JP2005191216A - Substrate processing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus which can absorb larger deviation angle of a rotating axis. <P>SOLUTION: The substrate processing apparatus (substrate cleaning apparatus) is provided with rotating axes (a drive axis 7 and a driven axis 9) which are driven to rotate with the predetermined drive source, and a brush 8 which is pivottaly supported with rotating axes to rotate for processing the substrate by applying the relevant rotating brush 8 to the substrate transferred in the predetermined direction. This substrate processing apparatus is further provided with a universal joint means (joint 100) for coupling the rotating axes and the brush 8. This universal joint means is provided with a driving force transmitter (formed of projected part 72 and slit 83) for transmitting the rotational driving force to the brush 8 from the rotating axes, and a supporting part (formed of a spherical body 71 and an engagement body 81) for turnably supporting the rotating axes and brush 8 at least in the cross direction within the plane crossing in orthogonal the axial directions with each other. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a substrate processing apparatus for processing a substrate by applying a rotating body such as a cylindrical body rotated around a predetermined axis center to the substrate, and more particularly to a glass substrate or a semiconductor wafer for FPD (Flat Panel Display). The present invention relates to a substrate processing apparatus such as a substrate cleaning apparatus for cleaning a substrate such as a roll brush or a rubbing apparatus for rubbing a glass substrate for a liquid crystal display with a rubbing roller.

  Conventionally, a predetermined axis such as a cleaning device for cleaning a substrate such as a glass substrate for FPD or a semiconductor wafer with a roll brush, or a rubbing device for rubbing a glass substrate (surface alignment film) for a liquid crystal display with a rubbing roller. 2. Description of the Related Art There is known a substrate processing apparatus that processes a substrate by causing a cylindrical body (corresponding to the roll brush or rubbing roller described above) that is rotationally driven around the center to act on the substrate.

  In general, in a substrate processing apparatus, for example, as shown in FIG. 18, the shaft (here, the brush shaft 182 for the roll brush 181) is connected to a driving source (for example, a driving motor 184) and a processing tank 183. Since a bearing member (for example, bearings 185 and 186) is disposed, the structure is attached so as to penetrate through the inside of the processing tank 183 (for example, Patent Document 1).

The brush shaft 182 has a fixed end at one end and a free end at the other end in order to absorb elongation (axial elongation) due to thermal expansion of the brush shaft 182 (shaft). The drive side (drive motor 184 side) is fastened and fixed by a drive shaft of the drive motor 184 and a coupling 187 (joint), and is supported by a bearing 185, and the driven side of the brush shaft 182 is It is supported by a bearing 186.
JP-A-8-243511

  By the way, the brush shaft 182 may be “swayed” during rotational driving. When vibration occurs, for example, the roll brush 181 does not act evenly on the substrate, that is, for example, the hair of the roll brush 181 does not contact the substrate surface evenly, resulting in uneven cleaning. In response to this “runout”, the driven side of the brush shaft 182 employs, for example, an automatic centering bearing as the bearing 186, so that the deflection angle due to the runout (the angle of the rotation center axis of the brush shaft 182 and the bearing 186 (185)). 19 can be absorbed, but the drive side is fixed by the drive motor 184 and the coupling 187 as described above. Is determined by the accuracy of these bearings 185, 186.

  On the other hand, it is required to suppress the vibration (vibration) so as not to cause the above declination. For example, an angular contact type bearing is used as the bearing 185 to increase rigidity. On the contrary, the tolerance of the declination (allowable declination) becomes small. Therefore, even if a deflection angle due to the shake of the brush shaft 182 occurs, it is difficult to absorb this, and misalignment occurs, that is, the two rotation center shafts such as the brush shaft 182 and the bearing 185 (186) are displaced. There is a problem that the shaft is shifted and noise (abnormal noise) is generated from the bearings or the bearings and shafts are damaged (worn). With regard to the allowance of this deflection angle, the shaft portions of both ends of the roll brush 181 on the brush shaft 182 are connected to a joint 190 (joint member 191 (192) as shown in FIG. 20, for example, with respect to the joint member 192 (191). It is conceivable to connect them with a universal joint that can rotate in the β cross direction with 193 and 194 as the rotation axis. However, such conventional joints include, for example, straight pins, half pins, caulking, and the like. Various pins 195 such as pins (or screws), or a rectangular parallelepiped top 196 sandwiched between two forks of the joint members 191 and 192 (the pins are inserted in the cross direction), a felt or an oil cap (not shown), etc. In this way, the number of parts increases, and it takes time to assemble and disassemble (attach and remove).

  The present invention has been made in view of the above problems, and has a simple configuration and can absorb a larger declination. As a result, generation of noise from a bearing or the like, or damage to a bearing or a rotating shaft ( It is an object of the present invention to provide a substrate processing apparatus capable of preventing wear.

  According to a first aspect of the present invention, a rotating shaft that is rotationally driven by a predetermined driving source, and a rotating body that is supported by the rotating shaft and rotates, the rotating rotating body is provided on a substrate that is conveyed in a predetermined direction. A substrate processing apparatus for performing substrate processing by acting, comprising universal joint means for connecting the rotary shaft and the rotary body, wherein the universal joint means transmits a rotational driving force between the rotary shaft and the rotary body. A substrate processing apparatus comprising: a driving force transmission unit configured to rotate; and a support unit configured to rotatably support the rotating shaft and the rotating body at least in a cross direction within a plane perpendicular to each other's axial direction. .

  Here, “supports rotatably in the cross direction” means that there are two shafts to be connected to each other, and when both shafts are connected, the rotation center lines of these two shaft bodies are linear. In other words, it means that the rotation center lines are allowed to cross each other at an angle in an arbitrary direction. That is, it means that one shaft body is rotatable with respect to the other shaft body in the vertical direction and the left-right direction (cross direction) with the shaft coupling portion as a base point.

  Since the universal joint means includes such a support portion and a driving force transmission portion, not only when the two rotation center lines are in a straight line state but also when they intersect at a certain angle. Rotational motion from one shaft body to the other shaft body can be transmitted.

  According to a second aspect of the present invention, in the substrate processing apparatus of the first aspect, a spherical body is provided at one end of the rotating shaft, and the spherical body is detachable and slidable at the end of the rotating body. The support portion is configured by providing a fitting body including a cylindrical space portion, and is configured to receive a protrusion portion projecting from an outer peripheral portion of the spherical body in a radial direction of the rotation shaft, The driving force transmitting portion is configured by a first slit portion formed in the fitting body.

  According to a third aspect of the present invention, in the substrate processing apparatus according to the second aspect, the fitting body is formed in a cylindrical shape, and a circumferential portion of the fitting body has an axial direction of the fitting body. A predetermined number of second slit portions formed and opened toward the front end side of the fitting body are formed.

  According to a fourth aspect of the present invention, in the substrate processing apparatus of the second or third aspect, the fitting body comprises an inner layer portion made of a resin material that is in sliding contact with the spherical body on the inner peripheral surface of the fitting body, and a metal material. It has a two-layer structure composed of an outer layer portion.

  According to a fifth aspect of the present invention, in the substrate processing apparatus according to the fourth aspect, the tip of the protrusion is tapered to prevent contact with the outer layer.

A sixth aspect of the present invention is the substrate processing apparatus according to any one of the second to fifth aspects,
The surface of the spherical body and the cylindrical space is covered with a coating material for reducing the friction coefficient in the sliding contact between the spherical body and the cylindrical space.

The invention according to claim 7 is the substrate processing apparatus according to any one of claims 2 to 6, wherein
The fitting body is detachably attached to the rotating body main body.

  The invention according to claim 8 is the substrate processing apparatus according to claim 7, wherein the fitting body has a flange portion formed on an outer peripheral portion on one end side, and the fitting body has a flange portion. And is screwed to the end face of the rotating body.

  According to a ninth aspect of the present invention, in the substrate processing apparatus according to the eighth aspect of the present invention, the concave and convex portions are formed on the end surfaces of the fitting body and the rotating body main body so as to obtain concentricity between the fitting body and the rotating body main body. Is formed.

  According to a tenth aspect of the present invention, in the substrate processing apparatus of the first aspect, a spherical body is provided at one end of the rotating shaft, and the spherical body is detachable and slidable at the end of the rotating body. The support portion is configured by providing a fitting body having a cylindrical space portion, and is an axial direction of the rotation shaft, cut out in an arc shape along the outer periphery of the spherical body, and the cut-out surface is The driving force transmitting portion is composed of a plurality of notched band portions formed in parallel with the radial direction of the rotation shaft, and an engaging surface portion that is engaged with the notched band portion and formed on the fitting body. It is characterized by being.

  The invention according to claim 11 is the substrate processing apparatus according to any one of claims 1 to 10, wherein the rotating shaft is provided in a pair with respect to one rotating body, and the rotating shaft is provided on both sides of the rotating body. It is connected to a rotating body by means of a universal joint means, and is characterized in that it comprises parallel moving means configured to be slidable parallel to at least one rotating shaft in the substrate transport direction.

  A twelfth aspect of the present invention is the substrate processing apparatus according to any one of the first to eleventh aspects, wherein the rotating shaft is provided in a pair with respect to one rotating body, and the rotating shaft is provided on both sides of the rotating body. It is connected to a rotating body by a universal joint means, and includes a vertical moving means configured to be able to slide each rotary shaft in a direction perpendicular to the substrate transport direction.

  According to the first aspect of the present invention, the universal joint means having the driving force transmitting portion and the support portion for connecting the rotating shaft and the rotating body in the apparatus is provided, and the rotating shaft and the rotation are rotated by the driving force transmitting portion. The rotational driving force between the bodies is transmitted, and the rotating shaft and the rotating body are respectively supported by the support portion so as to be rotatable in at least a cross direction in a plane orthogonal to the other axial direction. In this way, the rotational driving force between the rotating shaft and the rotating body is transmitted, and the rotating shaft and the rotating body are rotatably supported with respect to each other. Even if an angle occurs, the universal joint means can absorb this declination and, in turn, prevent misalignment between the rotating shaft and the bearing, thereby preventing noise from the bearing, etc. Or damage (wear) to the bearings and the rotating shaft can be prevented.

  According to the invention described in claim 2, the fitting body is provided with a spherical body at one end portion of the rotating shaft, and has a cylindrical space portion at which the spherical body is detachable and slidable at the end portion of the rotating body. A support portion that is provided and is in the radial direction of the rotation axis and protrudes from the outer peripheral portion of the spherical body; and a first slit portion that is formed in the fitting body that receives the protrusion portion Thus, a driving force transmission unit is configured. Thus, since the universal joint means is composed of a spherical body having a protrusion and a fitting body into which the spherical body is fitted, the universal joint means is referred to as a top (see a top 196 in FIG. 20). ), That is, a simple structure with a small number of parts, and the fitting body is detachable from the spherical body. For example, it is easy to remove and replace the rotating body from the apparatus. Will be able to do. In addition, by providing this universal joint means, it is not necessary to form a rotating body such as a roll brush integrally with the rotating shaft, so that the entire length of the shaft is increased, and in order to obtain runout accuracy and cylindricity. It is possible to prevent the unit unit price from becoming high.

  According to the third aspect of the present invention, a predetermined number of first parts formed in the axial direction of the fitting body and opened toward the distal end side of the fitting body are formed on the peripheral portion of the fitting body formed in a cylindrical shape. Two slit portions are formed. As a result, the spherical body can be fitted into the cylindrical space portion so as to push the fitting body in the radial direction, and the spherical body and the cylindrical space portion can be slidably contacted with each other without any gaps. The body can be pivotally supported with high accuracy, and the rotation shaft and the shaft misalignment between the rotation bodies can be prevented during rotation driving.

  According to the invention described in claim 4, the fitting body has a two-layer structure including an inner layer portion made of a resin material that is in sliding contact with the spherical body on an inner peripheral surface of the fitting body and an outer layer portion made of a metal material. Therefore, the strength of the fitting body is improved by the outer layer portion made of the metal material, and even when the inner layer portion made of the resin material is destroyed, it is possible to prevent the rotating body from falling off the rotating shaft. it can.

According to the fifth aspect of the present invention, since the tip of the protrusion is tapered to prevent contact with the outer layer, the protrusion can be prevented from contacting the outer layer. Further, contact between metal parts can be avoided, and generation of metal powder (particles) due to wear can be prevented.

  According to invention of Claim 6, since the surface of a spherical body and a cylindrical space part is coat | covered with the coating | covering material for the friction coefficient fall in the sliding contact between the said spherical body and a cylindrical space part, it is mutually spherical. Wear due to sliding contact with the body and the cylindrical space portion hardly occurs, and generation of metal powder can be prevented.

  According to the invention of claim 7, since the fitting body is detachably attached to the rotating body main body, the rotating body can be constituted by separate parts of the rotating body main body and the fitting body, For example, when replacing the rotating body (roll brush), it is not necessary to remove the entire rotating body (no need to remove many parts), and it is easy to separate only the connection point between the rotating body and the fitting body. The rotating body can be replaced, and the work time required to replace the rotating body can be shortened.

  According to the eighth aspect of the invention, the fitting body has a flange portion formed on the outer peripheral portion on one end side, and is configured to be screwed to the end surface of the rotating body main body using the flange portion. For example, when separating the rotating body main body (roll brush) and the fitting body, it is only necessary to release the screwing at the flange portion on the outer peripheral portion of the fitting body, that is, the portion for releasing the screwing is the outer peripheral portion. Therefore, the rotating body can be easily replaced and the working time required for the replacement can be further shortened.

According to the ninth aspect of the present invention, the end faces to be screwed in the fitting body and the rotating body main body are formed with the uneven portions (so-called inlay portions) so as to obtain concentricity between the fitting body and the rotating body main body. ,
The rotating body main body and the fitting body can be easily connected (screwed together) so as to be concentric (so as not to be decentered), and an axial shift can be prevented.

  According to the invention of claim 10, the fitting body is provided with a spherical body at one end portion of the rotating shaft, and has a cylindrical space portion at which the spherical body is detachable and slidable at the end portion of the rotating body. The support portion is provided and is formed in an axial direction of the rotating shaft, cut out in an arc shape along the outer periphery of the spherical body, and the cut-out surface is formed in parallel with the radial direction of the rotating shaft. The driving force transmitting portion is configured by the plurality of notched belt portions and the engaging surface portion that is engaged with the notched belt portion and formed in the fitting body. As described above, since the universal joint means is composed of a spherical body having a plurality of cut-out band portions and a fitting body into which the spherical body is fitted, the universal joint means is free from a piece or the like. That is, a simple structure with a small number of parts can be obtained, and the fitting body is detachable from the spherical body, so that only the rotating body can be easily detached from the apparatus and replaced. . In addition, by providing this universal joint means, it is not necessary to form a rotating body made of, for example, a roll brush or the like integrally with the rotating shaft, so that the entire length of the shaft is increased to obtain runout accuracy and cylindricity. It is possible to prevent the unit unit price from becoming high.

  In addition, the spherical body has no protrusions, or the fitting body is not formed with a slit part that engages with the protrusions, and the structure is simpler, resulting in malfunctions due to component damage, etc. Further, the probability of occurrence of metal powder does not occur, and sliding contact with the fitting body (sliding contact between the metal of the protrusion and the outer layer) does not occur due to the protrusion of the spherical body. Can be lowered.

  According to the eleventh aspect of the present invention, the rotating shaft is provided in a pair with respect to one rotating body, and the rotating shaft is connected to the rotating body on both sides of the rotating body by the universal joint means, and the parallel moving means. Thus, at least one of the rotation axes is configured to be slidable in parallel with the substrate transport direction. This makes it possible to arbitrarily change the rotation center axis direction of the rotator relative to the substrate transport direction, and when changing the rotation center axis direction of the rotator, the entire axis (for each rotator and rotation axis) ) It is not necessary to change the direction, and it is possible to simplify the structure of the apparatus and improve the working efficiency related to the change in the direction of the rotation center axis.

  According to the twelfth aspect of the present invention, the rotating shaft is provided in a pair with respect to one rotating body, and the rotating shaft is connected to the rotating body on both sides of the rotating body by the universal joint means, and the vertical moving means. Thus, each rotating shaft is configured to be slidable in a direction perpendicular to the substrate transport direction. Thereby, it becomes possible to arbitrarily change the rotation center axis direction of the rotating body with respect to the surface direction of the substrate, and when changing the axial direction of the rotating body, the direction of the entire shaft (for each rotating shaft and the rotating body) is changed. There is no need to change, and the apparatus structure can be simplified and the working efficiency related to the change in the direction of the rotation center axis can be improved. In addition, since each rotary shaft can be slid separately in the vertical direction with respect to the substrate, for example, a height position detecting means for detecting the height position of each rotary shaft, and the rotational speed of the drive source Load fluctuation detecting means for detecting a load fluctuation based on the change in the number of rotations, each rotating shaft is alternately moved up and down to cause the rotating body to act alternately on the substrate, and the rotation speed in that case changes It is possible to detect the height position of the rotating shaft and detect the position of the substrate (substrate contact surface) based on this detection.

  Hereinafter, a substrate cleaning apparatus as an example of a substrate processing apparatus according to the present invention will be described with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure has shown that it is the same structure.

  FIG. 1 is a perspective view schematically showing a substrate cleaning apparatus which is an example of a substrate processing apparatus according to an embodiment of the present invention. As shown in FIG. 1, the substrate cleaning apparatus 1 includes bases 2 and 3, support frames 4 and 5, a driving unit 6, a driving shaft unit 7 (rotating shaft), a brush unit 8 (rotating body), and a driven shaft unit 9. (Rotating shaft; the rotating shaft according to claim 1 shows the driving shaft portion 7 and the driven shaft portion 9. However, the rotating shaft is rotationally driven by a predetermined driving source in the driving shaft portion 7). Bearing units 10 and 11, elevating units 12 and 13, and position detection units 14 and 15 are provided.

  The bases 2 and 3 serve as pedestals for the so-called device that supports the entire device, and can change the distance between the support frames 4 and 5, that is, support the support frame 4 (5). The frame 5 (4) is configured to be slidable in the axial direction of the drive shaft portion 7 (driven shaft portion 9). The bases 2 and 3 are each composed of, for example, a substantially rectangular and flat upper substrate 21 and 31 and a lower substrate 22 and 32, and support and support the support frames 4 and 5 on the upper surfaces of the upper substrates 21 and 31. Yes. For example, cylindrical rollers 23 and 33 are provided between the upper substrates 21 and 31 and the lower substrates 22 and 32 and at, for example, four corner positions of the upper substrates 21 and 31.

  For example, two concave slide rails 24 and 34 extending in the axial direction are formed on the upper surfaces of the lower substrates 22 and 32, and the rollers 23 and 33 rotate in the slide rails 24 and 34, respectively. The upper substrates 21 and 31 are configured to be slidable relative to the lower substrates 22 and 32 by moving while moving.

  Further, the base 2 is provided with a predetermined mechanism for restricting (fixing) the sliding movement of the upper substrate 21 relative to the lower substrate 22, for example, a fixing member such as a screw with respect to the lower substrate 22 via the upper substrate 21. Are engaged or disengaged (removed), and a restricting portion 25 (contact portion) is provided for restricting whether or not the slide movement is possible (the restricting portion is similarly provided to the base 3 side). 35).

  In addition, as a structure which can be slidably moved, the roller 23 and the concave slide rail 24 (the roller 33 and the slide rail 34) may not be used. For example, the convex rail and a predetermined roller engaged with the rail Alternatively, it may be configured such as a rack and a gear meshing with the rack. Further, without using rollers or rollers, for example, concave and convex rail portions that engage with each other are formed on the opposing surface portions of the upper substrate 21 and the lower substrate 22 (upper substrate 31 and lower substrate 32). The lower substrates 22 and 32 may be configured to be slidable while being in sliding contact with each other. In addition to the rail portion as described above, for example, the upper substrate 21 (31) is provided with a predetermined guide member that sandwiches the lower substrate 22 (32) from both sides in the axial direction, thereby realizing the sliding movement. It may be a configuration.

  Further, the base 2 or 3 may be provided with a predetermined feed mechanism (not shown) that enables fine adjustment of the slide movement amount. The lower substrates 22 and 32 may be connected to each other or integrally formed. Further, one side of the bases 2 and 3, for example, the base 3, may be configured such that it cannot slide (for example, the upper substrate 31 and the lower substrate 32 are integrally formed or fixed to each other). In this case, the contact portion 35 is not provided on the base 3).

  The support frames 4 and 5 support the drive unit 6, the drive shaft unit 7, the brush unit 8, the driven shaft unit 9, and the bearing units 10 and 11. The support frames 4 and 5 are substantially U-shaped frames in a top view, which are formed on the bases 2 and 3 in the vertical direction and are formed by bending both ends in the vertical direction at right angles to the back surface. And the base end side (lower part) is fixed to the bases 2 and 3 (upper surface parts of the upper substrates 21 and 31). Each of the support frames 4 and 5 includes a pair of elevating rails 41 and 51. The elevating rails 41 and 51 support the bearing portions 10 and 11 so as to be movable up and down (sliding).

  The drive unit 6 is a drive source including a drive motor 61, and rotates the drive shaft unit 7 (the brush unit 8 and the driven shaft unit 9). One drive unit 6 is provided for each drive shaft unit 7. The drive shaft of the drive motor 61 in the drive unit 6 is connected to one end of the drive shaft unit 7 on the side opposite to a spherical body 71 (to be described later) and a predetermined coupling 62 (joint) and fixed to each other (note that The members attached to the drive unit 6 side in the coupling 62 are included in the drive unit 6). The drive motor (for example, DC motor) of the drive unit 6 is configured to be able to change the rotation speed (rotation driving force) according to the amount of electric power (current) applied thereto.

  Note that one drive motor 61 may not be provided for each drive shaft portion 7, for example, one main drive motor is provided and connected to each drive shaft portion 7 by a gear or the like. May be configured to be rotationally driven.

The drive shaft portion 7 is made of, for example, a predetermined metal material, is rotationally driven by the drive portion 6, and has a substantially cylindrical shape in external view that rotatably supports (supports) the brush portion 8 with respect to the drive shaft portion 7. It is a shaft body. A spherical body 71 provided with a protrusion 72 (described later) is formed (projected) at the center of the tip (tip surface) on the brush portion 8 side of the drive shaft portion 7. The base end side of the drive shaft portion 7 on the drive portion 6 side (the portion supported by the bearing portion 10) has a shaft diameter smaller than the shaft diameter on the distal end side of the drive shaft portion 7, for example. A pair of bearings 103 in the bearing unit 10 to be described later are fitted.

  The brush portion 8 has a channel brush in which a hair body made of a material such as nylon is implanted, and is wound spirally (spirally) around a predetermined shaft core, that is, has a high density over the circumferential direction of the shaft. Is a substantially cylindrical roll brush (so-called channel-type roll brush). The brush portion 8 includes a brush main body portion 80 composed of a shaft core and a roll brush (hair portion), and fitting bodies 81 at both ends of the brush main body portion 80. The fitting body 81 and a spherical body 71 described later constitute a connecting portion (hereinafter, this connecting portion is referred to as a joint portion 100) between the brush portion 8, the drive shaft portion 7, and the driven shaft portion 9 indicated by reference numeral 100. ing. The brush portion 8 rotates following the rotational drive of the drive shaft portion 7.

  The driven shaft portion 9 is made of, for example, a predetermined metal material, and supports (shaft supports) the brush portion 8 as a pair with the drive shaft portion 7. Similar to the drive shaft portion 7, the driven shaft portion 9 is formed with a spherical body 71 that fits the fitting body 81 at the tip of the brush portion 8, and is connected to the brush portion 8 by this and the fitting body 81. Has been. Further, the base end side of the driven shaft portion 9 opposite to the brush portion 8 (the portion supported by the bearing portion 10) has a shaft diameter smaller than the shaft diameter on the distal end side of the driven shaft portion 9, for example. In this portion, a pair of bearings 113 in a bearing portion 11 to be described later is fitted. The driven shaft portion 9 is rotated following the rotation of the brush portion 8 that is rotationally driven by the drive shaft portion 7.

The bearing portions 10 and 11 respectively support the drive shaft portion 7 and the driven shaft portion 9 so as to be axially rotatable. The bearing portions 10 and 11 are an upper bearing portion 101 and 111 for bearing the driving shaft portion 7 and the driven shaft portion 9 in the upper position, and a lower bearing portion for bearing the driving shaft portion 7 and the driven shaft portion 9 in the lower position. 102 and 112. The upper bearing portions 101 and 111 and the lower bearing portions 102 and 112 have a substantially cylindrical shape in external view (specifically, a shape in which both end sides in the axial direction, that is, the front side and the back side are notched so as to be flat portions). A pair of bearings 103 and 113 are built in both end portions in the axial direction. The drive shaft portion 7 and the driven shaft portion 9 are supported so that shaft rotation is possible by fitting the base end side into the bearings 103 and 113.

  A flange plate 104 (side plate) having a substantially square shape in the axial direction is fixed to the end of the bearing unit 10 on the drive unit 6 side, and the flange plate 104 and the drive shaft unit 7 in the drive unit 6 are fixed. Between the side end surfaces, there is provided a cover portion 105 having a substantially cylindrical shape in outer appearance, in which a predetermined opening 1051 is formed so that the coupling 62 can be seen from the outside. Further, a retaining member 114 such as a nut is attached to the end of the bearing portion 11 opposite to the driven shaft portion 9 so as to seal the driven shaft portion 9 (bearing 113) from coming out to the outside. (Screwed).

  The elevating parts 12 and 13 move the bearing parts 10 and 11 up and down (up and down driving), respectively. The elevating parts 12 and 13 are provided with drive sources composed of elevating drive motors 121 and 122 and elevating drive motors 131 and 132, respectively, and the upper bearing parts 101 and 111 and the lower bearing parts 102 and 112 are individually raised and lowered. It is configured to be movable. However, here, the lifting drive motor 121 (131) is configured to move the upper bearing portion 101 (111) up and down, and the lifting drive motor 122 (132) is configured to move the lower bearing portion 102 (112) up and down.

  Specifically, the elevating unit 12 (13) is connected by elevating drive motors 121, 122 (131, 132) (for example, pulse motors), drive shafts of these elevating drive motors, and a predetermined coupling 123 (133). A rotating shaft portion 124 (134) having a screw portion, and a screwed member (not shown) that is screwed to the rotating shaft portion 124 (134) and fixed to the bearing portions 10 and 11. The upper bearing portion 101 (111) and the lower bearing together with the member to be screwed together with the rotary shaft portion 124 (134) according to the rotation amount of the drive shaft of each of the lifting drive motors 121, 122 (131, 132). The part 102 (112) is moved up and down.

  Discs 121a and 122a (131a and 132a) are attached to the lower ends of the drive motors 121 and 122 (131 and 132), respectively, and rotate according to the rotational drive of the motors. In 132a), a notch (not shown) is formed by notching a part of each disk in the radial direction. Origin position sensors 121b and 122b (131b and 132b), which are U-shaped sensors similar to the position sensor 141 described later, are attached to the sides of each disk, and the disks can be inserted inside the U-shape. Are arranged in a positional relationship. As a result, each origin position sensor detects when the notch of the disk is at the position of the optical axis of the U-shaped sensor, that is, when the optical axis is not blocked by the disk as the origin position, Based on the number of pulses of each elevating drive motor (pulse motor) corresponding to the rotation (rotation angle) from the origin position, the drive shaft portion 7 and the driven shaft portion 9 (brush portion 8) in the vertical direction are precise (high Positioning).

  The position detectors 14 and 15 are configured such that each drive shaft portion 7 (upper bearing portion 101 and lower bearing portion 102) and each driven shaft portion 9 (upper bearing portion 111 and lower bearing portion 112) are movable in the height direction. It is to detect whether or not it is in a range (section) position. The position detection units 14 and 15 are provided at positions facing the back surfaces of the bearing units 10 and 11 in the support frames 4 and 5, respectively. For example, as shown in FIG. 8, the position detection unit 14 mainly includes position sensors 141 to 144 and a mounting plate 145 to which the position sensors 141 to 144 are attached. It is detected whether the (upper bearing portion 101) is in the movable range position, and the position sensors 143, 144 detect whether the lower drive shaft portion 7 (lower bearing portion 102) is in the movable range position. To do. In other words, each of the position sensors 141 to 144 is a so-called limit sensor that determines the movable range of each drive shaft portion 7 (each bearing portion 10), and the upper drive shaft portion 7 moves up and down between the position sensors 141 and 142. The lower drive shaft 7 has a moving range between the position sensors 143 and 144.

  Each of the position sensors 141 to 144 is a so-called transmission type photosensor including light emitting units 141 a to 144 a that emit (emits) light such as infrared rays and light receiving units 141 b to 144 b that receive the emitted light. It is substantially U-shaped in outline view. In such a U-shaped sensor, the optical axis formed on the inner side (formed between the light emitting portions 141a to 144a and the light receiving portions 141b to 144b, respectively) is blocked by a sector (not shown). An ON / OFF signal is output depending on whether or not The output ON / OFF signal is input to, for example, a control unit (see deformation mode (D)) to be described later, and the drive unit 7 moves up and down within the movable range based on the ON / OFF signal by the control unit. It is controlled to move.

  The sector is composed of, for example, a rectangular plate-like body that moves up and down integrally with the drive shaft portion 7 and is inserted between the U-shapes (between each light emitting portion and the light receiving portion). It is provided at the end position on the drive section 6 side behind the section 10 (or behind the flange plate 104 and the cover section 105). The sectors corresponding to the position sensors 141 and 142 may be provided on the upper bearing portion 101 side, and the sectors corresponding to the position sensors 143 and 144 may be provided on the lower bearing portion 102 side.

  Further, the mounting plate 145 is provided with a protective member 146 for protecting the position sensors 141 to 144 from contact with the bearing portion 10 or the like (in FIG. 8, only the position sensor 142 is attached with the protective member 146). Actually, it is attached to all the position sensors 141 to 144).

  The position detector 15 has the same configuration as the position detector 14 shown in FIG. However, the position detector 15 is attached to the support frame 5 in such an orientation that each position sensor is arranged mirror-symmetrically with the position detector 14. Moreover, the sector corresponding to this position detection part 15 is provided in the bearing part 11, for example, and has the same configuration as described above.

  Here, the structure of each connection part (joint part 100) of the brush part 8, the drive shaft part 7, and the driven shaft part 9 in FIG. 1 will be described. FIG. 2 shows an enlarged view of the joint portion 100 of the brush portion 8 and the drive shaft portion 7 (driven shaft portion 9). FIG. 3 is an enlarged view showing an example of the shape of the distal end portion of the drive shaft portion 7.

  Since the joint part 100 of the brush part 8 and the drive shaft part 7 is the same as the joint part 100 of the brush part 8 and the driven shaft part 9 (having a symmetrical configuration with the brush part 8 in between), here Now, the joint portion 100 between the brush portion 8 on one side and the drive shaft portion 7 will be described.

  First, as shown in FIG. 3, one spherical body 71 having a substantially spherical shape in external view is formed at the distal end portion (end portion on the brush portion 8 side) of the drive shaft portion 7. The spherical body 71 is formed integrally with the drive shaft portion 7 so that the center point 74 of the spherical body 71 is positioned on the rotation center shaft 75 of the drive shaft portion 7.

  The spherical body 71 is provided with a pair of protrusions 72 each having a substantially cylindrical shape as viewed from the outside and projecting in the radial direction of the drive shaft 7 and facing each other. The rotation center axis 76 of the pair of protrusions 72 is orthogonal to the rotation center axis 75 at the center point 74. In addition, a groove portion 73 having a substantially arc-shaped cross section is formed at the base portion of the spherical body 71 with respect to the drive shaft portion 7, thereby avoiding breakage due to stress concentration at the base portion. Is done. When the brush portion 8 (fitting body 81) is inclined (rotated) with respect to the drive shaft portion 7, the inner layer member 87 of the fitting body 81 approaches the root portion of the spherical body 71. Even if it is large, the formation of the groove 73 can prevent interference between the inner layer member 87 and the base portion of the spherical body 71 (see FIG. 6 described later).

  On the other hand, as shown in FIG. 2, the brush portion 8 is fitted with a fitting body 81 having a substantially cylindrical shape in an external view for fitting with the spherical body 71 at the end of the brush body portion 80 in the brush portion 8. ing. The fitting body 81 is formed in the direction of the axis (rotation center axis) of the fitting body 81, and the spherical body 71 of the drive shaft portion 7 is fitted into the cylindrical space portion 82 opened toward the spherical body 71. When the (concave portion) is connected to the drive shaft portion 7 and the brush portion 8 (when the spherical body 71 is fitted into the cylindrical space portion 82), the projection 72 of the spherical body 71 is received (engaged). A pair of slit portions 83 (groove portions) that are opposed to each other with the cylindrical space portion 82 interposed therebetween in the direction of the rotation center axis 76 of the protrusion 72 is formed.

  The fitting body 81 is detachably fitted to the spherical body 71 and is slidable. That is, the fitting body 81 can be inserted into and removed from the spherical body 71 by moving forward and backward (sliding) in the direction indicated by the symbol A (the formation direction of the slit portion 83) with respect to the spherical body 71. . In addition, the outer surface of the spherical body 71 and the inner surface (inner peripheral surface and inner bottom surface) of the cylindrical space portion 82, the outer peripheral surface of the base end side of the protrusion 72 in the spherical body 71, and an inner layer member to be described later of the slit portion 83. The inner wall surface of 87 is in sliding contact.

  The drive shaft portion 7 and the fitting body 81 (brush portion 8) are rotatable in a cross direction in a plane perpendicular to the direction of the counterpart shaft (rotation shaft). That is, for example, when the drive shaft portion 7 is rotated with respect to the fitting body 81, the direction of the rotation center axis 76 of the protrusion 72 in the plane perpendicular to the rotation center axis 84 of the fitting body 81 (indicated by reference numeral B1). The drive shaft portion 7 rotates in the direction indicated by the arrow) and in the direction perpendicular to the rotation center shaft 76 (the direction indicated by the arrow C1). In other words, the drive shaft portion 7 rotates with respect to the fitting body 81 in the arrow direction indicated by the reference numeral C1 so as to rotate in the arrow direction indicated by the reference numeral C2 with the rotation center shaft 76 as the rotation center. With respect to the fitting body 81, the rotation center shaft 76 (protrusion 72) swings the center point 74 of the spherical body 71 in the direction indicated by the arrow B2 in the plane including the rotation center shaft 84 and the rotation center shaft 76. It rotates in the direction indicated by the arrow B1 so as to swing around the center. However, the spherical body 71 and the fitting body 81 are the protrusions when the protrusion 72 swings in the direction indicated by the arrow B2 between the bottom surface of the slit 83 and the side surface of the protrusion 72. In order to avoid contact between the portion 72 and the bottom surface portion of the slit portion 83, they are fitted to each other so as to have a gap portion 831.

  The fitting body 81 is detachably attached to the end surface of the brush body 80 by screwing with a screwing member 85 such as a planting bolt (fixing methods other than screwing may be used). Further, a predetermined number of rotation restricting members 86 such as cylindrical pins are fitted between the fitting body 81 and the brush body 80 so that the fitting body 81 does not rotate with respect to the brush body 80. . As shown in the longitudinal sectional view of one end of the brush portion 8 in FIG. 4, the fitting body 81 and the brush main body 80 are connected to the connecting surface (the end surface to be screwed) of the fitting 81 and the brush main body 80. An inlay portion 800 (uneven portion) is formed so as to obtain concentricity.

  Incidentally, as shown in FIG. 5, the fitting body 81 is a portion that is in sliding contact with the spherical body on the inner peripheral surface of the fitting body 81, for example, an inner layer member 87 made of a resin material such as POM (Polyoxymethylene) resin, and FIG. 6. As shown in FIG. 2, the inner layer member 87 is provided so as to cover the inner layer member 87. The outer layer member 88 is made of a metal material such as stainless steel (for example, SUS316). As described above, the inner layer member 87 is formed of a resin material to prevent generation of particles. That is, the metal powder is prevented from being generated by sliding contact with the spherical body 71 made of a metal material (metals are in sliding contact with each other) (including generation of particles other than metal powder), thereby reducing dust generation. . Further, by covering the inner layer member 87 with the outer layer member 88 made of a metal material, the strength of the fitting body 81 is increased. For example, even when the inner layer member 87 that is a resin portion is damaged during the rotation driving, the drive shaft The brush portion 8 is prevented from falling off from the portion 7 (the driven shaft portion 9).

  The inner layer member 87 has a substantially cylindrical shape, is formed with the cylindrical space portion 82 and a slit portion 83a constituting the slit portion 83, and is formed in the direction of the rotation center axis 84 of the fitting body 81. In addition, a pair of slit portions 871 (so-called slits) are formed that are open toward the distal end side (drive shaft portion 7 side) of the fitting body 81 and are opposed to each other in the radial direction of the inner layer member 87. A hole (curved surface) is formed at an end portion indicated by reference numeral 872 in the slit portion 871 so as to avoid stress concentration.

  On the other hand, the outer layer member 88 has a substantially cylindrical shape, and the slit portion constituting the slit portion 83 is the same as the slit portion 83a and the slit portion 871 (so as to have the same shape and the same position in the circumferential direction). 83b and a slit portion 881 (slot) are formed. The slit portions 871 and 881 in the fitting body 81 formed by combining the inner layer member 87 and the outer layer member 88 are hereinafter referred to as a slit portion 89.

Since the slit 81 is formed in the fitting body 81, for example, the diameter (inner diameter) of the cylindrical space 82 is formed to be slightly smaller than the outer diameter of the spherical body 71, and the spherical body 71 is A so-called tight fit can be achieved by inserting the shaped space portion 82 (fitting body 81) so as to expand in the radial direction. Thereby, the spherical body 71 and the fitting body 81 can be fitted without a gap (the gap at the contact portion between the spherical body 71 and the fitting body 81 can be eliminated), and the drive shaft portion 7, the driven shaft portion 9, and the brush portion. 8 is prevented from being vibrated during the rotation driving, and thus the substrate is unevenly washed or the substrate is damaged (for example, if the substrate such as liquid crystal is scratched) Can cause the substrate to crack). In addition, poor conveyance of the substrate is prevented.

  However, for example, a metal material such as SUS316 having elasticity (flexibility) is used for the outer layer member 88 so that the fitting body 81 can be spread as described above. The thickness of the 88 layers is determined according to (the elastic force of) the metal material.

  7 is a cross-sectional view taken in the direction of the arrow indicated by the symbol D on the rotation center axis 76 of the protrusion 72 shown in FIG. 6 (a direction perpendicular to the rotation center axis 84 of the fitting 81 and the center point 74 in FIG. It is sectional drawing which passes through. As shown in FIG. 7, a tapered portion 721 is formed at the tip of each projection 72 to prevent contact with the outer layer member 88. The taper start point 722 in the taper portion 721 is a position inside the position of the contact point 882 with the inner layer member 87 on the inner peripheral surface of the outer layer member 88, and the outer peripheral surface portion of the protruding portion 72 and the outer layer member 88. Contact with the side surface portion 832 in the slit portion 83b is avoided.

Note that the outer surface of the spherical body 71 and the protrusion 72 and the inner surface of the cylindrical space portion 82 (the position indicated by reference numeral 873 in FIGS. 4 and 7) are slid between the spherical body 71 and the cylindrical space portion 82. It may be coated (coated) with a coating material (thermal spraying) such as ceramics made of a material such as alumina (Al ₂ O ₃ ) for reducing the friction coefficient against contact. By this covering, smooth sliding (turning) of the fitting body 81 with respect to the spherical body 71 and the protrusion 72 can be realized, and wear due to the sliding contact can be surely prevented.

  In the configuration of the joint portion 100 described above, when the drive shaft portion 7 is rotationally driven by the drive portion 6 (drive motor), the protrusion 72 in the spherical body 71 of the drive shaft portion 7 and the fitting body 81 that receives the protrusion 72. Rotational driving force (torque) is transmitted from the drive shaft portion 7 to the fitting body 81 (brush portion 8) by the slit portion 83 in this, whereby the brush portion 8 rotates. The driven shaft portion 9 rotates following the brush portion 8 rotated by the drive shaft portion 7.

Between the pair of (upper and lower) brush portions 8 that are rotationally driven in this way, for example, a substrate transported by a plurality of transport rollers (not shown) arranged in parallel with each other is passed, and the brush portion 8 acts on the substrate. Then, the substrate is cleaned. However, the method of “acting the brush portion 8 on the substrate” is not limited to the method in which the roll brush (cylindrical surface) of the brush main body 80 in each brush portion 8 is brought into direct contact with the upper and lower surfaces (both surfaces) of the substrate. When the liquid such as cleaning liquid is supplied to the substrate and the liquid is present on the upper and lower surfaces of the substrate, the pair of brushes are arranged so that the roll brush contacts the liquid but does not contact the upper and lower surfaces of the substrate. A method may be used in which the height position of the part 8 is set and the roll brush of the brush body part 80 is rotated in contact with the liquid on the substrate in this state.

  In addition, if the spherical body 71 of the drive shaft part 7 (driven shaft part 9) is within a range in which the deflection angle can be absorbed (required rotation amount (rotation angle) of the brush part 8 with respect to the drive shaft part 7). Is not required to be spherical as a whole, and a shape in which a part of the front end side of the protrusion 72 is cut away, that is, cut away in a direction perpendicular to the rotation center axis 75, The cut-out portion may have a shape that is a flat portion that is circular when viewed from the direction of the rotation center axis 75. In addition, a center hole for forming the spherical body 71 may be formed in the circular center portion of the flat portion (the drive by making the spherical body 71 into a shape with the tip cut out in this way). The shaft portion 7 and the driven shaft portion 9 can be easily formed). However, the cutout portion does not have to be cut out in a direction perpendicular to the rotation center axis 75.

  By the way, since the board | substrate washing | cleaning apparatus 1 is provided with the raising / lowering parts 12 and 13 for moving the bearing parts 10 and 11 up and down, and the joint part 100 as mentioned above, it is the drive shaft part 7 and the driven shaft part 9. Each of them can be rotationally driven (the drive shaft portion 7, the driven shaft portion 9, and the brush portion 8) while being slid in a direction perpendicular to the substrate transport direction. In this case, the drive shaft portion 7 and the driven shaft portion 9 are slid (moved up and down) in a state where the drive shaft portion 7 and the driven shaft portion 9 are kept horizontal (a state parallel to the upper surfaces of the bases 2 and 3). Since the drive shaft portion 7 and the driven shaft portion 9 can be moved up and down individually, when the drive shaft portion 7 and the driven shaft portion 9 are moved up and down in different states, these drive shaft portions 7 and the driven shaft portion 9 are rotationally driven in a state where they are inclined by a distance corresponding to the difference between the different height positions (see FIG. 16 to be described later).

  Accordingly, the rotation center axis direction (inclination direction) of the brush portion 8 with respect to the surface direction of the substrate can be changed to an arbitrary direction, and when the axial direction of the brush portion 8 is changed, It is not necessary to change the orientation (for each of the part 7, the driven shaft part 9, and the brush part 8), and the working structure relating to the change in the direction of the rotation center axis of the brush part 8 can be improved.

Further, as described above, the substrate cleaning apparatus 1 includes the bases 2 and 3 including the restriction portions 25 and 35 and the slide rails 24 and 34, and the upper substrates 21 and 31 are driven shaft portions with respect to the lower substrates 22 and 32, respectively. 7 (driven shaft portion 9) is configured to be slidable in the axial direction. However, when the brush portion 8 is replaced, for example, at least one of the restricting portions, for example, the restricting portion 25 is operated to operate the lower substrate. 22 is released, the support frame 4 is slid so as to retract the drive shaft portion 7 with respect to the fitting body 81 of the brush portion 8, and the spherical body 71 is extracted from the fitting body 81. The connection between the brush portion 8 and the drive shaft portion 7 and the driven shaft portion 9 is released, and the brush portion 8 is removed. Instead of releasing the fixing by the restriction portion 25 (35) and sliding the support frame 4 (5) in this way, the retaining member 114 in the bearing portion 11 is removed and the driven shaft portion 9 is directed outward. By sliding, the brush portion 8 may be removed by releasing the connection between the brush portion 8 and the drive shaft portion 7 and the driven shaft portion 9 in the same manner as described above.

  The said invention can take the following aspect (A)-(H).

  (A) FIG. 9 is a perspective view schematically showing a joint portion 100 of the drive shaft portion 7 and the brush portion 8, which is a modification of the present invention. In this case, the drive shaft portion 7 is referred to as a drive shaft portion 91, and the brush portion 8 is referred to as a brush portion 92. As shown in FIG. 9, a spherical body 93 is formed at the tip (tip surface) of the drive shaft portion 91, while a fitting body 94 that fits the spherical body 93 is formed at both ends of the brush portion 92. Is provided. However, the fitting body 94 may be attached to the brush main body portion 921 of the brush portion 92 by the screwing member 85, the rotation regulating member 86, or the like as described in FIG.

  Here, in FIG. 10, the perspective view at the time of seeing the spherical body 93 from the front end side is shown. As shown in FIG. 10, the spherical body 93 has a rotational center axis direction of the drive shaft portion 91 and is cut out in an arc shape along the outer periphery of the spherical body 93, and the cut surface is driven. A plurality (eight in this case) of notched band portions 931 are formed which are parallel to the radial direction of the shaft portion 91 (in which planar portions having the same band width are formed except for both end portions). These notched band portions 931 are substantially circular (perfect circles) along the spherical shape of the spherical body 93 as viewed from the side so that the point (vertex 932) indicated by reference numeral 932 is the intersection of the notched band portions 931. In addition to being formed in a shape, these notched band portions 931 are arranged symmetrically about the rotation center axis of the drive shaft portion 91 as the center of symmetry.

  A portion indicated by reference numeral 933 of the spherical body 93, that is, a portion sandwiched between the notched band portions 931 has a spherical shape (spherical band portion 933) where the notched band portions 931 are not formed. On the other hand, as shown in FIG. 9, the fitting body 94 engages with the notched band portion 931 of the spherical body 93, and the same number (here, eight) of engaging surface portions 941 as the notched band portion 931. A space portion (cylindrical space portion 940) having a prismatic shape (here, a regular octagonal column) formed on the inner peripheral surface is formed to open in the axial direction of the fitting body 94 and toward the spherical body 93. Yes.

  11 is a cross-sectional view (a cross-sectional view taken along the line E-E shown in FIG. 9) including a contact portion between the spherical body 93 and the fitting body 94 when the spherical body 93 and the fitting body 94 are fitted. As shown in FIG. 11, the spherical body 93 and the fitting body 94 are fitted in a state where the notch band portion 931 and the engagement surface portion 941 are engaged. In this case, the spherical band portion 933 of the spherical body 93 is at a position facing the corner apex (corner portion) of the cylindrical space portion 940 (regular octagon). With such a configuration, the spherical body 93 is detachably fitted to the cylindrical space portion 940 (fitting body 94), and the fitting body 94 is attached to the spherical body 93 (the brush portion 92 is It rotates in any direction including at least the cross direction indicated by the symbol F (see FIGS. 9 and 11). The spherical body 93 with respect to the fitting body 94 is similarly rotated.

  However, when the fitting body 94 rotates with respect to the spherical body 93 in the direction indicated by the arrow G, for example, the octagonal side indicated by reference numeral 943 facing in the direction of the arrow G, The engagement surface portion 941 rotates while being in line contact, but at the other side portions, the notch band portion 931 and the engagement surface portion 941 are rotated in a point contact state.

  On the other hand, since the notch strip 931 and the engagement surface portion 941 are engaged as shown in FIG. 11 (the cross-sectional shape in the radial direction of the spherical body 93 and the cylindrical space portion 940 in contact with the spherical body 93). Since the inner peripheral surface portion is not a circle (perfect circle), the drive shaft portion 91 and the brush portion 92 are not able to rotate with respect to each other, so the drive shaft portion 91 is rotationally driven. Then, the drive shaft portion 91 is rotationally driven from the drive shaft portion 91 to the fitting body 94 (brush portion 92) by the notch band portion 931 in the spherical body 93 of the drive shaft portion 91 and the engagement surface portion 941 of the fitting body 94 that receives the cut-out band portion 931. The force is transmitted, thereby rotating the brush portion 92. However, the driven shaft portion side with respect to the drive shaft portion 91 rotates following the rotation of the brush portion 92.

  Note that the base portion of the spherical body 93 with respect to the drive shaft portion 91 has a substantially circular cross section over the entire circumference thereof in order to avoid breakage due to stress concentration at the base portion, as in the groove portion 73 shown in FIG. An arcuate groove (not shown) may be formed. Further, as shown in FIG. 12, the spherical body 93 of the drive shaft portion 91 does not have to be entirely spherical, and a part of the spherical body 93 on the tip side is notched within a range in which the deflection angle can be absorbed. It may be a shape (position indicated by reference numeral 934). Further, a center hole for forming the spherical body 71 may be formed in the circular center portion of the cutout portion (planar portion).

  Further, the number of notched band portions 931 formed on the spherical body 93 is not limited to eight and may not be an even number. In other words, any number may be used as long as it is one or more (at least one is necessary so that the spherical body 93 and the fitting body 94 do not rotate with each other, that is, the rotational driving force can be transmitted). Further, the notched band portion 931 may be formed such that the spherical body 93 does not have the spherical band portion 933. However, the cylindrical space portion 940 of the fitting body 94 has a shape that matches the various shapes of the spherical body 93.

Further, on the outer surface of the spherical body 93 and the inner surface of the cylindrical space portion 940, for example, alumina (Al ₂ O) for reducing the friction coefficient against the sliding contact between the spherical body 93 and the cylindrical space portion 940. ₃ ) It may be coated with a coating material such as ceramics made of the above material. By this covering material, smooth sliding (turning) between the spherical body 93 and the fitting body 94 can be realized, and wear due to the sliding contact can be surely prevented. In addition, the joint part by the side of a driven shaft part is also the same structure as these.

  (B) As shown in the axial sectional view of the connecting portion in FIG. 13, the fitting body 81 shown in FIG. 2 and the fitting body 94 shown in FIG. 9 (the fitting body shown in FIG. 13 in this case is the fitting body). 201), a flange 2011 having a predetermined number of through holes for screwing members such as screws (or bolts) is formed on the outer peripheral portion on one end side in the axial direction of the fitting body 201. For example, at a position indicated by reference numeral 203, the fitting body 201 is attached to the brush main body 202 by being screwed to the end surface of the brush main body 202 by the screwing member (a fixing method other than screwing may be used). It may be configured to be attached. As in such a configuration, a portion for releasing the screwing (fixing) between the fitting body 201 and the brush main body portion 202 is provided as the flange 2011 on the outer peripheral portion, so that this location can be easily accessed. This makes it easier to replace the brush main body portion 202, and therefore, it is possible to further reduce the work time required for the replacement.

  As shown in FIG. 13, the connecting surface (the end surface to be screwed) of the fitting body 201 and the brush main body 202 has an inlay portion 204 (unevenness) to obtain concentricity between the fitting body 201 and the brush main body 202. Part) may be formed (however, the height of the convex part indicated by reference numeral 205 in the spigot part 204 is, for example, about 1 mm). Thereby, when connecting the fitting body 201 and the brush main-body part 202, concentricity can be obtained easily and an axial shift can be prevented.

  Further, by providing such an inlay portion 204, for example, when the screw member at the flange 2011 is removed and the brush main body portion 202 is replaced, the height portion of the convex portion (a distance of about 1 mm). When the fitting body 201 is slid and moved only in the axial direction, the brush main body portion 202 is detached, so that the replacement can be easily performed. In this case, for example, the gap between the protrusion 72 and the bottom of the slit 83 shown in FIG. 2 (see the gap 831), or the gap between the bottom of the cylindrical space 940 and the spherical body 93 shown in FIG. The size is equal to or greater than the height dimension of the convex part, and the fitting body 201 is moved to the drive shaft part side (driven shaft part side) by a distance longer than the height dimension (about 1 mm) of the convex part. The brush body 202 is removed.

  (C) As shown in FIG. 14, the substrate cleaning apparatus 1 further includes a base 211 below the base 2 (lower base 22), and the base 211 (and lower base 22) The lower base 22 may be configured to be slidable parallel to the base 211 (in the direction indicated by the arrow H) (for example, a predetermined guide rail is formed). In addition, a feed mechanism 212 including a feed screw or the like for adjusting the feed amount (slide movement amount) in this case may be provided.

  As described above, the base 211 and the feeding mechanism 212 are provided, and the base 2 side of the apparatus is slidable in the direction indicated by the arrow H, so that the substrate cleaning apparatus 1 in FIG. As shown in the figure, the direction of the rotation center axis 303 of the brush portion 8 (the brush body portion 80 and the fitting body 81) with respect to the conveyance direction 302 of the substrate 301 is set to the joint portion 100 between the brush portion 8 and the driven shaft portion 9. It is possible to arbitrarily change the position in the direction indicated by the arrow 304 with the position of the center as the center of rotation. In this case, as shown in the figure, the drive shaft portion 7 (driven shaft portion 9) is translated in the direction indicated by the arrow H while maintaining the direction perpendicular to the transport direction 302 of the substrate 301 and driven. The brush portion 8 connected between the shaft portion 7 and the driven shaft portion 9 is translated while being inclined with respect to a direction perpendicular to the transport direction 302.

  Further, when the direction of the rotation center axis 303 of the brush portion 8 is changed in this way, a mechanism (device) that changes the direction of the entire shaft (the drive shaft portion 7, the brush portion 8, and the driven shaft portion 9) is not necessary. The apparatus structure can be simplified, and the work efficiency related to the change in the direction of the rotation center shaft 303 can be improved. In addition, you may provide similarly to the base 211 and the feed mechanism 212 in the base 3 side. As a result, on the bases 2 and 3 side, the same sliding movement can be performed in parallel with the transport direction, and the direction of the rotation center axis 303 can be changed more flexibly.

  In addition, the configuration as shown in this variation (C) is applied to the liquid crystal by, for example, rubbing the liquid crystal substrate surface (alignment film portion) with a rubbing roller (roller on which a cloth or the like is wound). Therefore, the rubbing device can easily give an arbitrary alignment angle to the liquid crystal.

(D) As shown in the schematic view of the substrate cleaning apparatus 1 in FIG. 16 as viewed from the front, each drive motor 61 (for example, DC motor) of the drive unit 6 includes an ammeter 401 and the like. A load fluctuation detection device 400 that detects a load fluctuation (feedback current value) based on a change in the rotation speed (when the brush body 80 (roll brush) contacts the substrate 301, the rotation speed of the drive motor 61 decreases) is provided. The position of the substrate 301, that is, the position of the contact surface (substrate contact surface) with the brush body 80 on the substrate 301 based on the detection information of the load fluctuation when the brush body 80 contacts the substrate 301 ( Hereinafter, it may be configured to detect the pass line 410).

  Specifically, first, the drive shaft portion 7 (bearing portion 10) is moved downward by the elevating portion 12 to incline the rotation center shaft 303 of the brush portion 8, and the end of the brush body portion 80 on the drive shaft portion 7 side. The unit 402 is brought into contact with the upper surface of the substrate 301, and the height position on one end side of the substrate 301 is detected based on detection of the load fluctuation at the time of the contact by the detection device 410. Next, the drive shaft portion 7 is moved upward to release the contact with the substrate 301 at the end portion 402 of the brush body portion 80, and the driven shaft portion 9 (bearing portion 11) is moved downward by the elevating portion 13. The rotation center shaft 303 is inclined in the opposite direction to the case where the drive shaft portion 7 is moved downward, and the end portion 403 on the driven shaft portion 9 side of the brush main body portion 80 is similarly brought into contact with the upper surface of the substrate 301. Based on the detection of the load fluctuation at this time, the height position on the other end side of the substrate 301 is detected. Thus, the position of the pass line 410 is automatically detected by alternately contacting (acting) the both ends of the brush body 80 with the substrate 301.

  Note that the height positions of the drive shaft portion 7 and the driven shaft portion 9 when both ends of the brush main body portion 80 are in contact with the substrate are (the detection information of each origin position sensor in the lift portions 12 and 13 and each lift drive). The information on the height position obtained based on the detection information of the number of pulses of the motor) is stored in a predetermined storage means, and the drive shaft portion 7 and the driven shaft portion are based on the information on the height position. 9 is moved and adjusted so that 9 becomes the position of the pass line 410.

  Storage means for storing the height position, or drive unit 6 (each drive motor), elevating unit 12, 13 (each elevating drive motor or each origin position sensor), position detecting unit 14, 15 (each position sensor) The control means for controlling the entire substrate cleaning apparatus 1 including the load variation detection device 400 and the like is provided at a predetermined position of the substrate cleaning apparatus 1 (may be provided separately from the substrate cleaning apparatus 1). ).

  (E) Three or more slit portions 89 (see FIG. 2) of the fitting body 81 may be provided as shown in FIG. 17, for example (the three or more slit portions 89 are referred to as slit portions 501). In this case, the slit portion 501 may be formed at the same position as the slit portion 83 with which the protrusion 72 of the spherical body 71 is engaged, as indicated by reference numeral 502 (the slit portion 501 at the position of the slit portion 83). Is formed not on the slit portion 83 on one side but on the slit portions 83 on both sides, it is preferable in that a force such as stress is applied symmetrically). Thus, by providing a large number of slit portions 501, a fitting body 81 having a cylindrical space portion 82 having a smaller diameter than the outer diameter of the spherical body 71 is formed, and this cylindrical space portion 82 is formed. The spherical body 71 can be inserted by being greatly expanded, and can be more reliably fitted without a gap.

(F) The fitting bodies 81 and 94 may be formed integrally with the brush body 80. That is, the cylindrical space portions 82 and 940 or the slit portions 83 and 89 may be formed directly at both ends of the brush portion 8.

  (G) The fitting body 94 may have a two-layer structure including an outer layer portion made of a metal material on the outer peripheral portion of the fitting body 94 in the same manner as the fitting body 81. In this case, the fitting body 94 and the fitting body 81 do not have to have a two-layer structure, and may have a three-layer structure or more. Moreover, it is good also as a 1 layer structure which consists of resin materials. Moreover, you may form the fitting bodies 81 and 94 only from a metal material.

  (H) Two rotation shaft portions each including one drive shaft portion 7, brush portion 8 and driven shaft portion 9 may not be provided for one substrate cleaning apparatus 1, or one or three One or more may be provided. Further, as shown in FIG. 1, the rotation shaft portion does not have to be arranged in the vertical position, and may be arranged in a horizontal position or an oblique position (three or more rotation shaft portions are arranged in the vertical position and And / or arranged in a horizontal position and / or an oblique position).

  As described above, according to the substrate processing apparatus of the present invention, the driving force transmission unit and the support for connecting the driving shaft unit 7 and the driven shaft unit 9 (rotating shaft) and the brush unit 8 (rotating body) in the apparatus. And a universal joint means having a portion between the drive shaft portion 7 and the driven shaft portion 9 and the brush portion 8 (from the drive shaft portion 7 to the brush portion 8 or from the brush portion 8 by the drive force transmitting portion). Rotational driving force is transmitted to the shaft portion 9, and the support shaft causes the drive shaft portion 7 and the brush portion 8 (the driven shaft portion 9 and the brush portion 8) to cross each other at least in a plane perpendicular to the other axial direction. Is supported rotatably. As described above, the rotational driving force between the drive shaft portion 7 and the driven shaft portion 9 and the brush portion 8 is transmitted, and the drive shaft portion 7 and the driven shaft portion 9 and the brush portion 8 can rotate with respect to each other. Therefore, even if a deflection angle (a larger deflection angle) occurs during the rotation drive, the universal joint means can absorb this deflection angle. As a result, the drive shaft portion 7 and the driven shaft can be absorbed. Since it is possible to prevent the misalignment between each of the portions 9 and the bearings 103 and 113, the generation of noise from these bearings 103 and 113, or the bearings 103 and 113, the drive shaft portion 7, and the driven shaft portion. Breakage (wear) such as 9 can be prevented.

  In addition, a spherical body 71 is provided at one end of each of the drive shaft portion 7 and the driven shaft portion 9, and a cylindrical space portion in which the spherical body 71 is detachable and slidable at the end portion of the brush portion 8. A fitting body 81 including 82 is provided to constitute a support portion, and a projecting portion 72 projecting from the outer peripheral portion of the spherical body 71 in the radial direction of each drive shaft portion 7 and driven shaft portion 9; A driving force transmitting portion is configured by the slit portion 83 (first slit portion) formed in the fitting body 81 that receives the protruding portion 72. Thus, since the universal joint means is composed of the spherical body 71 having the protrusion 72 and the fitting body 81 into which the spherical body 71 is fitted, the universal joint means is referred to as a piece 196 (FIG. 20), that is, a simple structure with a small number of components, and the fitting body 81 is detachable from the spherical body 71. For example, only the brush portion 8 is removed from the apparatus. It will be possible to easily exchange them. Furthermore, by providing this universal joint means, it is not necessary to form the brush part 8 made of, for example, a roll brush or the like integrally with the drive shaft part 7 and the driven shaft part 9, and therefore the length of the entire shaft is increased. It is possible to prevent the component unit price from increasing in order to obtain runout accuracy and cylindricity.

  Further, a predetermined number of slit portions 89 (second portions) formed in the axial direction of the fitting body 81 and opened toward the distal end side of the fitting body 81 are formed in the peripheral portion of the fitting body 81 formed in a cylindrical shape. Are formed). Accordingly, the spherical body 71 can be fitted into the cylindrical space portion 82 so as to push the fitting body 81 in the radial direction, and the spherical body 71 and the cylindrical space portion 82 can be brought into sliding contact with no gap. The brush shaft 8 can be accurately supported by the drive shaft portion 7 and the driven shaft portion 9, and an axial displacement between the drive shaft portion 7 and the driven shaft portion 9 and the brush portion 8 at the time of rotational driving is prevented. be able to.

  Further, the fitting body 81 includes an inner layer member 87 made of a resin material that is in sliding contact with the spherical body 71 on the inner circumferential surface of the fitting body 81, that is, the inner circumferential wall surface (surface) of the cylindrical space portion 82 of the fitting body 81, and a metal Since the outer layer member 88 made of a material has a two-layer structure, the strength of the fitting body 81 is improved by the outer layer member 88 made of a metal material, and the inner layer member 87 made of a resin material is destroyed. Even if it exists, it can prevent that the brush part 8 falls off from the drive shaft part 7 and the driven shaft part 9. FIG.

  On the other hand, since the tapered portion 721 is formed at the tip portion of the protruding portion 72 to prevent contact with the outer layer member 88, the protruding portion 72 can be prevented from contacting the outer layer member 88. Contact between parts can be avoided, and generation of metal powder (particles) due to wear can be prevented. Furthermore, since the surfaces of the spherical body 71 and the cylindrical space portion 82 are covered with a coating material for reducing the friction coefficient in the sliding contact between the spherical body 71 and the cylindrical space portion 82, the spherical body 71 and the cylindrical space portion 82 are mutually connected. Wear due to sliding contact with the space 82 is less likely to occur, and generation of metal powder can be prevented.

  Further, since the fitting body 81 is detachably attached to the main body of the brush portion 8, the brush portion 8 can be constituted by separate parts of the brush main body portion 80 and the fitting body 81, for example, the brush When exchanging the main body 80, it is not necessary to remove the entire rotating body (no need to remove a large number of parts), and only the connecting portion between the brush main body 80 and the fitting body 81 can be easily separated. 80 can be exchanged, and the work time required to exchange the brush body 80 can be shortened.

  Further, the fitting body 81 has a flange 2011 formed on the outer peripheral portion on one end side, and is configured to be screwed to the end surface of the brush main body portion 80 by the flange 2011. When the fitting body 81 is separated, it is only necessary to release the screwing at the flange 2011 on the outer peripheral portion of the fitting body 81. That is, there is a portion for releasing the screwing on the outer peripheral portion so that it can be easily accessed. Since it can (reach), the brush body 80 can be replaced more easily, and the work time required for the replacement can be further shortened.

In addition, since the concavity and convexity portion (inlay portion 204) is formed on the end surfaces of the fitting body 81 and the brush main body portion 80 that are screwed together to obtain concentricity between the fitting body 81 and the brush main body portion 80.
The brush body 80 and the fitting body 81 can be easily connected (screwed together) so as to be concentric (so as not to be decentered), and an axial shift can be prevented.

  In addition, a spherical body 93 is provided at one end of the drive shaft portion 91 (and a driven shaft portion with respect to the drive shaft portion 91), and the spherical body 93 is detachable and slidable at the end portion of the brush portion 92. A fitting body 94 having a cylindrical space portion 940 is provided to constitute a support portion, which is in the axial direction of the drive shaft portion 91 (driven shaft portion) and cut out in an arc shape along the outer periphery of the spherical body 93, In addition, the cut-out surface engages with the cut-out band portion 931 and a plurality of cut-out band portions 931 formed in parallel with the radial direction of the drive shaft portion 91 (driven shaft portion). A driving force transmitting portion is formed from the engaging surface portion 941 formed on the surface. Thus, since the universal joint means is composed of a spherical body 93 having a plurality of notched band portions 931 and a fitting body 94 to which the spherical body 93 is fitted, the universal joint means is A simple structure with no top 196 or the like, that is, a small number of parts can be obtained, and the fitting body 94 is detachable from the spherical body 93. For example, only the brush portion 92 is removed from the apparatus and replaced. Can be easily performed. Further, by providing this universal joint means, for example, it is not necessary to form the brush portion 92 integrally with the drive shaft portion 91 (driven shaft portion), and therefore the length of the entire shaft is increased, and the deflection accuracy and cylindricity are increased. Therefore, it is possible to prevent the component unit price from increasing.

  The spherical body 93 does not have a projection such as the projection 72 shown in FIG. 2, or the fitting body 94 is formed with a slit (slit 83 shown in FIG. 2) that engages with the projection. Since the structure is simpler and the structure is simpler, the probability of operation failure due to component breakage or the like is further reduced, and the sliding contact with the fitting body 94 by the protruding portion of the spherical body 93 is performed. (Sliding contact between metals such as the protrusion 72 and the outer layer member 88) does not occur, and therefore the probability of occurrence of metal powder can be further reduced.

  Further, the drive shaft portion 7 and the driven shaft portion 9 are provided in a pair with respect to one brush portion 8, and the drive shaft portion 7 and the driven shaft portion 9 are arranged on both sides of the brush portion 8 by universal joint means. At least one shaft portion (for example, the drive shaft portion 7) of the drive shaft portion 7 and the driven shaft portion 9 is connected to the substrate 301 (see FIG. 15) by the base 211 and the feed mechanism 212 (parallel movement means). ) Is slidable parallel to the conveyance direction 302. This makes it possible to arbitrarily change the direction of the rotation center axis 303 of the brush unit 8 with respect to the conveyance direction 302 of the substrate 301, and when changing the direction of the rotation center axis 303 of the brush unit 8, ( It is not necessary to change the orientation (for each of the drive shaft portion 7, the driven shaft portion 9, and the brush portion 8), so that the apparatus structure can be simplified and the work efficiency related to the change in the orientation of the rotation center shaft 303 can be improved.

  Further, the drive shaft portion 7 and the driven shaft portion 9 are provided in a pair with respect to one brush portion 8, and the drive shaft portion 7 and the driven shaft portion 9 are applied to both sides of the brush portion 8 by universal joint means. The drive shaft portion 7 and the driven shaft portion 9 are connected to the brush portion 8 and can be slid in a direction perpendicular to the transport direction 302 of the substrate 301 by the elevating portions 12 and 13 (vertical moving means). . This makes it possible to arbitrarily change the direction of the rotation center axis 303 of the brush unit 8 relative to the surface direction of the substrate 301, and when changing the axial direction of the brush unit 8, there is no need to change the direction of the entire axis. Further, it is possible to improve the working efficiency related to the simplification of the device structure and the change in the direction of the rotation center shaft 303. In addition, since the drive shaft portions 7 and the driven shaft portions 9 can be separately slid in the vertical direction with respect to the substrate 301 in this way, the height positions of the drive shaft portions 7 and the driven shaft portions 9 can be set. Load position detecting means for detecting load fluctuation based on a change in the number of rotations of the drive motor 61, for example, including height position detecting means (each lifting drive motor, each disk, origin position sensor, etc.) for detection (Load fluctuation detecting device 400) is provided, and the drive shaft portion 7 and the driven shaft portion 9 are alternately moved up and down to cause both ends of the brush portion 8 to act alternately on the substrate 301, and the number of rotations in that case It is possible to detect the height positions of the drive shaft portions 7 and the driven shaft portions 9 when the distance changes, and to detect the position of the substrate, that is, the position of the pass line 410 based on this detection information.

It is a perspective view showing roughly a substrate cleaning device which is an example of a substrate processing device concerning one embodiment of the present invention. It is an enlarged view of the joint part of a brush part and a drive shaft part (driven shaft part). It is an enlarged view which shows an example of the shape of the front-end | tip part of a drive shaft part. It is a longitudinal cross-sectional view which shows the shape of the connection surface of a fitting body and a brush main-body part. It is a perspective view which shows the inner layer member of a fitting body. It is a perspective view which shows the inner layer member and outer layer member of a fitting body. It is sectional drawing of the radial direction of the coupling part in the central-axis position of the projection part shown in FIG. It is an expansion perspective view of a position detection part. It is a perspective view which shows roughly the coupling part of the drive shaft part and brush part which are the deformation | transformation aspects of this invention. It is a perspective view at the time of seeing the spherical body shown in FIG. 9 from the front end side. It is sectional drawing of the radial direction of the coupling part containing the contact part of the spherical body shown in FIG. 9, and a fitting body. It is a perspective view which shows the modification of the spherical body shown in FIG. It is a perspective view which shows the modification of the connection part of the fitting body shown in FIG. 2 or FIG. 9, and a brush part. It is a schematic side view of the board | substrate washing | cleaning apparatus which shows the modification of a base. FIG. 15 is a schematic top view of the substrate cleaning apparatus and the substrate showing the sliding movement of the drive shaft when the base shown in FIG. 14 is used. It is a schematic front view of the board | substrate cleaning apparatus which shows the modification regarding the raising / lowering movement of a drive shaft part and a driven shaft part. It is a perspective view which shows the modification of the fitting body shown in FIG. It is the schematic which shows the structure of the surroundings of the brush axis | shaft of the conventional substrate processing apparatus (substrate cleaning apparatus). It is the schematic explaining the deflection angle by the shake in the substrate processing apparatus shown in FIG. It is a perspective view which shows the conventional universal joint (universal joint).

Explanation of symbols

1. Substrate cleaning equipment (substrate processing equipment)
2, 3 Base 4, 5 Support frame 6 Drive unit (drive source)
61 Drive motor 62 Coupling 7 Drive shaft (rotary shaft)
71 Spherical body (support part)
72 Protrusion (driving force transmission part)
721 Taper (Taper)
8 Brush part (rotating body)
80 Brush body (Rotating body)
81 Fitting (support)
82 cylindrical space portion 83 slit portion (first slit portion; driving force transmission portion)
87 Inner layer member (inner layer part)
88 Outer layer member (outer layer part)
89 Slit (second slit)
800 Inlay 9 Driven shaft (Rotating shaft)
10, 11 Bearing portion 103, 113 Bearing 12, 13 Lifting portion (vertical moving means)
121a, 122a, 131a, 132a Discs 121b, 122b, 131b, 132b Origin position sensor 14, 15 Position detector 141-144 Position sensor 100 Joint (universal joint means)
104 Flange plate 114 Detachment member 91 Drive shaft portion 92 Brush portion 921 Brush body portion 93 Spherical body 931 Notched strip portion 933 Spherical strip portion 94 Fitting body 940 Cylindrical space portion 941 Engaging surface portion 201 Fitting body 202 Brush body portion (Rotation) Body)
204 Inlay part (concave / convex part)
2011 Flange (Flange part)
211 Base (parallel movement means)
212 Feeding mechanism (parallel moving means)
301 Substrate 400 Load variation detection device 410 Pass line

Claims (12)

A substrate that includes a rotating shaft that is rotationally driven by a predetermined driving source and a rotating body that is supported by the rotating shaft and rotates, and that performs the substrate processing by causing the rotating rotating body to act on a substrate transported in a predetermined direction. A processing device comprising:
Universal joint means for connecting the rotating shaft and the rotating body;
The universal joint means is capable of rotating at least a cross direction in a plane perpendicular to the axial direction of the other side, and a driving force transmitting portion for transmitting a rotational driving force between the rotating shaft and the rotating body. A substrate processing apparatus. The support is configured by providing a spherical body at one end of the rotating shaft, and providing a fitting body including a cylindrical space portion in which the spherical body is detachable and slidable at an end of the rotating body,
The driving force from a radial direction of the rotating shaft and protruding from the outer periphery of the spherical body and a first slit formed in the fitting body that receives the protruding part. The substrate processing apparatus according to claim 1, wherein the transmission unit is configured. The fitting body is formed in a cylindrical shape,
3. A predetermined number of second slit portions formed in an axial direction of the fitting body and opened toward a distal end side of the fitting body are formed in a peripheral portion of the fitting body. The substrate processing apparatus as described.   The fitting body has a two-layer structure including an inner layer portion made of a resin material that is in sliding contact with a spherical body on an inner peripheral surface of the fitting body and an outer layer portion made of a metal material. 3. The substrate processing apparatus according to 3.   The substrate processing apparatus according to claim 4, wherein a tip portion of the protruding portion is tapered to prevent contact with the outer layer portion.   The surface of the spherical body and the cylindrical space portion is covered with a coating material for reducing a friction coefficient in the sliding contact between the spherical body and the cylindrical space portion. A substrate processing apparatus according to claim 1.   The substrate processing apparatus according to claim 2, wherein the fitting body is detachably attached to the rotating body main body. The fitting body has a flange portion formed on the outer peripheral portion on one end side,
The substrate processing apparatus according to claim 7, wherein the fitting body is screwed to the end surface of the rotating body main body using a flange portion.   9. The substrate processing apparatus according to claim 8, wherein an uneven portion is formed on the end face of the fitting body and the rotating body main body so as to obtain concentricity between the fitting body and the rotating body main body. The support is configured by providing a spherical body at one end of the rotating shaft, and providing a fitting body including a cylindrical space portion in which the spherical body is detachable and slidable at an end of the rotating body,
A plurality of notched belt portions that are axial directions of the rotating shaft and are notched in an arc shape along the outer periphery of the spherical body, and the notched surfaces are formed in parallel with the radial direction of the rotating shaft. 2. The substrate processing apparatus according to claim 1, wherein the driving force transmitting portion is constituted by an engaging surface portion that is engaged with the notched band portion and formed in the fitting body. The rotating shaft is provided in a pair with respect to one rotating body, and is connected to the rotating body by the universal joint means on both sides of the rotating body,
The substrate processing apparatus according to claim 1, further comprising a parallel movement unit configured to be able to slide at least one of the rotation shafts in parallel to the substrate transport direction. The rotating shaft is provided in a pair with respect to one rotating body, and is connected to the rotating body by the universal joint means on both sides of the rotating body,
The substrate processing apparatus according to claim 1, further comprising a vertical movement unit configured to be able to slide each rotation shaft in a direction perpendicular to the substrate transport direction.

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