200909079 九、發明說明： L發明所屬之技術領域3 發明領域 本發明係有關一種可藉一對軋輥刷而對朝預定方向搬 5 送之基板進行刷洗處理之刷子洗淨裝置。 發明背景 液晶顯示裝置所使用之玻璃製基板上可形成電路圖 形。對基板上形成電路圖形時係採用微影製程。微影製程 10則一如周知’係於上述基板上塗布抗钱劑，再對該抗触層 隔著形成有電路圖形之光罩加以照光。 曰 其次，去除抗钱層之未照光之部分或已照光之部分， 再触刻已去除抗姓層之部分。繼之，於姓刻後，自基板上 去除抗触層，而反覆進行複數次上述一連争之步驟，以於 15上述基板上形成電路圖形。 m述微影製程中’藉顯影液、蚀刻液或姓刻後去除抗 姓層所用之剥離液等處理液處理上述基板之步驟，以及使 用處理液進行處理後，再藉洗淨液進行洗淨之步驟，皆不 可或缺。 在洗淨基板之洗淨步驟中，舉例言之，在洗淨去除基 板上所附著之處理液時，對於在處理槽内搬送之基板可 藉噴水器噴嘴噴射洗淨液，而由基板上洗淨去除處理液。 ’’、、而’基板上強力附著有餘等汙物時，對基板僅憑 喷射洗淨液’無法確實洗淨去除汙物。故而，此時將對搬 200909079 送於處理槽内之基板藉軋輥刷進行洗淨。 上述軋輥刷具有刷轴，該刷轴之兩端部以外之部分設 有包含刷毛之刷部。上述刷軸之兩端部則以接合部連結有 支軸。-對支軸則分別為軸承體所支料呈可旋轉之狀 5態。各軸承體則裝設固定於洗淨槽内所設之架台等安裝部 上。 近來，基板已有大型化之趨勢。基板一旦大型化，上 述軋輥刷即將對應基板之寬度大小而增長。乳觀刷一旦增 長’可支持其刷軸之兩端部所連結之支轴並使其呈可旋轉 10之狀態之一對軸承體之間隔亦將增大。 -對軸承狀間隔-旦增大，難難謂該等轴承體 之軸芯以高精度設成-致。-對軸承體之軸芯若非以高精 度設成-致者，則該等軸承體所支持之軋輥刷將無法圓滑 地旋轉，上述支軸及軸承体將提早受損。 15 ®此，如專利文獻1中所示，可於用以支持上述軋輥刷 之機機架上，設置位於同一垂直面上，且在水平方向上按 預定間隔分設之具有平坦面之第丨安裝部與第2安裝部。其 次，於第1安裝部與第2安裝部分別設置可支持設於上部軋 輥刷之刷軸之兩端部之支軸而使其呈可旋轉之狀態之—對 20第1軸承體，以及可支持設於下部軋輥刷之刷軸之兩端部之 支軸而使其呈可旋轉之狀態之一對第2軸承體。 【專利文獻1】特開2006-116465號公報 【明内容3 發明揭示 200909079 發明所欲解決之問題 而專利文獻1所示之習知技術，必須使可供設置第1 軸承體與第2軸承體之上述第丨安裝部與第2安裝部位於同 -垂直面上’並在水平方向上按預定間隔加以分設而設置 於上述機架上。 而°又於機架上之第1安裝部與第2安裝部若自同一 垂直面上偏移，則將裂設於各安裝部之各-對第卜第2軸 承體之轴芯亦將發生偏移。 各一對第1、第2軸承體之軸芯若發生偏移，則藉該等 轴承體支持6又於刷軸之兩端部之支軸時，應力將經支轴而 施加於第1、第2軸承體所支持之支軸及刷軸。 支軸及刷軸承受應力之狀態下，軋輥縣長時間進行 走轉驅動’則4應力將使支軸及刷軸發生破裂，而可能由 該破裂部分開始發生斷裂。進而，支軸及卵所承受之應 力將作用於軸承體’而亦為上述軸承體提早受損之原因。 本發明則可提供—種刷子洗淨裝置，即便支持軋鶴刷 之刷轴之-端部與另_端部之位置未以高精度設成—致， 亦不致對上述札輥刷之刷軸施加應力。 用以欲解決問題之手段 ―本發明係—種刷子洗淨裝置，具有於刷軸設有刷部之 對乾親刷’ 使朝預定方向搬送之基板通過前述 挺刷間，加以、、Φ ,，容 仏 先净。該刷子洗淨裝置包含有：徑向軸承， 糸支持上述刷軸之1部，使其可旋轉者；旋轉驅動源、’ 系連結於上述徑向轴承所支持而可旋轉之上述刷轴之 200909079 5 10 15 20BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a brush cleaning apparatus which can perform a brushing process on a substrate which is fed in a predetermined direction by a pair of roll brushes. Background of the Invention A circuit pattern can be formed on a glass substrate used in a liquid crystal display device. A lithography process is used to form a circuit pattern on a substrate. The lithography process 10 is as follows. The anti-money agent is applied to the substrate, and the anti-touch layer is illuminated by a photomask formed with a circuit pattern.曰 Secondly, remove the unilluminated part of the anti-money layer or the part that has been illuminated, and then remove the part of the anti-surname layer. Then, after the surname is engraved, the anti-touch layer is removed from the substrate, and the above-mentioned successive steps are repeated to form a circuit pattern on the substrate. In the lithography process, the process of treating the substrate by a treatment liquid such as a developing solution, an etching solution, or a stripping liquid for removing the anti-surname layer after the engraving is performed, and after the treatment with the treatment liquid, the cleaning liquid is used for cleaning. The steps are indispensable. In the washing step of the cleaning substrate, for example, when the processing liquid adhered to the substrate is washed and removed, the substrate conveyed in the processing tank may be sprayed with the washing nozzle by the nozzle of the nozzle, and washed by the substrate. The removal of the treatment liquid. When the remaining contaminants are strongly adhered to the substrate, the substrate can be reliably washed and removed only by the jet cleaning liquid. Therefore, at this time, the substrate which is sent to the processing tank in 200909079 is washed by the roller brush. The roll brush has a brush shaft, and a brush portion including bristles is provided at a portion other than both end portions of the brush shaft. Both ends of the brush shaft are coupled to the support shaft by a joint portion. - For the fulcrum, the bearing body is in a rotatable state. Each of the bearing bodies is attached to a mounting portion such as a stand provided in the washing tank. Recently, substrates have become larger. Once the substrate is enlarged, the above-described roll brush will increase in accordance with the width of the corresponding substrate. Once the milk-like brush is grown, it can support the support shaft of the both ends of the brush shaft and make it rotatable 10, and the spacing between the bearing bodies will also increase. - It is difficult to say that the bearing cores of these bearing bodies are set with high precision in order to increase the bearing spacing. - If the shaft core of the bearing body is not set to high precision, the roller brushes supported by the bearing bodies will not rotate smoothly, and the above-mentioned support shaft and bearing body will be damaged early. 15 ® this, as shown in Patent Document 1, can be provided on the machine frame for supporting the above-mentioned roll brush, and the second surface having the flat surface which is located on the same vertical plane and which is divided at a predetermined interval in the horizontal direction The mounting portion and the second mounting portion. Next, the first mounting portion and the second mounting portion are respectively provided with a support shaft that is supported at both end portions of the brush shaft of the upper roller brush so as to be rotatable, and the first bearing body is 20, and The support shaft provided at both ends of the brush shaft of the lower roll brush is supported to be in a rotatable state to the second bearing body. In the prior art disclosed in Patent Document 1, it is necessary to provide the first bearing body and the second bearing body. The second mounting portion and the second mounting portion are located on the same-vertical surface and are disposed at predetermined intervals in the horizontal direction and are provided on the frame. When the first mounting portion and the second mounting portion on the frame are offset from the same vertical surface, the axis core of each of the mounting portions and the second bearing body of the second mounting body will also occur. Offset. When the axial cores of the pair of first and second bearing bodies are displaced, when the bearing bodies support the support shafts of the two ends of the brush shaft, the stress is applied to the first through the fulcrum. The support shaft and the brush shaft supported by the second bearing body. In the state where the fulcrum and the brush bearing are stressed, the roll county will perform the running drive for a long time. Then the 4 stress will cause the fulcrum and the brush shaft to rupture, and the rupture portion may start to break. Further, the stress applied to the fulcrum and the egg will act on the bearing body', which is also the cause of the early damage of the above bearing body. The invention can provide a brush cleaning device, even if the position of the end portion and the other end portion of the brush shaft supporting the rolling brush is not set with high precision, and the brush shaft of the above-mentioned roller brush is not Apply stress. The present invention relates to a brush cleaning device, which has a pair of dry brushing brushes provided with a brush portion on a brush shaft, so that a substrate conveyed in a predetermined direction passes through the aforementioned brushing chamber, and is Φ. , Rong Rong first net. The brush cleaning device includes: a radial bearing, a cymbal supporting one of the brush shafts to be rotatable; a rotary drive source, 'connected to the above-mentioned radial bearing to support the rotation of the brush shaft 200909079 5 10 15 20
部’且旋轉驅動上述刷軸者；及，一對支持 卜 面形成凸狀之曲面，且藉前述曲面以點接觸狀“係外周 刷軸之另-端部，使其可旋轉者。 W支持上述 發明效果 依據本發明，由於藉徑向轴承支持乾 端部並使其呈可旋轉之狀態，另一端部則使:輪之-:凸狀曲面與外周面形成點接觸狀，子 子所構成之二造=偏移亦將—⑽ 可旋轉之狀態之徑向轴承之損^持刷軸之—端部並使其呈 圖式簡單說明 子洗淨/置係U代表本發明—實施例之刷子單元之刷 梦裝置之縱截面圖。 π之刷 =圖係刷子洗淨裝置之概略構造圖。 =係由斜上方觀察刷子單元之立體圖。 係由斜下方觀察刷子單元之立體圖。 弟5圖係由斜下方觀察 子單元之立體圖。 冑支持體卸下外罩後之刷 第6圖係顯示連結於 料之支持構造之立體圖。軋_之刷轴之1之第U 第7圖係顯示連結於 對札輥刷之刷軸之另— 端之第2 200909079 5 i 支軸之支持構造之立體圖。 第8圖係顯示可上下驅動設於第1支持體之第1上部可 動體與第1下部可動體之上下驅動機構之立體圖。 第9圖係放大顯示上下驅動機構之立體圖。 第10圖係第2支持體之設有第2旋轉凸輪體之部分之放 大立體圖。 第11圖係顯示第1、第2旋轉凸輪體之正面圖。 第12圖係顯示刷軸與支持軸之連結構造者。 第13圖係可支持第2支轴之支持滚子之截面圖。 10 第14圖係使用卸除用夾具而卸除上部軋輥刷時之立體 圖。 第15圖係顯示於刷軸之一端卡合有卸除用夾具之鉤部 之狀態之立體圖。 第16圖係顯示於刷軸之另一端卡合有卸除用夾具之鉤 15 部之狀態之立體圖。 【實施方式:J 用以實施發明之最佳形態 以下，參照圖示說明本發明之實施例。 第1圖係顯示橫式之刷子洗淨裝置之縱截面圖，該刷子 20 洗淨裝置包含處理槽1。該處理槽1内則如第2圖所示，設有 複數之搬送滾子2所構成之搬送機構3。該等搬送滚子2可藉 未圖示之驅動機構而朝預定方向旋轉驅動。 上述處理槽1之一端形成有搬入口 4,由該搬入口 4將對 標本1内送入諸如液晶顯示面板等所使用之玻璃製之基板 200909079 w。送入處之基板w可藉受旋轉驅動之上述搬送滾子 2而進行搬送’並由形成於上述處理糾之另—端之搬出口 5 送出。 如第1圖所不，上述處理槽i構成形成於其上面之開口 5部7可藉外罩6而進行開閉。上述處理槽m，沿行基板w之 搬送方向按預定間隔分設有可對藉上述搬送滾子2而搬送 於該處理槽1内之基板w進行刷洗作業之2個刷子單元丨丨（顯 不於第2圖）。上述處理槽i之底部則經排液管8而與廢液槽9 相連通。 1〇 上述刷子單元11則如第3圖乃至第5圖所示，包含由第1 支持體12與第2支持體13所支持，而構成轴向之一端部與另 一端部如後述般使軸線呈平行狀態之上部軋輥刷14與下部 軋輥刷15 各支持體12、13皆包含矩形之底板17。該底板17之上 面分別立設有構成第1 '第2導引機構之截面形狀呈口字狀 之導引構件18。如第6與第7圖所示，各導引構件18之内面 上部沿上下方向設有線型導軌19。 第1支持體12設有第1上部可動體21與第1下部可動體 22 ’並使其等可朝上下方向移動，第2支持體13則設有第2 2〇上部可動體23與第2下部可動體24,並使其等可朝上下方向 移動。 各可動體21〜24皆包含可與上述線型導軌19卡合而進 行滑動之滑動部25。各滑動部25則設有安裝板26並呈板面 垂直之狀態。如第6圖所示，第1上部可動體21與第1下部可 200909079 動體22之安裝板26分別設有—對徑向轴承28(僅圖示第以 部可動體21)，並呈軸芯在水平方向上一致之狀態。一對徑 向軸承28則為外罩29所覆蓋。第6圖中顯示了第】下部可動 體22為外罩29所覆蓋，第1上部可動體21則已卸除外罩29之 5 狀態。 另，第4與帛5圖中則顯示第1Jl部可動體21與第】下部 可動體22分別為外罩29所覆蓋之狀態。 设於各第1上部可動體21與第}下部可動體22之安裝板 26上之各-對徑向軸承28支持有藉後述之接合部32而連結 ίο於上述上部軋輥刷Μ與下部軋輥刷15之刷軸31之一端上， 並呈可裝卸及可$疋轉之狀態之第1支軸33。 另，上述各軋輥刷14、15之刷軸31之兩端部以外之部 分之外周面上，舉例言之，藉以螺旋狀捲裝保持有刷毛之 保持構件等方式而形成有刷部34。 15 上述上部軋輥刷14之第1支軸33藉接合部37而連結於 上述女裝板26之寬度方向之端部上所設之第丄旋轉驅動源 35之旋轉軸36上。上述下部軋輥刷15之第丨支軸％，亦同樣 藉接合部41而連結於上述安裝板26之寬度方向之端部之上 述第1旋轉驅動源35之下方所設之第2旋轉驅動源％之旋轉 20 軸39上。 如第7圖所不，上述上部軋輥刷14與下部軋輥刷15之刷 轴31之另一端，則藉與連結上述第丨支軸33與刷軸3丨之一端 之上述接合部32相同構造之接合部32，連結有第2支轴42， 並呈可裝卸之狀態。 200909079 上述上部軋輥刷Μ與下部軋輥刷15之第2支軸42分別 為設於上述第2支持體13之第2上部可動體23與第2下部可 動體24所支持，並呈可旋轉之狀態。 即’第2上部可動體23與第2下部可動體24之安裝板％ 5上，行與軋輥刷14、之軸線垂直之水平方向按預定間 隔设有一對柱狀之安裝構件43。各安裝構件43則使軸線與 上述各軋輥刷14、15之軸線平行而設置安裝軸44，各安裝 軸44則裝設有支持滾子45，並使其呈可旋轉之狀態。 如第13圖所示，上述支持滾子45之外周面形成朝寬度 10方向彎曲之凸狀曲面46。其次，上述第2支袖42則為上述一 對支持滾子45之凸狀曲面46以點接觸狀態所支持，並呈可 方疋轉之狀態。藉此，第2支軸42即可朝一對支持滾子45沿軸 線方向移動，並朝與軸線方向交錯之方向進行搖動。 一對安裝構件43甲，在比為一對支持滾子45所支持之 15第2支軸42位於更上側之部分，藉未圖示之螺桿而裝設有橫 構件48，並呈可裝卸之狀態。該橫構件48則藉螺軸幻而設 有可防止1為一對支持滚子45所支持之第2支軸42自上述支 持滾子45大幅上移之壓制滾子49,並呈可旋轉之狀態。即， 壓制滾子49對第2支轴42之外周面雖為非接觸狀態，但可藉 20各軋輥刷14、15之重量而防止第2支軸42自支持滾子45_^ 移。 如上所述，第1支軸33為徑向軸承28所支持並呈可旋轉 之狀態、第2支軸42則為一對支持料45所支持並呈可旋轉 之狀態之上部軋親刷14與下部軋輥刷15，可藉上述第i旋轉 12 200909079 驅動源35與第2旋轉驅動源38之作動，而分別進行旋轉驅 動。 用以對上述刷軸31之一端與另一端連結上述第1支轴 33與第2支軸42之個別之接合部32之構造係如第12圖所 5示。即，連接於刷軸31之一端之第1、第2支軸33、42之先 知上’設有與上述刷軸31相同外形大小之凸緣52。該凸緣 52在圓周方向上按預定間隔穿設有複數（諸如4個）之通孔 53(僅圖示2個）。上述凸緣52之上述刷軸31之一端面所連接 之端面上，則設有圓盤狀之凸部54。 10 上述刷軸31之一端面上形成有可供嵌合上述凸部54之 凹部55，以及於該凹部55之周邊部對應上述通孔53之複數 螺孔56。其次，上述第1、第2支軸33、42可將凸緣52之凸 邓54嵌合於刷軸31之凹部55，並使該凸緣52接觸刷軸31之 一端面，而由通孔53對上述螺孔56螺合作為結合機構之連 15 結螺桿57，以連結成可裴卸之狀態。 依據前述連結構造，凸緣52對刷軸31之連結螺桿57之 連結方向，與洗淨基板W時對刷軸31賦與之振動方向垂 直，且，設於凸緣52之凸部54與設於刷軸31之凹部％嵌合， 故因此而發生於刷軸31之振動，將因該刷軸31與第丨、第2 2〇支軸33、42之連結部分之影響，而不易增大。 上述上部軋報刷14與下部軋輥刷15將因增長而增加重 量’故使用第14乃至第16圖所示之卸除用夹具％由第1、第 2支持體!2、i3進行卸除作業。上述卸除用失具58包含有吊 昇軸59，以及設於該吊昇車由59之兩端，並卡合於上述刷軸 13 200909079 31:部:呈可裝卸之狀態之釣部61。 诚/冑釣州卡合於上部軋輕刷14之刷轴31之兩 2，知、對上述吊昇轴59卡合鍵條吊車之鉤部（皆未圖示） L跑曰下以上述第1支轴33之凸緣52作為刷_之一端之連 並自刷_分解出^支軸33。 接著右自安裝構件43卸除設有彳祕帛U轴Μ而使其 自支持I子45上移之壓制滾子49之橫構件Μ，則使鍵 :吊車捲昇而藉上述卸除用爽具58吊昇上部軋輥刷14，即 °自對支持體12、13卸除上述上部軋輥刷14。 卸除上述上部礼親刷14後，對下部札輥刷15亦可同樣 對支持體12、13加以卸除。藉此，上部軋輥刷14與下 #軋輕刷15即便增長而增重，亦可輕易進行該等軋輕刷 14、15之修理點檢及更換作業。 15 上述基板w可搬送於上述丄部軋輥刷14與下部軋輥刷 5之間。上部軋輥刷14與下部軋輥刷15之間隔則可對應基 板W之厚度及洗淨條件等，藉上下驅動機構63朝上下方向 驅動該等軋輥刷14、15而設定。 上述上下驅動機構63可沿導引構件18而上下驅動設於 第1支持體12之第1上部可動體21與第1下部可動體22，_曰 2〇第1上部可動體21與第1下部可動體22進行上下移動，其上 下移動將經動力傳達機構64而傳達至設於第2支持體]3之 第2上部可動體23與第2下部可動體24。 上述上下驅動機構63如第8及第9圖所示，包含有設於 第1走持體12之底板17之下面之上部上下用驅動源6S，以及 14 200909079 下部上下用驅動源66。各驅動源65、66之旋轉袖恤、咖 則分別連結有第1凸輪轴67之-端。各第！凸輪軸67則為設 於上述底板17下面之各-對軸承構件7〇所支持，並呈可旋 轉之狀態。 5 —對第1凸輪轴67分別設有第1旋轉凸輪體68。上述第i 旋轉凸輪體68如第11圖所示，具有盤狀體69,該盤狀體仍 之-側面上，形成有藉圓孤狀之凹部71而於外周面構成凸 輪面72之凸輪部73。 一對第1旋轉凸輪體68之凸輪面72上，卡合有設於第1 1〇驅動構件75之下端部並呈可旋轉之狀態之凸輪從動件％。 上述凹部71之内周面與上述凸輪面72之間隔則設成與上述 凸輪從動件76之外形大小大致相同。 藉此，可保持上述凸輪從動件76之外周面與凸輪面72 之接觸狀態不致分離，故可限制設有凸輪從動件7 6之第i驅 15動構件75朝上下方向自由移動。 、如第8圖所示’上述一對第味動構件75係由形成於上 述底板17上之開口部17a朝該底板17之上面側突出者。與為 上邛上下用驅動源65所旋轉驅動之第丨旋轉凸輪體68之旋 轉連動而上下移動之—方之第1驅動構件75之上端，則與設 j第1支持體12之第1上部可動體21連結，與為下部上下用 藤動源66所旋轉驅動之第1旋轉凸輪體68之旋轉連動而上 下移動之他方之第丨驅動構件乃之上端，則與第1下部可動 體22連結。 因此，若藉上部上下用驅動源65旋轉驅動第丨旋轉凸輪 15 200909079 體68 ’則可藉其旋轉而沿行設於第1支持體12之線型導軌i9 而朝上昇方向或下降方向驅動第1上部可動體21，若藉下部 上下用驅動源66旋轉驅動第1旋轉凸輪體則可藉其旋轉 而同樣朝上幵方向或下降方向驅動第1下部可動體22。 5 上述第1上部可動體21與第1下部可動體22之上下移 動，可藉上述動力傳達機構64而傳達至設於第2支持體13之 上述第2上部可動體23與第2下部可動體24。藉此，設於第2 支持體13之第2上部可動體23與第2下部可動體24，即可與 上述第1上部可動體21與第1下部可動體22之上下移動進行 10 連動。 上述動力傳達機構64包含一端藉接合部77而連結於一 對第1凸輪軸67之另-端，且呈可裝卸之狀g之—對連動軸 78。各連動軸78之另—端則如第1〇圖所示，分別藉接合部 肋而連結有第2凸輪軸79之一端，並呈可分解之狀態。一對 15第2凸輪軸79則分別設有第2旋轉凸輪體81。第2旋轉凸輪體 構每一第11圖所不之上述第丨旋轉凸輪體68相同，故省 上述第2凸輪轴79為設於上述第2支持體13之底板17下 20 轉凸輪構件82所支持，並呈可旋轉之狀態。各第2旋 於第4之凸輪面72上則卡合有於第、動構件83(顯示 、—、^圖）之下端設置成可旋轉之凸輪從動件84。 17ai_ - * ^動構件83係由形成於上述底板17之開口部 於第_朝上面側突出者。如第4與第5圖所示， 下用驅動源65而旋轉驅動之一方之連動轴78側之 16 200909079 * a轉凸輪體81所上下驅動之—方之第2驅動構件83之上 第上柯動體23連結，他方之第2驅動構件幻之上端 則與第2下部可動體24連結。 s夕㈣卩^上部上下用軸源辦下部上下用驅動源沾 崎轉艇動第j凸輪軸67，則其旋轉將經連動軸Μ而 第2凸輪轴79,故可使第1旋轉凸輪體68與第2旋轉凸 輪體81連動旋轉。 珩疋轉凸 若使第1旋轉凸輪體68與第2旋轉凸輪體81連動旋轉， 職等凸輪體68、81可使第1驅動節5與第2驅動構件83 1〇連動而上下移動，故設於第】支持體12與第2支持體^之第1 上α阿動體21與第2上部可動體23及第^部可動體靡第 2下部可浦24,即可連動而上下移動。 、 因此，可與各—對上部可動體2卜23及下部可動體22、 24之上下移動連動’而使上純輥祕與下輕輥刷15分 15別在水平狀態下進行上下移動。 20 如第Η)圖所示…對第2凸輪軸79分別設有驅動旋轉齒 輪86，該等驅動旋轉齒輪86之旋轉則可傳達至從動旋轉齒 輪87。從動旋轉齒輪87則設於受支持於上述第2支持體13之 底板π下面並呈可旋轉之狀態之支軸88。該支細則按預 定間隔設有複數之角度檢知圓板89。各角度檢知圓板89則 設有未圖示之缺口。各角度檢知圓板89係由各缺口在圓周 方向上錯開角度而設於上述支軸88上者。 上述底板17設有與上述角度檢知圓板89對向而可檢知 各角度檢知圓板89之缺口之檢知感測器9〇。該等檢知感測 17 200909079 器90，在第2凸輪軸79旋轉，且其旋轉經驅動旋轉齒輪沾與 從動旋轉齒輪87而傳達至上述支軸88,而使角度檢知圓板 89與該支軸88—同旋轉時，可藉已檢知角度檢知圓板的之 缺口之一檢知感測器90，檢知此時之第2凸輪軸79之旋轉角 5度，即，經連結有第2凸輪軸79之連動軸78而為上部上下用 驅動源65與下部上下用驅動源66所旋轉驅動之一對第！凸 輪軸67之旋轉角度。 上述上部上下用驅動源65與下部上下用驅動源66可藉 來自檢知感測器9〇之檢知訊號，而限制其驅動。藉此，上 10部軋輥刷14與下部軋輥刷15之上下方向之位置，即，上部 軋輥刷14與下部軋輥刷15之間隔，可依基板w之厚度及洗 淨條件等而設定。 如第3圖所示，第1支持體12與第2支持體13之底板17 下面’分別為下部外罩91所覆蓋，上面側則為上部外罩92 15所覆蓋。藉此，即可遮蓋設於上述底板17之下面與上面之 各種零件。 如第2圖所示，可對上述上部軋輥刷14及將洗淨之基板 W上面藉噴嘴體93供給洗淨液。如第3乃至第5圖所示，各 軋輥刷14、15之刷軸31之一端與另一端所連結之第1、第2 20 支軸33、42，設有可阻止所供給之洗淨液流過各支軸33、 42’而流至處理槽1之外部之一對阻液構件94。 依據上述構造之刷子洗淨裝置，設於上部軋輥刷14之 刷軸31之一端之第1支軸33與第1旋轉驅動源35之旋轉軸36 連結’設於另一端之第2支軸42則為設於第2上部可動體23 18 200909079 之一對支持滚子45之凸狀曲面46以點接觸狀態所支持。 同樣地，設於下部軋輥刷15之刷軸31之一端之第丨支輛 33與第2旋轉驅動源38之旋轉軸39連結，設於另一端之第之 支軸42則為設於第2上部可動體23之一對支持滾子45之凸 5 狀曲面46以點接觸狀態所支持。 因此，支持各刷軸31之一端之第1支軸33與另一端之第 2支軸42之位置即便在水平方向或垂直方向上發生偏移，因 以一對支持滚子45之凸狀曲面46以點接觸狀態支持第2支 軸42，故上述第2支軸42可對應偏移而移位，以吸收偏移之 10 影響。 即，第2支轴42以與一對支持滾子45之凸狀曲面46之接 觸點為支點而為之所支持，並可對水平方向及垂直方向分 別進行搖動。因此，指示各刷軸31之一端之第丨支軸33與另 一端之第2支軸42之位置即便發生偏移，其偏移亦可由第2 15支軸42之搖動移位所吸收，故第1、第2支軸33、42及連結 有該等支軸33、42之各軋輥刷14、15之刷軸31將不致承受 應力。 故而，各軋輥刷14、15即便長時間進行旋轉驅動，亦 無因應力而使刷軸31及第i、第2支軸33、42發生破裂，或 20由上述破裂部分開始斷裂之虞，且可避免支持第i支轴33之 徑向軸承28提早受損。 支持上述上部軋輥刷14之刷軸31之一端之第丨支軸33 之第1上部可動體21，以及支持下部軋輥刷15之刷軸31之_ 端之第1支軸33之第1下部可動體22，若沿行導引構件18之 19 200909079 線型導軌19而上下移動，則其上下移動將經動力傳達機構 64而使支持各軋輥刷14、15之刷轴31之另一端所連結之第j 支軸33並使其呈可旋轉之狀態之第2上部可動體23與第2下 部可動體24進行連動。 5 藉此，設於上部軋輥刷14與下部軋輥刷15之刷軸31之 一端與另一端之第1支軸33與第2支軸42，即可分別朝上下 方向驅動相同距離程度，故可使上部軋輥刷14與下部軋輥 刷15水平地上下移動。 亦即，調整上部軋輥刷14與下部軋輥刷15之間隔時， 10由於該等軋輥刷14、15可水平地上下移動，故可在軸向全 長上將上述間隔設定成均一。即，可使上部軋輥刷14與下 部軋輥刷15平行地上下移動。 上述上部軋輥刷14與下部軋輥刷15之上下驅動，係分 別藉上部上下用驅動源65與下部上下用驅動源66旋轉驅動 15 一對第1、第2旋轉凸輪體68、81。其次，藉於下端設有卡 合於上述第1、第2旋轉凸輪體68、81之凸輪面72之凸輪從 動件76之第1驅動構件75與第2驅動構件83，將其旋轉改換 為上下移動’再將其上下移動傳達至第1上部可動體21與第 1下部可動體22及第1、第2下部可動體22、24。 2〇 上述第1、第2旋轉凸輪體68、81之凸輪面72係由凹部 71所形成’上述凸輪從動件76則置入於上述凹部71内而與 上述凸輪面72卡合。其次，沿行凹部71之徑向之大小與凸 輪從動件76之外徑大小，係設定成大致相同，故可確實維 持凸輪從動件76與凸輪面72之接觸狀態。 20 200909079 即，使基板W通過上部軋輥刷14與下部軋輥刷15間而 進行洗淨時，即便發生上推上部軋輥刷14或下部軋輥刷 ，尤其是發生上推上部軋輥刷14之力時，亦不致使凸輪 從動件76因該力而自凸輪面72上移，而使第1、第2上部可 5動體21、23(即上部軋輥刷14)朝上方位移。 藉此，上部軋輥刷14與下部軋輥刷15之間隔可常保固 定，故可藉該等軋輥刷14、15而確實進行基板W之洗淨。 各軋親刷14、15於刷軸31之一端連結第1支軸33並使其 呈可分解之狀態，並於另一端連結第2支軸42並使其呈可分 1〇解之狀態，以徑向軸承28支持該等第1支軸33並使其呈可旋 轉之狀態，亦以支持滾子45支持第2支軸42並使其呈可旋轉 之狀態。 文支持而呈可旋轉之狀態之第i、第2支軸33、42將因 長期使用而受損，故構成損壞時可更換之可分解構造。其 15次，若對刷軸31構成可與第1、第2支軸33、42分解自如之 構迨，則可能於其連接部分增大對各軋輥刷14、15造成之 振動。 然而，上述第1、第2支軸33、42與刷軸31之連結構造 係於支軸33、42設置凸緣52，並使該凸緣52與上述刷轴31 0之端Φ接觸’而藉螺桿軸51進行結合。此外，並於凸緣 形成凸部54 ’而於刷軸31之端面上形成有可與上述凸部“ 嵌合之凹部55。 亦即，刷軸31與支軸33、42之凸緣52，係藉螺桿軸51 及凸部54與凹部55之嵌合而對與徑向垂直之方向之轴向進 21 200909079 :结合’故洗淨基板，，即便對各軋輥刷14、15造成授 ° 、動’亦可防止該軸因刷軸31與支軸33、42在軸向 上連結之結合部分而増大。 5 10 上述-實施例中，雖藉壓制滾子而防止為一對支持滾 持之第2支軸自支持滾子45上移，但因軋輥刷將因增 長而増重，故即便科壓制滾子，亦可藉其重量防止上移。 【陶式簡單說明】 第1圖係裝设有代表本發明_實施例之刷子單元之刷 子洗淨裝置之縱截面圖。 第2圖係刷子洗淨裝置之概略構造圖。 第3圖係由斜上方觀察刷子單元之立體圖。 第4圖係由斜下方觀察刷子單元之立體圖。 第5圖係由斜下方觀察由一對支持體卸下外罩後之刷 子單元之立體圖。 第6圖係顯示連結於一對軋輥刷之刷軸之一端之第1支 軸之支持構造之立體圖。 第7圖係顯示連結於一對軋輥刷之刷軸之另一端之第2 支軸之支持構造之立體圖。 第8圖係顯示可上下驅動設於第丨支持體之第1上部可 20動體與第1下部可動體之上下驅動機構之立體圖。 第9圖係放大顯示上下驅動機構之立體圖。 第10圖係第2支持體之設有第2旋轉凸輪體之部分之放 大立體圖。 第11圖係顯示第1、第2旋轉凸輪體之正面圖。 22 200909079 第12圖係顯示刷軸與支持軸之連結構造者。 第13圖係可支持第2支軸之支持滾子之截面圖。 第14圖係使用卸除用夾具而卸除上部軋輥刷時之立體 圖。 5 第15圖係顯示於刷軸之一端卡合有卸除用夾具之鉤部 之狀態之立體圖。 第16圖係顯示於刷轴之另一端卡合有卸除用夾具之鉤 部之狀態之立體圖。 【主要元件符號說明】 1…處理槽 15…下部軋親刷 2…搬送滚子 17…底板 3…搬送機構 17a…開口部 4···搬入口 18…導引構件 5··.搬出口 19…線型導軌 6…外罩 21…第1上部可動體 7…開口部 22…第1下部可動體 8…排液管 23…第2上部可動體 9…廢液槽 24…第2下部可動體 11···刷子單元 25…滑動部 12…第1支持體 26…安裝板 13…第2支持體 28···徑向軸承 14··.上部軋綱 29…外罩 23 200909079 31…刷轴 32…接合部 33…第1支車由 34…刷部 35…第1旋轉驅動源 36".旋轉轴 37…接糾 38…第2旋轉驅動源 39".旋轉轴 41…接合部 42…第2支軸 43…安裝構件 44…安裝轴 45…支持滾子 46···凸狀曲面 48…橫構件 49…壓制滾子 5l···螺桿軸 52···凸緣 53…通孔 54···凸部 55…凹部 56…螺孔 57…連結螺桿 58…卸除用夾具 59…吊昇轴 61…釣部 63…上下驅動機構 64…動力傳達機構 65…上部上下用驅動源 66…下部上下用驅動源 65a、66a...旋轉轴 67…第1凸輪軸 68…第1旋轉凸輪體 69…盤狀體 70…軸承構件 71…凹部 72···凸輪面 73…凸輪部 75…第1驅動構件 76…凸輪從動件 77…接合部 24 200909079 78…連動軸 88…支轴 79…第2凸輪軸 89…角度檢知圓板 80…接合部 90…檢知感測器 81…第2旋轉凸輪體 91…下部外罩 82…軸承構件 92…上部外罩 83…第2驅動構件 93…噴嘴體 84…凸輪從動件 94…阻液構件 86···驅動旋轉齒輪 W…紐 87…從動旋轉齒輪 25And rotating the above-mentioned brush shaft; and a pair of supporting surfaces form a convex curved surface, and the surface of the outer peripheral brush shaft is rotatably connected by the curved surface in a point contact manner. W support According to the present invention, since the radial end supports the dry end portion and makes it rotatable, the other end portion makes the wheel-: convex curved surface form a point contact with the outer peripheral surface, and the sub-subject constitutes The second offset = offset will also be - (10) the loss of the radial bearing in the rotatable state, holding the end of the brush shaft and making it a simple illustration. The sub-washing/setting system U represents the present invention - an embodiment Longitudinal sectional view of the brush unit of the brush unit. π brush = schematic structure diagram of the brush cleaning device. = The perspective view of the brush unit is observed obliquely from above. The perspective view of the brush unit is observed obliquely from below. The perspective view of the subunit is observed obliquely from below. The 后 support after removing the cover is shown in Fig. 6 is a perspective view showing the support structure connected to the material. The U through the _ the brush shaft 1 is shown in Fig. The other end of the brush shaft of the roller brush 2nd 2009090 Fig. 8 is a perspective view showing the upper upper movable body and the lower lower driving mechanism of the first lower movable body which can be driven up and down by the first support body. Fig. 9 is an enlarged view Fig. 10 is an enlarged perspective view showing a portion of the second support body in which the second rotating cam body is provided. Fig. 11 is a front view showing the first and second rotating cam bodies. Fig. 12 is a front view Fig. 13 is a cross-sectional view of a supporting roller that can support the second fulcrum. Fig. 14 is a perspective view of the upper roller brush when the removing jig is removed. The figure is a perspective view showing a state in which the hook portion of the removing jig is engaged with one end of the brush shaft. Fig. 16 is a perspective view showing a state in which the hook 15 of the removing jig is engaged with the other end of the brush shaft. [Embodiment: J. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a longitudinal sectional view showing a horizontal brush cleaning device, and the brush 20 cleaning device includes processing Slot 1. The inside of the processing tank 1 is as As shown in Fig. 2, a transport mechanism 3 including a plurality of transport rollers 2 is provided. The transport rollers 2 can be rotationally driven in a predetermined direction by a drive mechanism (not shown). The loading port 4 is configured to feed the substrate 1 into a substrate made of glass such as a liquid crystal display panel, such as a liquid crystal display panel, by the loading port 4. The substrate w at the feeding place can be rotated by the above-described conveying roller 2 The conveyance is sent out by the outlet 5 formed at the other end of the processing. As shown in Fig. 1, the processing tank i is configured such that the opening 5 portion 7 formed on the upper surface of the processing tank i can be opened and closed by the outer cover 6. In the groove m, two brush units 可 which are capable of brushing the substrate w conveyed in the processing tank 1 by the transport roller 2 are arranged at predetermined intervals along the transport direction of the row substrate w (not shown 2 picture). The bottom of the treatment tank i is connected to the waste liquid tank 9 via the drain pipe 8. 1A, the brush unit 11 is supported by the first support body 12 and the second support body 13 as shown in FIG. 3 to FIG. 5, and one end portion and the other end portion of the axial direction are aligned as described later. In the parallel state, the upper roller brush 14 and the lower roller brush 15 each support body 12, 13 each include a rectangular bottom plate 17. Guide members 18 having a cross-sectional shape of a first 'second guide mechanism' are formed on the upper surface of the bottom plate 17, respectively. As shown in Figs. 6 and 7, the upper surface of the inner surface of each of the guide members 18 is provided with a linear guide 19 in the vertical direction. The first support body 12 is provided with the first upper movable body 21 and the first lower movable body 22' so as to be movable in the vertical direction, and the second support body 13 is provided with the second upper movable body 23 and the second. The lower movable body 24 is allowed to move in the up and down direction. Each of the movable bodies 21 to 24 includes a sliding portion 25 that can be engaged with the linear guide rail 19 to slide. Each of the sliding portions 25 is provided with a mounting plate 26 and is in a state in which the plate faces are perpendicular. As shown in Fig. 6, the first upper movable body 21 and the first lower movable member 200909079 of the mounting plate 26 of the movable body 22 are respectively provided with a pair of radial bearings 28 (only the first movable body 21 is shown) and are axially oriented. The state in which the cores are uniform in the horizontal direction. A pair of radial bearings 28 are covered by a cover 29. In Fig. 6, the lower movable body 22 is covered by the outer cover 29, and the first upper movable body 21 is unloaded from the outer cover 29. Further, in the fourth and fifth figures, the first J1 movable body 21 and the second lower movable body 22 are each covered by the outer cover 29. Each of the pair of radial bearings 28 provided on the mounting plate 26 of each of the first upper movable body 21 and the lower movable body 22 supports the upper roller brush and the lower roller brush by a joint portion 32 which will be described later. At one end of the brush shaft 31 of the 15th, the first support shaft 33 is detachably and slidable. Further, on the outer peripheral surface of the portions other than the both end portions of the brush shafts 31 of the respective roll brushes 14, 15, for example, the brush portion 34 is formed by a spirally wound holding member holding the bristles. The first support shaft 33 of the upper roll brush 14 is coupled to the rotary shaft 36 of the second rotary drive source 35 provided at the end portion of the women's plate 26 in the width direction by the joint portion 37. The second spur shaft % of the lower roller brush 15 is also connected to the second rotary drive source provided below the first rotary drive source 35 at the end portion in the width direction of the attachment plate 26 by the joint portion 41. Rotate 20 on the axis 39. As shown in Fig. 7, the other ends of the upper roller brush 14 and the brush shaft 31 of the lower roller brush 15 are constructed in the same manner as the above-mentioned joint portion 32 which connects one end of the second support shaft 33 and the brush shaft 3丨. The joint portion 32 is coupled to the second support shaft 42 and is detachably attached. 200909079 The second support shafts of the upper roll brush and the lower roll brush 15 are supported by the second upper movable body 23 and the second lower movable body 24 provided in the second support body 13, respectively, and are rotatable. . In other words, in the mounting plate % 5 of the second upper movable body 23 and the second lower movable body 24, a pair of columnar mounting members 43 are provided at predetermined intervals in the horizontal direction perpendicular to the axis of the roll brush 14. Each of the mounting members 43 is provided with a mounting shaft 44 such that an axis thereof is parallel to the axes of the respective roll brushes 14, 15, and each of the mounting shafts 44 is provided with a supporting roller 45 and is rotatably provided. As shown in Fig. 13, the outer peripheral surface of the support roller 45 is formed with a convex curved surface 46 which is curved in the width direction 10. Next, the second sleeve 42 is supported by the convex curved surface 46 of the pair of support rollers 45 in a point contact state, and is in a state of being rotatable. Thereby, the second support shaft 42 can be moved in the axial direction toward the pair of support rollers 45, and can be swung in a direction intersecting with the axial direction. The pair of attachment members 43A are provided on the upper side of the 15th second shaft 42 supported by the pair of support rollers 45, and the cross member 48 is attached by a screw (not shown) and is detachable. status. The cross member 48 is provided with a pressing roller 49 which can prevent the first support shaft 4 supported by the pair of support rollers 45 from being greatly moved upward from the support roller 45 by a screw shaft, and is rotatable. status. That is, the pressing roller 49 is in a non-contact state with respect to the outer peripheral surface of the second support shaft 42, but the second support shaft 42 can be prevented from moving from the support roller 45 by the weight of each of the roll brushes 14 and 15. As described above, the first support shaft 33 is supported by the radial bearing 28 and is rotatable, and the second support shaft 42 is supported by a pair of support members 45 and is in a rotatable state. The lower roll brush 15 can be rotationally driven by the ith rotation 12 200909079 drive source 35 and the second rotary drive source 38, respectively. The structure for connecting the joint portions 32 of the first support shaft 33 and the second support shaft 42 to one end and the other end of the brush shaft 31 is as shown in Fig. 12. That is, the first and second support shafts 33 and 42 connected to one end of the brush shaft 31 are provided with a flange 52 having the same outer shape as the brush shaft 31. The flange 52 is provided with a plurality of (e.g., four) through holes 53 (only two are shown) at predetermined intervals in the circumferential direction. A disc-shaped convex portion 54 is provided on an end surface of the flange 52 to which one end surface of the brush shaft 31 is connected. 10, one end surface of the brush shaft 31 is formed with a recess 55 for fitting the convex portion 54, and a plurality of screw holes 56 corresponding to the through hole 53 at a peripheral portion of the recess 55. Next, the first and second fulcrums 33, 42 can fit the convex portion 54 of the flange 52 to the concave portion 55 of the brush shaft 31, and the flange 52 contacts one end surface of the brush shaft 31, and the through hole 53. The screw holes 56 are screwed together to form a coupling screw 57 of the coupling mechanism to be coupled in a detachable state. According to the above-described connecting structure, the direction in which the flange 52 connects the connecting screw 57 of the brush shaft 31 is perpendicular to the direction of vibration of the brush shaft 31 when the substrate W is cleaned, and the convex portion 54 of the flange 52 is provided. Since the concave portion of the brush shaft 31 is fitted, the vibration of the brush shaft 31 is not easily increased due to the influence of the connection portion between the brush shaft 31 and the second and second support shafts 33 and 42. . The upper rolling brush 14 and the lower roller brush 15 are increased in weight by the increase. Therefore, the first and second supports +2 and i3 are removed by using the removal jig % shown in Figs. 14 to 16 . . The unloading and disabling tool 58 includes a lifting shaft 59, and is disposed at both ends of the lifting vehicle 59, and is engaged with the brush shaft 13 200909079 31: a fishing unit 61 in a detachable state. Cheng / 胄 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州 州The flange 52 of the support shaft 33 is connected as one end of the brush and is disassembled from the brush shaft 33. Then, the right self-mounting member 43 removes the cross member 彳 which is provided with the 帛 帛 U Μ Μ Μ 上 上 上 上 上 上 上 Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ 吊 吊 吊 吊 吊The upper roll brush 14 is lifted by the 58, that is, the upper roll brush 14 is removed from the support bodies 12, 13. After the upper ritual brush 14 is removed, the support rollers 12 and 13 can be removed in the same manner for the lower roller brush 15. Thereby, even if the upper roller brush 14 and the lower roller brush 15 are increased in weight, the repair inspection and replacement work of the roller brushes 14 and 15 can be easily performed. The substrate w is conveyed between the crotch roller brush 14 and the lower roller brush 5. The distance between the upper roll brush 14 and the lower roll brush 15 can be set by driving the roll brushes 14 and 15 in the vertical direction by the vertical drive mechanism 63 in accordance with the thickness of the substrate W and the cleaning conditions. The vertical drive mechanism 63 can vertically drive the first upper movable body 21 and the first lower movable body 22 provided in the first support body 12 along the guide member 18, and the first upper movable body 21 and the first lower portion. The movable body 22 moves up and down, and the vertical movement is transmitted to the second upper movable body 23 and the second lower movable body 24 provided in the second support body 3 via the power transmission mechanism 64. As shown in Figs. 8 and 9, the vertical drive mechanism 63 includes upper and lower upper drive sources 6S, and 14 200909079 lower upper and lower drive sources 66, which are provided on the lower surface of the bottom plate 17 of the first support 12. The end of the first cam shaft 67 is coupled to each of the rotating sleeves and the coffee makers of the drive sources 65 and 66. Each! The cam shaft 67 is supported by the respective pair of bearing members 7A disposed under the bottom plate 17, and is in a rotatable state. 5 - The first rotating cam body 68 is provided for each of the first cam shafts 67. As shown in Fig. 11, the i-th rotary cam body 68 has a disk-shaped body 69 on which the cam portion of the cam surface 72 is formed on the outer peripheral surface by forming a concave portion 71 by a circular shape on the side surface. 73. On the cam surface 72 of the pair of first rotating cam bodies 68, the cam follower % provided in the lower end portion of the first driving member 75 is rotatably engaged. The distance between the inner circumferential surface of the concave portion 71 and the cam surface 72 is set to be substantially the same as the outer shape of the cam follower 76. Thereby, the contact state between the outer peripheral surface of the cam follower 76 and the cam surface 72 can be maintained without being separated, so that the ith drive member 75 provided with the cam follower 76 can be freely moved in the vertical direction. As shown in Fig. 8, the pair of first agitating members 75 are protruded toward the upper surface side of the bottom plate 17 by the opening portion 17a formed in the bottom plate 17. The upper end of the first driving member 75 that moves up and down in conjunction with the rotation of the second rotating cam body 68 that is rotationally driven by the upper and lower driving source 65 is the first upper portion of the first support body 12 The movable body 21 is coupled to the first lower movable body 22 in connection with the upper end of the second driving member that is moved up and down in conjunction with the rotation of the first rotating cam body 68 that is rotatably driven by the lower vertical movable source 66. . Therefore, when the second rotary drive cam 15 200909079 body 68 ′ is rotationally driven by the upper and lower drive source 65, the linear guide rail i9 provided on the first support body 12 can be rotated by the upper drive shaft 65 to drive the first forward direction or the downward direction. When the first rotating cam body is rotationally driven by the lower vertical driving source 66, the upper movable body 21 can also drive the first lower movable body 22 in the upward or downward direction by the rotation. The first upper movable body 21 and the first lower movable body 22 move up and down, and can be transmitted to the second upper movable body 23 and the second lower movable body provided in the second support body 13 by the power transmission mechanism 64. twenty four. Thereby, the second upper movable body 23 and the second lower movable body 24 provided in the second support body 13 can move up and down with the first upper movable body 21 and the first lower movable body 22 in parallel. The power transmission mechanism 64 includes a pair of interlocking shafts 78 that are coupled to the other end of the pair of first cam shafts 67 by a joint portion 77 and that are detachable. The other end of each of the interlocking shafts 78 is connected to the one end of the second cam shaft 79 by the joint ribs as shown in Fig. 1 and is in a decomposable state. The pair of 15 second cam shafts 79 are respectively provided with a second rotating cam body 81. Since the second rotating cam body structure is the same as the second rotating cam body 68 which is not shown in each of the eleventh drawings, the second cam shaft 79 is provided by the bottom plate 17 of the second supporting body 13 and the second rotating cam member 82. Supported and in a rotatable state. Each of the second cam faces 72 is engaged with a cam follower 84 which is provided at a lower end of the first and movable members 83 (display, -, and). The 17ai_-*-moving member 83 is protruded from the opening portion formed on the bottom plate 17 on the first to the upper surface side. As shown in the fourth and fifth figures, the drive unit 65 is used to rotationally drive one of the interlocking shafts 78 on the side of the drive. The 2009/2009 second drive member 83 is driven up and down. The actuator 23 is coupled, and the upper end of the second drive member is coupled to the second lower movable body 24. s ( 四 四 四 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部 上部68 rotates in conjunction with the second rotating cam body 81. When the first rotating cam body 68 and the second rotating cam body 81 rotate in conjunction with each other, the positional cam bodies 68 and 81 can move the first driving section 5 and the second driving member 83 1〇 in the vertical direction, thereby moving up and down. In the first support body 12 and the second support body, the first upper movable body 21 and the second upper movable body 23 and the second movable body 靡 second lower detachable unit 24 are movable in the vertical direction. Therefore, the upper and lower movable bodies 2, 23 and the lower movable bodies 22 and 24 can be moved up and down, and the upper pure roller and the lower light roller brush 15 can be moved up and down in a horizontal state. As shown in Fig. 2, the second cam shaft 79 is provided with drive rotary gears 86, and the rotation of the drive rotary gears 86 is transmitted to the driven rotary gear 87. The driven rotary gear 87 is provided on a support shaft 88 which is supported by the bottom plate π of the second support 13 and is rotatable. This rule is provided with a plurality of angle detection discs 89 at predetermined intervals. Each of the angle detecting discs 89 is provided with a notch (not shown). Each of the angle detecting discs 89 is provided on the support shaft 88 by an angle of the notches shifted in the circumferential direction. The bottom plate 17 is provided with a detecting sensor 9A which is opposed to the angle detecting circular plate 89 and which can detect the notch of each of the angle detecting discs 89. The detection sensor 17 200909079 90 rotates on the second cam shaft 79, and the rotation thereof is transmitted to the support shaft 88 via the driven rotary gear and the driven rotary gear 87, so that the angle detecting disc 89 is When the fulcrum 88 is rotated, the sensor 90 can be detected by one of the notches of the detected disc, and the rotation angle of the second cam shaft 79 at this time is detected to be 5 degrees, that is, The interlocking shaft 78 of the second cam shaft 79 is coupled to one of the upper and lower driving sources 65 and the lower vertical driving source 66. The angle of rotation of the cam shaft 67. The upper vertical driving source 65 and the lower vertical driving source 66 can be limited in driving by detecting the detection signal from the sensor 9A. Thereby, the position of the upper roller brush 14 and the lower roller brush 15 in the up-down direction, that is, the interval between the upper roller brush 14 and the lower roller brush 15 can be set depending on the thickness of the substrate w, the washing conditions, and the like. As shown in Fig. 3, the lower side cover 91 of the first support body 12 and the bottom plate 17 of the second support body 13 is covered by the lower outer cover 91, and the upper side is covered by the upper outer cover 9215. Thereby, various parts provided on the lower surface and the upper surface of the bottom plate 17 can be covered. As shown in Fig. 2, the upper roll brush 14 and the upper surface of the cleaned substrate W can be supplied with the cleaning liquid by the nozzle body 93. As shown in the third to fifth figures, the first and second 20 shafts 33 and 42 connected to one end of the brush shaft 31 of each of the roller brushes 14, 15 are provided with a cleaning liquid which can be prevented from being supplied. It flows through each of the support shafts 33, 42' and flows to one of the outer portions of the treatment tank 1 to the liquid-repellent member 94. According to the brush cleaning device of the above configuration, the first support shaft 33 provided at one end of the brush shaft 31 of the upper roller brush 14 is coupled to the rotary shaft 36 of the first rotary drive source 35 by the second support shaft 42 provided at the other end. Then, one of the second upper movable bodies 23 18 200909079 is supported by the convex curved surface 46 of the supporting roller 45 in a point contact state. Similarly, the second support 33 provided at one end of the brush shaft 31 of the lower roller brush 15 is coupled to the rotary shaft 39 of the second rotary drive source 38, and the second support shaft 42 provided at the other end is provided at the second. One of the upper movable bodies 23 is supported by the convex 5-shaped curved surface 46 of the supporting roller 45 in a point contact state. Therefore, the position of the first support shaft 33 supporting one end of each brush shaft 31 and the second support shaft 42 at the other end are offset even in the horizontal direction or the vertical direction due to the convex curved surface of the pair of support rollers 45. Since the second support shaft 42 is supported in the point contact state, the second support shaft 42 can be displaced in accordance with the offset to absorb the offset 10 influence. That is, the second support shaft 42 is supported by the contact with the convex curved surface 46 of the pair of support rollers 45 as a fulcrum, and can be shaken in the horizontal direction and the vertical direction, respectively. Therefore, even if the position of the second support shaft 33 indicating one end of each brush shaft 31 and the second support shaft 42 at the other end are shifted, the offset can be absorbed by the shaking displacement of the second 15 support shaft 42. The first and second support shafts 33, 42 and the brush shafts 31 of the respective roll brushes 14, 15 to which the support shafts 33, 42 are coupled will not be subjected to stress. Therefore, even if the roll brushes 14 and 15 are rotationally driven for a long period of time, the brush shaft 31 and the i-th and second support shafts 33 and 42 are not broken by the stress, or 20 is broken by the cracked portion. Premature damage to the radial bearing 28 supporting the i-th axle 33 can be avoided. The first upper movable body 21 supporting the second support shaft 33 at one end of the brush shaft 31 of the upper roller brush 14 and the first lower movable shaft 33 supporting the other end of the brush shaft 31 of the lower roller brush 15 are movable. When the body 22 moves up and down along the 19 200909079 linear guide 19 of the row guiding member 18, the upper and lower movements thereof are connected to the other end of the brush shaft 31 supporting the respective roller brushes 14, 15 via the power transmission mechanism 64. The second upper movable body 23 that is in the rotatable state of the support shaft 33 is interlocked with the second lower movable body 24. Therefore, the first support shaft 33 and the second support shaft 42 provided at one end of the upper roller brush 14 and the lower roller brush 15 and the second support shaft 42 can be driven to the same distance in the vertical direction. The upper roller brush 14 and the lower roller brush 15 are horizontally moved up and down. That is, when the interval between the upper roll brush 14 and the lower roll brush 15 is adjusted, 10 since the roll brushes 14, 15 can be horizontally moved up and down, the interval can be set to be uniform in the axial full length. That is, the upper roller brush 14 can be moved up and down in parallel with the lower roller brush 15. The upper roller brush 14 and the lower roller brush 15 are driven up and down, and the pair of first and second rotary cam bodies 68 and 81 are rotationally driven by the upper vertical drive source 65 and the lower vertical drive source 66, respectively. Then, the first drive member 75 and the second drive member 83 of the cam follower 76 that are engaged with the cam faces 72 of the first and second rotary cam bodies 68 and 81 are provided at the lower end, and the rotation is changed to The upper and lower movements are transmitted to the first upper movable body 21, the first lower movable body 22, and the first and second lower movable bodies 22 and 24, respectively. The cam surface 72 of the first and second rotating cam bodies 68 and 81 is formed by the concave portion 71. The cam follower 76 is placed in the concave portion 71 to be engaged with the cam surface 72. Further, the size of the radial direction of the row concave portion 71 and the outer diameter of the cam follower 76 are set to be substantially the same, so that the contact state between the cam follower 76 and the cam surface 72 can be surely maintained. 20 200909079 In other words, when the substrate W is washed by the upper roll brush 14 and the lower roll brush 15, even if the upper roll brush 14 or the lower roll brush is pushed up, especially when the upper roll brush 14 is pushed up, Therefore, the cam follower 76 is not moved upward from the cam surface 72 by the force, and the first and second upper movable bodies 21 and 23 (i.e., the upper roller brush 14) are displaced upward. Thereby, the interval between the upper roll brush 14 and the lower roll brush 15 can be constantly fixed, so that the substrate W can be reliably washed by the roll brushes 14 and 15. Each of the rolling contact brushes 14 and 15 connects the first support shaft 33 to one end of the brush shaft 31 and is in a decomposable state, and connects the second support shaft 42 to the other end to be in a state of being separable. The first support shafts 33 are supported by the radial bearings 28 in a rotatable state, and the second support shafts 42 are supported by the support rollers 45 so as to be rotatable. The i-th and second fulcrums 33, 42 which are supported in a rotatable state will be damaged by long-term use, and thus constitute a decomposable structure that can be replaced when damaged. On the other hand, if the brush shaft 31 is configured to be disassembled with the first and second support shafts 33 and 42, the vibration of each of the roller brushes 14, 15 may be increased at the joint portion. However, the connection structure of the first and second support shafts 33, 42 and the brush shaft 31 is such that the flanges 52 are provided on the support shafts 33, 42 and the flange 52 is brought into contact with the end Φ of the brush shaft 31 0'. Bonding is performed by the screw shaft 51. Further, a convex portion 54' is formed on the flange, and a concave portion 55 which is engageable with the convex portion is formed on the end surface of the brush shaft 31. That is, the flange 52 of the brush shaft 31 and the support shafts 33, 42 is By the fitting of the screw shaft 51 and the convex portion 54 and the concave portion 55, the axial direction 21 200909079 is combined with the direction perpendicular to the radial direction, so that the substrate is cleaned, even if the rollers 14 and 15 are given, The movement 'can also prevent the shaft from being enlarged by the joint portion of the brush shaft 31 and the support shafts 33, 42 in the axial direction. 5 10 In the above-described embodiment, the first step is to prevent the pair from supporting the rolling. The two shafts move up from the support roller 45, but because the roller brush will be heavy due to the increase, even if the roller is pressed, the weight can be prevented from moving up. [Simple description] The first figure is installed. Fig. 2 is a schematic cross-sectional view showing a brush cleaning device of a brush unit of the present invention. Fig. 3 is a perspective view showing a brush unit viewed obliquely from above. Fig. 4 is a perspective view of the brush unit. A perspective view of the brush unit is viewed obliquely from below. Figure 5 is a view of the pair of supports removed by obliquely downward viewing. A perspective view of the brush unit behind the cover. Fig. 6 is a perspective view showing a support structure of the first support shaft connected to one end of the pair of roll brushes. Fig. 7 is a view showing a brush shaft coupled to a pair of roll brushes. A perspective view of the support structure of the second support shaft at the other end. Fig. 8 is a perspective view showing the upper and lower drive mechanisms of the first upper movable body and the first lower movable body which are vertically movable on the second support. Fig. 10 is an enlarged perspective view showing a portion of the second support body in which the second rotary cam body is provided. Fig. 11 is a front view showing the first and second rotary cam bodies. 200909079 Fig. 12 shows the structure of the connection between the brush shaft and the support shaft. Fig. 13 is a sectional view of the support roller that can support the second shaft. Fig. 14 shows the use of the removal clamp to remove the upper roller brush. Fig. 15 is a perspective view showing a state in which the hook portion of the removing jig is engaged at one end of the brush shaft. Fig. 16 shows a hook portion of the removing jig at the other end of the brush shaft. A perspective view of the state. [Main components No. Description: 1...Processing tank 15...Powder rolling brush 2...Transporting roller 17...Backing plate 3...Transporting mechanism 17a... Opening section 4···Transporting port 18...Guiding member 5··.Transporting port 19...Line rail 6...cover 21...first upper movable body 7...opening 22...first lower movable body 8...drain pipe 23...second upper movable body 9...waste liquid tank 24...second lower movable body 11···brush Unit 25...sliding portion 12...first support body 26...mounting plate 13...second support body 28···radial bearing 14··. upper rolling frame 29... outer cover 23 200909079 31...brush shaft 32...joining portion 33... The first car is mounted by 34... brush unit 35... first rotary drive source 36". rotary shaft 37...correction 38...second rotary drive source 39".rotary shaft 41...joining portion 42...second pivot 43...installation Member 44... mounting shaft 45... support roller 46··· convex curved surface 48... cross member 49...pressing roller 5l···screw shaft 52···flange 53...through hole 54··· convex portion 55... Concave portion 56...coil hole 57...connection screw 58...removal jig 59...lifting shaft 61...fishing portion 63...up and down drive mechanism 64...power transmission mechanism 65...upper Driving source 66 for upper and lower parts... Driving source 65a, 66a for lower and lower parts... Rotating shaft 67... First cam shaft 68... First rotating cam body 69... Disk body 70... Bearing member 71... Concave 72···Cam Surface 73... Cam portion 75... First drive member 76: Cam follower 77: Joint portion 24 200909079 78... Linkage shaft 88... Support shaft 79... Second cam shaft 89... Angle detection disc 80... Engagement portion 90... Detecting sensor 81...second rotating cam body 91...lower outer cover 82...bearing member 92...upper outer cover 83...second drive member 93...nozzle body 84...cam follower 94...blocking member 86···driver Rotating gear W...NEW 87... driven rotating gear 25