TWI421924B - Apparatus for treating substrates - Google Patents

Description

Substrate processing device Field of invention

The present invention relates to a substrate processing apparatus for processing a substrate by a brush unit disposed in a processing tank.

Background of the invention

A circuit board formed on a glass substrate used in a liquid crystal display device is formed. A lithographic process is used to form a circuit pattern on the substrate. It is known that a lithographic process is to apply a photoresist to the substrate, and to illuminate the photoresist through a photomask formed with a circuit pattern.

Next, the portion of the photoresist that is not irradiated with light or the portion that is irradiated with light is removed, and the portion from which the photoresist is removed is etched. Next, after the etching, a series of processes of removing the photoresist from the substrate are repeated several times to form a circuit pattern on the substrate.

In the lithographic printing process, the substrate needs to be processed by a developing solution such as a developing solution, an etching solution, or a stripping liquid for removing a photoresist after etching, and after the processing liquid is used, the cleaning is performed. Liquid washing works.

In the cleaning process for cleaning the substrate, for example, when the treatment liquid adhering to the substrate is washed and removed, the cleaning liquid is sprayed onto the substrate conveyed into the treatment tank by using a nozzle, whereby the treatment liquid can be removed by washing the substrate.

However, when dirt such as fine particles adheres to the substrate tenacously, it is impossible to reliably wash and remove the dirt by merely spraying the cleaning liquid onto the substrate. Therefore, in this case, the substrate transported into the processing tank is washed by the brush unit.

The brush unit has an upper upper brush for brushing the transported substrate, and a brush for washing the lower lower brush. The axial ends of each brush are rotatable and respectively supported by the rotating shaft. Further, the rotating shafts provided at one end portion of the axial direction of each brush and the rotating shafts provided at the other end portions are attached and fixed to the pair of right and left brackets. The pair of right and left brackets are disposed in the width direction orthogonal to the conveyance direction of the substrate, and the lower ends are fixed and erected on the gantry constituting the processing apparatus.

Summary of invention

However, a pair of left and right brackets are erected in a width direction orthogonal to the conveyance direction of the substrate, and the one end portion of the upper and lower pair of brushes and the rotation shaft of the other end portion are attached and fixed to the brackets. In this case, it is difficult to precisely determine the left and right pair of brushes and fix them on the same straight line in the direction orthogonal to the conveyance direction of the substrate, that is, it is difficult to position and fix the pair of brushes in a direction orthogonal to the conveyance direction of the substrate. Not eccentric.

When the pair of left and right brackets are eccentric, the axes of the pair of shafts that are attached to the brackets and rotatably support the axial ends of the brush and the pair of right and left shafts of the other end portions are also eccentric. When the brush is rotationally driven in a state where the axis of the rotating shaft is deviated, the shaft of the rotating shaft or the brush generates stress, which may cause damage to the rotating shaft or damage to the brush shaft.

Further, since it is necessary to mount and fix a pair of left and right brackets in the narrow space in the processing tank, and to be disposed at both ends of the brush Since the rotating shaft is attached and fixed to the work such as the brackets, the workability is poor.

The present invention provides a processing device for a substrate, wherein the processing device of the substrate can rotatably support a pair of left and right rotating shafts of the upper and lower ends of the upper and lower brushes without being biased and precisely positioned to be orthogonal to the conveying direction of the substrate. The direction.

The processing device of the present invention can process a substrate conveyed in the processing tank by a brush unit disposed in the processing tank, and the brush unit includes a frame having a predetermined interval in a horizontal direction on the same vertical plane. The first upper brush and the second lower brush are separated from each other; the first upper brush and the first lower brush are arranged in the vertical direction in parallel with the axis; and the pair of first rotating shafts are attached to the first mounting portion and The second mounting portion supports the axial end portions of the first upper brush and is rotatable; and the pair of second rotating shafts are attached to the first mounting portion and the second mounting portion, and support the aforementioned The axial ends of the second lower brush are rotatable.

According to the present invention, one pair of mounting portions are formed on the frame at a predetermined interval in the horizontal direction on the same vertical plane, and the mounting portions are rotatably disposed in the up and down direction and respectively support the axial directions of the upper brush respectively. a pair of shafts of the pair of axial ends of the end and the lower brush.

Therefore, since each pair of rotating shafts can be provided without eccentricity, it is possible to prevent the rotating shafts or the pair of brush shafts supported on the rotating shaft from being damaged by stress.

Detailed description of the preferred embodiment

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

Fig. 1 is a longitudinal sectional view showing a processing apparatus of the present invention, which has a processing tank 1. As shown in Fig. 3, a transport mechanism 3 composed of a plurality of transport rollers 2 is provided in the treatment tank 1. These conveyance rollers 2 are rotationally driven in a predetermined direction. The one end of the processing tank 1 is formed with a loading port 4, and the substrate W made of glass, for example, used in a liquid crystal display panel, is transported by the transporting roller 2, and is formed by the above-described processing. The other end of the tank 1 is carried out by the outlet 5.

As shown in Fig. 1, the processing tank 1 is configured such that the opening portion 7 formed on the upper surface can be opened and closed by the lid body 6. The brush unit 11 for brushing the substrate W (shown in FIG. 3) conveyed by the conveyance roller 2 into the processing tank 1 is provided in the processing tank 1 as will be described later. Further, the bottom of the treatment tank 1 is connected to the waste liquid tank 9 via the drain pipe 8.

As shown in the second, fourth and fifth figures, the brush unit 11 has a frame 12. The frame 12 is formed in a gate shape by a joint portion 13 and one of the both ends of the joint portion 13 integrally formed with the leg portion 14. The cross-sectional shape of the connecting portion 13 and the leg portion 14 is U-shaped in which the upper portion and the outer portion are open.

The connecting plate 15 is attached and fixed to the lower end of the pair of leg portions 14, and as shown in Fig. 1, a suspension member 16 is provided in the middle of the connecting portion 13 in the longitudinal direction, and the hanging device is suspended by a transport mechanism such as a chain block. The user who hangs the frame 12.

As shown in FIG. 5, one of the side surfaces of the leg portion 14 is formed on the first attachment portion 17, and the other side surface of the leg portion 14 is formed on the second attachment portion 18. The first mounting portion 17 and the second mounting portion 18 are located on the same vertical plane as will be described later, and are separated at a constant interval in the horizontal direction, that is, at a distance larger than the width dimension of the substrate W.

Further, the other side surface of the leg portion 14 is formed with a third mounting portion 19 parallel to the first mounting portion 17, and the other side surface of the other leg portion 14 is formed with the second mounting portion 18 The fourth mounting portion 20 is parallel. Therefore, the third attachment portion 19 and the fourth attachment portion 20 are located on the same vertical plane as the first and second attachment portions 17, 18, and are separated at a predetermined interval in the horizontal direction.

As shown in FIGS. 4 and 5, the reference plane 21 on the same vertical plane on both sides of the pair of the first to fourth mounting portions 17 to 20 is formed in parallel and in the up and down direction. There is a pair of linear guides 22.

The upper movable plate 23 and the lower movable plate 24 are slidably engaged with the inner surfaces of the movable plate 23 and the lower movable plate 24, and are respectively engaged with the pair of the pair of sliders 25, and are provided in the pair of linear guide portions 22. That is, the upper movable plate 23 and the lower movable plate 24 are moved up and down along the linear guide portion 22.

Thereby, the plate surface between the pair of upper movable plates 23 and the lower movable plate 24 provided in the first mounting portion 17 and the second mounting portion 18 is located on the same vertical plane with respect to the reference surface 24 . Moreover, the plate surface between the pair of upper movable plates 23 and the lower movable plate 24 provided in the third mounting portion 19 and the fourth mounting portion 20 is also located on the same vertical plane with respect to the reference surface 21 as well.

The two upper movable plates 23 provided in the first and second mounting portions 17 and 18 of the pair of leg portions 14 are fixed to one side surface of each of the first rotating shafts 27, and similarly, the two lower movable plates are respectively provided. A second rotating shaft 28 is fixedly disposed on one side.

The two upper movable plates 23 are provided on the third and fourth mounting portions 19 and 20 of the pair of leg portions 14, and the third shafts 29 are fixedly disposed on one side surface thereof. Similarly, the two lower movable plates have their own The fourth shaft 30 is fixedly disposed on one side.

The axial ends of the first upper brush 32 are rotatably supported by the pair of first rotating shafts 27, and the axial ends of the first lower brush 33 are rotatably supported by the pair of second rotating shafts 28 .

Further, both axial end portions of the second upper brush 34 are rotatably supported by the pair of third rotating shafts 29, and both axial end portions of the second lower brushing member 35 are rotatably supported by the pair of fourth rotating shafts 30. .

As shown in FIG. 5, each of the brushes 32 to 35 is provided with bristles 37 on the outer peripheral surface of the hollow shaft 36, and the support shaft 39 is coupled to both ends of the hollow shaft 36, and the support shaft 39 is rotatably supported by the support shaft 39. Each axis is 27~30.

One of the axial end faces of each of the pair of first to fourth rotating shafts 27 to 30 that rotatably support the axial end portions of the respective brush members 32 to 35 is provided with a drive source 40, respectively. Each of the driving sources 40 is coupled to the support shafts 39 of the respective brush holders 32 to 35, and rotationally drives the brushes 32 to 35 in a predetermined direction.

That is, each of the pair of upper brushes 32, 34 and the lower brushes 33, 35 are driven to rotate in the reverse direction. The rotation direction of each pair of brushes is generally reversely driven in the direction in which the substrate W is conveyed. However, if the peripheral speed of the brush is different from the conveyance speed of the substrate W, the rotation direction of each brush may be the same as the substrate W. The handling direction is the same. Further, one of the pair of upper and lower brushes 32, 33 and the other pair of upper and lower brushes 34, 35 may be in the same direction as the conveyance direction of the substrate W, and the other may be reversed.

The first upper brush 32 and the first lower brush 33 are driven in the vertical direction by the first vertical drive mechanism 41, and the positions can be adjusted, and the second upper brush 34 and the second lower brush 35 can be used. The second vertical drive mechanism 42 having the same configuration as the first vertical drive mechanism 41 is driven in the vertical direction and adjusted in position.

The first and second positioning mechanisms 41, 42 have a pair of first support bodies 44 that are horizontally attached to one of the upper ends of the pair of legs 14 and are attached to the upper end of the leg portion 14. As shown in Fig. 4, the movable block 45 is slidably supported by a pair of first support bodies 44 (one of which is shown). The upper end of the drive shaft 46 is slidably supported by the movable block 45.

The lower end of each of the drive shafts 46 is coupled and fixed to the upper ends of the pair of first rotating shafts 27 and the third movable shaft 23 provided at the upper movable shaft 23. A roller 47 is provided at an upper end portion of the drive shaft 46, and the roller 47 is engaged with an inclined groove 48 formed in the movable block 45 so as to be inclined in the vertical direction. Accordingly, when the movable block 45 slides in the axial direction, the roller 47 moves up and down along the inclined groove 48, and the drive shaft 46 moves in conjunction with the vertical movement, so that the movable plate 23 is coupled to the upper portion of the drive shaft 46. It will be driven up and down along the linear guide 22.

The pair of right and left movable plates 23 rotatably support the second upper brush 34 via the pair of first rotating shafts 27 via the first upper brush 32 and the pair of third rotating shafts 29, respectively. Therefore, when the upper movable plate 23 is driven up and down, the first and second upper brushes 32, 34 can be moved up and down and positioned.

One end of the pair of right and left movable blocks 45 is coupled by the interlocking shaft 51. The other end of one of the movable blocks 45 is coupled to one end of the slide shaft 52 (shown in FIG. 4). The slide shaft 52 is slidably supported by the second support body 53 attached to one of the leg portions 14 by the bracket 50.

The upper end portion of the first operation shaft 54 is rotatably supported by the second support body 53. A drive gear (not shown) that engages with a driven gear provided on the slide shaft 52 is provided at an upper end portion of the first operation shaft 54. Further, when the first operation shaft 54 is rotated by the operation knob 55 provided at the lower end of the first operation shaft 54, the slide shaft 52 can be driven in the axial direction by the rotation.

When the slide shaft 52 is driven in the axial direction, the first slider 45 is slid in conjunction with each other. Therefore, as described above, the position of the first upper brush 32 and the second upper brush 34 in the vertical direction can be adjusted.

As shown in FIG. 4, the raising lever 56 is connected to the second support body 53 so as to be pivotably coupled to the middle support portion by the pin 56a. The upper end of the operating lever 56 is pivotably coupled to the portion of the second support body 53 supported by the slide shaft 52 so as to be rotatable in the vertical direction.

Therefore, when the operation lever 56 is rotated in the counterclockwise direction and the upper end retreating direction indicated by the arrow in FIG. 4, the slide lever 52 can be forcibly driven in the backward direction by the operation lever 56. Thereby, the first and second upper brushes 32, 34 can be rapidly increased in size larger than the size of the first operation shaft 54.

The upper and lower lower brush units 33 and 35 of the first and second upper and lower driving mechanisms 41 and 42 are configured to have substantially the same configuration as the first and second upper brush units 32 and 34. Institutional. That is, although not shown in detail, as shown in FIG. 2, the first support body 44A is attached to one of the upper ends of the leg portion 14 of the frame 12, and the first slider (not shown) It is slidably disposed on one of the supports 44A.

The first slider is coupled to a slide shaft (not shown) slidably provided on the second support 53A. The upper end of the second operation shaft 54A is rotatably supported by the second support body 53A, and the second operation shaft 54A is rotated by the operation handle 55A, and the first slider 54A can be slid via the slide shaft.

The pair of left and right first sliders 54A are coupled by the interlocking shaft 51A. The drive shafts (all not shown) are provided on the inclined grooves (not shown) provided in the respective first sliders by the rollers being vertically movable. A pair of drive shafts are coupled to the lower movable plate 24, and the lower movable plates are respectively disposed on one side surface and the other side surface of one of the frame portions 14 of the frame 4 and are movable in the vertical direction.

As a result, when the second operation shaft 54A is rotated, the drive shaft that moves up and down in conjunction with the rotation and the pair of second and fourth rotation shafts 28 and 30 attached to the lower movable plate 24 can be used to make the first The lower brush 33 and the second lower brush 35 move up and down.

In other words, the first upper and lower driving mechanisms 41 and the second driving mechanism 42 can adjust the position of the first and second upper brushes 32, 34 and the first and second lower brush members 33, 35 in the up-down direction. That is, the interval between the brushes. Thereby, the contact strength of the bristles 37 with respect to the upper and lower surfaces of the substrate W between the upper and lower pair of brushes can be adjusted.

As shown in FIG. 1, the brush unit 11 configured as described above is detachably attached to the connecting plate 15 provided at the lower end of the leg portion 14 of the frame 12 and fixedly disposed in the width direction of the processing tank 1. Above the gantry 57 on both sides.

That is, the brush unit 11 sets the frame 12 in a direction orthogonal to the conveyance direction of the substrate W in the width direction of the processing tank 1, and as shown in FIG. 3, is provided in the first frame of the frame 12. The first upper brush 32 and the first lower brush 33 of the second mounting portions 17 and 18 are located on the upstream side in the conveyance direction of the substrate W indicated by the arrow in the figure, and are provided in the third and fourth mounting portions 19, The second upper brush 34 and the second lower brush 35 of 20 are disposed on the downstream side in the conveyance direction of the substrate W.

Fig. 6 is a view showing an arrangement state of a nozzle for supplying a washing liquid which is provided in a portion of the brush unit 11 provided in the processing tank 1. In other words, the first nozzle 61 supplies the cleaning liquid to the first upper brush 32, and the second nozzle 62 supplies the cleaning liquid to the second upper brush 34. Further, the upper surface of the portion between the pair of upper and lower brushes of the substrate W is ejected by the two sets of third nozzles 63 to supply the cleaning liquid. Further, the first to third nozzles 61 to 63 are disposed at a predetermined interval in the axial direction of the brush.

As shown in Fig. 1, the first and second operating shafts 54, 54A and the operating lever 56 of the first and second upper and lower lower driving mechanisms 41, 42 project toward the outside of the processing tank 1. Thereby, the upper and lower positions of the upper brush 32, 34 and the lower brush 33, 35 can be adjusted externally.

As shown in Fig. 1, a pillar 72 of a crane 71 is erected on the outer side of one side of the treatment tank 1. One end of the cross member 73 is fixed to the upper end of the post 72. The horizontal member 73 is horizontally disposed above the processing tank 1 in the width direction of the processing tank 1.

A winch 74 operated by the operation portion 74a is provided at a midway portion of the pillar 72 in the height direction. The trolley 75 is rotatably provided at one end and the other end of the horizontal member 73, respectively. The wire 76 that is curled or discharged by the aforementioned carriage 75 is engaged with a pair of winches 75. A hook portion 77 is provided at the front end of the wire 76.

The hook portion 77 is engageable with the engaging hole 16a of the hanger 16 formed in the brush unit 11. The hook portion 77 is engaged with the hanging portion 16. When the brush body unit 11 is detached from the gantry 57 and the cover body 6 is removed by the processing tank 1, the wire 76 is taken up by the winch 74, which can be represented by the solid line in FIG. In the mounting position, the brush unit 11 is suspended above the processing tank 1 as indicated by a broken line. Therefore, the maintenance of the aforementioned brush unit 11 and the like can be easily performed.

According to the processing apparatus thus constituted, the pair of upper brushes 32, 34 and the pair of lower brushes 33, 35 can be integrated by the frame 12. Therefore, if it is integrated before being assembled in the processing tank 1, the inside of the processing tank 1 is completed by attaching and fixing the connecting plate 15 provided at the lower end of the leg portion 14 of the frame 12 to the gantry 57. Therefore, the work of assembling the brush unit 11 in the processing tank 1 can be performed easily and quickly.

The first mounting portion 17 and the second mounting portion 18 are disposed on the same vertical surface on one side of the leg portion 14 of the frame 12, and the third mounting portion 19 and the fourth mounting portion 20 are provided on the other side surface. Also set on the same vertical plane. Specifically, the pair of upper portions are formed on the reference surface 21 formed on the side surface of the leg portion 14 of the frame 12 of the first and second mounting portions 17, 18 and the third and fourth mounting portions 19 and 20, respectively. The plate faces of the movable plate 23 and the lower movable plate 24 are respectively located on the same vertical plane.

Therefore, when the pair of first rotating shaft 27, second rotating shaft 28, third rotating shaft 29, and fourth rotating shaft 30 are respectively attached and fixed with reference to the surface between the upper movable plate 23 and the lower movable plate 24, one can be used. The shafts 27 to 30 are attached to the frame 12, respectively, without deviating from the shaft core.

If a pair of rotating shafts 27 to 30 can be respectively attached to the frame 12 without deviating from the axial core, even if the driving source 40 is rotationally driven to support the brush 32 to 35 which are rotatably supported by the rotating shafts 27 to 30, It can prevent stress and damage of each of the rotating shafts 27 to 30 or the brushes 32 to 35.

Further, the first and second rotating shafts 27, 28 provided on one side of one of the side surfaces of the frame 12 and the leg portion 14 can be integrally driven up and down via the interlocking shaft 51 by the first vertical drive mechanism 41.

Further, the third and fourth rotating shafts 29, 30 provided on each of the other side faces of the pair of the leg portions 14 of the frame 12 can be integrally driven up and down via the interlocking shaft 51A by the second drive mechanism 42.

Therefore, the first to fourth rotating shafts 27 to 30 provided on each of the pair of side faces and the other side of the pair of leg portions 14 are not eccentric, and do not deviate from the position in the vertical direction. It is possible to prevent stress from being generated on the shaft or the respective shafts 27 to 30 of the brush by rotating the brushes 32 to 35.

In the above embodiment, the brush unit is provided with one pair of upper and lower brushes on one side and the other side of the frame. However, the present invention may also be provided with a pair of upper and lower brushes only on one side of the frame. A brush unit having a composition.

1. . . Processing tank

2. . . Handling roller

3. . . Transport mechanism

4. . . Move in

5. . . Move out

6. . . Cover

7. . . Opening

8. . . Drain tube

9. . . Waste tank

11. . . Brush unit

12. . . frame

13. . . Linkage

14. . . Foot

15. . . Link board

16. . . Hanging tool

17. . . First installation department

18. . . Second installation department

19. . . Third installation department

20. . . 4th installation department

twenty one. . . Datum

twenty two. . . Linear guide

twenty three. . . Upper movable plate

twenty four. . . Lower movable plate

25. . . Slider

27. . . 1st shaft

28. . . 2nd shaft

29. . . Third axis

30. . . 4th axis

32. . . 1st upper brush

33. . . First lower brush

34. . . 2nd upper brush

35. . . Second lower brush

36. . . Hollow shaft

37. . . Brushing

39. . . Support shaft

40. . . Drive source

41. . . First positioning mechanism

42. . . Second positioning mechanism

44,44A. . . First support

45. . . Movable slider

45A. . . 1st slider

46. . . Drive shaft

47. . . Roller

48. . . Inclined ditch

50. . . bracket

51, 51A. . . Linking axis

52. . . Sliding shaft

53,53A. . . Second support

54. . . First operating axis

54A. . . Second operating axis

55,55A. . . Operating handle

56. . . Rising lever

56a, 56b. . . pin

57. . . shelf

61. . . First nozzle

62. . . Second nozzle

63. . . Third nozzle

71. . . Crane device

72. . . pillar

73. . . Cross member

74. . . winch

74a. . . Operation department

75. . . pulley

76. . . Wire

77. . . Hook

W. . . Substrate

Fig. 1 is a longitudinal sectional view showing an embodiment of the present invention.

Figure 2 is an exploded perspective view of the brush unit.

Fig. 3 is an explanatory view showing an arrangement relationship between a transport mechanism for transporting a substrate in a predetermined direction in the processing tank and a brush unit.

Fig. 4 is a front elevational view showing the longitudinal end of the brush unit in an enlarged manner.

Figure 5 is a plan view of the lower drive mechanism of the upper brush unit.

Fig. 6 is an explanatory view showing the arrangement relationship between each of the brush members of the brush unit and the nozzle for ejecting the cleaning liquid.

11. . . Brush unit

12. . . frame

13. . . Linkage

14. . . Foot

15. . . Link board

17. . . First installation department

18. . . Second installation department

19. . . Third installation department

27. . . 1st shaft

28. . . 2nd shaft

29. . . Third axis

30. . . 4th axis

32. . . 1st upper brush

34. . . 2nd upper brush

40. . . Drive source

41. . . First positioning mechanism

42. . . Second positioning mechanism

44,44A. . . First support

51, 51A. . . Linking axis

53,53A. . . Second support

54. . . First operating axis

54A. . . Second operating axis

55,55A. . . Operating handle

56. . . Rising lever

Claims (5)

A substrate processing apparatus capable of processing a substrate conveyed in the processing tank by a brush unit provided in a processing tank, wherein the brush unit includes a frame connected by a connecting portion and two ends of the connecting portion The pair of leg portions are formed in a gate shape, and the first mounting portion and the second mounting portion are formed on one side surface of the pair of leg portions which are separated by a predetermined interval in the horizontal direction on the same vertical surface; the first upper brush and the first (1) The lower brush is disposed in the vertical direction in parallel with the axis; the pair of first rotating shafts are attached to the first mounting portion and the second mounting portion, and support the axial end portions of the first upper brush, And a pair of second rotating shafts attached to the first mounting portion and the second mounting portion, and supporting the axially opposite end portions of the first lower brush to be rotatable, the foregoing processing A gantry is provided on both sides in the width direction of the groove, and the frame of the brush unit is provided such that a pair of leg portions are detachably attached and fixed to the gantry. The substrate processing apparatus according to claim 1, wherein the first rotating shaft and the second rotating shaft are attached to the first mounting portion and the second mounting portion, respectively, and are movable up and down, and the first and second rotating shafts are provided to be movable. The positioning adjustment in the vertical direction is performed by each of the first mounting units by the first vertical drive mechanism. The substrate processing apparatus according to claim 1, wherein one of the frames forms a third mounting portion parallel to the first mounting portion on the other side surface of the leg portion, and the second mounting portion is parallel to the second mounting portion The third mounting portion is separated from the fourth mounting portion at a predetermined interval, and the third rotating shaft and the fourth rotating shaft are respectively provided in the third mounting portion and the fourth mounting portion in the vertical direction, and are provided in the third mounting portion and One of the fourth mounting portions rotatably supports the axial ends of the second upper brush to the third rotating shaft, and the pair of the fourth rotating shaft rotatably supports the axially opposite ends of the second lower brush . In the substrate processing apparatus of the third aspect of the invention, the third rotating shaft and the fourth rotating shaft are respectively disposed on the third mounting portion and the fourth mounting portion, and are movable up and down, and the third and fourth rotating shafts are provided to be movable. The second vertical drive mechanism adjusts the vertical direction of each of the mounting portions. The substrate processing apparatus according to claim 3, wherein the first mounting portion and the second mounting portion are formed on one side surface of the pair of leg portions, and the third mounting portion and the fourth mounting portion are formed in a The other side of the pair of legs is parallel to the other side.