JP2010116718A - Workbench - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve work efficiency in a workbench. <P>SOLUTION: The workbench 1 includes a top plate 2 constituting a working floor face, and a support leg 6 having a first leg 4 supporting one end of the top plate 2, and a second leg 5 supporting the other end of the top plate 2. The top plate 2 is constituted to move horizontally along the first and second legs 4, 5. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a workbench for performing work such as maintenance at a high place such as a substrate inspection device or a substrate transfer device arranged on a production line of a liquid crystal panel manufacturing plant.

  Conventionally, in a liquid crystal panel manufacturing factory, a liquid crystal panel is manufactured by performing resist patterning on a glass substrate (mother glass) by a photolithography process such as resist coating, baking, exposure, and development. Such a liquid crystal panel production line includes a substrate production apparatus such as a resist coating apparatus and an exposure apparatus for producing a glass substrate, a substrate inspection apparatus for inspecting a glass substrate produced in each process, and a space between the apparatuses. A substrate transfer device for transferring a glass substrate is disposed.

  At present, a liquid crystal panel manufacturing factory employs a large glass substrate having a side exceeding 3000 mm in order to increase productivity, and the height of a conveyance line for conveying the large glass substrate is as high as 1700 mm. For this reason, in a substrate manufacturing apparatus, a substrate inspection apparatus, and a substrate transfer apparatus, maintenance work at a high place is forced.

For example, Patent Documents 1 and 2 have been proposed as mobile work tables.
JP-A-5-330379 JP-A-8-296324

  By the way, with the increase in the size of the large glass substrate described above, the substrate inspection apparatus, the substrate transfer apparatus, and the work table are also increased in size. As a work table, a trapezoidal shape in which ladders are provided on both sides of a top plate for performing work is known. When this workbench is used, it is provided across the stage on which a large glass substrate is placed and the substrate transport path, and the workbench is moved by two workers and stopped at the work position. Will work on. Since the work on the work table is at a high place, the worker must get off when moving the work table in consideration of safety. The work table is very heavy, and moving the work table is very troublesome both in terms of power and operation. Therefore, if the work table is moved during work such as maintenance, there is a problem that it takes time to ascend / descend for work, labor and time to move the work table, and deteriorates work efficiency.

  An object of the present invention is to provide a workbench capable of improving work efficiency in view of the above-described conventional situation.

  In order to solve the above-described problems, the work table according to the present invention supports the top plate portion constituting the work floor, the first leg portion supporting one end of the top plate portion, and the other end of the top plate portion. And a support leg having a second leg, wherein the top plate moves in the horizontal direction along the first leg and the second leg.

According to the present invention, by moving the top plate portion in the horizontal direction along the first leg portion and the second leg portion, it is possible to save time and effort when moving the entire workbench. Can be increased.

Hereinafter, a workbench according to an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view showing a workbench 1 according to an embodiment of the present invention.
2A and 2B are a front view and a right side view showing the movable part 3 of the work table 1.

FIG. 3 is a perspective view showing a state in which the top plate 2 of the work table 1 is raised.
The work table 1 includes a movable portion 3 including a top plate portion 2 and the like constituting a work floor, a first leg portion 4 that supports one end of the top plate portion 2 through a traveling portion 10 described later, and a top plate portion. 2 and a support leg 6 having a second leg 5 that supports the other end via a travel part 11 described later, and is disposed so as to straddle the work object 13 shown in FIG. 2A.

The movable portion 3 includes a top plate portion 2, a top plate placement portion 7, a plurality of baseboard portions 8, a handrail portion 9, traveling portions 10 and 11, a lock mechanism 12, damper support portions 14 and 15, dampers 16 and 17. Etc.
The top plate portion 2 has a plurality of (five in the present embodiment) plate members 2 a laid in the longitudinal direction, and is fixed on the top plate mounting portion 7. In addition, the upper ends of the dampers 16 and 17 shown in FIG. The dampers 16 and 17 are supported by damper support portions 14 and 15 at the lower ends thereof. The damper support portions 14 and 15 are fixed to the traveling portions 10 and 11 and extend downward from the traveling portions 10 and 11.

  The top plate 2 has a horizontal position (see FIG. 1) constituting the work floor and a position rotated from the horizontal position (see FIG. 3) in the arrow direction A shown in FIG. Move times. When the top plate portion 2 is rotated and lowered to the horizontal position, the above-described dampers 16 and 17 serve to buffer the impact force.

  The top plate 2 does not need to be raised in the vertical direction. For example, when the work target 13 to be described later is a substrate inspection device or a substrate transfer device, an inclination angle that does not impair the flow of downflow, For example, even if it is raised within a range of ± 20 ° from the vertical direction, it is possible to prevent the flow of the downflow from being hindered and to save space as described later.

  Each plate member 2a is removed or rotated from the top plate mounting portion 7 when working directly under the top plate 2 with the top plate 2 lowered to a horizontal position as shown in FIG. It can be made to. The top plate 2a is formed with two holes 2b into which the operator's fingers can be inserted during removal or rotation. The opening area of the hole 2b may be small so that the operator's foot is not caught or within a range in which the top plate 2 can be lifted by inserting a finger. In addition, although mentioned later in detail, it is good to provide each board | plate material 2a so that rotation is possible in the position of the horizontal state, and the position stood | started up substantially perpendicularly | vertically from there.

  As shown in FIG. 2A, the height L from the top surface of the top plate portion 2 lowered to the horizontal position to the top surface of the work object 13 such as a substrate inspection device or a substrate transfer device described later is determined by the operator. It is good to set it as the range which an operator's hand can reach in the state where it was folded on 2, for example, 50 mm-700 mm, preferably about 300 mm-500 mm.

  By setting the height L to about 300 mm, for example, when the work object 13 is a substrate inspection device, a substrate transfer device, or the like, the hand of a substrate transfer robot such as an articulated robot can work with the top plate 2. It is possible to enter between the object 13 and work easily.

  A plurality of (four in the present embodiment) skirting boards 8 are erected in a straight line in the longitudinal direction of the top board 2 at the side of the top board 2. Each skirting board portion 8 is formed to a height at which a foot is caught so that an operator does not slide and fall from the top board portion 2. As shown in FIG. 2B, each skirting board 8 rotates to a position standing on the side of the top board 2 and a position retracted from the top board 2 and folded horizontally on the top board 2. The skirting board 8 is folded so as not to obstruct the work when the worker works in a collapsed state, and is erected as shown in FIG. 2B at the end of the work.

  The handrail portion 9 is erected on at least one side portion of the top plate portion 2 and extends in the longitudinal direction of the top plate portion 2. At both ends of the handrail portion 9, there are provided locking portions 9a, 9a for locking the top plate portion 2 in a standing state as shown in FIG.

In the present embodiment, since the top plate portion 2 is raised, the plurality of plate materials 2a are fixed to the top plate mounting portion 7 by a lock mechanism so as not to be detached.
For example, a rotary hook type manual lock member or the like can be used as the locking portion 9, but an electric lock member that automatically locks by detecting the rising of the top plate portion 2 may be used.

The traveling portions 10 and 11 are fixed to both ends in the longitudinal direction of the top plate portion 2, and one is provided on the walking plates 4 a and 5 a constituting the passage for the first leg portion 4 and the second leg portion 5 described later. Placed one by one.
The traveling unit 11 shown in FIG. 2B includes two traveling rollers 11 a and 11 a that are provided in a straight line in the traveling direction and roll on the walking plate 5 a of the second leg 5, and the guide rail 5 b of the second leg 5. Two upper guide rollers 11b and 11b that prevent the traveling unit 11 from lifting by rolling along the bottom surface, and two horizontal guide rollers that roll along the side surface of the guide rail 5b on the top plate 2 side. 11c, 11c.

  Although not shown, the traveling unit 10 on the first leg 4 side also has a traveling roller that rolls on the walking plate 4a of the first leg 4 and the first leg as in the traveling unit 11. It is assumed that the upper guide roller and the lateral guide roller that roll along the four guide rails 4 b are provided symmetrically with the traveling unit 11.

  As described above, the traveling units 10 and 11 fixed to the top panel 2 travel on the walking boards 4a and 5a on the first leg 4 and the second leg 5, so that the top panel 2 It is possible to move in a direction (arrow D) that intersects the direction (orthogonal in the present embodiment).

  Note that the walking plates 4 a and 5 a of the first leg portion 4 and the second leg portion 5 extend in parallel to each other in a direction (direction D) intersecting the longitudinal direction of the top plate portion 2. Further, the movement of the top plate portion 2 in the horizontal direction (arrow D) does not have to be strictly horizontal, and depending on the work object 13, a slight inclination may be given from the horizontal direction.

  The brake mechanism 12 fixes the traveling unit 10 to an arbitrary position of the walking board 4a. For example, a brake part provided with a lower surface in contact with the walking board 4a and a brake pad is brought into contact with the surface of the walking board 4a. A link that moves to a position (locked state) and a retracted position (released state) away from the surface of the walking board 4a, and an operation lever 12a that is connected to the link and operates the brake unit to a locked state and a released state.

  The operation lever 12a functions to move the entire movable portion 3 including the top plate portion 2 when the operator pulls or pushes the operation lever 12a with the brake mechanism 12 released. The operation lever 12a extends vertically upward with respect to the traveling unit 10 to such a height that the operator can hold it in an upright state. For example, the operation lever 12a can be released to unlock the brake unit. When the movable part 3 is moved, the movable part 3 is manually moved by holding the operation lever 12a in the released state.

  The first leg portion 4 and the second leg portion 5 include, in addition to the above-described walking plates 4a and 5a and guide rails 4b and 5b, a plurality of leg columns 4c and 5c that support the walking plates 4a and 5a, and the walking plate 4a. , 5a have ladder portions 4d, 5d.

  According to the present embodiment described above, the top plate portion 2 moves in the horizontal direction along the walking plates 4a and 5a of the first leg portion 4 and the second leg portion 5. However, there is no need to get down from the high place to the bottom and push the work table to move it. Move the top 2 to an arbitrary position at the high place where the work is to be performed, and move to the top 2 immediately after the move. Therefore, the working efficiency can be remarkably improved.

  In the present embodiment, the first leg portion 4 and the second leg portion 5 are formed with walking plates 4a and 5a that constitute a passage for the worker. Therefore, the worker can easily move on the other walking board through the top plate part 2 constituting the work floor.

  Moreover, in this Embodiment, the walk boards 4a and 5a of the 1st leg part 4 and the 2nd leg part 5 are mutually extended in the direction (arrow D) which cross | intersects the longitudinal direction of the top-plate part 2, The top plate 2 moves in a direction (arrow D) that intersects the longitudinal direction. Therefore, as shown in FIG. 4, the operator can work all over the entire floating stage, which is a wide work target area of 3 m square.

  In the present embodiment, the lock mechanism 12 performs an operation for fixing the top panel 2 to the support leg 6 (first leg 4) and an operation for moving the top panel 2. An operating lever 12a is provided. Therefore, the movement operation of the top plate part 2 can be performed easily and safely, and therefore the work efficiency can be enhanced while ensuring safety.

  Further, in the present embodiment, the work table 1 further includes a base board 8 that stands on the side of the top board 2 and extends in the longitudinal direction of the top board 2. It can move to a position erected on the side of the section 2 and a position retracted from the position. Therefore, the work efficiency can be further improved by moving the skirting board 8 to the retracted position during the work on the top board 2.

  Moreover, in this Embodiment, the top-plate part 2 is movable to the position of the horizontal state which comprises a work floor surface, and the position which rotated from this horizontal position and stood up. Therefore, when the work table 1 is applied to a work object 13 such as a substrate inspection device or a substrate transfer device, the top plate portion 2 is made to stand by raising the top plate portion 2 when the work is not being performed. It is possible to prevent the flow of the downflow from being blocked.

  Furthermore, even when the top plate portion 2 is moved to the end portions of the first leg portion 4 and the second leg portion 5 as shown in FIG. Since the width in the state is smaller than the width in the horizontal state, the space for retracting the top panel 2 from the work object 13 can be reduced. Therefore, space saving of the work table 1 can be achieved.

  Furthermore, a plurality of plate members 2a are laid in the longitudinal direction of the top plate portion 2, and can be detached or rotated independently of each other between a horizontal position constituting the work floor and a position rising from the horizontal position. In this case, the operation below the top plate portion 2 is facilitated, and therefore the working efficiency can be further enhanced.

Moreover, in this Embodiment, the hole 2b for moving this top-plate part 2 to the said standing position is formed in the top-plate part 2. As shown in FIG. Therefore, the top plate part 2 can be easily raised, so that the working efficiency can be further improved. Furthermore, a plurality of plate materials 2a
Are made to stand up independently of each other as described above, the holes 2b are formed in the plurality of plate members 2a, so that each plate member 2a can be easily raised, and therefore, the working efficiency is further improved. Can be increased.

  In this embodiment, the walking plates 4a and 5a constituting the worker's passage are provided on both the first leg portion 4 and the second leg portion 5, but the walking constituting the worker's passage is provided. Even if the plates 4a and 5a are provided only on one of the first leg 4 and the second leg 5, the working efficiency can be improved.

In the present embodiment, the lock mechanism 12 is mechanically configured, but may be remotely controlled by an electromagnetic lock mechanism.
Further, in the present embodiment, the position of the skirting board 8 that has been retracted from the position erected on the side of the top board 2 has been described as a position folded horizontally on the top board 2. For example, it is good also as the position slid vertically below, the position rotated below from the upper surface of the top-plate part 2, etc.

Further, in the present embodiment, the example in which the movement of the top plate part 2 (movable part 3) is manually performed by the operation lever 12a has been described. However, a driving part may be provided to automatically travel.
<First Modification>
FIG. 4 is a perspective view showing a work table 20 and a substrate inspection apparatus 30 according to a first modification of the present embodiment.

  The work table 20 of the present modification employs a board inspection device 30 as the work object 13, and the leg handrails 4f on both sides of the walking plates 4a and 5a of the first leg 4 and the second leg 5. , 5f, and the ladder parts 4d, 5d, except that the ladder handrails 4g, 5g are provided on both sides of the ladder parts 4d, 5d. About the same member and part, the same code | symbol is attached | subjected to FIG. 4, and description is abbreviate | omitted.

  The substrate inspection apparatus 30 includes a stage unit 31 having a floating plate 31a laid in a matrix, and an inspection unit 32a in one axis direction (the same direction D as the moving direction of the top plate unit 2) on the stage unit 31. A substrate (mother glass substrate) used for a flat panel display (FPD) such as a liquid crystal display (LCD) is inspected, which includes a moving gantry 32 and a base portion 33 disposed below the stage portion 31.

The substrate inspection apparatus 30 is disposed in a clean room together with the work table 20 disposed so as to straddle the substrate inspection apparatus 30.
The levitation plate 31a levitates a substrate (not shown) by discharging air.

  The inspection unit 32a is a microscope, for example, and moves along the gantry 32 in a horizontal direction orthogonal to the moving direction of the gantry 32 (arrow D). Therefore, the inspection unit 32a can freely move on the stage unit 31 in the two horizontal axes.

  The board inspection device 30 is disposed between the walking legs 4a and 5a of the first leg 4 and the second leg 5, and the top board 2 is attached to the inspection part 32a attached to the gantry 32 and the surface. It is arranged close to the stage unit 31 so as to have a height that allows manual work. Therefore, during the inspection by the inspection unit 32a, the top panel 2 is not subjected to interference with the inspection unit 32a, for example, the end portions of the first leg 4 and the second leg 5 shown in FIG. And the exterior for the substrate inspection apparatus 30 (not shown). On the contrary, during the movement of the top plate portion 2, it is necessary to retreat the gantry 32 to a retreat area outside the stage portion 31 as shown in FIG.

As in the present modification described above, the work table 20 is applied to the substrate inspection apparatus 30, and the top plate portion 2 extends horizontally on the substrate inspection apparatus 30 along the first leg portion 4 and the second leg portion 5. By making it move, work efficiency, such as maintenance of the board | substrate inspection apparatus 30, can be improved as demonstrated in the said one Embodiment.

<Second Modification>
FIG. 5 is a perspective view showing a work table 40 and a substrate transfer apparatus 50 according to a second modification of the embodiment.

  The work table 40 of the present modified example employs a substrate transfer device 50 as the work object 13, a point in which two movable parts 41 and 42 that move in the horizontal direction independently of each other, and a ladder part 4h. Since it is substantially the same as the work table 1 shown in FIGS. 1 and 3 except that it is disposed only on the first leg 4, the same members / portions are denoted by the same reference numerals in FIG. 5 and description thereof is omitted. To do.

  The substrate transfer apparatus 50 includes a stage unit 51 that forms a substrate transfer path (not shown), an auto macro inspection unit 52 that macroscopically inspects the substrate, a micro inspection unit 53 that microscopically inspects the substrate, and an ionizer 54. , 55 and a passage portion 56, in this modification, a substrate transfer device that also serves as a substrate inspection device, and a substrate (mother glass substrate) used in a flat panel display (FPD) such as a liquid crystal display (LCD). Transport and inspect.

  The substrate transport device 50 is, for example, a substrate transport device disposed in a photolithography production line, and is disposed in a clean room together with a work table 40 disposed so as to straddle the substrate transport device 50.

  The stage unit 51 includes, for example, a floating plate (not shown) laid in a matrix and a substrate transport unit 51a that holds and transports the substrate. The substrate transport unit 51a moves the substrate to the top plate unit 2. Transport in the same direction D as the direction.

In addition, when a conveyance roller, a conveyance conveyor, etc. are arrange | positioned on the stage part 51 instead of a floating plate, the board | substrate conveyance part 51a becomes unnecessary.
The passage portion 56 is disposed between the auto macro inspection portion 52 and the micro inspection portion 53, and constitutes a worker passage, like the walking boards 4a and 5a.

  The two movable parts 41 and 42 of the work table 40 are arranged one by one on both sides of the auto macro inspection part 52 and the micro inspection part 53. The top plate portions 2 and 2 of the movable portions 41 and 42 are at a height that does not interfere with the ionizers 54 and 55, but are at a height that interferes with the auto macro inspection portion 52 and the micro inspection portion 53.

  Here, since the auto macro inspection part 52 and the micro inspection part 53 are fixed, it is not necessary to retract the movable parts 41 and 42 in order to avoid interference with them. By making the top plate part 2 stand up, it is possible to prevent the flow of the downflow from being blocked and to save space.

  In the present modification, the example in which the substrate transport apparatus 50 includes the auto macro inspection unit 52 and the micro inspection unit 53 has been described. However, the substrate transport apparatus 50 is disposed in a photolithography manufacturing line or the like and only transports without performing substrate inspection. It is effective to apply the work table to the substrate transfer apparatus.

  As in the above-described modified example, the work table 40 is applied to the substrate transfer device 50, and the top plate portion 2 extends horizontally on the substrate inspection device 50 along the first leg portion 4 and the second leg portion 5. By making it move, work efficiency, such as maintenance of the board | substrate conveyance apparatus 50, can be improved as demonstrated in the said one Embodiment.

  Further, in this modification, the plurality of top plate parts 2 and 2 (movable parts 41 and 42) move independently of each other in the horizontal direction along the first leg part 4 and the second leg part 5, so that the auto macro Even if there is an obstacle located at a height that interferes with the top plate parts 2 and 2 such as the inspection part 52 and the micro inspection part 53, the working efficiency can be effectively increased.

1 is a perspective view showing a workbench according to an embodiment of the present invention. It is a front view which shows the movable part of the worktable which concerns on one embodiment of this invention. It is a right view which shows the movable part of the work bench | platform which concerns on one embodiment of this invention. It is a perspective view which shows the state which the top-plate part of the work bench | platform which concerns on one embodiment of this invention stood | started up. It is a perspective view which shows the worktable and board | substrate inspection apparatus which concern on the 1st modification of one embodiment of this invention. It is a perspective view which shows the work bench | platform and substrate conveying apparatus which concern on the 2nd modification of one embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Worktable 2 Top plate part 2a Plate material 2b Hole 3 Movable part 4 1st leg part 5 2nd leg part 4a, 5a Walking board 4b, 5b Guide rail 4c, 5c Leg pillar 4d, 5d Ladder part 4f, 5f For leg parts Handrail 4g, 5g Ladder part handrail 4h Ladder part 6 Support leg part 7 Top plate placing part 8 Skirting board part 9 Handrail part 9a Locking part 10, 11 Traveling part 11a Traveling roller 11b Upper guide roller 11c Side guide Roller 12 Lock mechanism 12a Operation lever 13 Work object 14, 15 Damper support unit 16, 17 Damper 20 Work table 30 Substrate inspection device 31 Stage unit 31a Floating plate 32 Gantry 32a Inspection unit 33 Base unit 40 Work table 41, 42 Movable unit DESCRIPTION OF SYMBOLS 50 Substrate conveyance apparatus 51 Stage part 51a Substrate conveyance part 52 Auto macro inspection part 53 Micro inspection part 54,55 Ionizer 56 Passage

Claims (13)

A top plate constituting the work floor;
A support leg having a first leg for supporting one end of the top plate and a second leg for supporting the other end of the top plate;
In a workbench comprising
The top plate moves in the horizontal direction along the first leg and the second leg.
A workbench characterized by that.   2. The work table according to claim 1, wherein an operator passage is formed in at least one of the first leg and the second leg. The first leg portion and the second leg portion extend in parallel to each other in a direction intersecting the longitudinal direction of the top plate portion,
The top plate moves in a horizontal direction along the first leg and the second leg in a direction intersecting the longitudinal direction of the top plate.
The workbench according to claim 1 or 2, characterized in that   The work table according to any one of claims 1 to 3, further comprising a lock mechanism that takes a position for fixing the top plate portion with respect to the support leg portion and a position retracted therefrom. .   5. The operation according to claim 4, wherein the lock mechanism includes an operation unit for performing an operation for fixing the top plate part to the support leg part and an operation for moving the top plate part. Stand. Further comprising a baseboard portion standing on the side of the top plate portion and extending in the longitudinal direction of the top plate portion,
The skirting board portion is movable to a position erected on the side part of the top plate part and a position retracted therefrom.
The workbench according to any one of claims 1 to 5, wherein   The said top-plate part is movable to the position of the horizontal state which comprises a work floor, and the position which rotated from the position of this horizontal state, and stood up, The one of Claims 1-6 characterized by the above-mentioned. Item 1. The work table according to item 1.   The said top-plate part has a some board | plate material laid in the longitudinal direction, and moves independently from each other in the position of the horizontal state which comprises the said work floor surface, and the said standing position. Work table.   9. The worktable according to claim 7, wherein a hole for moving the top plate portion to the raised position is formed in the top plate portion.   The work table according to claim 9, wherein the top plate portion includes a plurality of plate materials laid in the longitudinal direction thereof and formed with the holes.   11. The apparatus according to claim 1, further comprising a plurality of the top plate portions that move independently of each other in the horizontal direction along the first leg portion and the second leg portion. Workbench. The said top-plate part moves to the horizontal direction along the said 1st leg part and the said 2nd leg part on the board | substrate inspection apparatus which test | inspects a board | substrate, The any one of Claim 1 to 11 characterized by the above-mentioned. The work table described in the section.   The said top plate part moves to the horizontal direction along the said 1st leg part and the said 2nd leg part on the board | substrate conveyance apparatus which conveys a board | substrate, The any one of Claim 1-11 characterized by the above-mentioned. The work table described in the section.