KR102046037B1 - Pad for cleaning panel and apparatus for cleaning panel with this pad - Google Patents

Abstract

A pad that forms a flat plate shape and rotates in contact with the surface of the panel so as to clean the panel without overlapping pads while preventing interference between the pads. The pad is formed at intervals along the outer circumferential surface and cut inwardly. It provides a large area panel cleaning pad including at least one non-contact groove, and at least one protrusion formed between the non-contact groove and the non-contact groove.

Description

PAD FOR CLEANING PANEL AND APPARATUS FOR CLEANING PANEL WITH THIS PAD}

The present invention relates to a cleaning pad for use in an apparatus for removing foreign matter from a large area panel surface and a cleaning apparatus including the same.

For example, when manufacturing a flat panel display (FPD: Flat Panel Display) such as LCD, LED, PDP, a flat glass substrate is used. Recently, as much attention has been focused on high quality and large size of such a flat panel display, a glass substrate to be used also requires a high quality large area substrate.

In order to provide a large-scale high-quality display panel, the glass substrate is subjected to various processes in the manufacturing process. During this process, foreign substances such as dust may adhere to the organic substrate. If the display panel is manufactured while foreign matter is attached to the glass substrate, the quality of the flat panel display will be degraded.

Thus, the process for manufacturing a flat panel display is provided with a cleaning device for removing foreign matter and particles on the glass substrate or panel constituting the panel. The cleaning apparatus includes a polishing pad that is in close contact with the glass substrate and rotates to remove foreign substances and particles adhering to the glass substrate surface.

As the size of the glass substrate increases, the number of polishing pads used for cleaning is gradually increasing, and the time required for cleaning is also increasing. Thus, a plurality of polishing pads were arranged to perform a cleaning operation. However, this structure has to be spaced between the rotating polishing pads, so that the cleaning is not performed properly in this area. In addition, since the polishing pads must be arranged in a plurality of rows in order to prevent such cleaning failure regions from occurring, there is a disadvantage in that the cleaning apparatus is increased and the polishing pad usage increases.

The present invention provides a large-area panel cleaning pad and a cleaning apparatus including the same, which can clean the panel without overlapping the pads while preventing interference between the pads.

The present invention provides a large area panel cleaning pad and a cleaning apparatus including the same, which can effectively clean a large area panel using a smaller number of pads.

The pad of the present embodiment may clean the panel while rotating in contact with the surface of the panel in the form of a flat plate.

The cleaning apparatus of the present embodiment may include a cleaning module disposed on at least one surface of the panel, a plurality of pads provided on the cleaning module and being in close contact with the surface of the panel to clean the panel, and a driving unit to rotate the pad.

The pad may include at least one non-contact groove formed at intervals along the outer circumferential surface and cut toward the center, and at least one protrusion formed between the non-contact groove and the non-contact groove.

The non-contact groove may form an arc.

A plurality of the pads may be arranged in a line along the width direction of the panel to form a combination, and at least one combination may be arranged at intervals along the panel traveling direction.

The plurality of pads may be arranged along the same line at intervals equal to or less than the diameter of the pads.

The pad may be disposed at a phase difference angle between neighboring pads such that the protrusion is located in a non-contact groove of a neighboring pad.

The pads may have opposite rotation directions between neighboring pads.

The radius of rotation of the pad by the protrusion of the pad and the radius of contact by the non-contact groove of the adjacent pad may be spaced apart from each other.

As described above, according to the present exemplary embodiment, the pads may be stacked and arranged so that the front surface of the panel may be cleaned without any gap even if the pads are arranged in one row. Thus, it is possible to effectively clean a large area panel while using less pads.

In addition, the pads can be arranged in a plurality of rows to further improve the cleaning power.

In addition, the structure of the large-area panel cleaning device can be simplified and the size of the equipment can be reduced, and the cost can be reduced by reducing the number of parts used.

In addition, even if the pads are overlapped, it is possible to prevent the interference with each other to be damaged.

1 is a schematic perspective view showing a cleaning apparatus with a large area panel cleaning pad according to the present embodiment.
2 is a schematic side view showing a cleaning apparatus with a large area panel cleaning pad according to the present embodiment.
3 is a schematic front view of a cleaning apparatus with a large area panel cleaning pad according to the present embodiment.
4 is a perspective view showing a large area panel cleaning pad according to the present embodiment.
5 and 6 are schematic diagrams showing an arrangement structure of a large area panel cleaning pad according to the present embodiment.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art can easily understand, the embodiments described below may be modified in various forms without departing from the concept and scope of the present invention. Where possible, the same or similar parts are represented using the same reference numerals in the drawings.

The terminology used below is merely to refer to specific embodiments, and is not intended to limit the present invention. As used herein, the singular forms “a,” “an,” and “the” include plural forms as well, unless the phrases clearly indicate the opposite. As used herein, the meaning of "comprising" embodies a particular property, region, integer, step, operation, element, and / or component, and other specific properties, region, integer, step, operation, element, component, and / or group. It does not exclude the presence or addition of.

All terms including technical terms and scientific terms used below have the same meaning as those commonly understood by those skilled in the art. Terms defined in advance are additionally interpreted to have a meaning consistent with the related technical literature and the presently disclosed contents, and are not interpreted in an ideal or very formal sense unless defined.

Hereinafter, the present embodiment will be described by way of example a glass substrate used for a display with a large area panel. This embodiment is not limited to cleaning glass substrates, and is applicable to panel cleaning of various kinds of large areas. In the following description, cleaning may refer to any operation for removing foreign matters adhered to or attached to a glass substrate, including cleaning or polishing.

1 and 3 schematically show a cleaning apparatus according to the present embodiment.

As shown, the cleaning apparatus 100 is provided in the cleaning module 10, the cleaning module 10 disposed in the width direction on the glass substrate P along the transfer line of the glass substrate P, and the glass substrate P. A plurality of pads 20, which are in close contact with the surface, to clean the glass substrate P, and a driving unit which rotates each of the pads 20.

In FIG. 1, the x axis represents the conveying direction of the glass substrate P, the y axis represents the width direction of the glass substrate P, and the z axis represents the vertical direction.

Two cleaning modules 10 may be disposed in a pair of upper and lower portions of the glass substrate P along the z-axis direction. Each cleaning module 10 cleans the upper and lower surfaces of the glass substrate P at the corresponding positions. Glass substrate (P) is placed on the roller 110 of the transfer line is moved and the surface is cleaned while passing through the cleaning module 10 installed on one side of the transfer line.

The pad 20 and a driving unit for rotating the pad 20 are provided inside the cleaning module 10. The driving unit of the present embodiment is installed on the servo motor 12 for driving the pad 20 to rotate, the drive gear 13 installed on the servo motor 12, and the rotation shaft 14 supporting the pad 20, and the drive gear ( 13 may include a driven gear 15 for engaging.

Accordingly, when the servo motor 12 is driven, the drive gear 13 is rotated, power is transmitted to the rotary shaft 14 through the driven gear 15 meshed with the drive gear 13, and the rotary shaft 14 is rotated. . Therefore, as the pad 20 installed at the tip of the rotating shaft 14 is rotated, foreign substances are removed from the surface of the glass substrate P.

The cleaning module 10 may include a driving unit and a pad 20 to form a unit, and may be detachably installed on a facility. The cleaning module 10 extends in the width direction of the glass substrate P. The plurality of pads 20 are arranged in a line along the width direction of the glass substrate P in the cleaning module 10.

In this embodiment, only one cleaning module 10 may be provided along the glass substrate P transport direction, and at least two or more cleaning modules 10 may be arranged at intervals. The cleaning module 10 may cleanly clean the entire surface of the organic substrate P even if only one pad 20 is disposed without overlapping each other. In the case in which the cleaning module 10 has two or more structures disposed along the glass substrate P transport direction, the cleaning operation may be further performed as the glass substrate is moved several times.

The driving unit may further include a reduction gear unit (not shown) installed between the driving gear 13 and the driven gear 15 to reduce and transmit the rotational speed of the servomotor 12 at an appropriate ratio.

As shown in FIG. 3, a plurality of pads 20 may be connected to one servomotor 12. To this end, the rotation shafts 14 of the pads 20 arranged in a row may have a structure in which the driven gears 15 of one of the rotation shafts 14 are engaged with the driven gears 15 of the neighboring rotation shafts 14. have.

Accordingly, when one side driven gear 15 engaged with the drive gear 13 is rotated, the neighboring driven gear 15 engaged with the driven gear 15 and the plurality of driven gears 15 continuously engaged with the driven gear 15 are together. Is rotated. Accordingly, as the rotating shafts 14 connected to the driven gears 15 are all rotated, each pad 20 provided in the cleaning module 10 rotates at the same time to perform the cleaning operation.

By being directly connected between neighboring driven gears 15, as shown in FIG. 3, each of the pads 20 arranged in a row in the cleaning module 10 is rotated in the opposite direction between the adjacent pads 20. As a result, interference between the pads 20 may be prevented while the pads 20 are adjacent to each other. The pad and the arrangement of the pad will be described below.

The pads 20 of this embodiment are arranged closely to each other between the pads 20 arranged in a row, and have a structure capable of cleaning the glass substrate P without gaps.

To this end, the pads 20 of the present embodiment may be arranged to be arranged in a row in the cleaning module 10 and overlap without interfering with each other. Accordingly, it is possible to prevent the non-contact surface of the glass substrate P from being generated between the pads 20.

4 illustrates a pad according to this embodiment.

As shown in FIG. 4, the pad 20 of the present embodiment has at least one non-contact groove 22 formed at intervals along the outer circumference and cut toward the center, and the non-contact groove 22 and the non-contact groove 22. It may include at least one or more protrusions 24 formed therebetween.

The pad 20 forms a flat plate shape so as to be in contact with the flat glass substrate P. The non-contact groove 22 and the protrusion 24 are alternately formed along the outer circumferential surface of the pad 20. As shown in FIG. 4, the pad 20 of the present exemplary embodiment may have four protrusions 24 and non-contact grooves 22. The protrusions and the non-contact grooves may be formed in two or three or five or more, for example, in the form of gears or teeth, in addition to the four-membered structure, and if the plurality of pads are partially overlapped and arranged in a line without interference with each other, All will belong to the true spirit of the invention.

The non-contact groove 22 is a portion in which the disc-shaped pad 20 is cut and removed to form an area in which the protrusion 24 of the pad 20 adjacent thereto is located. The non-contact groove 22 is formed to be excavated toward the rotation center from the outer peripheral surface of the pad 20.

The non-contact groove 22 can be formed in various shapes and sizes. In this embodiment, the non-contact groove 22 may be formed in an arc shape. In such a structure, while sufficiently securing the entire area of the pad 20, interference with the protrusion 24 of the neighboring pad 20 may be minimized.

The protrusion 24 forms a protruding portion of the pad 20 formed between the two non-contact grooves 22. The outer tip of the protrusion 24 forms the tip of the pad 20. The protrusion 24 contacts the panel surface and substantially cleans the panel P when the pad 20 is rotated. The size of the radius of rotation by the tip of the protrusion 24 indicates the diameter of the pad 20, that is, the size of the pad 20.

Thus, by forming the protrusions 24 and the non-contact grooves 22 in the pad 20, when the pads 20 are arranged in a line, a part of the pads 20 overlap each other so that the protrusions 24 of the one side pad 20 are adjacent to each other. The non-contact groove 22 of the pad 20 can be located.

Thus, the plurality of pads 20 may be arranged without interfering with each other while overlapping the rotation regions between the pads 20. Therefore, since no gap is generated between the pad 20 and the pad 20, the surface of the glass substrate P can be cleaned without any gap even if the pads 20 are arranged in a row.

Hereinafter, the arrangement structure and operation of the pad of the present embodiment will be described with reference to FIGS. 5 and 6.

As shown in FIG. 5, a plurality of pads 20 according to the present exemplary embodiment may be arranged in a line along the width direction of the glass substrate P. FIG. The pads 20 arranged in a row form a combination, and at least one combination may be arranged at intervals along the advancing direction of the glass substrate P. FIG.

As shown in FIG. 6, each of the pads 20 is disposed between the pads 20 adjacent to each other so that the protrusions 24 of one pad 20 are located in the non-contact grooves 22 of the pads 20 adjacent to each other. The phase difference angle R is disposed.

Accordingly, the pads 20 may be arranged at intervals equal to or less than the diameter of the pads 20 along the same line and may partially overlap each other. The collinear line may mean that a line connecting the central axis of each pad is one same straight line. By overlapping the pads 20 along the same line, it is possible to prevent the pads 20 from being in contact with the glass substrate P.

As shown in FIG. 6, the rotation radius of the protrusions 24 of the neighboring pads 20 overlaps each other to form an overlapping area A of the pads 20. The radius of rotation by the protruding portion 24 is substantially the area where the pad 20 comes into contact with the glass substrate P and is cleaned. In the pad 20 of the present embodiment, the cleaning regions may overlap each other between the pads 20 adjacent to each other.

As described above, since the pad 20 and the pad 20 overlap each other to clean the glass substrate P, the pad 20 and the pad 20 may be cleaned, and thus the washing operation may be performed without gap in the glass substrate P width direction.

In this embodiment, the phase difference angle R between the pads 20 adjacent to each other may be 45 °. That is, the angle between the direction in which the protrusion 24 of the one side pad 20 faces and the direction in which the protrusion 24 of the neighboring pad 20 faces may be 45 °. Accordingly, even when the rotation radius of the pads 20 adjacent to each other when the pads 20 rotate, the contact or interference between the pads 20 can be prevented.

The phase difference angle R between the pads 20 adjacent to each other may be adjusted at an appropriate angle according to the number of formations of the protrusions 24 and the non-contact grooves 22. For example, when the number of protrusions and non-contact grooves is two, the angle of phase difference between neighboring pads may be 90 °. Accordingly, the protrusions 24 and the non-contact grooves 22 face each other between the pads 20 that rotate with each other, thereby preventing interference between neighboring pads 20.

In this embodiment, the rotation directions between neighboring pads 20 may be opposite to each other. As shown in FIG. 6, when one side pad 20 is rotated in the clockwise direction, the neighboring pads 20 are rotated in the counterclockwise direction. Thus, even if the pads 20 overlap each other, the protrusions 24 and the non-contacting grooves 22 may be engaged between the pads 20 adjacent to each other like a gear, thereby preventing contact between the pads 20 in the overlapping area A. .

In addition, the arrangement interval between the pad 20 and the pad 20 may be set to such an extent that the protrusions 24 and the non-contact grooves 22 of the neighboring pads 20 do not touch each other. That is, each pad 20 may be spaced apart from each other so that the rotation radius by the protrusion 24 of the one side pad 20 and the rotation radius by the non-contact groove 22 of the neighboring pad 20 do not interfere with each other. . Thus, while the pads 20 overlap, the protrusions 24 and the non-contact grooves 22 between the pads 20 adjacent to each other do not contact each other when the pads 20 rotate.

While the exemplary embodiments of the invention have been illustrated and described as described above, various modifications and other embodiments may be made by those skilled in the art. Such modifications and other embodiments will be considered and included in the appended claims without departing from the true spirit and scope of the invention.

10: cleaning module 12: servo motor
13: drive gear 14: rotating shaft
15: driven gear 20: pad
22: non-contact groove 24: protrusion
100: cleaning device

Claims (13)

delete delete delete delete delete delete Cleaning module for cleaning a large area panel, including a cleaning module disposed on at least one surface of the large area panel, a plurality of pads provided in the cleaning module and adhered to the panel surface to clean the panel, and a driving unit rotating the pad. In the apparatus,
The pad includes at least one non-contact groove formed at intervals along the outer circumferential surface and cut toward the center, and at least one protrusion formed between the non-contact groove and the non-contact groove,
The plurality of pads are arranged in a line along the width direction of the panel to form a combination, at least one or more combinations are arranged at intervals along the panel travel direction,
The pads are arranged along the same line at intervals less than or equal to the diameter of the pads,
The pads are disposed at a phase difference angle between neighboring pads such that the protrusions are located in non-contact grooves of neighboring pads.
The pads have opposite directions of rotation between neighboring pads,
The rotation radius of the pad by the protrusion of the pad and the rotation radius of the non-contact groove of the adjacent pad are spaced apart from each other so that the protrusion and the non-contact groove do not contact each other between the pads adjacent to each other when the pad rotates.
The pad has a structure in which four protrusions and four non-contact grooves are alternately formed, and a phase difference angle between the pads is 45 °. The method of claim 7, wherein
The non-contact groove is a cleaning device to form an arc. delete delete delete delete delete

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