are provided with an auxiliary slide mechanism capable of sliding the slide frame SF1 along the horizontal direction perpendicular to the longitudinal direction of the base frames BF11, BF21.

Description

200914811 六、發明說明: 【發明所屬之技術領域】 本發明有關於可藉由斜向配置滑動框體而縮小尺寸的可變 _ 尺寸基台。該可變尺寸基台適於用以測定彩色濾光片之光學特 • 性、液晶基板膜厚4的液晶基板移動式檢查裝置等。 【先前技術】200914811 VI. Description of the Invention: [Technical Field] The present invention relates to a variable _ size base that can be downsized by obliquely arranging a sliding frame. The variable-sized base is suitable for a liquid crystal substrate mobile inspection device for measuring the optical characteristics of a color filter and a liquid crystal substrate film thickness 4. [Prior Art]

將貼合彩色濾光片基板、TFT基板、彩色濾光片基板與TFT f '基板而成的基板(統稱「液晶基板」),近年已越趨於大型化, 例如最新規格(G1G)的液晶基板之尺寸為約3mx3m的大尺寸。 將該液晶基板以矩陣狀切取所需數量,再將所切取的各片設置 於液晶顯示裝置中。 此種液晶基板的性能戰,必需在姆前實施。施行性能測 试的檢查錢具備有:φ姉所構成秘支撐液晶基板的基 台、以及以光照射液晶基板並測定其透射光或反射光的光學檢 U 測頭。 上述^查I置必而搬送至液晶基板的檢查地點,但隨液晶基 板的大型化,檢查裝置亦趨於大型化。尤其用以支撐液晶基板 的框體,其尺寸已達車輛無法搭载的程度。 所以,⑴可考慮將檢查褒置以零件為單位先輸送至檢查地 點’再於檢查地點施行最終組裝。此方法中,因為必需等到在 檢查地點才能首次施行整體的動作確認與性能確認,因而當有 發現問題時,必需再度寄送零件的風險極高。且,在檢查地點 97126256 200914811 的組裝作業X時增加’有導致作業效率惡化的問題。況且,因 為在限制鮮的檢查地點處置各單元,因而就作業安全層面而 言亦有問題。 再者,⑵亦可考慮將已完成整體動作確認與性能確認的構 件以單it為單位分割’輸送此料元,紐再於檢查地點復 原。亦有採用此方式者。 另外,較佳的方法係(3)直接將已完成整體動作確認與性能 確認的檢查裝置輸送至檢查地點。對於小型尺寸液晶基板用檢 查裝置’即如此將已完成最終組裝的檢錢置輸駐檢查地點。 但是,就大型化檢絲置而言,@為其尺寸為車柄亦無法搭 載的大小,因而期待可縮小尺寸的可變尺寸基台。 緣疋’本發明之目的在於提供可將框體簡單折h運送的可 麦尺寸基台與液晶基板檢查裝置。 【發明内容】A substrate (collectively referred to as a "liquid crystal substrate") in which a color filter substrate, a TFT substrate, a color filter substrate, and a TFT f' substrate are bonded together has been increasingly enlarged in recent years, for example, a liquid crystal of the latest specification (G1G). The size of the substrate is a large size of about 3 mx 3 m. The liquid crystal substrate is cut into a required number in a matrix, and the cut pieces are placed in a liquid crystal display device. The performance war of such a liquid crystal substrate must be implemented before the methane. The test for performing the performance test includes a base for supporting the liquid crystal substrate by φ姊, and an optical inspection head for measuring the transmitted light or reflected light by irradiating the liquid crystal substrate with light. The above-mentioned inspection is carried out to the inspection site of the liquid crystal substrate, but as the liquid crystal substrate is enlarged, the inspection apparatus tends to be enlarged. In particular, the frame for supporting the liquid crystal substrate has a size that is such that the vehicle cannot be mounted. Therefore, (1) it is considered that the inspection device is first transported to the inspection site in units of parts and then final assembly is performed at the inspection site. In this method, since it is necessary to wait until the inspection site to perform the overall operation confirmation and performance confirmation for the first time, the risk of having to resend the parts is extremely high when problems are found. Further, when the assembly work X of the inspection site 97126256 200914811 is increased, there is a problem that the work efficiency is deteriorated. Moreover, because the units are disposed of at the restricted inspection sites, there is also a problem with the operational safety level. Furthermore, (2) it is also conceivable to divide the component that has completed the overall action confirmation and performance verification in units of a single unit to deliver the element, and the button is restored at the inspection site. There are also people who use this method. Further, the preferred method (3) directly transports the inspection device that has completed the overall operation confirmation and performance confirmation to the inspection site. The inspection device for the small-sized liquid crystal substrate is thus placed in the inspection site where the final assembly has been completed. However, in the case of a large-sized wire inspection, @ is a size that cannot be loaded by the handle, and thus a variable-size base that can be downsized is expected. The purpose of the present invention is to provide a usable size base and a liquid crystal substrate inspecting apparatus which can transport a frame by a simple folding h. [Summary of the Invention]

本發明的可變尺寸基台具備有:第―、第二基座框、至少】 條滑動框體、第-聯結構件、及第二聯結構件;該第一、第二 基座框相互平行設置,可相互靠近/遠離;該至少丨條滑驗 體橋接於上述第-、第二基座簡;該第—聯結構件將上述第 -基座框與上賴脑體之—部分相獅;該第二聯結構件將 上述第二基座框與上述滑動框體之另—部分相聯結。 上述第-聯結構件具備有沿上述第一基座框之縱長方向滑 動的第一滑動機構;上述第二聯結構件具備有沿上述第二基座 97126256 200914811 框之縱長方向滑動的第二滑動機構。 在上述第-聯結構件上設有用以改變上述滑動框體相對於 上述第-基座框之角度的第一旋轉機構;在上述第二聯結構件 • 上設有用以改變上述滑動框體相對於上述第二基座框之角度 _ 的第二旋轉機構。 並且’本發明的可變尺寸基台中’在上述第-聯結構件或第 二聯結構件巾至少任—者上,設置有漏滑動機構,可使上述 Γ滑動框體沿與上述第一、第二基座框之縱長方向相交叉的方向 滑動。 上述所謂「交又方向」,指與上述第―、第二基座框之縱長 方向成既疋角度0的方向,例如可為直角方向(故=训。)。此 外,「交叉方向」亦可為上述滑動框體的縱長方向。 根據此構造之可變尺寸基台,利用上述第―、第二聯結構件 的滑動機構與旋轉機構,可縮小或放大基座框間的寬度方向。 ί所以’在輸送日卞可在完全未分離之下折疊基座框與滑動框體, 在搬入現場後’可輕易地在現場執行復原作業。藉此即使在現 場復原後,亦可保證與輸送前之裝置同等級的性能。 本發明的可變尺寸基台特別有輔助滑動機構。若無設置 該輔助滑動機構,在義框體移動時,僅依靠上述滑動機構與 _ 旋轉機構,故在滑動框體移動時需要較大的力,可能導致無法 -順暢改變上述第一、第二基座框間之間隔。所以,若設有輔助 滑動機構,便可使滑動框體本身實質伸縮。藉此,若僅依靠上 97126256 5 200914811 、旋轉機構而無法麵移树,彻上 ==輕易地改變上述第―、第二基座框間的間隔= 移動較重之框體時,上述辅助滑動機構特別有用。 在 二述_肋機構最好限定上料動框體魏的極限範 * :'、、右未設置該極限範圍,在上述滑動輕體移動時, 框體有從上述聯結構件上脫落之虞。 _ 、〔第U冓件上最好設置第-辅助旋轉機構,盆具 動框=滑動框體之縱長方向成直角的旋轉軸,可虹述滑 構,其具有方向與上=:=輔助旋轉機 可使上述滑動框體搖/ /之縱長方向成直角的旋轉轴, =動框體搖擺。若未設置該第―、第二辅助 二==二ί可變尺寸基台時’若第一、第二基座框上 卜_ ' 第—旋轉機構施加過大的力。利用該第_、 第二__機構使上述滑輸體搖擺, 轉機構遭受損傷。 弟一方疋 使第二旋轉機構及上述第―、第二辅助旋轉機構若 旋轉 構’則利用1個球面旋轉機構便可實現二者之 述動框體中α置光學檢測頭可對基板進行光學檢測。 Α ,本發_液晶基板檢絲置因使用上述可變尺寸基 口,而使在檢查地闕行檢錢為可能。 本發明的上述或其他優點、特徵及效果,藉由參照所附圖式 97126256 200914811 而對如下述實施形態之說明’便可清楚明瞭。 【實施方式】 以下,針對本發明實施形態,參照所附圖式詳細說明。 圖1所示係本實施形態的可變尺寸基台之整體立體圖。圖2 所示係玎變尺寸基台的俯視圖,圖3所示係正視圖。The variable-size base of the present invention includes: a first and a second base frame, at least a sliding frame body, a first coupling structure, and a second coupling member; the first and second base frames are mutually Parallelly disposed to be close to/away from each other; the at least one of the first and second bases is bridged to the first and second bases; and the first and second structural members respectively connect the first base frame to the upper body a lion; the second coupling member couples the second base frame to another portion of the sliding frame. The first joint structure is provided with a first sliding mechanism that slides along the longitudinal direction of the first base frame, and the second joint member is provided with a first sliding direction along the longitudinal direction of the second base 97126256 200914811 Two sliding mechanism. a first rotating mechanism for changing an angle of the sliding frame relative to the first base frame; and a second connecting member for changing the sliding frame relative to the first coupling member a second rotating mechanism at an angle _ of the second base frame. And in the variable size base of the present invention, at least one of the first joint structure member or the second joint member towel is provided with a leakage sliding mechanism, and the first sliding frame body can be along the first The longitudinal direction of the second base frame slides in a direction intersecting. The above-mentioned "crossing direction" means a direction which is at an angle of 0 with respect to the longitudinal direction of the first and second base frames, and may be, for example, a right angle direction (so, training). Further, the "cross direction" may be the longitudinal direction of the above sliding frame body. According to the variable-sized base of this configuration, the width direction between the base frames can be reduced or enlarged by the sliding mechanism and the rotating mechanism of the first and second coupling members. ί Therefore, it is possible to fold the base frame and the sliding frame completely at the time of transporting the sun, and it is easy to perform the restoration work on the spot after moving into the site. This ensures the same level of performance as the pre-delivery unit even after the field is restored. The variable size abutment of the present invention particularly has an auxiliary sliding mechanism. If the auxiliary sliding mechanism is not provided, only the sliding mechanism and the _ rotating mechanism are used when the movable frame moves, so that a large force is required when the sliding frame moves, which may result in a failure to smoothly change the first and second. The spacing between the base frames. Therefore, if the auxiliary sliding mechanism is provided, the sliding frame body itself can be substantially expanded and contracted. Therefore, if the tree cannot be moved by the rotation mechanism only by the above 97126256 5 200914811, the above-mentioned interval between the first and second base frames can be easily changed == the auxiliary sliding is performed when the heavy frame is moved. The organization is particularly useful. In the second description, the rib mechanism preferably defines the limit range of the upper moving frame body: *, and the right limit is not set. When the sliding light body moves, the frame body is detached from the joint structural member. . _, [The U-piece is preferably provided with a first-auxiliary rotation mechanism, and the basin frame = the rotation axis of the sliding frame body at a right angle to the right angle, which can be described as a direction and upper =:= auxiliary The rotating machine can swing the above-mentioned sliding frame body at a right angle to the vertical axis, and the moving frame body swings. If the first and second auxiliary two == two variable size bases are not set, 'if the first and second base frames are _' the first rotating mechanism applies an excessive force. The sliding body is rocked by the first and second __ mechanisms, and the rotating mechanism is damaged. When the second rotating mechanism and the first and second auxiliary rotating mechanisms are rotated, the two rotating mirrors can realize the optical positioning of the substrate by the optical detecting head. Detection. Α 本 本 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The above and other advantages, features, and advantages of the present invention will become apparent from the following description of the appended claims. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Fig. 1 is an overall perspective view of a variable-size base of the embodiment. Figure 2 shows a top view of the 玎-size sized abutment, and Figure 3 shows a front view.

可變尺寸基台具有:組合由金屬(例如銘、鐵)、合成樹脂等 構成的角棒狀構件(亦稱「框體」)而形成複數個四角框架,使 該等四角框架垂直站立,並將該等四角框架間利用水平設置的 中間框體IF相聯結*形成的形狀。在本發明實施形態中合計 有4個四角框木,分別為2個外側框體框架(以^表示) 與2個内側框體框架(以12、22表示)。 圖1中將左侧的外側框體框架Η、左側的内側框體框架 12及左側的中間框體IF1,統稱為「一側支樓部】」,將右側 的外側框體框架2卜右侧的_臓框架22及右側的中間框 體IF2 ’統稱為「另—側支撐部%。 田=各ι組合响成四角框架時,可將正交的框體間利用 累私等累鎖:l具相聯結,亦可利用諸域接、硬焊等方式,而 使正交框體間相聯結。 々利用中間框體IF在框架_聯結時,亦同樣地可使用螺检 等累鎖工具Λ施’亦可利用溶接、硬焊等手段而實施。 、在側支撐部1與另—側支稽部2之間,可裝卸地設置有固 定用框體找。賴疊可變尺寸基台時,可使一側支撐们與 97126256 200914811 =部2朝箭頭A朝内之方向相靠近,而拆卸該固定用 ::壯:。然後,在—側支_與另,切部2的底面, 借;&quot;滾輪(未圖示),並在地面上鋪設導引該滾輪的滑執, =一㈣料1與另—側讀部2可朝箭頭A方向移動。所 下,相=:另—側支撐部2可在維持™ 、側切部1具備有㈣細角《狀的外侧體框架n 成四角框架狀的内側框體框架12 ;另—側支撐部2 “加組《成四角彳_狀的外_體隸21以及組裝成四角 王卞狀的内側框體框架22。外側框體框架與内側框體框架之 間藉由中間框體m、IF2相聯結。 ” 在側支撐』1巾,對形成外側框體框架11的四角框架, 。、側水平;跨的框體稱為「基座框顧」,對形成内側框 體框木12的四脑架’將其上侧水平橫跨雜體稱為「基座 框BF12」。 再者,在另-侧支撐部2 t,對形成外側框體框架21的四 角框架’將其上侧水平橫跨的框體稱$「基座框體」,對形 成内側框體框架22的四触架,將其上側水平橫跨的框體稱 為「基座框BF22」。 基座框BF11或基座框BF12構成「第一基座框」,基座框腿 或基座框BF22構成「第二基座框」。 並且,具備有·跨接基座框BF11與基座框BF21間的至少^ 97126256 8 200914811 條長條狀滑動框體SFl、以及跨接基座框即12與基座框BF22 間的至少1條長條狀滑動框體別2。 滑動框體SF1在接觸到基座框bfii的部位處介設有聯結構 件C11,滑動框體SF1在接觸到基座框BF21的部位處介設有 聯結構件C21。此外,滑動框體SF2在接觸到基座框即12的 部位處介設有聯結構件C12,滑動框體SF2在接觸到基座框 BF22的部位處介設有聯結構件C22。 聯結構件C11或聯結構件C12構成「第一聯結構件」,聯結 構件C21或聯結構件C22構成「第二聯結構件」。 在本實施形態中裝設有4個聯結構件,代表性地說明聯結構 件CU、C21的構造。其餘的聯結構件,則C12與cu為相同 構造’而C22與C21為相同構造。 圖4所示係設置在滑動框體SF1與基座框BFn間的聯結構 件C11之侧視圖,圖5所示係正視圖。圖6所示係分解立體圖。 聯結構件C11設有滑動板32、輔助滑動板34及旋轉板奶。 该滑動板32沿基座框BF11之縱長方向B滑動。該輔助滑動板 34 |合載於滑動板32上,與上述縱長方向b成既定角度故而沿 水平方向E滑動(參照圖6),並安裝有用以改變滑動框體sn 相對於基座框BF11之角度(參照圖8中的Θ)的旋轉軸承機構 33。該旋轉板35搭載於旋轉軸承機構犯上,並圍繞垂直軸v 方疋轉,且安裝有旋轉軸承機構33,其具有與滑動框體SF1之 縱長方向C成直角水平方向])的旋轉軸,可使滑動框搖擺。此 97126256 200914811 外在凝轉板35上隔著辅助板38而裝設有滑動框體sfi。 更詳細說明,在基座框BF11水平的上面,鋪設有2條滑執 3卜朝基座框BF11之縱長方向β延伸。在滑動板32的下面, 設置有可在該2條滑執31上旋轉的車輪(未圖示)。藉由設置 該車輪,使聯結構件C11可在基座框顧上朝縱長方向Β自 由移動。另外’在基座框觀的上面最好設置播止,以防止 聯結構件C11從基聽㈣之二端脫落。播止只要能阻止聯 π構件C11即可,可為任意形狀,例如圖6所示,可為立設在 基座框BF11之上面的銷Ρ。 在滑動板32的上面,沿與上述縱長方向Β成既定交叉角度 於的方向Ε鋪設有2條滑執37a ’且在滑動板32的上方,於 下面之二邊形成有溝部37b,在該等溝部挪中設置有供裝設 在上述滑執37a上旋轉之車輪(未圖示)的輔助滑動板%。上 述父叉角度0只要滿足〇。&lt;0〈副。的角度即可,最好為奶。 &lt;4&lt;135°。例如0亦可為直角(9〇。)。 藉由設置該辅助滑動板34 ’使滑動框體SF1可在滑動板32 上朝方向E自由移動。依此’藉由該車輪與滑執37a,可實現 「輔助滑動機構37」。另外,在滑動板32的上面或辅助滑動 板34的下面,為避免滑動框體邠丨從滑動板% 2好設止m驗止漏義板34 意形狀。例如可為立設在滑動板32上面的銷。 再者,在輔助滑動板34的上面設置有旋轉軸承機構犯。旋 97126256 200914811 轉韩承機構33由絲在輔助滑動板34场 及可相對於外心轴承部33a而自由旋轉的内心轴部:广: 成。旋轉板35固定於内心袖部33b上。藉由 &amp;所構 板35可相對於辅助滑動板34而自由旋轉,其 &amp; ’旋轉 直抽V。另外,亦可將内心轴部咖錢於辅助I動垂 並將旋轉板35安裝於外心軸承部33a上。 上 在旋轉板35上設置有輔助旋轉轴承機構39, 細之縱w的斜編上输轉轴:= ㈣軸承機構39使滑動框體SF1圍繞著與圖5所示 SF1之縱長方向C成直角的水平方向D,沿旋轉角“搖擺。 在輔綠娜承機構39上裝設有辅助板38,在其上面則裝設 有滑動框體SF1。另外,為限麵助旋轉轴承機構%的自^ 旋轉’最好設置將舰轉肖賊於—絲_㈣止(未圖 示)。The variable-size abutment has a corner bar-shaped member (also referred to as a "frame") composed of a metal (for example, iron, synthetic resin, or the like) to form a plurality of four-corner frames, so that the four-corner frames stand vertically, and A shape formed by the intermediate frames IF horizontally disposed between the four corner frames. In the embodiment of the present invention, there are four quadrangular frame woods, which are two outer frame frames (indicated by ^) and two inner frame frames (indicated by 12 and 22). In Fig. 1, the outer frame frame Η on the left side, the inner frame frame 12 on the left side, and the intermediate frame IF1 on the left side are collectively referred to as "one side branch portion", and the right outer frame frame 2 is on the right side. The _ 臓 frame 22 and the middle frame IF2 ' on the right side are collectively referred to as "the other side support portion %. When the field = each ι combination is spliced into a four-corner frame, the orthogonal frames can be used for tired locks: With the phase connection, it is also possible to connect the orthogonal frames by means of domain connection, brazing, etc. 々 When the intermediate frame IF is used in the frame_connection, a screw-locking tool such as a screw check can be used. The application can be carried out by means of welding or brazing, etc. Between the side support portion 1 and the other side branch portion 2, a fixing frame is detachably provided. , can make one side support and 97126256 200914811 = part 2 toward the arrow A inward direction, and disassemble the fixed use:: strong:. Then, in the side branch _ and the other, the bottom of the cut 2, borrow ;&quot;roller (not shown), and lay the slide on the ground to guide the roller, = one (four) material 1 and the other - side reading part 2 can be arrow Moving in the direction of the head A. The lower side: the other side support portion 2 is provided with the inner frame frame 12 having the four-corner frame shape of the outer frame n in the shape of the (4) fine-angled shape in the side-cut portion 1; - Side support portion 2 "The outer body member 21 in the form of a square corner" and the inner frame frame 22 assembled in a square shape are added. The outer frame frame and the inner frame frame are connected by the intermediate frames m and IF2. In the side support, 1 towel, the four-cornered frame forming the outer frame frame 11, and the side horizontal; the frame of the span is called the "base frame", and the four-brain frame forming the inner frame frame 12 The upper horizontal crossbody is referred to as "base frame BF12". Further, in the other side support portion 2 t, the frame which is formed by arranging the upper side of the square frame of the outer frame frame 21 is referred to as a "base frame", and the inner frame frame 22 is formed. The four-contact frame is referred to as a "base frame BF22". The base frame BF11 or the base frame BF12 constitutes a "first base frame", and the base frame leg or base frame BF22 constitutes a "second base frame". Further, at least one of the long-slide-shaped sliding frame body SF1 between the jumper base frame BF11 and the base frame BF21 and at least one of the jumper base frame 12 and the base frame BF22 are provided. Long strip sliding frame body 2. The sliding frame body SF1 is provided with a coupling member C11 at a portion contacting the base frame bfii, and the sliding frame body SF1 is provided with a coupling member C21 at a portion contacting the base frame BF21. Further, the sliding frame body SF2 is provided with a joint structural member C12 at a portion contacting the base frame 12, and the sliding frame body SF2 is provided with a joint structural member C22 at a portion contacting the base frame BF22. The joint member C11 or the joint member C12 constitutes a "first joint member", and the joint member C21 or the joint member C22 constitutes a "second joint member". In the present embodiment, four joint members are provided, and the structures of the joint members CU and C21 are representatively explained. For the remaining joint members, C12 and cu have the same structure' and C22 and C21 have the same configuration. Fig. 4 is a side view showing a coupling member C11 provided between the sliding frame body SF1 and the base frame BFn, and Fig. 5 is a front view. Fig. 6 is an exploded perspective view. The joint member C11 is provided with a slide plate 32, an auxiliary slide plate 34, and a rotating plate milk. The slide plate 32 slides in the longitudinal direction B of the base frame BF11. The auxiliary slide plate 34 is coupled to the slide plate 32, and is slid in the horizontal direction E at a predetermined angle with respect to the longitudinal direction b (see FIG. 6), and is mounted to change the slide frame sn relative to the base frame BF11. The rotary bearing mechanism 33 at the angle (refer to Θ in Fig. 8). The rotating plate 35 is mounted on a rotary bearing mechanism and rotates around a vertical axis v, and is attached with a rotary bearing mechanism 33 having a rotating shaft at a right angle to the longitudinal direction C of the sliding frame body SF1. The sliding frame can be swung. This 97126256 200914811 is provided with a sliding frame body sfi on the outer condensing plate 35 via the auxiliary plate 38. More specifically, on the horizontal level of the base frame BF11, two slides 3 are laid so as to extend in the longitudinal direction β of the base frame BF11. On the lower surface of the slide plate 32, wheels (not shown) that are rotatable on the two slides 31 are provided. By providing the wheel, the coupling member C11 can be freely moved in the longitudinal direction of the base frame. Further, it is preferable to set the broadcast on the upper surface of the base frame to prevent the joint member C11 from coming off the two ends of the base (4). The broadcast may be any shape as long as it can block the π member C11. For example, as shown in Fig. 6, it may be a pin erected above the base frame BF11. On the upper surface of the slide plate 32, two slides 37a' are laid in a direction perpendicular to the longitudinal direction, and a groove portion 37b is formed on the lower side of the slide plate 32. The auxiliary sliding plate % for the wheel (not shown) to be mounted on the slide 37a is provided in the groove portion. The parent fork angle 0 is as long as it satisfies 〇. &lt;0<sub. The angle can be, preferably milk. &lt;4&lt;135°. For example, 0 can also be a right angle (9 〇.). The slide frame body SF1 is freely movable in the direction E on the slide plate 32 by providing the auxiliary slide plate 34'. Accordingly, the "auxiliary slide mechanism 37" can be realized by the wheel and the slide 37a. Further, on the upper surface of the slide plate 32 or the lower surface of the auxiliary slide plate 34, in order to prevent the slide frame body from being set, the shape of the leak-proof plate 34 is checked. For example, it may be a pin that is erected on the sliding plate 32. Further, a rotary bearing mechanism is provided on the upper surface of the auxiliary slide plate 34.旋 97126256 200914811 The Korean bearing mechanism 33 is made of a wire in the auxiliary sliding plate 34 field and an inner mandrel portion that is freely rotatable relative to the outer core bearing portion 33a: wide: forming. The rotating plate 35 is fixed to the inner sleeve portion 33b. The plate 35 is freely rotatable relative to the auxiliary slide plate 34 by the &amp;&apos;, and the &amp;&apos; is rotated straight. Further, the inner shaft portion may be hanged on the auxiliary I, and the rotary plate 35 may be attached to the outer core bearing portion 33a. The upper rotary plate 35 is provided with an auxiliary rotary bearing mechanism 39, and the upper longitudinal w is inclined to the upper rotating shaft: = (4) The bearing mechanism 39 surrounds the sliding frame SF1 with the longitudinal direction C of the SF1 shown in FIG. The horizontal direction D of the right angle "swings" along the rotation angle. The auxiliary plate 38 is mounted on the auxiliary green bearing mechanism 39, and the sliding frame body SF1 is mounted thereon. In addition, the hinged rotating bearing mechanism is limited. From ^ Rotate 'The best setting will turn the ship to the thief in the silk _ (four) stop (not shown).

其餘的聯結構件⑽、⑵、C22中,與⑴同屬於_側支撐 部1的聯結構件C12,具有與CU相同的構造。 牙 另一側支撐部2所屬的聯結構件C2卜C22具有圖7所示構 造。該構造不同於圖6之處在於··省略辅輯動機構。即,辅 助滑動板34與滑動板32係直接固定。 此構造中,滑動框體SF卜SF2雖無法沿方向E自由移動, 但因為滑動框體SF1 ' SF2的另一端可藉由聯結構件cu、ci2 而移動,因而在折疊或打開可變尺寸基台時,仍可順暢地移動 97126256 11 200914811 滑動框體SFl、SF2。另外 _ ,聯結構件C21、C22亦可為1置有 輔助滑動機構37的構造,gR+ 邛了為》又置有 再&amp;即亦可為滑動框體SF1 * 向E自由移動的構造。 ㈣i M2月“方Among the remaining joint members (10), (2), and C22, and the joint member C12 belonging to the _ side support portion 1 (1) have the same configuration as the CU. The joint member C2 C22 to which the other side support portion 2 belongs has the configuration shown in Fig. 7. This configuration differs from that of FIG. 6 in that the auxiliary mechanism is omitted. That is, the auxiliary slide plate 34 and the slide plate 32 are directly fixed. In this configuration, the sliding frame SF SF2 cannot move freely in the direction E, but since the other end of the sliding frame SF1 ' SF2 can be moved by the coupling members cu, ci2, the variable size base is folded or opened. At the time of the station, it is still possible to smoothly move the 97126256 11 200914811 sliding frame SFl, SF2. Further, the joint members C21 and C22 may have a structure in which the auxiliary slide mechanism 37 is provided, and the gR+ is set to "and" and the slide frame body SF1* can be freely moved to the E. (4) i M2 month "party

說明此可變尺寸基台的折A ,Λ , α α 且動作,知作員在圖2所示可變尺 寸基台呈打開的狀態下折卸 矛、栓並卸除介設在一側去 ,、另一側支撐部2間的固定用框 , 體FX。然後,手持著滑動框 _ J °押入’即可藉由前述滑動板32沿基座框 ㈣之謝向B__,與旋_承機制在㈣ 的旋轉動作之互動’而折疊滑動框體納、網。此時,尤立 在折4之初期階段,操作員使力之方向和-側支撐部!與另Γ 側支擇部2相靠近之方向呈接近直角之狀態,操作員必須承受 極大的力。 此處,輔助滑動機構37將產生作用十當僅依靠滑動動 作與旋轉動作並無法順暢地移動滑動框體sp丨、sF2時,便可 藉由辅助滑動機構37而實質改變滑動框體SF卜SF2的長度。 因為該滑動框體SF1、SF2變短的方向,係一侧支樓部1 ^另 側支擇β 2相靠近的方向,因而當手持著滑動框體肌、奶 亚朝斜向押入時,可使滑動框體SF1、SF2順暢地移動。 輔助旋轉軸承機構39之作用,在一側支撐部1與另一側支 擔。卩2並非完全水平設置的情況下發揮。即,在設置可變尺寸 基台的地面非完全水平的情況下,或基座框BF11之上面與基 座框BF21之上面非屬同一水平面的情況下,若折疊滑動框體 97126256 12 200914811 SF卜奶’滑動框體SF1的一端與另—端便相對的上下動,且 滑動框體SF2的-端與另一端亦相對的上下動,此動作可藉由 辅助旋轉軸承機構39朝φ方向的旋轉動作而吸收。所以,可 防止應力施加於聯結構件⑴之可動部分(具體而言,指旋轉 轴承機構33)。 圖8所示係可變尺寸基台呈折疊狀態的俯姻,圖9所示係 正視圖。在—側支撐部1與另—側切部2間介設有固定用安 裝治具4G ’―側支撐部1與另—側支撐部2隔著固定用安裝 治具40 *藉由螺㈣定。可在此狀態下輸送。 當將可變財基台錢場打開麵餘料,執行與至目前 為止反向的操作° ’拆卸固定用安裝治具40,並打開滑動 框體SF卜SF2。此時,因為設有輔助滑動機構π,因而當僅 依靠滑動動作與旋轉動作無法順暢移動滑動框體肌、肥 時’便可藉由輔助滑動機構37而改變滑動框體肥、肥的長 度。因為該滑動框體Sn、SF2變長的方向,即為一側支撐部 1與另側支撐^ 2相遠離的方向,因而可使滑動框體奶、 SF2順暢地移動。 當-側支接部1與另一側支稽部2間的距離成為既定距離 時’便在二構件間播入固定用框體FX,並藉由螺检等固定。 在此狀態下,在滑動框體Sn、SF2間支樓液晶基板,並將光 學檢測頭0H钱於滑動框體肥、奶上,即可施行該液晶基 板的光學測定。 97126256 13 200914811 =ίο圖11所示係本發明另一實施形態,旋轉軸承機構犯 、,助方疋轉軸承機構39的動作由單-個球面旋轉機構41兼任 、、下秘結構件Clla構造的側視圖與正視圖。 U籌件CUa具備有滑動板32、輔助滑動板34、及旋轉板 該滑動板32沿基座框奶(之縱長方向B滑動。= ^板34料於滑動板32上’並具有辅助滑動機構37,且 有球面旋轉機構41。該旋轉板施搭載於球面旋轉機構 球峻轉機構41由:設置於輔助滑動板34上的球面體、以 及覆盖該球面體球面且可沿球面任意旋轉運動的球面蓋體所 構成。球面旋轉機構41可圍繞垂直軸V旋轉(參照圖1();0), =堯Η咖謝向G㈣的梢轉轴D旋轉 / ’ Φ)。所以’可改變基座框BFU與滑動框體阳 日L又角Θ,亦可使滑動框體搖擺,因而可具有 4〜圖6所示聯結構件C11相同的作用。 ” 以上針對本翻實卿態朗’惟本發_實縫不僅侷限 於此。例^’只要基座框數量最少有2條,且橋接其等的滑動 忙體之數里至少有!條,便可實施本發明。此外,輔助滑動機 構設置於滑動板32與輔助滑動板34之間,但亦可設置於其他 部例如圖12所示’設置於辅助板祁與滑動框體仰1之間。 此m ’在輔助板38上鋪設滑軌,並在滑動框體肌底面 设置在違滑執上滾動的車輪。滑執之方向(即辅助滑動機構吖 97126256 14 200914811 的滑動方向)’只要使滑動框體SF1可相對於辅助板38而卜、典 動框體SF1之縱長方向c滑動而決定便可。 彳 再者,截至目前的說明係假設將可變尺寸基台使用於液曰美 板檢查裝置。但是,本發明的可變尺寸基台並不僅偈限於= 基板的檢查’舉凡要求可折疊的所有用途均可利用。若使用於 例如供收容大型貨物的框體、大型商品陳列用框體等方面,當 無收容物品時,便可以折疊之狀態放置於倉庫中,或可在折: 之狀態下輸送。 X」隹折宜 【圖式簡單說明】 =1為本制實_態的可狀核自L體圖。 圖2為可變尺寸基台的俯視圖。 圖3為可變尺寸基台的正視圖。 圖4為在滑動框體與基座框之間所設置聯 圖5為聯結構件的正視圖。 冑件的侧視圖。 圖6為聯結構件的分解立體圖。 圖7為省略輔助滑動機構的聯結構件之分解 圖8為可變尺寸基台呈折叠狀態的俯視圖。-… 圖9為可變尺寸基台呈折疊狀態的正視圖。 圖10為旋轉軸承機構與辅助旋轉妹機構 球面旋轉機構兼用時,聯結構件的構造侧視圈。乍,由1個 圖11為該聯結構件的構造正視圖。Explain the folding A, Λ, α α of the variable-size abutment and the action. The clerk disassembles the spear, the bolt and removes the one on the side when the variable-size abutment shown in Fig. 2 is opened. , the fixing frame between the other side support portions 2, the body FX. Then, holding the sliding frame _ J ° into the 'can be folded by the sliding plate 32 along the base frame (4), B__, and the rotation mechanism of the rotation mechanism in the (four) rotation action 'folding the sliding frame body, the net . At this time, in the early stage of the fold 4, the operator makes the direction of the force and the side support! The operator is close to a right angle with the other side of the side selection 2, and the operator must withstand a great force. Here, the auxiliary sliding mechanism 37 will produce a function. When the sliding frames sp丨 and sF2 cannot be smoothly moved by only the sliding motion and the rotating motion, the sliding frame body SF SF2 can be substantially changed by the auxiliary sliding mechanism 37. length. Because the direction in which the sliding frames SF1 and SF2 are shortened, the one side branch portion 1 ^ the other side selects the direction in which the β 2 is close to each other, so that when the sliding frame body muscle is held by hand and the milk is tilted obliquely, The sliding frames SF1 and SF2 are smoothly moved. The auxiliary rotary bearing mechanism 39 functions as a support on the one side support portion 1 and the other side.卩 2 is not played when the level is set completely. That is, in the case where the ground of the variable-size base is set to be incompletely horizontal, or when the upper surface of the base frame BF11 and the upper surface of the base frame BF21 are not in the same horizontal plane, if the sliding frame is folded, the structure of the sliding frame is 97126256 12 200914811 SF One end of the sliding frame SF1 moves up and down relative to the other end, and the end of the sliding frame SF2 is also moved up and down relative to the other end. This action can be rotated in the φ direction by the auxiliary rotary bearing mechanism 39. Absorbed by action. Therefore, it is possible to prevent stress from being applied to the movable portion of the joint member (1) (specifically, the rotary bearing mechanism 33). Figure 8 shows a collapsed state of the variable-size abutment, and Figure 9 is a front view. A fixing fixture 4G is disposed between the side support portion 1 and the other side cut portion 2 - the side support portion 1 and the other side support portion 2 are separated by a fixing fixture 40 * by a screw (four) . It can be transported in this state. When the variable profit base is opened, the operation is reversed to the present, and the fixing fixture 40 is removed, and the sliding frame SF SF2 is opened. At this time, since the auxiliary sliding mechanism π is provided, when the sliding frame muscles and the fat are not smoothly moved by the sliding motion and the rotating motion, the length of the sliding frame body fat and the fertilizer can be changed by the auxiliary sliding mechanism 37. Since the direction in which the sliding frames Sn and SF2 are elongated is the direction in which the one side support portion 1 is away from the other side support member 2, the sliding frame body milk and the SF 2 can be smoothly moved. When the distance between the side branch portion 1 and the other side branch portion 2 is a predetermined distance, the fixing frame FX is inserted between the two members and fixed by screwing or the like. In this state, the liquid crystal substrate is branched between the sliding frames Sn and SF2, and the optical detecting head 0H is applied to the sliding frame body fat or milk to perform optical measurement of the liquid crystal substrate. 97126256 13 200914811 = ίο FIG. 11 shows another embodiment of the present invention, in which the rotary bearing mechanism is engaged, and the operation of the assisting slewing bearing mechanism 39 is performed by the single spherical rotating mechanism 41 and the lower structural member Clla. Side view with front view. The U-funded member CUa is provided with a sliding plate 32, an auxiliary sliding plate 34, and a rotating plate. The sliding plate 32 slides along the base frame milk (the longitudinal direction B is slid. = ^ the plate 34 is fed onto the sliding plate 32) and has an auxiliary sliding The mechanism 37 includes a spherical rotating mechanism 41. The rotating plate is mounted on the spherical rotating mechanism. The spherical turning mechanism 41 is composed of a spherical body provided on the auxiliary sliding plate 34, and a spherical surface covering the spherical body and arbitrarily rotating along the spherical surface. The spherical cover mechanism is formed. The spherical rotating mechanism 41 is rotatable about the vertical axis V (refer to FIG. 1(); 0), and the rotation of the tip rotation axis D of the G (four) is rotated / 'Φ). Therefore, the base frame BFU and the sliding frame body L and the corner frame can be changed, and the sliding frame body can be swayed, so that the same function as the joint structure member C11 shown in Fig. 6 can be obtained. The above is not limited to this. It is not limited to this. As long as there are at least 2 pedestal frames, and at least there are at least ! The present invention can be implemented. Further, the auxiliary sliding mechanism is disposed between the sliding plate 32 and the auxiliary sliding plate 34, but may be disposed at other portions, such as shown in Fig. 12, between the auxiliary plate and the sliding frame. This m' lays a slide rail on the auxiliary plate 38, and sets the wheel on the bottom surface of the sliding frame body to slide on the sliding slip. The direction of the slippery direction (ie, the sliding direction of the auxiliary sliding mechanism 吖97126256 14 200914811) The sliding frame body SF1 can be determined by sliding relative to the auxiliary plate 38 and the longitudinal direction c of the pawn frame SF1. Further, as of now, it is assumed that the variable-size base plate is used for liquid-stained beauty. The plate inspection device. However, the variable-size base of the present invention is not limited to the inspection of the substrate. It can be used for all applications requiring folding. For example, it is used for housings for large-sized goods and for large-scale merchandise display. Frame and other aspects When there is no containment item, it can be placed in the warehouse in the state of being folded, or it can be transported in the state of folding: X" 隹 宜 【 [Simple description of the figure] =1 is the nucleus of the solid state _ state L body map. 2 is a top plan view of a variable size abutment. Figure 3 is a front elevational view of a variable size abutment. Fig. 4 is a front view showing the joint between the sliding frame and the base frame. Side view of the piece. Figure 6 is an exploded perspective view of the joint structure. Fig. 7 is an exploded view of the joint member omitting the auxiliary slide mechanism. Fig. 8 is a plan view showing the variable size base in a folded state. -... Figure 9 is a front view of the variable size abutment in a folded state. Fig. 10 is a structural side view of the coupling member when the rotary bearing mechanism and the auxiliary rotary mechanism are used together.乍, from Fig. 11 is a front view of the structure of the joint structure.

圖為將辅助滑動機構設置於輔助板38 I 97126256 動榷體SF1間 15 200914811 的聯結構件分解立體圖。 【主要元件符號說明】 1 一側支撐部 2 另一侧支撐部 11 ' 21 外側框體框架 12、22 内側框體框架 31 、 37a 滑執 32 滑動板 33 旋轉軸承機構 33a 外心轴承部 33b 内心軸部 34 輔助滑動板 35、36a 旋轉板 37、37’ 輔助滑動機構 37b 溝部 38 輔助板 39 輔助旋轉軸承機構 40 固定用安裝治具 41 球面旋轉機構 B、C 縱長方向 BF11 、 BF12 、BF2卜BF22 基座框 CH、Clla、 C12、C21、C22 聯結構件 97126256 16 200914811 FX 固定用框體 IF ' IF1 &gt; IF2 中間框體 OH 光學檢測頭 P 鎖 SF1 、 SF2 滑動框體 V 垂直軸 ί 97126256The figure shows an exploded perspective view of the joint structure in which the auxiliary sliding mechanism is disposed between the auxiliary plates 38 I 97126256 and the movable body SF1 15 200914811. [Description of main component symbols] 1 One side support portion 2 The other side support portion 11 ' 21 Outer frame frame 12, 22 Inner frame frame 31, 37a Slip 32 Sliding plate 33 Rotary bearing mechanism 33a Center of outer bearing portion 33b Shaft portion 34 auxiliary slide plate 35, 36a rotary plate 37, 37' auxiliary slide mechanism 37b groove portion 38 auxiliary plate 39 auxiliary rotary bearing mechanism 40 fixing jig 41 spherical rotating mechanism B, C longitudinal direction BF11, BF12, BF2 BF22 base frame CH, Clla, C12, C21, C22 joint structure 97126256 16 200914811 FX fixing frame IF ' IF1 &gt; IF2 intermediate frame OH optical inspection head P lock SF1, SF2 sliding frame V vertical axis ί 97126256

Claims (1)

200914811 七、申請專利範圍: 1. 一種可變尺寸基台’其具備有: 第-、第二基座框,其相互平行而設置,可相互靠近/遠離; • 滑動框體,其橋接於上述第一、第二基座框之間; 第-聯結構件’其將上述第—基座框與上料動框體之一部 分相聯結;以及 第二聯結構件,其將上述第二基座框與上述滑動框體之另一 〇 部分相聯結; 上述第-聯結構件具備有沿上述第一基座框之縱長方向滑 動的第-滑動機構;上述第二聯結構件具備有沿上述第二基座 框之縱長方向滑動的第二滑動機構; 在上述第-聯結構件上設有:用以改變上述滑動框體相對於 上述第-基座框之角度的第一旋轉機構;在上述第二聯結構件 上設有:用以改變上述滑動框體相對於上述第二基座植 的第二旋轉機構; 义 在上述第-聯結構件或第二聯結構件中至少任—者上,1 輔助滑動機構,可使上述滑動框體沿上述第―、第二基座ς之 縱長方向的交叉方向滑動。 2.如申請專補圍第!項之可變尺寸基台,其中,上述交叉 =向係與上述第-、第二基座框之縱長方向成既定角度珍的方 97126256 18 200914811 3.如申請專利範圍第1項之可變尺寸基台,其中,上述交叉 方向係上述滑動框體的縱長方向。 、4.如中請專利範圍第1項之可變尺寸基台,其中,上述輔助 滑動機構’上輯動框體滑_極限範圍。 5.如申請專·圍第1項之可變尺寸基台,其中,在上述第 -聯結構件上設置有第—辅助旋轉機構,該第—辅助旋轉機構 具有與上切動_之縱長方向成直財__軸,並使上 述滑動框體搖擺;在上述第二聯結構件上設置有第二輔助旋轉 機構’該第二辅助旋轉機構具有與上述滑動框體之 直角方向的旋轉轴,並可使上述滑動框體搖擺。 ^如申請專利範圍第5項之可變尺寸基台,其中,以球面旋 轉機構兼料上述第—旋轉機構及上述第—辅助旋轉機構。 7·如申請專利_第5項之可變尺寸基台,其中,以球面旋 C. 轉機構兼用為上述第二旋轉機構及上述第二辅助旋轉機構。 ^申請專職第1項之可變尺寸基台,其中,在上述滑 動框體上可裝設光學檢測頭。 9. -種液晶基板檢查裝置,其使料請專利範圍第1至 中任一項之可變尺寸基台。 97126256 19200914811 VII. Patent application scope: 1. A variable-size abutment having: a first and a second base frame which are arranged parallel to each other and can be close to/away from each other; • a sliding frame which is bridged to the above Between the first and second base frames; a first joint member 'which connects the first base frame to a portion of the upper feed frame; and a second joint member that connects the second base The frame is coupled to the other portion of the sliding frame; the first-linking member is provided with a first sliding mechanism that slides along the longitudinal direction of the first base frame; and the second connecting member is provided along the a second sliding mechanism that slides in the longitudinal direction of the second base frame; and the first coupling member is provided with: a first rotating mechanism for changing an angle of the sliding frame relative to the first base frame; Provided on the second joint member: a second rotating mechanism for changing the sliding frame body relative to the second base; at least any of the first joint structure or the second joint member On, 1 auxiliary sliding mechanism, So that the sliding frame along the first - direction intersecting the longitudinal direction of the second sliding base ς. 2. If you apply for a special supplement! The variable-size base of the item, wherein the intersection=the direction and the lengthwise direction of the first and second base frames are at a predetermined angle. 97126256 18 200914811 3. Variable according to the first item of the patent application scope The size base, wherein the intersecting direction is a longitudinal direction of the sliding frame. 4. The variable size abutment of the first aspect of the patent application, wherein the auxiliary sliding mechanism </ RTI> is slidable to the limit range. 5. The variable size abutment of the first item, wherein the first auxiliary structure is provided with a first auxiliary rotation mechanism, and the first auxiliary rotation mechanism has a lengthwise relationship with the upper cutting The direction is a straight __axis, and the sliding frame body is swayed; and the second coupling member is provided with a second auxiliary rotation mechanism'. The second auxiliary rotation mechanism has a rotation axis in a direction perpendicular to the sliding frame body And can swing the above sliding frame. The variable size base according to item 5 of the patent application, wherein the first rotating mechanism and the first auxiliary rotating mechanism are combined by a spherical rotating mechanism. 7. The variable size base according to claim 5, wherein the spherical rotating mechanism is used as the second rotating mechanism and the second auxiliary rotating mechanism. ^Applicable to the variable size abutment of the full-time item 1, wherein an optical detecting head can be mounted on the sliding frame. A liquid crystal substrate inspecting apparatus which is a variable-size abutment according to any one of claims 1 to 3. 97126256 19
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