KR101499595B1 - Brush cleaning apparatus - Google Patents

Abstract

An object of the present invention is to provide a brush cleaning apparatus capable of reliably and rotatably supporting one end and the other end of a brush shaft of a roll brush without applying stress to the brush shaft.

The present invention is a brush cleaning apparatus having a pair of roll brushes (14, 15) provided with a brush portion (34) on a brush shaft (31) and cleaning the substrate conveyed in a predetermined direction through a pair of roll brushes ,

A radial bearing for rotatably supporting one end of the brush shaft; A rotary drive source connected to one end of a brush shaft rotatably supported by the radial bearing and rotatingly driving the brush shaft; And a pair of support rollers 45 for rotatably supporting the outer circumferential surface of the other end of the brush shaft by point contact with the convex curved surface.

Description

BRUSH CLEANING APPARATUS

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a brush cleaning apparatus for performing a brush cleaning process on a substrate conveyed in a predetermined direction by a pair of roll brushes.

A circuit pattern is formed on a glass substrate used for a liquid crystal display device. In order to form a circuit pattern on a substrate, a lithography process is employed. As is well known, the lithography process applies a resist to the substrate, and irradiates the resist through a mask having a circuit pattern formed thereon.

Next, a portion of the resist not irradiated with light or a portion irradiated with light is removed, and a portion where the resist is removed is etched. Then, a circuit pattern is formed on the substrate by repeating a series of steps of removing the resist from the substrate after etching a plurality of times.

Such a lithography process requires a step of treating the substrate with a treatment liquid such as a developing solution, an etching solution or a removing solution for removing the resist after etching, and a step of cleaning the substrate with a cleaning liquid after treatment with the treatment liquid .

In the cleaning step of cleaning the substrate, for example, in the case of cleaning and removing the treatment liquid attached to the substrate, the cleaning liquid is sprayed to the substrate conveyed into the treatment tank by the shower nozzle, can do.

However, in the case where contamination of particles or the like is firmly adhered to the substrate, it is not possible to surely clean and remove the contamination only by spraying the cleaning liquid on the substrate. Therefore, in such a case, the substrate conveyed into the treatment tank is cleaned by the roll brush.

The roll brush includes a brush shaft, and a brush portion provided with a brush sole is provided at a portion excluding both ends of the brush shaft. A support shaft is connected to both ends of the brush shaft through a coupling. Each of the pair of support shafts is rotatably supported on the bearing body. Each of the bearing bodies is fixed to a mounting portion such as a support provided in the cleaning tank.

In recent years, the substrate tends to be large. When the substrate is enlarged, the roll brush is elongated according to the width dimension of the substrate. When the roll brush is elongated, the interval between the pair of bearing bodies for rotatably supporting the support shaft connected to both ends of the brush shaft becomes large.

When the gap between the pair of bearing bodies becomes large, it becomes difficult to mount the bearing bodies with their axial centers aligned with high accuracy. If the shaft centers of the pair of bearing bodies are not coincident with each other with a high precision, the roll brush supported by these bearing bodies is not smoothly rotated, and the support shaft or the bearing body is quickly damaged.

Thus, as shown in Patent Document 1, the frame on which the roll brush is supported is provided with a first mounting portion and a second mounting portion which are located on the same vertical plane and which have flat surfaces spaced apart from each other at a predetermined interval in the horizontal direction. The first mounting portion and the second mounting portion are provided with a pair of first bearing bodies for rotatably supporting support shafts provided at both ends of the brush shaft of the upper roll brush and a pair of support shafts provided at both ends of the brush shaft of the lower roll brush And a pair of second bearing members for supporting the first bearing member.

[Patent Document 1] Japanese Patent Application Laid-Open No. 2006-116465

However, according to the conventional technique shown in Patent Document 1, the first mounting portion and the second mounting portion for mounting the first bearing body and the second bearing body are positioned on the same vertical plane, It must be installed in the frame to be spaced apart.

However, if the first mounting portion and the second mounting portion provided on the frame are displaced from the same vertical plane, deviation occurs in the axial centers of the pair of first bearing bodies and second bearing bodies mounted on the respective mounting portions.

When the support shaft provided at both ends of the brush shaft is supported by these bearing bodies, the first bearing body and the second bearing body are supported by the first bearing body and the second bearing body Stress is applied to the supported support shaft or brush shaft.

When the roll brush is rotationally driven for a long time in a state in which stress is applied to the support shaft or the brush shaft, cracks are generated in the support shaft or the brush shaft due to the stress, There is a concern. Further, the stress generated in the support shaft or the brush shaft acts on the bearing body, which may cause the bearing body to be damaged soon.

The present invention provides a brush cleaning device that does not generate stress on the brush shaft of the roll brush even if the positions of supporting the one end and the other end of the brush shaft are not coincident with each other with high accuracy.

The present invention relates to a brush cleaning apparatus for cleaning a substrate conveyed in a predetermined direction through a pair of roll brushes, the brush cleaning apparatus comprising a pair of roll brushes provided with brush portions on the brush shaft, wherein one end of the brush shaft is rotatably supported A radial bearing,

A rotary drive source connected to one end of the brush shaft rotatably supported by the radial bearing and rotatingly driving the brush shaft,

The outer peripheral surface of which is formed into a convex curved surface and which is rotatably supported by point contact with the outer peripheral surface of the other end of the brush shaft by the curved surface,

The brush cleaning apparatus according to claim 1,

According to the present invention, one end portion of the brush shaft of the roll brush is rotatably supported by a radial bearing, and the other end portion is supported by the convex curved surface of the pair of support rollers in point contact with the outer peripheral surface. Even if there is a deviation in the horizontal direction or in the vertical direction between the pair of right and left support positions to be supported, this deviation is alleviated by the support structure of the support rollers at the other end.

This prevents damage to the brush shaft and damage to the radial bearing which rotatably supports one end of the brush shaft, because stress is prevented from being generated in the brush shaft of the roll brush supported rotatably.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings.

Fig. 1 is a vertical cross-sectional view showing a horizontal brush-cleaning apparatus. The brush-cleaning apparatus has a treatment tank 1. Fig. As shown in Fig. 2, a conveying mechanism 3 comprising a plurality of conveying rollers 2 is provided in the treatment tank 1. As shown in Fig. These conveying rollers 2 are rotationally driven in a predetermined direction by a driving mechanism (not shown).

An inlet 4 is formed at one end of the treatment tank 1 and a glass substrate W used for a liquid crystal display panel or the like is introduced into the treatment tank 1 from the inlet 4. The substrate W carried into the treatment tank 1 is conveyed by the conveying roller 2 which is rotationally driven and is taken out from the exit 5 formed at the other end of the treatment tank 1. [

As shown in Fig. 1, the treatment tank 1 is configured such that the opening 7 formed in the upper surface thereof can be opened and closed by the cover body 6. [ Two brush units 11 (shown in Fig. 2) for brush-cleaning the substrate W conveyed by the conveying roller 2 in the treatment tank 1 are provided in the treatment tank 1 in the conveying direction of the substrate W As shown in FIG. The bottom of the treatment tank 1 is connected to the waste liquid tank 9 through a liquid discharge pipe 8.

As shown in Figs. 3 to 5, the brush unit 11 is constructed such that one end and the other end in the axial direction of the brush unit 11 are supported by the first support 12 and the second support 13 parallel to each other And an upper roll brush 14 and a lower roll brush 15 are provided.

Each support 12, 13 is provided with a rectangular base plate 17. On the upper surface of the base plate 17, a guide member 18 having a "U" -shaped cross section constituting the first guide means and the second guide means, respectively, is provided. As shown in Figs. 6 and 7, linear guide rails 19 are provided in the upper part of the inner surface of each guide member 18 along the vertical direction.

The first upper movable body 21 and the first lower movable body 22 are vertically movable and the second upper movable body 23 and the second upper movable body 23 are provided on the first support body 12, And the second lower movable body 24 is provided so as to be movable in the vertical direction.

Each of the movable members 21 to 24 is provided with a slider 25 slidably engaged with the linear guide rail 19. Each slider 25 is provided with a mounting plate 26 whose plate surface is vertical. 6, the first upper movable body 21 and the mounting plate 26 of the first lower movable body 22 are provided with a pair of radial bearings 28 (only the first upper movable body 21 Are provided so as to be aligned in the horizontal direction. A pair of radial bearings (28) are covered by a cover (29). 6 shows a state in which the first lower movable body 22 is covered by the cover 29 and the first upper movable body 21 is separated from the cover 29. [

4 and 5 show a state in which the first upper movable body 21 and the first lower movable body 22 are covered with the cover 29, respectively.

Each pair of radial bearings 28 provided on the mounting plate 26 of each of the first upper movable body 21 and the first lower movable body 22 is provided with an upper roller brush 14 and a lower roller brush 15 A first support shaft 33 connected to one end of the brush shaft 31 so as to be detachable by a coupling 32 described later is rotatably supported.

The outer circumferential surfaces of the brush rollers 14 and 15 excluding the opposite ends of the brush shaft 31 are formed by winding a support member holding the brush brush thereon in a threaded manner to form the brush part 34 Is formed.

The first support shaft 33 of the upper roll brush 14 is connected to the rotation shaft 36 of the first rotation drive source 35 provided at the widthwise end of the mounting plate 26 by a coupling 37 . The first support shaft 33 of the lower roll brush 15 is similarly rotated by the rotation shaft 39 of the second rotation drive source 38 provided below the first rotation drive source 35 at the widthwise end of the mounting plate 26 ) By a coupling (41).

7, a first supporting shaft 33 is connected to one end of the brush shaft 31 at the other end of the brush shaft 31 of the upper roll brush 14 and the lower roll brush 15, And the second support shaft 42 is connected and disconnected by a coupling 32 having the same structure as the first support shaft 32.

The second support shaft 13 of the upper roll brush 14 and the lower roll brush 15 are connected to the second upper movable body 23 and the second lower movable body 24 provided on the second support body 13, And is rotatably supported.

That is, a pair of columnar mounting members 43 are mounted on the mounting plate 26 of the second upper movable body 23 and the second lower movable body 24 in the horizontal (vertical) direction orthogonal to the axial line of the roll brushes 14, 15 As shown in Fig. Each of the mounting members 43 is provided with a mounting shaft 44 with its axis parallel to the axis of each of the roll brushes 14 and 15 and a supporting roller 45 is rotatably mounted .

As shown in Fig. 13, the outer peripheral surface of the support roller 45 is formed by a convex curved surface 46 curved in the width direction. The second support shaft 42 is rotatably supported by point convex surfaces 46 of the pair of support rollers 45 by point contact. As a result, the second support shaft 42 can move in the axial direction with respect to the pair of support rollers 45, and can swing with respect to the direction crossing the axial direction.

The pair of mounting members 43 are mounted on the upper portion of the second supporting shaft 42 supported by the pair of supporting rollers 45 such that the lateral members 48 can be attached and detached with screws . A pressure roller 49 for preventing the second support shaft 42 supported by the pair of support rollers 45 from rising from the support roller 45 is supported on the screw shaft 51 As shown in Fig. That is, the pressing roller 49 is not in contact with the outer circumferential surface of the second supporting shaft 42, but the second supporting shaft 42 is supported by the supporting roller 45 by the weight of each of the roll brushes 14, Is prevented.

The first support shaft 33 is rotatably supported by the radial bearing 28 and the second support shaft 42 is rotatably supported by the pair of support rollers 45. [ 14 and the lower roll brush 15 are respectively driven to rotate by the operation of the first rotation drive source 35 and the second rotation drive source 38. [

Each of the couplings 32 connecting the first support shaft 33 and the second support shaft 42 to one end and the other end of the brush shaft 31 has the structure shown in Fig. A flange 52 having an external dimension such as a brush shaft 31 is provided at the tip of the first and second support shafts 33 and 42 connected to one end of the brush shaft 31. [ The flange 52 is formed by drilling a plurality of, for example, four through-holes 53 (only two are shown) at predetermined intervals in the circumferential direction. A disk-shaped convex portion 54 is provided on an end face connected to one end face of the brush shaft 31 of the flange 52.

The brush shaft 31 has a concave portion 55 at which the convex portion 54 is fitted and a plurality of screw holes 56 at the peripheral portion of the concave portion 55 corresponding to the through hole 53 have. The first and second support shafts 33 and 42 are formed by fitting the convex portion 54 of the flange 52 to the concave portion 55 of the brush shaft 31, And is connected to the one end surface of the screw hole 31 so as to be mounted and detached from the through hole 53 by screwing the connection screw 57 as the engaging means into the screw hole 56. [

According to such a connection structure, the connecting direction of the flange 52 with respect to the brush shaft 31 by the connecting screw 57 is orthogonal to the vibration direction applied to the brush shaft 31 when cleaning the substrate W, Since the convex portion 54 provided on the flange 52 is fitted in the concave portion 55 provided on the brush shaft 31, vibration caused on the brush shaft 31 by this connection structure is transmitted to the brush shaft 31 31 and the connecting portion of the first supporting shaft and the second supporting shaft 33 and 42. [

Since the upper roll brush 14 and the lower roll brush 15 have a large weight due to the elongation, the separation jig 58 shown in Figs. 14 to 16 is formed from the first and second supports 12 and 13 As shown in FIG. The separation jig 58 includes a hanger shaft 59 and a hook 61 provided at both ends of the hanger shaft 59 and adapted to be mounted and detached at both ends of the brush shaft 31, .

When the hook 61 is engaged with both ends of the brush shaft 31 of the upper roll brush 14, hooks (not shown) of the chain block are engaged with the suspending shaft 59, The connection screw 57 having the flange 52 of the support shaft 33 as one end of the brush shaft 31 is separated and the first support shaft 33 is disassembled from the brush shaft 31. [

Then, when the transverse member 48 provided with the pressure roller 49 holding the second support shaft 42 from the support roller 45 is separated from the mounting member 43, the chain block is wound up The upper roll brush 14 can be separated from the pair of supports 12 and 13 by lifting up the upper roll brush 14 by the separating jig 58. [

After separating the upper roll brush 14, the lower roll brush 15 can likewise be separated from the pair of supports 12, 13. Thus, even if the upper roll brush 14 and the lower roll brush 15 are elongated and become heavy, the repair and replacement work of the roll brushes 14 and 15 can be easily performed.

The substrate W is conveyed between the upper roll brush 14 and the lower roll brush 15. The gap between the upper roll brush 14 and the lower roll brush 15 is set by driving the roll brushes 14 and 15 in the vertical direction by the up-down driving means 63 in accordance with the thickness of the substrate W, .

Since the first and second movable bodies 21 and 22 provided on the first support body 12 are driven to move up and down along the guide member 18 in the up-and-down driving means 63, When the movable body 21 and the first lower movable body 22 move up and down, the up and down movement of the movable body 21 is transmitted to the second upper movable body 23 provided on the second support body 13 by the power transfer means 64, 2 lower movable body 24, as shown in Fig.

8 and 9, the upper and lower drive means 63 is provided with the upper and lower drive sources 65 provided on the lower surface of the base plate 17 of the first support body 12 and the upper and lower drive sources 66 do. One end of the first camshaft 67 is connected to the rotation shafts 65a and 66a of the respective driving sources 65 and 66, respectively. Each of the first camshafts 67 is rotatably supported by a pair of bearing members 70 provided on the lower surface of the base plate 17.

A pair of first cam shafts (67) is provided with a first rotating cam body (68). 11, an annular concave portion 71 is formed on one side surface of the semicircular body 69 so that the outer circumferential surface of the semicircular body 69 faces the cam surface 72 ) Is formed on the outer circumferential surface.

A cam follower 76 rotatably installed at the lower end of the first driving member 75 is engaged with the cam surface 72 of the pair of first rotating cams 68. The interval between the inner circumferential surface of the concave portion 71 and the cam surface 72 is set to be substantially equal to the outer dimension of the cam follower 76. [

The contact state between the outer peripheral surface of the cam follower 76 and the cam surface 72 is maintained without being separated so that the first drive member 75 provided with the cam follower 76 is restricted from moving freely in the vertical direction .

8, a pair of first driving members 75 protrude from the opening 17a formed in the base plate 17 toward the upper surface of the base plate 17. As shown in Fig. The upper end of one first driving member 75, which moves up and down in association with the rotation of the first rotating cam body 68 rotated by the upper and lower driving source 65, The upper end of the other first driving member 75, which is connected to the movable body 21 and moves up and down in association with the rotation of the first rotating cam body 68 which is rotationally driven by the lower upper and lower driving source 66, 1 lower movable body 22, as shown in Fig.

Therefore, when the first rotating cam body 68 is rotationally driven by the upper and lower driving source 65, the first upper movable body 21 is rotated by the rotation of the linear guide 19 provided on the first supporting body 12 When the first rotary cam body 68 is rotationally driven by the lower / upper drive source 66, the first lower movable body 22 is rotated in the upward or downward direction by this rotation, So that it can be driven in the downward direction.

Up and down movement of the first upper movable body 21 and the first lower movable body 22 is achieved by the second upper movable body 23 provided on the second support body 13 by the power transmitting means 64, And is transmitted to the movable body 24. The second upper movable body 23 and the second lower movable body 24 provided on the second support body 13 are moved up and down by the first upper movable body 21 and the first lower movable body 22 So that they can be interlocked.

The power transmitting means 64 has a pair of interlocking shafts 78 connected to the other end of the pair of first camshafts 67 so that one end thereof can be attached and detached by a coupling 77. As shown in FIG. 10, one end of the second camshaft 79 is detachably connected to the other end of each interlocking shaft 78 by a coupling 80. A pair of second camshafts 79 are provided with a second rotating cam body 81, respectively. Since the second rotation cam body 81 has the same structure as the first rotation cam body 68 shown in Fig. 11, the description is omitted.

The second camshaft 79 is rotatably supported by a pair of bearing members 82 provided on the lower surface of the base plate 17 of the second support body 13. A cam follower 84 rotatably installed at the lower end of the second driving member 83 (shown in Figs. 4 and 5) is engaged with the cam surface 72 of each second rotating cam body 81.

A pair of second driving members 83 protrude from the opening 17a (shown in Fig. 10) formed in the base plate 17 to the upper surface side. As shown in Figs. 4 and 5, one of the second driving members (first and second driving members) that is vertically driven by the second rotating cam body 81 on the side of one interlocking shaft 78 that is rotationally driven by the upper and lower driving source 65 83 are connected to the second upper movable member 23 and the upper end of the other second driving member 83 is connected to the second lower movable member 24. [

That is, when the upper and lower driving source 65 and the lower and upper driving source 66 are operated to rotate the first camshaft 67, the rotation thereof is transmitted to the second camshaft 79 via the interlocking shaft 78 , The first rotating cam body (68) and the second rotating cam body (81) rotate together.

The first drive member 75 and the second drive member 83 interlock with each other by the cams 68 and 81 to rotate the first and second rotary cams 68 and 81 in the vertical direction The first upper movable body 21, the second upper movable body 23, the first lower movable body 22, and the second lower movable body (not shown) provided on the first support body 12 and the second support body 13, 24 are moved up and down in association with each other.

Therefore, the upper roll brush 14 and the lower roll brush 15 are moved up and down in a horizontal state in association with the vertical movement of the pair of upper movable bodies 21, 23 and the lower movable bodies 22, 24 .

10, a pair of second camshafts 79 is provided with a drive rotary gear 86, and the rotation of these drive rotary gears 86 is transmitted to the driven rotary gear 87. As shown in Fig. The driven rotary gear 87 is provided on a support shaft 88 which is rotatably supported on the lower surface of the base plate 17 of the second support body 13. [ A plurality of angle detecting discs 89 are provided on the support shaft 88 at predetermined intervals. Notches (not shown) are formed in each of the angle detection discs 89. Each of the angle detection discs 89 is provided on the support shaft 88 so that the respective notches are angularly deviated in the peripheral direction.

The base plate 17 is provided with four detection sensors 90 for detecting the notches of the respective angle detection discs 89 against the respective angle detection discs 89. These detection sensors 90 are arranged such that the second camshaft 79 rotates and this rotation is transmitted to the support shaft 88 via the drive rotation gear 86 and the driven rotation gear 87, The rotation angle of the second camshaft 79 at that time is detected by one detection sensor 90 which detects the notch of the angle detection disc 89. That is, The rotation angles of the pair of first camshafts 67 rotationally driven by the upper and lower drive sources 65 and the lower and upper drive sources 66 are detected through the interlocking shafts 78 connected to the camshafts 79.

The upper and lower driving source 65 and the lower and upper driving source 66 are driven by a detection signal from the detecting sensor 90. [ The positions of the upper roll brush 14 and the lower roll brush 15 in the vertical direction, that is, the distance between the upper roll brush 14 and the lower roll brush 15, can be set by the thickness of the substrate W, .

3, the lower surfaces of the base plate 17 of the first support body 12 and the second support body 13 are covered by the lower cover 91 and the upper surface of the base plate 17 is covered by the upper cover 92 have. As a result, various components provided on the lower surface and the upper surface of the base plate 17 are covered and are not seen.

As shown in Fig. 2, the cleaning liquid is supplied to the upper surface of the upper roll brush 14 or the substrate W to be cleaned by the nozzle body 93. 3 to 5, the supplied cleaning liquid is supplied to the first and second support shafts 33 and 42 connected to one end and the other end of the brush shaft 31 of each of the roll brushes 14 and 15, There is provided a pair of liquid stoppers 94 which are transmitted to the support shafts 33 and 42 to prevent them from flowing outside the treatment tank 1.

The first support shaft 33 provided at one end of the brush shaft 31 of the upper roll brush 14 is connected to the rotation shaft 36 of the first rotation drive source 35, And the second support shaft 42 provided at the other end is supported in point contact by the convex curved surface 46 of the pair of support rollers 45 provided on the second upper movable body 23. [

Similarly, the first support shaft 33 provided at one end of the brush shaft 31 of the lower roll brush 15 is connected to the rotation shaft 39 of the second rotation drive source 38, and the second support shaft 32 42 are supported in point contact by the convex curved surface 46 of a pair of support rollers 45 provided on the second upper movable body 23. [

Therefore, even if the position for supporting the first support shaft 33 at one end of each brush shaft 31 and the second support shaft 42 at the other end is shifted in the horizontal direction or the vertical direction, Contact with the convex curved surface 46 of the pair of support rollers 45, the second support shaft 42 is displaced and alleviated due to the displacement.

In other words, the second support shaft 42 is supported so as to swing with respect to the horizontal direction and the vertical direction with the point of contact with the convex curved surface 46 of the pair of support rollers 45 as a fulcrum. Therefore, even if there is a shift in the position at which the first support shaft 33 at one end of each brush shaft 31 and the second support shaft 42 at the other end are displaced, the misalignment occurs because the second support shaft 42 swings The stress is not applied to the brush shaft 31 of each of the roll brushes 14 and 15 to which the first and second support shafts 33 and 42 and the support shafts 33 and 42 are connected do.

Therefore, even if each of the roll brushes 14 and 15 is rotationally driven for a long time, the brush shaft 31 and the first and second support shafts 33 and 42 are cracked due to stress, The radial bearing 28 supporting the first support shaft 33 is not damaged in the early stage.

A first upper movable body 21 that supports a first support shaft 33 at one end of the brush shaft 31 of the upper roll brush 14 and a second upper movable body 21 that supports the other end of the brush shaft 31 of the lower roll brush 15 When the first lower movable body 22 supporting the first support shaft 33 is moved up and down along the linear guide rail 19 of the guide member 18, The second upper movable body 23 and the second lower movable body 24 which are rotatably supporting the second support shaft 33 connected to the other end of the brush shaft 31 of the roll brushes 14 and 15 are interlocked .

The first support shaft 33 and the second support shaft 42 provided at one end and the other end of the brush shaft 31 of the upper roll brush 14 and the lower roll brush 15 are arranged in the same vertical direction It is possible to horizontally move the upper roll brush 14 and the lower roll brush 15 up and down.

That is, when adjusting the distance between the upper roll brush 14 and the lower roll brush 15, it is possible to move the roll brushes 14 and 15 horizontally up and down, so that the gap is uniformly distributed over the entire axial length It becomes possible to set it. That is, the upper roll brush 14 and the lower roll brush 15 can be moved up and down in parallel.

Up and down driving of the upper roll brush 14 and the lower roll brush 15 is performed by driving the pair of first rotating cams and the pair of second rotating cams 68 and 81 to the upper and lower driving source 65 and the lower and upper driving source 66 ). The cam follower 76 engaged with the cam surfaces 72 of the first and second rotating cams 68 and 81 is rotated by the first and second driving members 75 and 75, The first and second movable bodies 21 and 22 and the first and second movable bodies 22 and 24 are moved up and down by the first and second movable bodies 83 and 83, .

The cam surfaces 72 of the first and second rotating cams 68 and 81 are formed by the recesses 71 and the cam followers 76 are inserted into the recesses 71 to be engaged with the cam surfaces 72 It has been hooked. Since the dimension along the radial direction of the concave portion 71 and the outer diameter dimension of the cam follower 76 are set to be substantially equal to each other, the contact state between the cam follower 76 and the cam surface 72 is reliably maintained .

That is, when cleaning the upper roll brush 14 and the lower roll brush 15 through the substrate W, the force to push up the upper roll brush 14 and the lower roll brush 15, particularly, the upper roll brush 14 The cam follower 76 rises from the cam surface 72 and the first upper movable body and the second upper movable body 21 and 23, that is, the upper roll brush 14, It does not matter.

As a result, the interval between the upper roll brush 14 and the lower roll brush 15 is always kept constant, so that it is possible to surely clean the substrate W by these roll brushes 14, 15. [

Each of the roll brushes 14 and 15 has a first support shaft 33 detachably connected to one end of the brush shaft 31 and a second support shaft 42 detachably connected to the other end thereof, 1 support shaft 33 is rotatably supported by the radial bearing 28 and the second support shaft 42 is rotatably supported by the support roller 45. [

The first and second support shafts 33 and 42, which are rotatably supported, can be consumed by long-term use. Therefore, the first and second support shafts 33 and 42 can be disassembled so that they can be replaced when consumed. If the first support shaft and the second support shaft 33 and 42 are detachably connected to the brush shaft 31, the vibrations applied to the connection portion and the roll brushes 14 and 15 can be amplified There is a concern.

However, the connection structure of the first and second support shafts 33 and 42 and the brush shaft 31 is such that the flange 52 is provided on the support shafts 33 and 42, So as to be brought into contact with the end surface of the shaft 31 and to be coupled by the screw 51. A convex portion 54 is formed in the flange 52 and a concave portion 55 is formed in the end surface of the brush shaft 31 to which the convex portion 54 is coupled.

That is, the flange 52 of the brush shaft 31 and the support shafts 33 and 42 is formed by the engagement of the screw 51 and the convex portion 54 with the concave portion 55, Even when the roll brushes 14 and 15 oscillate in the radial direction during the cleaning of the substrate W, the vibration is transmitted to the brush shaft 31 and the support shafts 33 and 42 in the axial direction Can be prevented from being amplified by the coupling portion connected to the signal line.

In the above-described embodiment, the second support shaft supported by the pair of support rollers is prevented from being lifted from the support roller by the pressurizing roller. However, since the roll brush is long, the weight is increased, It is possible to prevent floating due to the impact.

1 is a longitudinal sectional view of a brush cleaning apparatus incorporating a brush unit according to an embodiment of the present invention.

2 is a schematic configuration diagram of the brush cleaning apparatus.

3 is a perspective view of the brush unit as viewed from the oblique upper side.

4 is a perspective view of the brush unit as viewed from the obliquely lower side.

5 is a perspective view of a brush unit in which a cover is separated from a pair of supports as viewed from the lower side of the inclination.

6 is a perspective view showing a support structure of a first support shaft connected to one end of a brush shaft of a pair of roll brushes.

7 is a perspective view showing a support structure of a second support shaft connected to the other end of the brush shaft of the pair of roll brushes.

8 is a perspective view showing a first upper movable body provided on a first support body and an up-down drive means for vertically driving the first lower movable body.

9 is an enlarged perspective view of the up-and-down driving means.

10 is an enlarged perspective view of a portion of the second support body where the second rotating cam body is installed;

11 is a front view showing the first rotating cam body and the second rotating cam body.

12 is a view showing a connection structure between a brush shaft and a support shaft.

13 is a cross-sectional view of a support roller for supporting a second support shaft;

14 is a perspective view of the upper roll brush when the separating jig is used to remove the upper roll brush.

15 is a perspective view showing a state in which a hook of a separating jig is engaged with one end of a brush shaft.

16 is a perspective view showing a state in which the hook of the separating jig is engaged with the other end of the brush shaft.

[Description of Symbols]

11: Brush unit

12: first support

13: second support

14: Upper roll brush

15: Lower roll brush

21: first upper movable body

22: first lower movable body

23: second upper movable body

24: second lower movable member

28: Radial bearing

31: Brush shaft

32: Coupling

33: first support shaft

34: Brush part

35:

38: second rotation drive source

42: Support shaft

45: Support roller

46: convex surface

49: Pressure roller

63: Up and down drive means

64: Power transmission means

65: upper and lower driving source

66: Lower and upper driving source

68: first rotating cam body

71:

72: cam face

73: cam portion

75: first drive member

76: Cam Follower

78: Interlocking shaft

81: the second rotation cam body

Claims (5)

A brush cleaning apparatus comprising a pair of roll brushes provided with brush portions on a brush shaft and cleaning a substrate conveyed in a predetermined direction through the pair of roll brushes, A radial bearing for rotatably supporting one end of the brush shaft, A rotation driving source connected to one end of the brush shaft rotatably supported by the radial bearing, for rotating the brush shaft; A pair of support rollers which are formed in a convex curved surface on the outer circumferential surface and on an outer circumferential surface of the other end of the brush shaft on the curved surface, . The method according to claim 1, The radial bearings rotatably supporting one end of the brush shaft of the pair of roll brushes are respectively provided on the first movable body and the pair of first movable bodies are provided so as to be movable in the vertical direction by the first guide means , A pair of support rollers rotatably supporting the other end of the brush shaft are respectively provided on the second movable body and the pair of second movable bodies are provided so as to be movable in the up and down direction by the second guide means, Wherein the pair of first movable bodies are driven in the vertical direction along the first guide means by up-and-down driving means, respectively, and the second movable bodies of the second movable bodies corresponding to the respective first movable bodies And the up-and-down movement by the means is interlocked with the up-and-down movement of each of the first movable bodies by the power transmission means. 3. The method of claim 2, The power transmitting means includes: An interlocking shaft disposed in parallel with an axis of the roll brush, An interlocking drive source for rotatingly driving the interlocking shafts, A first rotating cam provided on a portion of the interlocking shaft corresponding to one end of the brush shaft of the roll brush, A second rotating cam body provided at a portion of the peristaltic shaft corresponding to the other end of the brush shaft of the roll brush, And a cam follower provided at a lower end thereof to abut against a cam surface formed on the first rotating cam body and the second rotating cam body, respectively, and an upper end connected to the first movable body and a second movable body, And a pair of driving members that are vertically moved by being rotationally driven by the interlocking drive source together with the shaft, . The method of claim 3, Wherein the rotating cam body has a semicircular body and a cam portion formed on one side of the semicircular body and having a cam surface on an outer circumferential surface thereof by a concave portion. The method according to claim 1, Wherein at least one end of the brush shaft to which the rotation drive source is connected is detachably connected to the support shaft by a coupling, The coupling has a flange having the same diameter as that of the brush shaft provided at the end of the support shaft, and the flange is mounted and fixed to the end surface of the brush shaft by a coupling means, Wherein a convex portion is formed on one of an end face of the flange and an end face of the brush shaft on which the flange is mounted and fixed and a concave portion on which the convex portion is fitted is formed on the other side.

Images