WO2018037934A1 - Plate glass cleaning device - Google Patents

Plate glass cleaning device Download PDF

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Publication number
WO2018037934A1
WO2018037934A1 PCT/JP2017/029093 JP2017029093W WO2018037934A1 WO 2018037934 A1 WO2018037934 A1 WO 2018037934A1 JP 2017029093 W JP2017029093 W JP 2017029093W WO 2018037934 A1 WO2018037934 A1 WO 2018037934A1
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WO
WIPO (PCT)
Prior art keywords
cleaning
gears
plate glass
glass
gear
Prior art date
Application number
PCT/JP2017/029093
Other languages
French (fr)
Japanese (ja)
Inventor
隼人 奥
浩市 北嶋
Original Assignee
日本電気硝子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気硝子株式会社 filed Critical 日本電気硝子株式会社
Priority to KR1020197007798A priority Critical patent/KR102419069B1/en
Priority to CN201780051109.XA priority patent/CN109641242A/en
Publication of WO2018037934A1 publication Critical patent/WO2018037934A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • B08B1/20—
    • B08B1/32—
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075—Cleaning of glass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H55/00—Elements with teeth or friction surfaces for conveying motion; Worms, pulleys or sheaves for gearing mechanisms
    • F16H55/02—Toothed members; Worms
    • F16H55/06—Use of materials; Use of treatments of toothed members or worms to affect their intrinsic material properties

Definitions

  • the present invention relates to a technology for a plate glass cleaning apparatus.
  • a glass substrate for a flat panel display such as a liquid crystal display or an organic EL display
  • the glass surface of the glass substrate (specifically, an electronic functional element on the glass surface, etc.) during the manufacturing process.
  • a cleaning process is performed to remove foreign matter such as fine glass pieces and dust adhering to the effective surface on which is formed. Thereby, the glass surface of a glass substrate is cleaned and it becomes possible to form an electronic functional element etc. accurately on the glass surface of a glass substrate in a post process etc.
  • Patent Document 1 discloses a substrate processing apparatus for cleaning the front and back surfaces of a wafer (for example, a glass substrate).
  • the substrate processing apparatus disclosed in Patent Document 1 includes a submerged loader that immerses a number of wafers in a pure liquid, a back surface cleaning device, a front surface cleaning device, and a transfer device.
  • the back surface cleaning apparatus has a circular brush fixed to the upper end of the rotating shaft, and by supplying the processing liquid to the wafer taken out from the submerged loader, the circular brush is brought into contact with the back surface of the wafer and rotated. Then, the back surface of the wafer is brush cleaned from below.
  • the front surface cleaning device brush cleans the surface of the wafer from above by supplying a chemical solution for chemical treatment to the wafer after cleaning by the back surface cleaning device.
  • a plate glass cleaning device having a plurality of cleaning members such as the circular brush, and pressing the glass against the glass surface of the plate glass while rotating the cleaning member to remove foreign matter adhering to the glass surface of the plate glass.
  • a gear for example, a spur gear
  • the plurality of gears can be rotated simultaneously to rotate the plurality of cleaning members.
  • the present invention has been made in view of the present problems described above, and an object of the present invention is to provide a plate glass cleaning device in which dust generation due to wear between gears is suppressed.
  • the flat glass cleaning apparatus is a flat glass cleaning apparatus for cleaning the glass surface of a flat glass, and is provided with a plurality of cleaning members, a rotation shaft that supports each of the plurality of cleaning members, and the rotation shaft. And a rotation driving means for driving at least one of the rotating shafts, wherein the gears mesh with each other between adjacent gears and are made of different materials.
  • the frictional resistance is smaller than when the gears are made of the same material due to the different materials between adjacent gears, and dust generation due to wear between the gears is suppressed. it can.
  • one of the adjacent gears is made of metal and the other gear is made of resin.
  • the sheet glass cleaning device it is preferable that a plurality of the metal gears and the resin gears are arranged so as to alternately mesh with each other.
  • the plurality of gears can be driven by driving at least one of the plurality of gears by the rotation driving unit, the plurality of rotation driving units are not required and maintenance is performed. It becomes easy.
  • the frictional resistance is smaller than when the gears are made of the same material, and dust generation due to wear of the gears can be suppressed.
  • FIG. 3 is a cross-sectional view taken along line AA in FIG. 2.
  • FIGS. 1 to 3 the vertical direction shown in FIGS. 1 and 3 is described as the vertical direction of the plate glass cleaning device 10.
  • FIG. 1 the direction of the arrow F is described as the conveyance direction of the plate glass G, and is described.
  • the direction orthogonal to the transport direction is defined as the width direction.
  • a sheet glass cleaning apparatus 10 (hereinafter simply referred to as a cleaning apparatus 10) according to the present embodiment is configured to rotate the cleaning member 11 by a motor M that is a rotation driving unit to rotate both surfaces of the glass surface of the sheet glass G.
  • This is a device for cleaning (the front surface and the back surface).
  • the cleaning device 10 is arranged on the conveyance path of the conveyance device in the production apparatus for the plate glass G, and is conveyed in a horizontal state from the upstream side to the downstream side (in FIG. 2, from the left side to the right side in the drawing). It is an apparatus for washing
  • a processing device (not shown) that performs various processing such as cutting processing and end surface processing on the plate glass G is provided on the upstream side of the cleaning device 10.
  • the cleaning device 10 performs a cleaning process for removing foreign substances such as fine glass powder and dust adhering to the front surface and the back surface of the glass surface of the glass sheet G through various processing steps provided on the upstream side. is there.
  • the cleaning device 10 has a plurality of cleaning members 11, 11... On the front surface side and the back surface side of the glass surface of the plate glass G, respectively.
  • the cleaning device 10 includes a plurality of cleaning members 11, 11, and 11 for cleaning the front surface side and the back surface side (in the present embodiment, the upper surface side and the lower surface side) of the glass surface of the plate glass G. .. are arranged opposite to each other with the plate glass G interposed therebetween.
  • cleaning apparatus 10 of this embodiment although comprised as an apparatus which wash
  • positioned at the upper surface side of the plate glass G is abbreviate
  • the cleaning device 10 includes a plurality of cleaning members 11, 11..., Rotating shafts 12, 12... That support each of the plurality of cleaning members 11, 11. And gears (spur gears) 13, 13..., And a motor M that is a rotation driving means for driving the rotary shafts 12, 12.
  • the motor M rotates the rotary shaft 12 directly.
  • a gear (not shown) is provided on the rotary shaft (not shown) of the motor M, and the gear 13 provided on the gear M of the motor M and the rotary shaft 12 of the cleaning member 11.
  • the motor M may rotate the gear 13.
  • the cleaning member 11 is a disk-shaped member, and mainly includes a cleaning pad 14 disposed to face the glass surface of the plate glass G, and a cleaning head 15 that holds the cleaning pad 14.
  • the cleaning members 11 are arranged side by side in a direction orthogonal to the transport direction in plan view.
  • the cleaning pad 14 can be made of an elastic body such as a hard resin or a soft resin.
  • a felt-like fiber molded body, a sponge-like foamed resin molded body, or a sponge-like foamed rubber molded body is formed into a circular shape. Is formed.
  • the material of the cleaning pad 14 is polyvinyl alcohol (PVA).
  • the cleaning pad 14 On the surface (contact surface) facing the plate glass G in the cleaning pad 14, a plurality (six in this embodiment) of concave grooves 14 a formed radially in the radial direction are provided.
  • the cleaning pad 14 is formed with a plurality of (three in the present embodiment) supply ports 14b for supplying the cleaning liquid to the central portion and the vicinity of the central portion.
  • the supply port 14b communicates with a cleaning liquid supply hole (not shown) of the cleaning head 15, and the cleaning liquid is supplied via the supply port 14b during the execution of the cleaning process.
  • the cleaning head 15 is formed in a disk shape from a metal material such as an aluminum alloy or stainless steel.
  • the rotating shaft 12 is a shaft member to which the cleaning head 15 of the cleaning member 11 is fixed at the tip.
  • the plurality of rotary shafts 12, 12... are rotatably supported by the rotary shaft support portion 16 so that the axial directions of the rotary shafts 12 are parallel to each other.
  • illustration of the rotation shaft support portion 16 that supports the rotation shafts 12 and 12 on the upper surface side of the glass sheet G and the gears 13 and 13 provided on the rotation shafts 12 and 12 are omitted.
  • the rotary shaft support portion 16 is moved away from the plate glass G by a forward position (contact position) where the plurality of cleaning pads 14 are brought into contact with one surface of the glass sheet G by a vertical position driving means (not shown). It is configured to be able to reciprocate between the retracted position (separated position) to be moved and to be rotatable.
  • a motor M is connected to one of the plurality of rotating shafts 12, 12..., And the rotating shaft 12 can be rotationally driven by rotating the motor M.
  • the plurality of rotating shafts 12, 12... Includes a drive shaft 12 a that is a rotating shaft connected to the motor M, and a driven shaft 12 b that is a rotating shaft that is not connected to the motor M. ...
  • the gear 13 meshes with each other between adjacent gears and is made of a different material.
  • the gear 13 is a spur gear provided in the middle of the rotating shaft 12 in the axial direction.
  • the gear 13 includes a metal gear 13a and a synthetic resin gear 13b, which mesh with each other and are alternately arranged in series. That is, the gears 13, 13,... Constitute a gear train that meshes in series, and are arranged so as to be orthogonal to the conveying direction of the glass sheet G.
  • the metal gear 13a is preferably made of a metal that does not easily rust, and is preferably made of stainless steel.
  • the synthetic resin gear 13b is preferably a hard resin.
  • PEEK resin polyether ether ketone resin
  • MC nylon resin or the like can be used.
  • a spur gear is used as the gear 13, but it is not particularly limited.
  • a helical gear can be used.
  • a row of cleaning members 11, 11... Arranged in series along a direction orthogonal to the conveying direction of the plate glass G is formed of plate glass.
  • a plurality of Gs are arranged at predetermined intervals along the G conveying direction (horizontal direction).
  • two rows are arranged on the upstream side and the downstream side along the conveyance direction (horizontal direction) of the plate glass G.
  • the arrangement mode of the cleaning members 11, 11... Is set so that a portion that is not cleaned in the cleaning region on one surface of the plate glass G does not occur.
  • the respective cleaning members 11, 11... Adjacent to each other in the conveying direction (horizontal direction) of the plate glass G are arranged with their positions in the width direction of the plate glass G being different (offset).
  • positioning aspect of the cleaning members 11.11 ... can be arbitrarily set unless the site
  • the cleaning liquid is continuously supplied and discharged from the supply port 14 b provided in each cleaning member 11 to the upper and lower surfaces of the plate glass G. That is, the cleaning process of the upper and lower surfaces of the plate glass G is performed in a state where a predetermined amount of cleaning liquid is interposed between the cleaning member 11 (cleaning pad 14) and the plate glass G.
  • the cleaning liquid is supplied from the supply port 14b of each cleaning pad 14, and the next row of the cleaning members 11, 11.
  • the row is sequentially moved from the retracted position (separated position) to the advanced position (contact position) while the upper and lower surfaces of the glass sheet G are cleaned.
  • the rotational driving force by the motor M is a plurality of gears corresponding to each of the gears 13, 13. .. Are transmitted to the rotary shafts 12, 12... As a result, the cleaning member 11 provided at the tip of each rotating shaft 12 rotates.
  • the gear 13 is engaged with each other between the adjacent gears 13 and 13 and is made of a different material.
  • the frictional resistance becomes smaller than when all the gears 13, 13... Are made of the same material, and dust generation due to wear between the gears can be suppressed.
  • one gear 13 is the metal gear 13a
  • the other gear 13 is the synthetic resin gear 13b.
  • dust metal powder generated
  • the gears 13a and 13a made of metal are engaged with each other, there is a possibility that dust (metal powder is generated) due to wear of the gears 13a and 13a.
  • Metal powder generated when gears made of metal are engaged with each other is less likely to be generated. Thereby, the contamination to the glass surface of the plate glass G by metal powder can be prevented.
  • the metal gear 13a is used, the durability of the gear 13 is improved and the replacement frequency of each gear 13 is suppressed as compared with the case where the synthetic resin gears 13b and 13b are engaged with each other. , It takes less time to maintain the equipment.
  • a plurality of metal gears 13a and synthetic resin gears 13b are arranged so as to alternately mesh with each other.
  • a plurality of gears 13, 13 ... (gears 13a, 13a ... and gears 13b, 13b ... )can be driven, a plurality of rotation driving means are not required, the apparatus configuration can be simplified, and maintenance is facilitated.
  • the plate glass cleaning apparatus according to the present invention can be used for cleaning the glass surface of a glass substrate, for example, when manufacturing a glass substrate for a flat panel display.

Abstract

The purpose of the present invention is to provide a plate glass cleaning device that suppresses dust generation due to abrasion between gears. Provided is a plate glass cleaning device (10) for cleaning a glass surface of a piece of plate glass (G), wherein: the plate glass cleaning device is provided with a plurality of cleaning members (11), rotating shafts (12) that support each of the plurality of cleaning members (11), gears (13) disposed on each of the rotating shafts (12), and a motor (M) that is a rotary drive means for driving at least one of the rotating shafts (12); and with respect to the gears (13), neighboring gears mesh with one another and are made of different materials.

Description

板ガラス洗浄装置Sheet glass cleaning equipment
　本発明は、板ガラス洗浄装置の技術に関する。 The present invention relates to a technology for a plate glass cleaning apparatus.
　一般的に、液晶ディスプレイ、有機ＥＬディスプレイなどのフラットパネルディスプレイ（ＦＰＤ）用のガラス基板を製造する際には、製造過程でガラス基板のガラス面（具体的には、ガラス面における電子機能素子等が形成される有効面）に付着した微小なガラス片や塵芥等の異物を取り除くための洗浄処理が行われる。これにより、ガラス基板のガラス面が清浄化され、後工程等においてガラス基板のガラス面上に電子機能素子等を精度良く形成することが可能となる。 Generally, when manufacturing a glass substrate for a flat panel display (FPD) such as a liquid crystal display or an organic EL display, the glass surface of the glass substrate (specifically, an electronic functional element on the glass surface, etc.) during the manufacturing process. A cleaning process is performed to remove foreign matter such as fine glass pieces and dust adhering to the effective surface on which is formed. Thereby, the glass surface of a glass substrate is cleaned and it becomes possible to form an electronic functional element etc. accurately on the glass surface of a glass substrate in a post process etc.
　例えば、特許文献１には、ウエハ（例えば、ガラス基板）の表面及び裏面を洗浄するための基板処理装置が開示されている。 For example, Patent Document 1 discloses a substrate processing apparatus for cleaning the front and back surfaces of a wafer (for example, a glass substrate).
　特許文献１に開示される基板処理装置は、多数のウエハを純液中に浸漬する液中ローダと、裏面洗浄装置と、表面洗浄装置と、搬送装置とを備えている。裏面洗浄装置は、回転軸の上端に固定される円形ブラシを有し、液中ローダから取り出されたウエハに処理液を供給することにより、円形ブラシをウエハの裏面に当接させるとともに回転させて、ウエハの裏面を下方からブラシ洗浄する。表面洗浄装置は、裏面洗浄装置による洗浄後のウエハに化学処理のための薬液を供給することにより、ウエハの表面を上方からブラシ洗浄する。 The substrate processing apparatus disclosed in Patent Document 1 includes a submerged loader that immerses a number of wafers in a pure liquid, a back surface cleaning device, a front surface cleaning device, and a transfer device. The back surface cleaning apparatus has a circular brush fixed to the upper end of the rotating shaft, and by supplying the processing liquid to the wafer taken out from the submerged loader, the circular brush is brought into contact with the back surface of the wafer and rotated. Then, the back surface of the wafer is brush cleaned from below. The front surface cleaning device brush cleans the surface of the wafer from above by supplying a chemical solution for chemical treatment to the wafer after cleaning by the back surface cleaning device.
　また、従来から、上記円形ブラシのような洗浄部材を複数有し、該洗浄部材を回転させながら板ガラスのガラス面に押し当てて、板ガラスのガラス面に付着した異物を取り除く板ガラス洗浄装置が用いられている。このような板ガラス洗浄装置では、複数の洗浄部材を回転させるために洗浄部材の各回転軸にギア（例えば、平歯車）を設けて、隣接するギア同士を噛み合わせて、そのうちの一つの駆動用のギアを駆動手段により回転させることで複数のギアを同時に回転させて複数の洗浄部材を回転させることができる。 Further, conventionally, there has been used a plate glass cleaning device having a plurality of cleaning members such as the circular brush, and pressing the glass against the glass surface of the plate glass while rotating the cleaning member to remove foreign matter adhering to the glass surface of the plate glass. ing. In such a plate glass cleaning device, in order to rotate a plurality of cleaning members, a gear (for example, a spur gear) is provided on each rotating shaft of the cleaning member, and adjacent gears are engaged with each other, and one of them is used for driving. By rotating the gears by the driving means, the plurality of gears can be rotated simultaneously to rotate the plurality of cleaning members.
特開平７－７４１３３号公報JP-A-7-74133
　しかしながら、上述の板ガラス洗浄装置が有する複数のギアを噛み合わせた機構では、隣接するギア同士が同一の材質で構成された場合、摩擦抵抗が大きくなるため、ギア同士の磨耗により発塵し、板ガラスのガラス面を汚染する原因となる。そのため、このような板ガラス洗浄装置においては、ギア同士の磨耗による発塵を抑制する構成が望まれていた。 However, in the mechanism in which a plurality of gears included in the plate glass cleaning device described above are engaged, when adjacent gears are made of the same material, friction resistance increases, so dust is generated due to wear of the gears, and the plate glass Cause contamination of the glass surface. Therefore, in such a plate glass cleaning apparatus, a configuration that suppresses dust generation due to wear between gears has been desired.
　本発明は、以上に示した現状の問題点を鑑みてなされたものであり、ギア同士の磨耗による発塵の抑制が図られた板ガラス洗浄装置を提供することを課題とする。 The present invention has been made in view of the present problems described above, and an object of the present invention is to provide a plate glass cleaning device in which dust generation due to wear between gears is suppressed.
　本発明の解決しようとする課題は以上の如くであり、次にこの課題を解決するための手段を説明する。 The problems to be solved by the present invention are as described above. Next, means for solving the problems will be described.
　即ち、本発明に係る板ガラス洗浄装置は、板ガラスのガラス面を洗浄する板ガラス洗浄装置であって、複数の洗浄部材と、前記複数の洗浄部材の各々を支持する回転軸と、前記回転軸に設けられるギアと、前記回転軸の少なくとも１つを駆動する回転駆動手段と、を備え、前記ギアは、隣接するギア同士で互いに噛合し、かつ材質が異なることを特徴とする。 That is, the flat glass cleaning apparatus according to the present invention is a flat glass cleaning apparatus for cleaning the glass surface of a flat glass, and is provided with a plurality of cleaning members, a rotation shaft that supports each of the plurality of cleaning members, and the rotation shaft. And a rotation driving means for driving at least one of the rotating shafts, wherein the gears mesh with each other between adjacent gears and are made of different materials.
　このような板ガラス洗浄装置によれば、隣接するギア同士で材質が異なることにより、ギアを同一の材質で構成した場合よりも摩擦抵抗が小さくなり、ギア同士の磨耗による発塵を抑制することができる。 According to such a plate glass cleaning device, the frictional resistance is smaller than when the gears are made of the same material due to the different materials between adjacent gears, and dust generation due to wear between the gears is suppressed. it can.
　また、本発明に係る板ガラス洗浄装置において、前記隣接するギア同士は、一方のギアが金属製であり、他方のギアが樹脂製であることが好ましい。 In the sheet glass cleaning device according to the present invention, it is preferable that one of the adjacent gears is made of metal and the other gear is made of resin.
　このような板ガラス洗浄装置によれば、金属製のギア同士を噛み合わせて構成した場合に発生する金属粉が発生し難くなる。
　これにより、金属粉による板ガラスのガラス面への汚染を防止することができる。
　さらに、金属製のギアを使用しているため、樹脂製のギア同士を噛み合わせて構成した場合より、ギアの耐久性が向上し、ギアの交換頻度が抑えられ、装置のメンテナンスに手間がかからない。 According to such a plate glass cleaning apparatus, metal powder generated when metal gears are engaged with each other is hardly generated.
Thereby, the contamination to the glass surface of the plate glass by metal powder can be prevented.
In addition, because metal gears are used, the durability of the gears is improved and the frequency of gear replacement is reduced compared to the case where resin gears are engaged with each other. .
　また、本発明に係る板ガラス洗浄装置において、前記金属製のギアと前記樹脂製のギアが交互に噛み合うように複数配置されることが好ましい。 Further, in the sheet glass cleaning device according to the present invention, it is preferable that a plurality of the metal gears and the resin gears are arranged so as to alternately mesh with each other.
　このような板ガラス洗浄装置によれば、複数のギアの少なくとも一つを回転駆動手段により駆動することで、複数のギアを駆動することができるため、複数の回転駆動手段を必要とせず、メンテナンスが容易となる。 According to such a plate glass cleaning apparatus, since the plurality of gears can be driven by driving at least one of the plurality of gears by the rotation driving unit, the plurality of rotation driving units are not required and maintenance is performed. It becomes easy.
　本発明によれば、隣接するギア同士で材質が異なることにより、ギアを同一の材質で構成した場合よりも摩擦抵抗が小さくなり、ギア同士の磨耗による発塵を抑制することができる。 According to the present invention, since the materials are different between adjacent gears, the frictional resistance is smaller than when the gears are made of the same material, and dust generation due to wear of the gears can be suppressed.
本発明の一実施形態に係る板ガラス洗浄装置において、洗浄部材近傍の構成を示した概念斜視図。In the plate glass washing | cleaning apparatus which concerns on one Embodiment of this invention, the conceptual perspective view which showed the structure of the washing | cleaning member vicinity. 板ガラス洗浄装置の洗浄部材を上方から見た平面図。The top view which looked at the washing | cleaning member of the plate glass washing | cleaning apparatus from upper direction. 図２におけるＡ－Ａ線矢視断面図。FIG. 3 is a cross-sectional view taken along line AA in FIG. 2.
　次に、本発明の一実施形態に係る板ガラス洗浄装置１０について、図１乃至図３を用いて説明する。
　なお、以下の説明に関しては便宜上、図１、図３に示す上下方向を、それぞれ板ガラス洗浄装置１０の上下方向と規定して記述する。
　また、図１、図２においては、矢印Ｆの方向を板ガラスＧの搬送方向と規定して記述する。
　また、図１、図２においては、搬送方向に直交する方向を幅方向と規定して記述する。 Next, a plate glass cleaning apparatus 10 according to an embodiment of the present invention will be described with reference to FIGS. 1 to 3.
In the following description, for convenience, the vertical direction shown in FIGS. 1 and 3 is described as the vertical direction of the plate glass cleaning device 10.
Moreover, in FIG. 1, FIG. 2, the direction of the arrow F is described as the conveyance direction of the plate glass G, and is described.
In FIGS. 1 and 2, the direction orthogonal to the transport direction is defined as the width direction.
　図１に示すように、本実施形態に係る板ガラス洗浄装置１０（以下、単に洗浄装置１０という）は、回転駆動手段であるモータＭにより洗浄部材１１を回転駆動して板ガラスＧのガラス面の両面（表面及び裏面）を洗浄する装置である。
　洗浄装置１０は、例えば、板ガラスＧの製造装置における搬送装置の搬送経路上に配置され、搬送装置により上流側から下流側（図２においては、図中左側から右側）に向けて水平状態で搬送される矩形状の板ガラスＧのガラス面の両面（表面及び裏面）を洗浄するための装置である。 As shown in FIG. 1, a sheet glass cleaning apparatus 10 (hereinafter simply referred to as a cleaning apparatus 10) according to the present embodiment is configured to rotate the cleaning member 11 by a motor M that is a rotation driving unit to rotate both surfaces of the glass surface of the sheet glass G. This is a device for cleaning (the front surface and the back surface).
For example, the cleaning device 10 is arranged on the conveyance path of the conveyance device in the production apparatus for the plate glass G, and is conveyed in a horizontal state from the upstream side to the downstream side (in FIG. 2, from the left side to the right side in the drawing). It is an apparatus for washing | cleaning both surfaces (front surface and back surface) of the glass surface of the rectangular-shaped plate glass G to be performed.
　なお、洗浄装置１０の上流側には、板ガラスＧに対して切断加工や端面加工等の種々の加工を施す加工装置等（図示せず）が設けられている。 A processing device (not shown) that performs various processing such as cutting processing and end surface processing on the plate glass G is provided on the upstream side of the cleaning device 10.
　洗浄装置１０は、上流側に設けられた各種加工工程を経ることによって板ガラスＧのガラス面の表面及び裏面に付着した微小なガラス粉や塵芥等の異物を取り除くための洗浄処理を実行するものである。洗浄装置１０は、板ガラスＧのガラス面の表面側及び裏面側にそれぞれ複数の洗浄部材１１・１１・・・を有している。
　なお、例えば本実施形態においては、洗浄装置１０は、板ガラスＧのガラス面の表面側及び裏面側（本実施形態では、上面側及び下面側）を洗浄するために複数の洗浄部材１１・１１・・・が板ガラスＧを介して上下に対向配置されている。
　また、本実施形態の洗浄装置１０では、板ガラスＧのガラス面の両面を洗浄する装置として構成しているが、特に限定するものでなく、板ガラスＧのガラス面の一方面（例えば、ガラス面における電子機能素子等が形成される有効面）のみを洗浄する装置として構成することもできる。
　また、図１及び図２では、洗浄装置１０において、板ガラスＧの上面側に配置される複数の洗浄部材１１・１１の図示を省略し、板ガラスＧの下側面に配置される複数の洗浄部材１１・１１・・・のみを図示している。 The cleaning device 10 performs a cleaning process for removing foreign substances such as fine glass powder and dust adhering to the front surface and the back surface of the glass surface of the glass sheet G through various processing steps provided on the upstream side. is there. The cleaning device 10 has a plurality of cleaning members 11, 11... On the front surface side and the back surface side of the glass surface of the plate glass G, respectively.
For example, in the present embodiment, the cleaning device 10 includes a plurality of cleaning members 11, 11, and 11 for cleaning the front surface side and the back surface side (in the present embodiment, the upper surface side and the lower surface side) of the glass surface of the plate glass G. .. are arranged opposite to each other with the plate glass G interposed therebetween.
Moreover, in the washing | cleaning apparatus 10 of this embodiment, although comprised as an apparatus which wash | cleans both surfaces of the glass surface of the plate glass G, it does not specifically limit, One surface (for example, in glass surface) of the plate glass G It can also be configured as an apparatus for cleaning only the effective surface on which the electronic functional elements and the like are formed.
Moreover, in FIG.1 and FIG.2, in the washing | cleaning apparatus 10, illustration of the some cleaning members 11 * 11 arrange | positioned at the upper surface side of the plate glass G is abbreviate | omitted, and the some cleaning member 11 arrange | positioned at the lower surface of the plate glass G is omitted. -Only 11 ... is shown.
　洗浄装置１０は、複数の洗浄部材１１・１１・・・と、複数の洗浄部材１１・１１・・・の各々を支持する回転軸１２・１２・・・と、回転軸１２・１２・・・の各々に設けられるギア（平歯車）１３・１３・・・と、回転軸１２・１２・・・を駆動する回転駆動手段であるモータＭと、を備える。図１では、モータＭが回転軸１２を直接回転させているが、モータＭの図示しない回転軸に図示しないギアを設け、モータＭのギアと洗浄部材１１の回転軸１２に設けられたギア１３と噛み合わせることで、モータＭがギア１３を回転させる形態でも良い。 The cleaning device 10 includes a plurality of cleaning members 11, 11..., Rotating shafts 12, 12... That support each of the plurality of cleaning members 11, 11. And gears (spur gears) 13, 13..., And a motor M that is a rotation driving means for driving the rotary shafts 12, 12. In FIG. 1, the motor M rotates the rotary shaft 12 directly. However, a gear (not shown) is provided on the rotary shaft (not shown) of the motor M, and the gear 13 provided on the gear M of the motor M and the rotary shaft 12 of the cleaning member 11. , The motor M may rotate the gear 13.
　洗浄部材１１は、ディスク形状の部材であり、板ガラスＧのガラス面に対して対向配置される洗浄パッド１４と、洗浄パッド１４を保持する洗浄ヘッド１５とを主に備えている。
　また、洗浄部材１１は、平面視において搬送方向に対して直交する方向に並べて配置されている。 The cleaning member 11 is a disk-shaped member, and mainly includes a cleaning pad 14 disposed to face the glass surface of the plate glass G, and a cleaning head 15 that holds the cleaning pad 14.
The cleaning members 11 are arranged side by side in a direction orthogonal to the transport direction in plan view.
　洗浄パッド１４は、硬質樹脂、軟質樹脂等の弾性体を使用することができ、例えばフェルト状の繊維成形体、スポンジ状の発泡樹脂成形体、あるいはスポンジ状の発泡ゴム成形体等で円形状に形成されている。本実施形態においては、洗浄パッド１４の材質は、ポリビニルアルコール（ＰＶＡ）である。 The cleaning pad 14 can be made of an elastic body such as a hard resin or a soft resin. For example, a felt-like fiber molded body, a sponge-like foamed resin molded body, or a sponge-like foamed rubber molded body is formed into a circular shape. Is formed. In the present embodiment, the material of the cleaning pad 14 is polyvinyl alcohol (PVA).
　洗浄パッド１４における板ガラスＧとの対向面（接触面）には、径方向に放射状に形成された凹溝１４ａが円周方向に複数（本実施形態では６本）設けられている。
　また、洗浄パッド１４には、その中心部及び中心部近傍に洗浄液を供給するための円形状の複数（本実施形態では３個）の供給口１４ｂが形成されている。 On the surface (contact surface) facing the plate glass G in the cleaning pad 14, a plurality (six in this embodiment) of concave grooves 14 a formed radially in the radial direction are provided.
The cleaning pad 14 is formed with a plurality of (three in the present embodiment) supply ports 14b for supplying the cleaning liquid to the central portion and the vicinity of the central portion.
　そして、供給口１４ｂは、洗浄ヘッド１５が有する図示しない洗浄液供給孔に連通されており、洗浄処理の実行中には、洗浄液が、供給口１４ｂを介して供給されるようになっている。 The supply port 14b communicates with a cleaning liquid supply hole (not shown) of the cleaning head 15, and the cleaning liquid is supplied via the supply port 14b during the execution of the cleaning process.
　なお、洗浄ヘッド１５は、例えば、アルミニウム合金やステンレス鋼等の金属材料で円盤状に形成されている。 The cleaning head 15 is formed in a disk shape from a metal material such as an aluminum alloy or stainless steel.
　回転軸１２は、先端に洗浄部材１１の洗浄ヘッド１５が固定される軸部材である。
　複数の回転軸１２・１２・・・は、図３に示すように、互いの回転軸１２の軸方向が平行となるように、回転軸支持部１６に回転自在に支持されている。
　なお、図３では、板ガラスＧの上面側の回転軸１２・１２を支持する回転軸支持部１６及び回転軸１２・１２のそれぞれに設けられるギア１３・１３の図示を省略している。 The rotating shaft 12 is a shaft member to which the cleaning head 15 of the cleaning member 11 is fixed at the tip.
As shown in FIG. 3, the plurality of rotary shafts 12, 12... Are rotatably supported by the rotary shaft support portion 16 so that the axial directions of the rotary shafts 12 are parallel to each other.
In FIG. 3, illustration of the rotation shaft support portion 16 that supports the rotation shafts 12 and 12 on the upper surface side of the glass sheet G and the gears 13 and 13 provided on the rotation shafts 12 and 12 are omitted.
　ここで、回転軸支持部１６は、図示しない上下位置駆動手段により、複数の洗浄パッド１４を板ガラスＧの一方面に当接させる前進位置（当接位置）と、洗浄パッド１４を板ガラスＧから離間させる後退位置（離間位置）との間を往復動可能で、かつ回転可能に構成されている。 Here, the rotary shaft support portion 16 is moved away from the plate glass G by a forward position (contact position) where the plurality of cleaning pads 14 are brought into contact with one surface of the glass sheet G by a vertical position driving means (not shown). It is configured to be able to reciprocate between the retracted position (separated position) to be moved and to be rotatable.
　複数の回転軸１２・１２・・・のうちの一つには、モータＭが連結され、該モータＭを回転駆動させることで、回転軸１２を回転駆動させることができる。
　複数の回転軸１２・１２・・・は、図１に示すように、モータＭに連結される回転軸である駆動軸１２ａと、モータＭに連結されていない回転軸である従動軸１２ｂ・１２ｂ・・・とにより構成されている。 A motor M is connected to one of the plurality of rotating shafts 12, 12..., And the rotating shaft 12 can be rotationally driven by rotating the motor M.
As shown in FIG. 1, the plurality of rotating shafts 12, 12... Includes a drive shaft 12 a that is a rotating shaft connected to the motor M, and a driven shaft 12 b that is a rotating shaft that is not connected to the motor M. ...
　ギア１３は、隣接するギア同士で互いに噛合し、かつ材質が異なるものである。
　また、ギア１３は、回転軸１２の軸方向中途部に設けられた平歯車である。
　具体的には、ギア１３は、金属製のギア１３ａと、合成樹脂製のギア１３ｂとにより構成され、互いに噛み合うとともに交互に直列状に配置されている。
　すなわち、複数のギア１３・１３・・・は、直列状に噛み合うギア列を構成し、板ガラスＧの搬送方向に対して直交するように配置されている。 The gear 13 meshes with each other between adjacent gears and is made of a different material.
The gear 13 is a spur gear provided in the middle of the rotating shaft 12 in the axial direction.
Specifically, the gear 13 includes a metal gear 13a and a synthetic resin gear 13b, which mesh with each other and are alternately arranged in series.
That is, the gears 13, 13,... Constitute a gear train that meshes in series, and are arranged so as to be orthogonal to the conveying direction of the glass sheet G.
　金属製のギア１３ａは、錆び難い金属を使用することが好ましく、ステンレスを使用することが好ましい。
　合成樹脂製のギア１３ｂは、硬質樹脂であることが好ましく、例えば、ポリエーテルエーテルケトン樹脂（ＰＥＥＫ樹脂）や、ＭＣナイロン樹脂等を使用することができる。 The metal gear 13a is preferably made of a metal that does not easily rust, and is preferably made of stainless steel.
The synthetic resin gear 13b is preferably a hard resin. For example, polyether ether ketone resin (PEEK resin), MC nylon resin, or the like can be used.
　なお、本実施形態では、ギア１３として平歯車を用いているが、特に限定するものではない。
　例えば、平歯車以外では、はすば歯車を用いて構成することもできる。 In the present embodiment, a spur gear is used as the gear 13, but it is not particularly limited.
For example, other than a spur gear, a helical gear can be used.
　本実施形態の洗浄装置１０では、図２に示すように、板ガラスＧの搬送方向との直交方向に沿って直列状に複数配置して構成される洗浄部材１１・１１・・・の列を板ガラスＧの搬送方向（水平方向）に沿って所定間隔で複数配置される。
　具体的には、本実施形態の洗浄装置１０では、板ガラスＧの搬送方向（水平方向）に沿って上流側と下流側に２列配置されている。 In the cleaning apparatus 10 of the present embodiment, as shown in FIG. 2, a row of cleaning members 11, 11... Arranged in series along a direction orthogonal to the conveying direction of the plate glass G is formed of plate glass. A plurality of Gs are arranged at predetermined intervals along the G conveying direction (horizontal direction).
Specifically, in the cleaning device 10 of the present embodiment, two rows are arranged on the upstream side and the downstream side along the conveyance direction (horizontal direction) of the plate glass G.
　洗浄部材１１・１１・・・の配置態様は、板ガラスＧの一方面の洗浄領域内で洗浄されない部位が生じないように設定される。
　本実施形態では、板ガラスＧの搬送方向（水平方向）で隣り合う各洗浄部材１１・１１・・・が板ガラスＧの幅方向の位置を相互に異ならせて（オフセットして）配置されている。 The arrangement mode of the cleaning members 11, 11... Is set so that a portion that is not cleaned in the cleaning region on one surface of the plate glass G does not occur.
In the present embodiment, the respective cleaning members 11, 11... Adjacent to each other in the conveying direction (horizontal direction) of the plate glass G are arranged with their positions in the width direction of the plate glass G being different (offset).
　すなわち、板ガラスＧの搬送方向において上流側と下流側で隣り合う洗浄部材１１・１１・・・の各列においては、各洗浄部材１１の板ガラスＧの幅方向の位置を相互に異ならせている。
　これにより、板ガラスＧの一方面の洗浄領域内で洗浄されない部位が残ることを防ぐことができる。 That is, in each row of the cleaning members 11, 11... Adjacent to each other on the upstream side and the downstream side in the conveyance direction of the plate glass G, the positions in the width direction of the plate glass G of the cleaning members 11 are different from each other.
Thereby, it can prevent that the site | part which is not wash | cleaned within the washing | cleaning area | region of the one surface of the plate glass G remains.
　なお、洗浄部材１１・１１・・・の配置態様は板ガラスＧの洗浄面内で洗浄されない部位が生じない限りにおいて任意に設定することができる。 In addition, the arrangement | positioning aspect of the cleaning members 11.11 ... can be arbitrarily set unless the site | part which is not wash | cleaned within the washing | cleaning surface of the plate glass G arises.
　次に、洗浄装置１０により板ガラスＧの一方面を洗浄する工程を説明する。 Next, a process of cleaning one surface of the plate glass G by the cleaning device 10 will be described.
　先ず、搬送装置により板ガラスＧが洗浄装置１０に水平状態で搬入されると、洗浄装置１０のうち、最も上流側にある洗浄部材１１・１１・・・の列がモータＭの駆動により回転しながら前進位置（当接位置）に移動し、各洗浄部材１１の洗浄パッド１４が板ガラスＧの表面及び裏面（本実施形態では、上面及び下面）に各々当接されて洗浄処理が開始される。
　この際、モータＭが回転駆動することにより、互いに噛み合う複数のギア１３・１３・・・（ギア１３ａ・１３ａ・・・およびギア１３ｂ・１３ｂ・・・）が連動し、回転駆動されことになる。 First, when the plate glass G is carried into the cleaning device 10 in a horizontal state by the transport device, the row of the cleaning members 11, 11... At the most upstream side of the cleaning device 10 is rotated by driving the motor M. The cleaning pad 14 of each cleaning member 11 is brought into contact with the front and back surfaces (upper surface and lower surface in this embodiment) of the glass sheet G, and the cleaning process is started.
At this time, when the motor M is rotationally driven, a plurality of gears 13... ( Gears 13 a, 13 a... And gears 13 b, 13 b...) That are engaged with each other are interlocked and rotationally driven. .
　続いて図１において、洗浄部材１１による洗浄処理の実行中、各洗浄部材１１に設けられた供給口１４ｂから板ガラスＧの上面及び下面に対して洗浄液が連続的に供給・吐出される。
　すなわち、洗浄部材１１（洗浄パッド１４）と板ガラスＧとの間に所定量の洗浄液が介在した状態で板ガラスＧの上面及び下面の洗浄処理が実行される。 Subsequently, in FIG. 1, during the cleaning process by the cleaning member 11, the cleaning liquid is continuously supplied and discharged from the supply port 14 b provided in each cleaning member 11 to the upper and lower surfaces of the plate glass G.
That is, the cleaning process of the upper and lower surfaces of the plate glass G is performed in a state where a predetermined amount of cleaning liquid is interposed between the cleaning member 11 (cleaning pad 14) and the plate glass G.
　その後、板ガラスＧが下流側に徐々に搬送されるのに伴って、各洗浄パッド１４の供給口１４ｂから洗浄液が供給されつつ、洗浄部材１１・１１・・・の次列（図２において右側の列）が回転しながら順次後退位置（離間位置）から前進位置（当接位置）に移動し、板ガラスＧの上面及び下面の洗浄処理が実行される。 Thereafter, as the glass sheet G is gradually conveyed downstream, the cleaning liquid is supplied from the supply port 14b of each cleaning pad 14, and the next row of the cleaning members 11, 11. The row is sequentially moved from the retracted position (separated position) to the advanced position (contact position) while the upper and lower surfaces of the glass sheet G are cleaned.
　以上のように構成された洗浄装置１０では、モータＭによる回転駆動力が、直列状のギア１３・１３・・・の列を介して、各々のギア１３・１３・・・に対応する複数の回転軸１２・１２・・・に伝達され、これによってこれらの回転軸１２・１２・・・が回転駆動される。
　これにより、各回転軸１２の先端に設けた洗浄部材１１が回転する。 In the cleaning apparatus 10 configured as described above, the rotational driving force by the motor M is a plurality of gears corresponding to each of the gears 13, 13. .. Are transmitted to the rotary shafts 12, 12...
As a result, the cleaning member 11 provided at the tip of each rotating shaft 12 rotates.
　このように洗浄装置１０が動作することによって、噛み合うギア間で摩擦が生じるが、本実施形態のように金属製のギア１３ａと合成樹脂製のギア１３ｂを交互に噛み合わせて構成した場合では、金属製のギア同士を噛み合わせて構成した場合に比べて摩擦抵抗が低減されるため、歯の部分が擦れることによる磨耗が減少し、金属粉等の発塵が抑制される。 By operating the cleaning device 10 in this way, friction occurs between the meshing gears, but when the gears 13a and the synthetic resin gears 13b are alternately meshed as in this embodiment, Since the frictional resistance is reduced as compared with a case in which metal gears are engaged with each other, wear due to rubbing of the tooth portion is reduced, and dust generation such as metal powder is suppressed.
　また、本実施形態における洗浄装置１０において、ギア１３は、隣接するギア１３・１３同士で互いに噛合し、かつ材質が異なるものである。
　このように構成することで、全てのギア１３・１３・・・を同一の材質で構成した場合よりも摩擦抵抗が小さくなり、ギア同士の磨耗による発塵を抑えることができる。 Further, in the cleaning device 10 according to the present embodiment, the gear 13 is engaged with each other between the adjacent gears 13 and 13 and is made of a different material.
By configuring in this way, the frictional resistance becomes smaller than when all the gears 13, 13... Are made of the same material, and dust generation due to wear between the gears can be suppressed.
　また、本実施形態における洗浄装置１０では、隣接するギア１３・１３同士は、一方のギア１３が金属製のギア１３ａであり、他方のギア１３が合成樹脂製のギア１３ｂである。
　一般的に、金属製のギア１３ａ・１３ａ同士を噛み合わせて構成した場合、ギア１３ａ・１３ａ同士の磨耗により発塵（金属粉が発生）するおそれがあるが、このようにしたことで、金属製のギア同士を噛み合わせて構成した場合に発生する金属粉が発生し難くなる。
　これにより、金属粉による板ガラスＧのガラス面への汚染を防止することができる。
　さらに、金属製のギア１３ａを使用しているため、合成樹脂製のギア１３ｂ・１３ｂ同士を噛み合わせて構成した場合より、ギア１３の耐久性が向上し、各ギア１３の交換頻度が抑えられ、装置のメンテナンスに手間がかからない。 Moreover, in the washing | cleaning apparatus 10 in this embodiment, as for the adjacent gears 13 * 13, one gear 13 is the metal gear 13a, and the other gear 13 is the synthetic resin gear 13b.
Generally, when the gears 13a and 13a made of metal are engaged with each other, there is a possibility that dust (metal powder is generated) due to wear of the gears 13a and 13a. Metal powder generated when gears made of metal are engaged with each other is less likely to be generated.
Thereby, the contamination to the glass surface of the plate glass G by metal powder can be prevented.
Furthermore, since the metal gear 13a is used, the durability of the gear 13 is improved and the replacement frequency of each gear 13 is suppressed as compared with the case where the synthetic resin gears 13b and 13b are engaged with each other. , It takes less time to maintain the equipment.
　また、本実施形態における洗浄装置１０では、金属製のギア１３ａと合成樹脂製のギア１３ｂが交互に噛み合うように複数配置されている。
　これにより、複数のギア１３・１３・・・の少なくとも一つをモータＭにより駆動することで、複数のギア１３・１３・・・（ギア１３ａ・１３ａ・・・およびギア１３ｂ・１３ｂ・・・）を駆動することができるため、複数の回転駆動手段を必要とせず、装置構成が簡略化でき、メンテナンスが容易となる。 In the cleaning apparatus 10 according to the present embodiment, a plurality of metal gears 13a and synthetic resin gears 13b are arranged so as to alternately mesh with each other.
By driving at least one of the plurality of gears 13, 13 ... by the motor M, a plurality of gears 13, 13 ... ( gears 13a, 13a ... and gears 13b, 13b ... ) Can be driven, a plurality of rotation driving means are not required, the apparatus configuration can be simplified, and maintenance is facilitated.
　本発明に係る板ガラス洗浄装置は、例えば、フラットパネルディスプレイ用のガラス基板を製造する際において、ガラス基板のガラス面を洗浄するために利用することができる。 The plate glass cleaning apparatus according to the present invention can be used for cleaning the glass surface of a glass substrate, for example, when manufacturing a glass substrate for a flat panel display.
　１０　板ガラス洗浄装置
　１１　洗浄部材
　１２　回転軸
　１３　ギア
　１３ａ　金属製のギア
　１３ｂ　樹脂製のギア
　Ｇ　　板ガラス
　Ｍ　　モータ（回転駆動手段） DESCRIPTION OF SYMBOLS 10 Plate glass cleaning apparatus 11 Cleaning member 12 Rotating shaft 13 Gear 13a Metal gear 13b Resin gear G Plate glass M Motor (rotation drive means)

Claims (3)

  1. 　板ガラスのガラス面を洗浄する板ガラス洗浄装置であって、
    　複数の洗浄部材と、
    　前記複数の洗浄部材の各々を支持する回転軸と、
    　前記回転軸の各々に設けられるギアと、
    　前記回転軸の少なくとも１つを駆動する回転駆動手段と、を備え、
    　前記ギアは、隣接するギア同士で互いに噛合し、かつ材質が異なる、
    　ことを特徴とする板ガラス洗浄装置。     A plate glass cleaning device for cleaning a glass surface of a plate glass,
    A plurality of cleaning members;
    A rotating shaft that supports each of the plurality of cleaning members;
    A gear provided on each of the rotating shafts;
    Rotation drive means for driving at least one of the rotation shafts,
    The gears mesh with each other between adjacent gears, and the materials are different.
    A flat glass cleaning apparatus characterized by that.
  2. 　前記隣接するギア同士は、一方のギアが金属製であり、他方のギアが樹脂製である、
    　ことを特徴とする、請求項１に記載の板ガラス洗浄装置。     Between the adjacent gears, one gear is made of metal and the other gear is made of resin.
    The flat glass washing | cleaning apparatus of Claim 1 characterized by the above-mentioned.
  3. 　前記金属製のギアと前記樹脂製のギアが交互に噛み合うように複数配置される、
    　ことを特徴とする、請求項１または請求項２に記載の板ガラス洗浄装置。
    　     A plurality of the metal gears and the resin gears are arranged so as to alternately mesh with each other.
    The flat glass washing | cleaning apparatus of Claim 1 or Claim 2 characterized by the above-mentioned.
PCT/JP2017/029093 2016-08-22 2017-08-10 Plate glass cleaning device WO2018037934A1 (en)

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CN201780051109.XA CN109641242A (en) 2016-08-22 2017-08-10 Glass sheet cleaning device

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JP2016162193A JP6809038B2 (en) 2016-08-22 2016-08-22 Flat glass cleaning device
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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021113132A (en) * 2018-03-26 2021-08-05 日本電気硝子株式会社 Production method of glass plate, and cleaning apparatus of glass plate
KR102046037B1 (en) * 2018-04-10 2019-11-18 주식회사 에이유테크 Pad for cleaning panel and apparatus for cleaning panel with this pad
JP7081351B2 (en) * 2018-07-10 2022-06-07 日本電気硝子株式会社 Glass plate manufacturing method and glass plate cleaning equipment
CN110586529B (en) * 2019-08-12 2022-07-08 山东嘉隆新型材料有限公司 Device for removing adhesive from steel plate
CN115365251A (en) * 2022-08-16 2022-11-22 深圳市易天自动化设备股份有限公司 Glass cleaning device and glass cleaning equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004251398A (en) * 2003-02-21 2004-09-09 Honda Motor Co Ltd Gear transmission system
JP2005136068A (en) * 2003-10-29 2005-05-26 Seiko Epson Corp Cleaning station and method for manufacturing semiconductor device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0774133A (en) 1993-03-18 1995-03-17 Dainippon Screen Mfg Co Ltd Substrate treatment apparatus
JP3148808B2 (en) * 1997-08-22 2001-03-26 株式会社タカトリ Liquid crystal glass substrate foreign matter removal device
CN102865224A (en) * 2011-07-05 2013-01-09 冀珂 Ultra-high molecular polyethylene gear pump
CN202343528U (en) * 2011-12-07 2012-07-25 郑州旭飞光电科技有限公司 Liquid crystal glass substrate cleaning device
CN102632060A (en) * 2012-03-21 2012-08-15 李莉 Flat glass plate washing device
CN202779101U (en) * 2012-09-25 2013-03-13 芜湖东旭光电科技有限公司 Drive device of liquid crystal glass substrate cleaning plate brushes
CN203791305U (en) * 2014-03-19 2014-08-27 杭州普裕机械设备有限公司 Glass cleaning disc brush mechanism
TWI536440B (en) * 2015-02-26 2016-06-01 友達光電股份有限公司 Substrate conveying apparatus
CN204996798U (en) * 2015-09-22 2016-01-27 日本电气硝子株式会社 Washing pad of glass board

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004251398A (en) * 2003-02-21 2004-09-09 Honda Motor Co Ltd Gear transmission system
JP2005136068A (en) * 2003-10-29 2005-05-26 Seiko Epson Corp Cleaning station and method for manufacturing semiconductor device

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