JP4903090B2 - Brush cleaning device - Google Patents

Description

  The present invention relates to a brush cleaning apparatus that performs a brush cleaning process on a substrate conveyed in a predetermined direction with a pair of roll brushes.

  A circuit pattern is formed on a glass substrate used in the liquid crystal display device. A lithographic process is employed to form a circuit pattern on the substrate. In a lithography process, as is well known, a resist is applied to the substrate, and light is irradiated through a mask having a circuit pattern formed on the resist.

  Next, a portion of the resist not irradiated with light or a portion irradiated with light is removed, and the portion where the resist is removed is etched. Then, a circuit pattern is formed on the substrate by repeating a series of steps of removing the resist from the substrate after etching a plurality of times.

  In such a lithography process, it is necessary to process the substrate with a processing solution such as a developing solution, an etching solution or a stripping solution that removes the resist after etching, and a step of cleaning with a cleaning solution after the processing with the processing solution. Become.

  In the cleaning process for cleaning the substrate, for example, when the processing liquid adhering to the substrate is cleaned and removed, the processing liquid is ejected from the substrate by spraying the cleaning liquid onto the substrate transported in the processing tank with a shower nozzle. Can be washed away.

  However, in the case where dirt such as particles adheres firmly to the substrate, the dirt cannot be reliably removed by simply spraying the cleaning liquid onto the substrate. Therefore, in such a case, the substrate conveyed in the processing tank is cleaned with a roll brush.

  The roll brush has a brush shaft, and a brush portion having brush hairs is provided on a portion excluding both ends of the brush shaft. A support shaft is connected to both ends of the brush shaft via joints. Each of the pair of support shafts is rotatably supported by the bearing body. Each bearing body is fixedly attached to a mounting portion such as a gantry provided in the cleaning tank.

  Recently, the size of the substrate tends to increase. When the substrate is enlarged, the roll brush is elongated according to the width of the substrate. When the length of the roll brush is increased, the distance between the pair of bearing bodies for rotatably supporting the support shaft connected to both ends of the brush shaft increases.

  When the distance between the pair of bearing bodies increases, it becomes difficult to provide the shaft cores of these bearing bodies with high accuracy. If the shaft cores of the pair of bearing bodies do not coincide with each other with high accuracy, the roll brush supported by these bearing bodies will not rotate smoothly, and the support shaft and the bearing body will be damaged early.

Therefore, as shown in Patent Document 1, the frame on which the roll brush is supported has a first mounting portion and a second mounting portion having flat surfaces located on the same vertical plane and spaced apart at a predetermined interval in the horizontal direction. Provide a mounting part. And a pair of 1st bearing bodies which rotatably support the support shaft provided in the both ends of the brush axis | shaft of an upper roll brush in the 1st attachment part and the 2nd attachment part, and the brush of a lower roll brush A pair of second bearing bodies that rotatably support the support shafts provided at both ends of the shaft are provided.
JP 2006-116465 A

  By the way, according to the prior art disclosed in Patent Document 1, the first mounting portion and the second mounting portion for providing the first bearing body and the second bearing body are positioned on the same vertical plane. In addition, the frame must be provided so as to be spaced apart at predetermined intervals in the horizontal direction.

  However, if the first mounting portion and the second mounting portion provided on the frame are deviated from the same vertical plane, the shaft cores of the pair of first and second bearing bodies attached to the respective mounting portions also Deviation will occur.

  When the shaft cores of each pair of first and second bearing bodies are displaced, when the support shafts provided at both ends of the brush shaft are supported by these bearing bodies, the first and second shafts are supported via the support shafts. Stress is applied to the support shaft and brush shaft supported by the bearing body.

  If the roll brush is driven to rotate for a long time with stress applied to the support shaft or brush shaft, the stress may cause cracks in the support shaft or brush shaft or break from the cracked portion. is there. Further, since the stress generated in the support shaft and the brush shaft acts on the bearing body, the bearing body may be damaged early.

  The present invention provides a brush cleaning device in which no stress is generated on the brush shaft of the roll brush even if the positions of supporting the one end and the other end of the brush shaft of the roll brush do not coincide with each other with high accuracy. Is to provide.

The present invention is a brush cleaning device having a pair of roll brushes provided with a brush portion on a brush shaft and cleaning a substrate conveyed in a predetermined direction by passing between the pair of roll brushes.
A radial bearing that rotatably supports one end of the brush shaft;
A rotational drive source coupled to one end of the brush shaft rotatably supported by the radial bearing, and rotationally driving the brush shaft;
A brush cleaning apparatus comprising: a pair of support rollers having an outer peripheral surface formed into a convex curved surface and rotatably supporting the outer peripheral surface of the other end portion of the brush shaft by point contact with the curved surface. .

Radial bearings that rotatably support one end portions of the brush shafts of the pair of roll brushes are respectively provided on the first movable body, and the pair of first movable bodies are provided so as to be movable in the vertical direction by the first guide means. And
A pair of support rollers that rotatably support the other end of the brush shaft are respectively provided on the second movable body, and the pair of second movable bodies are provided so as to be vertically movable by the second guide means. And
The pair of first movable bodies are respectively driven in the vertical direction along the first guide means by the vertical drive means, and the second guide means of the second movable bodies corresponding to the first movable bodies. It is preferable that each of the vertical movements along the line is linked to the vertical movement of each first movable body by the power transmission means.

The power transmission means is
An interlocking shaft arranged with its axis parallel to the axis of the roll brush,
An interlocking drive source for rotationally driving the interlocking shaft;
A first rotating cam body provided at a portion corresponding to one end of the brush shaft of the roll brush of the interlocking shaft;
A second rotating cam body provided at a portion corresponding to the other end of the brush shaft of the roll brush of the interlocking shaft;
A cam follower is provided at the lower end to contact the cam surfaces formed on the first rotating cam body and the second rotating cam body, and the upper end is connected to the first movable body and the second movable body, respectively. Preferably, each rotating cam body includes a pair of drive members that move up and down by being rotated together with the interlocking shaft by the interlocking drive source.

  It is preferable that the rotating cam body has a disk-like body, and a cam portion whose outer peripheral surface is the cam surface is formed by a concave portion on one side surface of the disk-like body.

At least one end of the brush shaft connected to the rotational drive source is connected to a support shaft in a dismountable manner by a joint.
The joint has a flange having the same diameter as the brush shaft provided at the end of the support shaft, and the flange is attached and fixed to the end surface of the brush shaft by a coupling means;
It is preferable that a convex portion is formed on one of the end surface of the flange and the end surface of the brush shaft to which the flange is attached and fixed, and a concave portion into which the convex portion is fitted is formed on the other.

  According to this invention, one end of the brush shaft of the roll brush is rotatably supported by the radial bearing, and the other end is supported by bringing the outer peripheral surface into point contact with the convex curved surface of the pair of support rollers. Even if there is a horizontal or vertical shift in the pair of left and right support positions that support one end and the other end of the shaft, the shift is absorbed by the support structure of the support roller at the other end.

  This prevents stress from being generated on the brush shaft of the roll brush that is rotatably supported, thereby preventing damage to the brush shaft and the radial bearing that rotatably supports one end of the brush shaft. Can do.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a longitudinal sectional view showing a horizontal brush cleaning apparatus, and this brush cleaning apparatus includes a treatment tank 1. In the processing tank 1, a transport mechanism 3 including a plurality of transport rollers 2 is provided as shown in FIG. 2. These transport rollers 2 are rotationally driven in a predetermined direction by a driving mechanism (not shown).

  A carrying-in port 4 is formed at one end of the processing tank 1, and a glass substrate W used for, for example, a liquid crystal display panel is carried into the processing tank 1 from the carrying-in port 4. The substrate W carried into the processing tank 1 is transported by the transport roller 2 that is rotationally driven, and is transported from a transport outlet 5 formed at the other end of the processing tank 1.

  As shown in FIG. 1, the treatment tank 1 is configured such that an opening 7 formed on the upper surface can be opened and closed by a lid 6. In the processing tank 1, two brush units 11 (shown in FIG. 2) for brush cleaning the substrate W transported by the transport roller 2 in the processing tank 1 are arranged at predetermined intervals along the transport direction of the substrate W. It is set apart by. The bottom of the treatment tank 1 is connected to a waste liquid tank 9 through a drain pipe 8.

  As shown in FIGS. 3 to 5, the brush unit 11 has a first support 12 and a second support 13 so that one end and the other end in the axial direction are parallel to each other as will be described later. A supported upper roll brush 14 and lower roll brush 15 are provided.

  Each support 12, 13 has a rectangular base plate 17. On the upper surface of the base plate 17, a guide member 18 having a U-shaped cross-section that constitutes the first and second guide means is erected. As shown in FIGS. 6 and 7, linear guide rails 19 are provided along the vertical direction at the upper part of the inner surface of each guide member 18.

  The first support body 12 is provided with a first upper movable body 21 and a first lower movable body 22 so as to be movable in the vertical direction, and the second support body 13 is provided with a second upper movable body 23 and a first movable body 23. Two lower movable bodies 24 are provided to be movable in the vertical direction.

Each movable body 21 to 24 has a slider 25 slidably engaged with the linear guide rail 19. Each slider 25 is provided with a mounting plate 26 with the plate surface vertical. As shown in FIG. 6, a pair of radial bearings 28 (only the first upper movable body 21 is shown) are horizontally mounted on the mounting plates 26 of the first upper movable body 21 and the first lower movable body 22. It is provided to match the direction. The pair of radial bearings 28 are covered with a cover 29. FIG. 6 shows a state in which the first lower movable body 22 is covered with a cover 29 and the first upper movable body 21 is removed from the cover 29.
4 and 5 show a state in which the first upper movable body 21 and the first lower movable body 22 are covered with a cover 29, respectively.

  Each pair of radial bearings 28 provided on the mounting plates 26 of the first upper movable body 21 and the first lower movable body 22 is provided at one end of the brush shaft 31 of the upper roll brush 14 and the lower roll brush 15 as will be described later. A first support shaft 33 detachably connected by a joint 32 is rotatably supported.

  In addition, the outer peripheral surface of the part except the both ends of the brush axis | shaft 31 of each said roll brush 14 and 15 has the brush part 34 formed, for example by winding the holding member holding the brush hair helically. .

  A first support shaft 33 of the upper roll brush 14 is connected to a rotation shaft 36 of a first rotation drive source 35 provided at an end in the width direction of the mounting plate 26 by a joint 37. The first support shaft 33 of the lower roll brush 15 is also a rotation shaft of a second rotation drive source 38 provided below the first rotation drive source 35 at the end in the width direction of the mounting plate 26. 39 is connected by a joint 41.

  As shown in FIG. 7, the other end of the brush shaft 31 of the upper roll brush 14 and the lower roll brush 15 has the same structure as the joint 32 in which the first support shaft 33 is connected to one end of the brush shaft 31. The second support shaft 42 is detachably connected by the joint 32.

  The second support shafts 42 of the upper roll brush 14 and the lower roll brush 15 can be rotated by a second upper movable body 23 and a second lower movable body 24 provided on the second support body 13, respectively. It is supported.

  That is, a pair of columnar mounting members 43 are provided at predetermined intervals along the horizontal direction orthogonal to the axis of the roll brushes 14 and 15 on the mounting plate 26 of the second upper movable body 23 and the second lower movable body 24. It has been. Each attachment member 43 is provided with an attachment shaft 44 with its axis parallel to the axis of each of the roll brushes 14 and 15, and a support roller 45 is rotatably attached to each attachment shaft 44.

  As shown in FIG. 13, the outer peripheral surface of the support roller 45 is formed as a convex curved surface 46. The second support shaft 42 is rotatably supported by point contact by the convex curved surface 46 of the pair of support rollers 45. Accordingly, the second support shaft 42 can move in the axial direction with respect to the pair of support rollers 45 and can swing in a direction intersecting the axial direction.

  A lateral member 48 is detachably attached to the pair of attachment members 43 at a portion above the second support shaft 42 supported by a pair of support rollers 45 by screws (not shown). The horizontal member 48 is provided with a presser roller 49 that can be rotated by a screw shaft 51 so as to prevent the second support shaft 42 supported by the pair of support rollers 45 from being greatly lifted from the support roller 45. That is, the presser roller 49 is not in contact with the outer peripheral surface of the second support shaft 42, but the second support shaft 42 is lifted from the support roller 45 by the weight of each roll brush 14, 15. It is prevented.

  Thus, the upper roll brush 14 and the lower roll brush 15 in which the first support shaft 33 is rotatably supported by the radial bearing 28 and the second support shaft 42 is rotatably supported by the pair of support rollers 45 are as follows. The first rotation drive source 35 and the second rotation drive source 38 are driven to rotate respectively.

  Each joint 32 for connecting the first support shaft 33 and the second support shaft 42 to one end and the other end of the brush shaft 31 has a structure shown in FIG. That is, a flange 52 having the same outer dimensions as the brush shaft 31 is provided at the tips of the first and second support shafts 33 and 42 connected to one end of the brush shaft 31. A plurality of, for example, four through holes 53 (only two are shown) are formed in the flange 52 at predetermined intervals in the circumferential direction. A disc-shaped convex portion 54 is provided on an end surface of the flange 52 connected to one end surface of the brush shaft 31.

  A concave portion 55 into which the convex portion 54 is fitted is formed on one end surface of the brush shaft 31, and a plurality of screw holes 56 are formed in the peripheral portion of the concave portion 55 corresponding to the through hole 53. The first and second support shafts 33 and 42 have the convex portion 54 of the flange 52 fitted into the concave portion 55 of the brush shaft 31, and the flange 52 is brought into contact with one end surface of the brush shaft 31. From the above, the connecting screw 57 as a connecting means is screwed into the screw hole 56 so as to be detachably connected.

  According to such a connecting structure, the connecting direction of the flange 52 with respect to the brush shaft 31 by the connecting screw 57 is orthogonal to the vibration direction applied to the brush shaft 31 when the substrate W is cleaned, and is provided on the flange 52. Since the convex portion 54 is fitted in the concave portion 55 provided on the brush shaft 31, vibrations generated in the brush shaft 31 due to these are caused between the brush shaft 31 and the first and second support shafts 33 and 42. It is difficult to be amplified by the connecting portion.

  Since the upper roll brush 14 and the lower roll brush 15 become heavy due to the increase in length, the upper roll brush 14 and the lower roll brush 15 are removed from the first and second support bodies 12 and 13 using the removal jig 58 shown in FIGS. It has become. The removal jig 58 includes a lifting shaft 59 and hooks 61 provided at both ends of the lifting shaft 59 and detachably engaged with both ends of the brush shaft 31.

  When the hook 61 is engaged with both ends of the brush shaft 31 of the upper roll brush 14, the hook (not shown) of the chain block is engaged with the lifting shaft 59, and then the first The connecting screw 57 having the flange 52 of the support shaft 33 as one end of the brush shaft 31 is removed, and the first support shaft 33 is disassembled from the brush shaft 31.

  Next, when the transverse member 48 provided with the presser roller 49 that holds the second support shaft 42 so as not to be lifted from the support roller 45 is removed from the attachment member 43, the chain block is wound up and the upper roll brush 14 is removed. If the upper roll 14 is lifted by the jig 58, the upper roll 14 can be removed from the pair of supports 12 and 13.

  After the upper roll brush 14 is removed, the lower roll brush 15 can be similarly removed from the pair of supports 12 and 13. As a result, even if the upper roll brush 14 and the lower roll brush 15 are lengthened and become heavy, it is possible to easily repair and inspect and replace these roll brushes 14 and 15.

  The substrate W is transported between the upper roll brush 14 and the lower roll brush 15. The distance between the upper roll brush 14 and the lower roll brush 15 can be set by driving the roll brushes 14 and 15 in the vertical direction by the vertical drive means 63 according to the thickness of the substrate W, the cleaning conditions, and the like. .

  The vertical driving means 63 is configured to vertically drive the first upper movable body 21 and the first lower movable body 22 provided on the first support body 12 along the guide member 18. When the upper movable body 21 and the first lower movable body 22 move up and down, the second upper movable body 23 provided on the second support 13 and the second lower movable body are moved by the power transmission means 64. It is transmitted to the body 24.

  The vertical drive means 63 has an upper vertical drive source 65 and a lower vertical drive source 66 provided on the lower surface of the base plate 17 of the first support 12 as shown in FIGS. One end of a first cam shaft 67 is connected to the rotation shafts 65a and 66a of the drive sources 65 and 66, respectively. Each first cam shaft 67 is rotatably supported by a pair of bearing members 70 provided on the lower surface of the base plate 17.

  A pair of first cam shafts 67 are provided with first rotating cam bodies 68, respectively. As shown in FIG. 11, the first rotating cam body 68 has a disk-shaped body 69, and a cam section whose outer peripheral surface is a cam surface 72 by an arc-shaped recess 71 on one side surface of the disk-shaped body 69. 73 is formed.

  A cam follower 76 that is rotatably provided at the lower end of the first drive member 75 is engaged with the cam surfaces 72 of the pair of first rotary cam bodies 68. The distance between the inner peripheral surface of the recess 71 and the cam surface 72 is set to be substantially the same as the outer dimension of the cam follower 76.

  As a result, the contact state between the outer peripheral surface of the cam follower 76 and the cam surface 72 is maintained without leaving, so that the first drive member 75 provided with the cam follower 76 is restricted from freely moving in the vertical direction. Yes.

  As shown in FIG. 8, the pair of first drive members 75 protrude from the opening 17 a formed in the base plate 17 to the upper surface side of the base plate 17. The upper end of one first drive member 75 that moves up and down in conjunction with the rotation of the first rotary cam body 68 that is driven to rotate by the upper vertical drive source 65 is a first support provided on the first support 12. The upper end of the other first drive member 75 that is connected to the upper movable body 21 and moves up and down in conjunction with the rotation of the first rotary cam body 68 that is driven to rotate by the lower vertical drive source 66 is the first top. It is connected to the lower movable body 22.

  Accordingly, when the first rotary cam body 68 is rotationally driven by the upper vertical drive source 65, the first upper movable body 21 is moved along the linear guide 19 provided on the first support body 12 by the rotation. If the first rotary cam body 68 is driven to rotate by the lower vertical drive source 66, the first lower movable body 22 can be similarly driven in the upward or downward direction. Can be driven to.

  The vertical movement of the first upper movable body 21 and the first lower movable body 22 is caused by the second upper movable body 23 and the second second movable body 23 provided on the second support 13 by the power transmission means 64. The lower movable body 24 is transmitted. As a result, the second upper movable body 23 and the second lower movable body 24 provided on the second support body 13 move up and down with respect to the first upper movable body 21 and the first lower movable body 22. It is to be linked to.

  The power transmission means 64 has a pair of interlocking shafts 78 with one end detachably connected to the other end of the pair of first cam shafts 67 by a joint 77. As shown in FIG. 10, one end of the second cam shaft 79 is connected to the other end of each interlocking shaft 78 by a joint 80 so as to be disassembled. Each of the pair of second cam shafts 79 is provided with a second rotating cam body 81. The second rotating cam body 81 has the same structure as the first rotating cam body 68 shown in FIG.

  The second cam shaft 79 is rotatably supported by a pair of bearing members 82 provided on the lower surface of the base plate 17 of the second support 13. A cam follower 84 that is rotatably provided at the lower end of a second drive member 83 (shown in FIGS. 4 and 5) is engaged with the cam surface 72 of each second rotary cam body 81.

  The pair of second drive members 83 protrudes from the opening 17a (shown in FIG. 10) formed in the base plate 17 to the upper surface side. As shown in FIGS. 4 and 5, the upper end of one second drive member 83 driven up and down by a second rotating cam body 81 on the side of one interlocking shaft 78 driven to rotate by an upper vertical drive source 65. Is connected to the second upper movable body 23, and the upper end of the other second driving member 83 is connected to the second lower movable body 24.

  That is, when the upper vertical drive source 65 and the lower vertical drive source 66 are operated to rotate the first cam shaft 67, the rotation is transmitted to the second cam shaft 79 via the interlocking shaft 78. Therefore, the first rotating cam body 68 and the second rotating cam body 81 rotate in conjunction with each other.

  If the first rotating cam body 68 and the second rotating cam body 81 rotate in conjunction with each other, the first driving member 75 and the second driving member 83 move in conjunction with these cam bodies 68 and 81 to move up and down. Therefore, the first upper movable body 21, the second upper movable body 23, the first lower movable body 22, and the second lower movable body provided on the first support body 12 and the second support body 13, respectively. 24 moves up and down in conjunction with each other.

  Accordingly, the upper roll brush 14 and the lower roll brush 15 can be moved up and down in a horizontal state in conjunction with the vertical movement of the pair of upper movable bodies 21 and 23 and lower movable bodies 22 and 24, respectively. Yes.

  As shown in FIG. 10, a pair of second camshafts 79 are provided with drive rotation gears 86, and the rotations of these drive rotation gears 86 are transmitted to a driven rotation gear 87. The driven rotation gear 87 is provided on a support shaft 88 that is rotatably supported on the lower surface of the base plate 17 of the second support 13. A plurality of angle detection disks 89 are provided on the support shaft 88 at predetermined intervals. Each angle detection disk 89 is provided with a notch (not shown). Each angle detection disk 89 is provided on the support shaft 88 with its notch shifted in the circumferential direction.

  The base plate 17 is provided with four detection sensors 90 that face the angle detection disks 89 and detect notches of the angle detection disks 89. In these detection sensors 90, the second cam shaft 79 rotates, and the rotation is transmitted to the support shaft 88 via the drive rotation gear 86 and the driven rotation gear 87. When the rotation is made, the rotation angle of the second cam shaft 79 at that time, that is, the interlocking shaft 78 to which the second cam shaft 79 is connected is detected by one detection sensor 90 that detects the notch of the angle detection disk 89. Thus, the rotation angle of the pair of first cam shafts 67 driven by the upper vertical drive source 65 and the lower vertical drive source 66 is detected.

  The upper vertical drive source 65 and the lower vertical drive source 66 are controlled by a detection signal from a detection sensor 90. Thereby, the vertical position of the upper roll brush 14 and the lower roll brush 15, that is, the interval between the upper roll brush 14 and the lower roll brush 15, can be set according to the thickness of the substrate W, the cleaning conditions, and the like.

  As shown in FIG. 3, the lower surfaces of the base plates 17 of the first support body 12 and the second support body 13 are each covered with a lower cover 91, and the upper surface side is covered with an upper cover 92. Thereby, various components provided on the lower surface and the upper surface of the base plate 17 are covered and hidden.

  As shown in FIG. 2, the cleaning liquid is supplied by the nozzle body 93 to the upper roll brush 14 and the upper surface of the substrate W to be cleaned. As shown in FIGS. 3 to 5, the supplied cleaning liquid is supplied to the first and second support shafts 33 and 42 connected to one end and the other end of the brush shaft 31 of each roll brush 14 and 15. A pair of liquid stoppers 94 that prevent the fluid from flowing through the processing tanks 1 through 33 and 42 are provided.

  According to the brush cleaning device having such a configuration, the first support shaft 33 provided at one end of the brush shaft 31 of the upper roll brush 14 is connected to the rotation shaft 36 of the first rotation drive source 35 and the other end. The second support shaft 42 provided on the second upper movable body 23 is supported by a pointed contact by a convex curved surface 46 of a pair of support rollers 45 provided on the second upper movable body 23.

  Similarly, the first support shaft 33 provided at one end of the brush shaft 31 of the lower roll brush 15 is connected to the rotation shaft 39 of the second rotation drive source 38 and the second support shaft provided at the other end. 42 is supported by point contact by a convex curved surface 46 of a pair of support rollers 45 provided on the second upper movable body 23.

  Therefore, even if the position of supporting the first support shaft 33 at one end of each brush shaft 31 and the second support shaft 42 at the other end is displaced in the horizontal direction or the vertical direction, the second support shaft 42 is provided. Is supported by point contact by the convex curved surface 46 of the pair of support rollers 45, the second support shaft 42 is displaced and absorbed in accordance with the deviation.

  That is, the second support shaft 42 is supported so as to be able to swing with respect to the horizontal direction and the vertical direction with a contact point with the convex curved surface 46 of the pair of support rollers 45 as a support point. Therefore, even if there is a shift in the position indicating the first support shaft 33 at one end of each brush shaft 31 and the second support shaft 42 at the other end, the second support shaft 42 swings and displaces. Thus, no stress is applied to the first and second support shafts 33 and 42 and the brush shafts 31 of the roll brushes 14 and 15 to which the support shafts 33 and 42 are connected.

  Therefore, even if each of the roll brushes 14 and 15 is driven to rotate for a long time, the brush shaft 31 and the first and second support shafts 33 and 42 are cracked due to stress or broken from the cracked portion. There is no fear, and the radial bearing 28 supporting the first support shaft 33 is not damaged early.

  The first upper movable body 21 supporting the first support shaft 33 at one end of the brush shaft 31 of the upper roll brush 14 and the first support shaft 33 at one end of the brush shaft 31 of the lower roll brush 15 are supported. When the first lower movable body 22 moves up and down along the linear guide rail 19 of the guide member 18, the up and down movement is connected to the other ends of the brush shafts 31 of the roll brushes 14 and 15 by the power transmission means 64. The second upper movable body 23 and the second lower movable body 24 that rotatably support the two support shafts 33 are interlocked.

  Thereby, the first support shaft 33 and the second support shaft 42 provided at one end and the other end of the brush shaft 31 of the upper roll brush 14 and the lower roll brush 15 are respectively driven by the same distance in the vertical direction. Therefore, the upper roll brush 14 and the lower roll brush 15 can be moved up and down horizontally.

  That is, when adjusting the interval between the upper roll brush 14 and the lower roll brush 15, the roll brushes 14 and 15 can be moved up and down horizontally, so that the interval can be set uniformly over the entire axial length. Become. That is, the upper roll brush 14 and the lower roll brush 15 can be moved up and down in parallel.

  The upper and lower roll brushes 14 and 15 are driven vertically by a pair of first and second first rotating cam bodies 68 and 81 by an upper vertical drive source 65 and a lower vertical drive source 66, respectively. Rotating drive. The cam follower 76 that engages the rotation with the cam surfaces 72 of the first and second rotating cam bodies 68 and 81 is moved up and down by the first drive member 75 and the second drive member 83 provided at the lower end. The vertical movement is transmitted to the first upper movable body 21, the first lower movable body 22, and the first and second lower movable bodies 22, 24.

  The cam surfaces 72 of the first and second first rotating cam bodies 68 and 81 are formed by recesses 71, and the cam followers 76 are inserted into the recesses 71 and engaged with the cam surfaces 72. Since the dimension along the radial direction of the recess 71 and the outer diameter dimension of the cam follower 76 are set to be substantially the same, the contact state between the cam follower 76 and the cam surface 72 is reliably maintained.

  That is, when cleaning is performed through the substrate W between the upper roll brush 14 and the lower roll brush 15, even if a force for pushing up the upper roll brush 14 or the lower roll brush 15, particularly the upper roll brush 14, is generated, 76 floats from the cam surface 72, and the first and second upper movable bodies 21, 23, that is, the upper roll brush 14 are not displaced upward.

  As a result, the distance between the upper roll brush 14 and the lower roll brush 15 is always maintained constant, so that the substrate W can be reliably cleaned with the roll brushes 14 and 15.

  Each roll brush 14, 15 is connected to one end of the brush shaft 31 so that the first support shaft 33 can be disassembled, and to the other end, the second support shaft 42 is connected so as to be disassembled. Is supported rotatably on the radial bearing 28, and the second support shaft 42 is rotatably supported by a support roller 45.

  Since the first and second support shafts 33 and 42 that are rotatably supported may be worn by long-term use, the first and second support shafts 33 and 42 can be disassembled so that they can be replaced when worn. And if it is the structure which connects the 1st, 2nd spindle 33,42 to the brush axis | shaft 31 so that decomposition | disassembly is possible, there exists a possibility that the vibration added to each roll brush 14,15 in the connection part may be amplified. .

  However, in the connection structure of the first and second support shafts 33 and 42 and the brush shaft 31, the support shafts 33 and 42 are provided with flanges 52, and the flanges 52 are brought into contact with the end surfaces of the brush shaft 31 and screwed. 51. Moreover, a convex portion 54 is formed on the flange 52, and a concave portion 55 in which the convex portion 54 is fitted is formed on the end surface of the brush shaft 31.

  That is, the flange 52 of the brush shaft 31 and the support shafts 33 and 42 is coupled to the axial direction, which is a direction orthogonal to the radial direction, by the fitting of the screw 51 and the convex portion 54 and the concave portion 55. Even when the roll brushes 14 and 15 vibrate in the radial direction during the cleaning of W, the vibration is prevented from being amplified by the coupling portion connected in the axial direction between the brush shaft 31 and the support shafts 33 and 42. Can do.

  In the above-described embodiment, the second support shaft supported by the pair of support rollers is prevented from being lifted from the support roller by the presser roller. Even if a roller is not provided, it can be prevented from floating due to its weight.

BRIEF DESCRIPTION OF THE DRAWINGS The longitudinal cross-sectional view of the brush cleaning apparatus in which the brush unit which shows one embodiment of this invention was integrated. The schematic block diagram of a brush washing | cleaning apparatus. The perspective view which looked at the brush unit from diagonally upward. The perspective view which looked at the brush unit from diagonally downward. The perspective view which looked at the brush unit which removed the cover from a pair of support body from diagonally downward. The perspective view which shows the support structure of the 1st spindle connected with the end of the brush axis | shaft of a pair of roll brush. The perspective view which shows the support structure of the 2nd spindle connected with the other end of the brush shaft of a pair of roll brush. The perspective view which shows the up-and-down drive means which drives the 1st upper movable body and 1st lower movable body which were provided in the 1st support body up and down. The perspective view which expands and shows a vertical drive means. The expansion perspective view of the part in which the 2nd rotation cam body of the 2nd support body was provided. The front view which shows the 1st, 2nd rotation cam body. The figure which shows the connection structure of a brush shaft and a support shaft. Sectional drawing of the support roller which supports a 2nd spindle. The perspective view when removing an upper roll brush using the jig for removal. The perspective view which shows the state which engaged the hook of the jig | tool for removal with the end of the brush shaft. The perspective view which shows the state which engaged the hook of the removal jig | tool with the other end of the brush axis | shaft.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 11 ... Brush unit, 12 ... 1st support body, 13 ... 2nd support body, 14 ... Upper roll brush, 15 ... Lower roll brush, 21 ... 1st upper movable body, 22 ... 1st lower movable body , 23 ... second upper movable body, 24 ... second lower movable body, 28 ... radial bearing, 31 ... brush shaft, 32 ... joint, 33 ... first support shaft, 34 ... brush portion, 35 ... first 38 ... second rotational drive source, 42 ... support shaft, 45 ... support roller, 46 ... convex curved surface, 49 ... pressing roller, 63 ... vertical drive means, 64 ... power transmission means, 65 ... upper part Vertical drive source, 66 ... Lower vertical drive source, 68 ... First rotating cam body, 71 ... Recess, 72 ... Cam surface, 73 ... Cam portion, 75 ... First drive member, 76 ... Cam follower, 78 ... Interlocking shaft, 81... Second rotating cam body.

Claims (5)

A brush cleaning device having a pair of roll brushes provided with a brush portion on a brush shaft and cleaning a substrate conveyed in a predetermined direction through the pair of roll brushes,
A radial bearing that rotatably supports one end of the brush shaft;
A rotational drive source coupled to one end of the brush shaft rotatably supported by the radial bearing, and rotationally driving the brush shaft;
A brush cleaning device comprising: a pair of support rollers having an outer peripheral surface formed into a convex curved surface and rotatably supporting the outer peripheral surface of the other end portion of the brush shaft by point contact with the curved surface. Radial bearings that rotatably support one end portions of the brush shafts of the pair of roll brushes are respectively provided on the first movable body, and the pair of first movable bodies are provided so as to be movable in the vertical direction by the first guide means. And
A pair of support rollers that rotatably support the other end of the brush shaft are respectively provided on the second movable body, and the pair of second movable bodies are provided so as to be vertically movable by the second guide means. And
The pair of first movable bodies are respectively driven in the vertical direction along the first guide means by the vertical drive means, and the second guide means of the second movable bodies corresponding to the first movable bodies. 2. The brush cleaning device according to claim 1, wherein the vertical movement along the axis is linked to the vertical movement of each of the first movable bodies by power transmission means. The power transmission means is
An interlocking shaft arranged with its axis parallel to the axis of the roll brush,
An interlocking drive source for rotationally driving the interlocking shaft;
A first rotating cam body provided at a portion corresponding to one end of the brush shaft of the roll brush of the interlocking shaft;
A second rotating cam body provided at a portion corresponding to the other end of the brush shaft of the roll brush of the interlocking shaft;
A cam follower is provided at the lower end to contact the cam surfaces formed on the first rotating cam body and the second rotating cam body, and the upper end is connected to the first movable body and the second movable body, respectively. The brush cleaning device according to claim 2, further comprising: a pair of drive members that move up and down as each rotary cam body is rotationally driven by the interlock drive source together with the interlock shaft.   4. The brush according to claim 3, wherein the rotating cam body has a disk-like body, and a cam portion having an outer peripheral surface thereof becomes the cam surface is formed by a concave portion on one side surface of the disk-like body. Cleaning device. At least one end of the brush shaft connected to the rotational drive source is connected to a support shaft in a dismountable manner by a joint.
The joint has a flange having the same diameter as the brush shaft provided at the end of the support shaft, and the flange is attached and fixed to the end surface of the brush shaft by a coupling means;
One of the end surface of the flange and the end surface of the brush shaft to which the flange is attached and fixed is formed with a convex portion, and the other is formed with a concave portion into which the convex portion is fitted. The brush cleaning apparatus according to claim 1.

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