CN107497728A - Wafer brushing device - Google Patents
Wafer brushing device Download PDFInfo
- Publication number
- CN107497728A CN107497728A CN201710493246.0A CN201710493246A CN107497728A CN 107497728 A CN107497728 A CN 107497728A CN 201710493246 A CN201710493246 A CN 201710493246A CN 107497728 A CN107497728 A CN 107497728A
- Authority
- CN
- China
- Prior art keywords
- roller brush
- brush shaft
- shaft
- water inlet
- main shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001680 brushing effect Effects 0.000 title claims abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 47
- 230000000694 effects Effects 0.000 abstract description 4
- 238000005406 washing Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 7
- 238000005201 scrubbing Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920006351 engineering plastic Polymers 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- B08B1/12—
-
- B08B1/20—
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
Abstract
The invention discloses a kind of wafer brushing device, including roller brush shaft, round brush, water inlet end and drive end；Roller brush shaft is hollow, has one section to be provided with some apertures on axial wall, and round brush, which is sheathed on roller brush shaft, to be set foraminate one section and cover all apertures；Water inlet end is connected to the first end of roller brush shaft, and drive end is connected to the second end of roller brush shaft；Water inlet end is supported on front side board, and drive end is supported on back side panel, and front side board bottom is connected by connecting rod with back side panel；Water inlet end includes hollow water inlet end main shaft, and water inlet end main shaft first end is connected to admitting pipe joint, the second end and roller brush shaft clamping；Drive end includes drive end main shaft, is connected between drive end main shaft first end and roller brush shaft by retaining mechanism, the second end is connected to motor.The roller brush shaft of the present invention connected mode of one end locking, is made the connection of roller brush shaft rigidly be highly improved, is avoided producing axial float when rotating at a high speed, reach more preferable wafer washing effect by one end clamping.
Description
Technical field
The present invention relates to a kind of wafer brushing device, belong to and wafer is chemically-mechanicapolish polished（CMP）Cleaning neck afterwards
Domain.
Background technology
It is after cmp an essential ring in cleaning that wafer, which scrubs technique, and its principle is by round brush and wafer
Between frictional force remove and be attached to the particle of crystal column surface.Patent No. 200480031861.0 patent of invention " scrubbing unit and
Scrubber box " discloses a kind of typical wafer scrubbing box, and wafer is vertically placed on three fulcrums of scrubbing box, and can propped up
Point drives lower rotate；Scrub axle for two and be located at wafer both sides respectively, scrub axle one end and be connected with water inlet module, be responsible for roller brush shaft
Inside injection pure water, keeps round brush moistening；The other end is connected with driving module, by motor driven round brush rotation, is connect when with wafer
When touching, rotation produces frictional force, removes the particle of crystal column surface.The swing arm of left and right two can open in the presence of motor
Or it is close, so as to control the size for scrubbing power.
Scrub axle on round brush as a kind of consumptive material need often change, therefore scrub axle connection be typically designed as it is removable
Unload structure.Existing wafer is scrubbed in the connection scheme of axle, and water inlet module end is designed as sliding axially with spring
Jacking block, driving module design be fixed a distance between jacking block, two jacking blocks be less than round brush shaft length.When round brush is installed,
Jacking block with spring terminal is slided to opposite direction, the distance between two jacking blocks of increase, so as to which roller brush shaft is loaded.Final round brush
Axle is to hold out against connection by spring force.
The fixation of existing roller brush shaft is tightened mainly by spring force, it is contemplated that anticorrosion and purity requirements, in scrubbing box
All parts are that engineering plastics material, limited strength, therefore spring force can not be too big, otherwise can when installing or removing round brush
Damage parts can be caused.For rotating speed up to 700RPM, spring force is limited, may cause roller brush shaft when carrying out washing and cleaning operation for round brush
Axial float occurs when high speed rotates, influences to scrub the stability of technique.
In addition, in actual applications, the swing arm of casing is not an entirety, consider that swing arm is by front and rear two for structure
Individual side plate and a middle tie-beam combine.The connection rigidity of swing arm is directly connected to the shape that axle is scrubbed under stressing conditions
State, the problem of turning into one and can not be ignored.In the prior art, the spring of roller brush shaft is connected as being flexibly connected, overall to lifting firm
The effect of property is little.
The content of the invention
The purpose of the present invention is to be tightened to solve the fixation of wafer current brushing device roller brush shaft mainly by spring force, is rolled
When high speed rotates axial float easily occurs for brush axle, influences to scrub technology stability；The spring of roller brush shaft is connected as flexible connect
Connect, cause the technical problem of the integral rigidity difference of brushing device.
In order to solve the above-mentioned technical problem, the present invention provides a kind of wafer brushing device, including roller brush shaft, round brush, water inlet
End and drive end；
The roller brush shaft is hollow, has one section to be provided with some apertures on axial wall, the round brush is sheathed on the roller brush shaft and is provided with institute
State one section of aperture and cover all apertures；
The water inlet end is connected to the first end of the roller brush shaft, and the drive end is connected to the second end of the roller brush shaft；
The water inlet end by bearings on front side board, the drive end by bearings on back side panel, before described
Side plate bottom is connected by connecting rod with the back side panel；
The water inlet end includes hollow water inlet end main shaft, and the water inlet end main shaft first end is connected to admitting pipe joint, and second
End and the roller brush shaft clamping；
The drive end includes drive end main shaft, passes through retaining mechanism between the drive end main shaft first end and the roller brush shaft
Connection, the second end is connected to motor.
Further, the retaining mechanism includes centering cutting ferrule and locking nut, and the centering cutting ferrule has in cylinder
Surface；
The end of the drive end main shaft first end is provided with rectangle bayonet socket, the portion away from the roller brush shaft on the drive end main shaft
Point one section of screw thread is machined with, the outer surface that the round brush shaft portion is adjoined on the drive end main shaft is the face of cylinder, the cylinder
Face and the cylindrical form interior surface gap of the centering cutting ferrule coordinate；
It is rectangular surfaces that the end of roller brush shaft second is front and rear；The rectangular surfaces at the end of roller brush shaft second insert in the drive end main shaft
Rectangular card is intraoral；
The locking nut is installed on the screw thread of the drive end main shaft and is close to the centering cutting ferrule, by tightening the lock
The centering cutting ferrule is pushed into be in close contact with the roller brush shaft by tight nut, so as to lock the roller brush shaft.
Further, the centering cutting ferrule also has cone-shaped inner surface, the cone-shaped inner surface and table in the cylinder
Face is adjacent；
The end of roller brush shaft second is up and down taper surface；
The taper surface at the end of roller brush shaft second contacts fitting with the cone-shaped inner surface of the centering cutting ferrule.
Further, the cone angle phase of the cone angle and the taper surface of the roller brush shaft of the cone-shaped inner surface of the centering cutting ferrule
Together.
Further, gap is matched somebody with somebody between the cylindrical form interior surface of the face of cylinder of the drive end main shaft and the centering cutting ferrule
The gap of conjunction is not more than 50um.
Further, the end at the end of water inlet end main shaft second is radially provided with rectangle bayonet socket；
The roller brush shaft first end has rectangular surfaces；
The rectangular card that the rectangular surfaces of the roller brush shaft first end insert in the water inlet end main shaft is intraoral.
Further, the end at the end of water inlet end main shaft second is axially additionally provided with taper bayonet socket；
The roller brush shaft first end also has taper surface, and the taper surface protrudes the rectangular surfaces located at the roller brush shaft first end
On；
The conic clamp that the taper surface of the roller brush shaft first end inserts in the water inlet end main shaft is intraoral.
Further, the round brush is polyvinyl alcohol material, and its surface is covered with salient point.
Further, the retaining mechanism is pin or screw.
Compared with prior art, the invention has the advantages that：
The connected mode that the roller brush shaft of the present invention is locked by one end clamping, one end by centering cutting ferrule and locking nut, makes round brush
The connection of axle is rigidly highly improved, and avoids producing axial float when rotating at a high speed, while cause by roller brush shaft, side plate and company
The integral rigidity for the whole round brush supporting structure that extension bar is formed gets a promotion, and reaches more preferable wafer washing effect.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention；
Fig. 2 a are water inlet end main shaft bayonet arrangement schematic diagrames；
Fig. 2 b are roller brush shaft water inlet end bayonet arrangement schematic diagrames；
Fig. 3 a are drive end locking mechanism structure schematic diagrames；
Fig. 3 b are drive end main axle structure schematic diagrames；
Fig. 3 c are centering ferrule structure schematic diagrames；
Fig. 3 d are roller brush shaft drive end bayonet arrangement schematic diagrames.
In figure, roller brush shaft 1；First end taper surface 101；First end rectangular surfaces 102；Second end toper face 103；Second end moment
Shape face 104；Round brush 2；Water inlet end 3；Water inlet end main shaft 301；Water inlet end main shaft rectangle bayonet socket 301-1；Taper bayonet socket 301-2；Drive
Moved end 4；Centering cutting ferrule 401；Feel relieved cutting ferrule cylindrical form interior surface 401-1；Feel relieved cutting ferrule cone-shaped inner surface 401-2；Drive end master
Axle 402；Face of cylinder 402-1；Drive end main shaft rectangle bayonet socket 402-2；Screw thread 402-3；Locking nut 403；Front side board 5；Rear side
Plate 6；Connecting rod 7；Admitting pipe joint 8；Fulcrum 9.
Embodiment
Make preferred detailed description to the present invention presently in connection with accompanying drawing.These accompanying drawings are simplified schematic diagram, only to show
Meaning mode illustrates the basic structure of the present invention, therefore it only shows the composition relevant with the present invention.
As shown in Fig. 1-3d, wafer brushing device of the invention, including roller brush shaft 1, round brush 2, water inlet end 3 and drive end 4；
Roller brush shaft 1 is hollow, has one section to be provided with some apertures on axial wall, round brush 2, which is sheathed on roller brush shaft 1, sets foraminate one section simultaneously
Cover all apertures；
Water inlet end 3 is connected to the first end of roller brush shaft 1, and drive end 4 is connected to the second end of roller brush shaft 1；
Water inlet end 3 by bearings on front side board 5, drive end 4 by bearings on back side panel 6, the bottom of front side board 5
It is connected by connecting rod 7 with back side panel 6；
Water inlet end 3 includes hollow water inlet end main shaft 301, and the first end of water inlet end main shaft 301 is connected to admitting pipe joint 8, and second
End and the clamping of roller brush shaft 1；
Drive end 4 includes drive end main shaft 402, is connected between the first end of drive end main shaft 402 and roller brush shaft 1 by retaining mechanism
Connect, the second end is connected to motor.
Preferably, retaining mechanism includes centering cutting ferrule 401 and locking nut 403, and centering cutting ferrule 401 has table in cylinder
Face 401-2；
The end of the first end of drive end main shaft 402 is provided with rectangle bayonet socket 402-2, the portion away from roller brush shaft 1 on drive end main shaft 402
Divide and be machined with one section of screw thread 402-3, the outer surface that the part of roller brush shaft 1 is adjoined on drive end main shaft 402 is face of cylinder 402-1, circle
Cylinder 402-1 and centering cutting ferrule 401 cylindrical form interior surface 401-2 gaps coordinate；
It is rectangular surfaces 104 that the end of roller brush shaft 1 second is front and rear；The rectangular surfaces 104 at the end of roller brush shaft 1 second insert in drive end main shaft 402
In rectangle bayonet socket 402-2, the moment of torsion of motor is transferred to roller brush shaft 1 from drive end main shaft 402；
Locking nut 403 is installed on the screw thread 402-3 of drive end main shaft and is close to cutting ferrule 401 of feeling relieved, by tightening locking screw
Centering cutting ferrule 401 is pushed into be in close contact with roller brush shaft 1 by mother 403, so as to lock roller brush shaft 1.
Preferably, centering cutting ferrule 401 also has cone-shaped inner surface 401-2, cone-shaped inner surface 401-2 and cylindrical form interior surface
401-1 is adjacent；
The end of roller brush shaft 1 second is up and down taper surface 103；
The taper surface 103 at the end of roller brush shaft 1 second contacts fitting with the cone-shaped inner surface 401-2 for cutting ferrule 401 of feeling relieved, and makes centering cutting ferrule
401 and roller brush shaft 1 install after it is concentric.
Preferably, the cone-shaped inner surface 401-2 of centering cutting ferrule 401 cone angle and the cone angle phase in the face of taper 103 of roller brush shaft 1
Together, it is ensured that tighter keep concentric after centering cutting ferrule 401 and the installation of roller brush shaft 1, will not occur radially to rock.
Preferably, between the cylindrical form interior surface 401-1 of the face of cylinder 402-1 of drive end main shaft 402 and cutting ferrule 401 of feeling relieved
The gap that gap coordinates is not more than 50um, in order to avoid the too big generation radial wobble in gap.
Preferably, the end at the end of water inlet end main shaft 301 second is radially provided with rectangle bayonet socket 301-1；
The first end of roller brush shaft 1 has rectangular surfaces 102；
The rectangular surfaces 102 of the first end of roller brush shaft 1 are inserted in the rectangle bayonet socket 301-1 of water inlet end main shaft 301, pass through such clamping
Mode, moment of torsion effectively can be transferred to water inlet end main shaft 301 from roller brush shaft 1.
Preferably, the end at the end of water inlet end main shaft 301 second is axially additionally provided with taper bayonet socket 301-2；
The first end of roller brush shaft 1 also has taper surface 101, and taper surface 101 is protruded in the rectangular surfaces 102 of the first end of roller brush shaft 1；
The taper surface 102 of the first end of roller brush shaft 1 is inserted in the taper bayonet socket 301-2 of water inlet end main shaft 301, can make the He of roller brush shaft 1
Water inlet end main shaft 301 is concentric, while plays sealing function, prevents the DIW for cleaning wafer imported in roller brush shaft 1（Go
Ionized water）Outflow.
Preferably, round brush 2 is polyvinyl alcohol（PVA）Material, its surface are covered with salient point, improve washing effect.
In addition, as a kind of deformation, the retaining mechanism between the first end of drive end main shaft 402 and roller brush shaft 1 can be pin
Or screw association.
When roller brush shaft 1 is installed, first locking nut 403 is unscrewed, centering cutting ferrule 401 is pushed into this end of screw thread 402-3, driven
Hold the rectangle bayonet socket 402-2 of main shaft to stretch out, the rectangular surfaces 104 at the second end of roller brush shaft 1 are inserted in the rectangle of drive end main shaft 402
In bayonet socket 402-2, then the cutting ferrule 401 that will feel relieved reverses, and makes the taper of the taper surface 103 and centering cutting ferrule 401 at the end of roller brush shaft 1 second
Inner surface 401-2 contact fittings, tighten locking nut 403, installation.
So, roller brush shaft 1, front and rear side plate 5,6 and connecting rod 7 are interconnected to constitute a firm rigid element, can be around
It is fixed on installation base plate（Not shown in figure）On a pair of fulcrums 8 rotate, so as to being scrubbed to wafer.
It is complete by above-mentioned description, relevant staff using the above-mentioned desirable embodiment according to the present invention as enlightenment
Various changes and amendments can be carried out without departing from the scope of the technological thought of the present invention' entirely.The technology of this invention
Property scope is not limited to the content on specification, it is necessary to determines its technical scope according to right.
Claims (8)
1. wafer brushing device, it is characterised in that including roller brush shaft, round brush, water inlet end and drive end；
The roller brush shaft is hollow, has one section to be provided with some apertures on axial wall, the round brush is sheathed on the roller brush shaft and is provided with institute
State one section of aperture and cover all apertures；The water inlet end is connected to the first end of the roller brush shaft, the drive end connection
In the second end of the roller brush shaft；For the water inlet end by bearings on front side board, the drive end passes through bearings
In on back side panel, the front side board bottom is connected by connecting rod with the back side panel；The water inlet end includes hollow water inlet
Main shaft is held, the water inlet end main shaft first end is connected to admitting pipe joint, the second end and the roller brush shaft clamping；The drive end
Including drive end main shaft, connected between the drive end main shaft first end and the roller brush shaft by retaining mechanism, the second end connects
It is connected to motor.
2. wafer brushing device according to claim 1, it is characterised in that the retaining mechanism includes centering cutting ferrule and lock
Tight nut, the centering cutting ferrule have cylindrical form interior surface；
The end of the drive end main shaft first end is provided with rectangle bayonet socket, the portion away from the roller brush shaft on the drive end main shaft
Point one section of screw thread is machined with, the outer surface that the round brush shaft portion is adjoined on the drive end main shaft is the face of cylinder, the cylinder
Face and the cylindrical form interior surface gap of the centering cutting ferrule coordinate；
It is rectangular surfaces that the end of roller brush shaft second is front and rear；The rectangular surfaces at the end of roller brush shaft second insert in the drive end main shaft
Rectangular card is intraoral；
The locking nut is installed on the screw thread of the drive end main shaft and is close to the centering cutting ferrule, by tightening the lock
The centering cutting ferrule is pushed into be in close contact with the roller brush shaft by tight nut, so as to lock the roller brush shaft.
3. wafer brushing device according to claim 2, it is characterised in that the centering cutting ferrule also has table in taper
Face, the cone-shaped inner surface are adjacent with the cylindrical form interior surface；
The end of roller brush shaft second is up and down taper surface；
The taper surface at the end of roller brush shaft second contacts fitting with the cone-shaped inner surface of the centering cutting ferrule.
4. wafer brushing device according to claim 3, it is characterised in that the cone of the cone-shaped inner surface of the centering cutting ferrule
Angle is identical with the cone angle of the taper surface of the roller brush shaft.
5. according to the wafer brushing device described in claim any one of 2-4, it is characterised in that the cylinder of the drive end main shaft
The gap that gap coordinates between the cylindrical form interior surface of face and the centering cutting ferrule is not more than 50um.
6. according to the wafer brushing device described in claim any one of 1-4, it is characterised in that the end of water inlet end main shaft second
End be radially provided with rectangle bayonet socket；
The roller brush shaft first end has rectangular surfaces；
The rectangular card that the rectangular surfaces of the roller brush shaft first end insert in the water inlet end main shaft is intraoral.
7. wafer brushing device according to claim 6, it is characterised in that the end axis at the end of water inlet end main shaft second
To being additionally provided with taper bayonet socket；
The roller brush shaft first end also has taper surface, and the taper surface protrudes the rectangular surfaces located at the roller brush shaft first end
On；
The conic clamp that the taper surface of the roller brush shaft first end inserts in the water inlet end main shaft is intraoral.
8. wafer brushing device according to claim 1, it is characterised in that the retaining mechanism is pin or screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710493246.0A CN107497728B (en) | 2017-06-26 | 2017-06-26 | Wafer brushing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710493246.0A CN107497728B (en) | 2017-06-26 | 2017-06-26 | Wafer brushing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107497728A true CN107497728A (en) | 2017-12-22 |
| CN107497728B CN107497728B (en) | 2019-09-24 |
Family
ID=60679023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710493246.0A Active CN107497728B (en) | 2017-06-26 | 2017-06-26 | Wafer brushing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107497728B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109772767A (en) * | 2018-12-27 | 2019-05-21 | 中国电子科技集团公司第二研究所 | Wafer scrub methods with automatically cleaning brush |
| CN110449382A (en) * | 2019-08-08 | 2019-11-15 | 绵阳宁瑞电子有限公司 | A kind of chip brush foot machine and brush foot method |
| CN113812748A (en) * | 2020-06-18 | 2021-12-21 | 平坦标准技术有限公司 | Cleaning brush device for large-area display |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6308369B1 (en) * | 1998-02-04 | 2001-10-30 | Silikinetic Technology, Inc. | Wafer cleaning system |
| KR20030078434A (en) * | 2002-03-29 | 2003-10-08 | (주)케이.씨.텍 | Brush Assembly for cleaning a substrate |
| JP2005191216A (en) * | 2003-12-25 | 2005-07-14 | Dainippon Screen Mfg Co Ltd | Substrate processing apparatus |
| CN2871036Y (en) * | 2005-12-29 | 2007-02-21 | 林珍如 | Spindle device of crystal wafer cleaner |
| KR20070034886A (en) * | 2005-09-26 | 2007-03-29 | 세메스 주식회사 | Brush Shaft Support |
| US20070174982A1 (en) * | 2006-01-27 | 2007-08-02 | Chen-Ju Lin | Brush holding device for a wafer cleaning brush |
| CN104241167A (en) * | 2013-06-13 | 2014-12-24 | K.C.科技股份有限公司 | Substrate cleaning apparatus and method and brush assembly used therein |
| CN106583295A (en) * | 2016-12-23 | 2017-04-26 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Concentric clamping structure for cleaning brush of chemical mechanical polishing (CMP) post cleaning equipment and using method |
-
2017
- 2017-06-26 CN CN201710493246.0A patent/CN107497728B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6308369B1 (en) * | 1998-02-04 | 2001-10-30 | Silikinetic Technology, Inc. | Wafer cleaning system |
| KR20030078434A (en) * | 2002-03-29 | 2003-10-08 | (주)케이.씨.텍 | Brush Assembly for cleaning a substrate |
| JP2005191216A (en) * | 2003-12-25 | 2005-07-14 | Dainippon Screen Mfg Co Ltd | Substrate processing apparatus |
| KR20070034886A (en) * | 2005-09-26 | 2007-03-29 | 세메스 주식회사 | Brush Shaft Support |
| CN2871036Y (en) * | 2005-12-29 | 2007-02-21 | 林珍如 | Spindle device of crystal wafer cleaner |
| US20070174982A1 (en) * | 2006-01-27 | 2007-08-02 | Chen-Ju Lin | Brush holding device for a wafer cleaning brush |
| CN104241167A (en) * | 2013-06-13 | 2014-12-24 | K.C.科技股份有限公司 | Substrate cleaning apparatus and method and brush assembly used therein |
| CN106583295A (en) * | 2016-12-23 | 2017-04-26 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Concentric clamping structure for cleaning brush of chemical mechanical polishing (CMP) post cleaning equipment and using method |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109772767A (en) * | 2018-12-27 | 2019-05-21 | 中国电子科技集团公司第二研究所 | Wafer scrub methods with automatically cleaning brush |
| CN110449382A (en) * | 2019-08-08 | 2019-11-15 | 绵阳宁瑞电子有限公司 | A kind of chip brush foot machine and brush foot method |
| CN113812748A (en) * | 2020-06-18 | 2021-12-21 | 平坦标准技术有限公司 | Cleaning brush device for large-area display |
| CN113812748B (en) * | 2020-06-18 | 2023-02-03 | 平坦标准技术有限公司 | Cleaning brush device for large-area display |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107497728B (en) | 2019-09-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107497728A (en) | Wafer brushing device | |
| CN108672431A (en) | Lift adjustable oil cylinder cleaning device | |
| CN106944429B (en) | A kind of pipe fitting cleaning device | |
| CN103600318B (en) | A kind of fixture for the examination of stator blade intensity and installation method | |
| CN208147206U (en) | A kind of welder of automobile nut plate | |
| CN203062289U (en) | Cam clamping device | |
| CN204261977U (en) | A kind of electrodynamic type tyre cleaning device | |
| CN201105268Y (en) | Cleaning mechanism and pipe cleaning device using the same | |
| CN106277717B (en) | Glass liquid stirring stick | |
| CN104128337A (en) | Simple steel tube inner wall rust removing device | |
| CN205870210U (en) | Flexible rotatory burring device of polishing | |
| CN207868183U (en) | Chuck pin and workpiece cleaner | |
| CN203680055U (en) | Novel transmission mechanism of angle grinder | |
| CN203655920U (en) | Safe transmission assembly of electric motor | |
| JP2008027959A (en) | Wafer cleaning apparatus | |
| CN115648093A (en) | Composite material circular thin-wall product processing device and using method | |
| CN105499175B (en) | A kind of flange shaft thread cleaning device | |
| JP2020025403A (en) | Position adjustment device, and rotation device with the position adjustment device | |
| CN203779247U (en) | Polishing device of conical workpiece | |
| CN203991548U (en) | A kind of easy device for dedusting inner wall of steel pipe | |
| CN205415302U (en) | Fixture of grinding machine | |
| CN206748311U (en) | A kind of Full-automatic brushless electric screwdriver | |
| CN205356544U (en) | Touch -control telebision integrated | |
| CN210265266U (en) | Connect stable motor fan blade | |
| CN208033241U (en) | A kind of linear bearing clamps the wine bottle clamping apparatus of bottle |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200812 Address after: 101, 2 / F, building 2, No. 1, third Taihe street, Beijing Economic and Technological Development Zone, Daxing District, Beijing 100176 Patentee after: Beijing ShuoKe precision electronic equipment Co.,Ltd. Address before: 100176, No. 1, Tai Street, Beijing economic and Technological Development Zone, Daxing District, Beijing Patentee before: BEIJING SEMICONDUCTOR EQUIPMENT INSTITUTE (THE 45TH Research Institute OF CETC) |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 100176 101, floor 2, building 2, No. 1, Taihe Third Street, economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Jingyi Precision Technology Co.,Ltd. Address before: 100176 Room 101, floor 2, building 2, No. 1, Taihe 3rd Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee before: Beijing ShuoKe precision electronic equipment Co.,Ltd. |