CN211275818U - Glass substrate cleaning device - Google Patents

Glass substrate cleaning device Download PDF

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Publication number
CN211275818U
CN211275818U CN201921419548.4U CN201921419548U CN211275818U CN 211275818 U CN211275818 U CN 211275818U CN 201921419548 U CN201921419548 U CN 201921419548U CN 211275818 U CN211275818 U CN 211275818U
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China
Prior art keywords
glass substrate
liquid
cleaning
gears
applying mechanism
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Active
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CN201921419548.4U
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Chinese (zh)
Inventor
鉴继薰
中塚弘树
山本好晴
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Nippon Electric Glass Co Ltd
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Nippon Electric Glass Co Ltd
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Priority to CN201921419548.4U priority Critical patent/CN211275818U/en
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Abstract

The utility model provides a glass substrate belt cleaning device, it can restrain the wearing and tearing each other of gear and realize the long-life of gear, prevents to produce the quality defect of glass substrate because the adhesion of wearing and tearing powder. A glass substrate cleaning device (1) for cleaning a glass surface of a glass substrate (G) is provided with a plurality of cleaning members (2), a plurality of rotating shafts (5) for supporting the plurality of cleaning members (2), a plurality of gears (7) provided on the plurality of rotating shafts (5), and a rotary drive mechanism (motor M) for driving at least one of the plurality of rotating shafts (5), wherein adjacent gears (7) of the plurality of gears (7) are engaged with each other, and the glass substrate cleaning device (1) is further provided with a liquid applying mechanism (9) for applying a liquid (L) to an engaging portion (8) where the adjacent gears (7) are engaged with each other.

Description

Glass substrate cleaning device
Technical Field
The utility model relates to a glass substrate belt cleaning device's technique.
Background
In the manufacture of glass substrates for Flat Panel Displays (FPD), there has been known a technique for removing foreign matter such as minute glass pieces or dust adhering to the glass surface of the glass substrate. For example, as described in patent document 1.
Patent document 1 discloses a glass plate cleaning apparatus for cleaning a glass surface of a glass plate (glass substrate). The glass plate cleaning device includes: a plurality of cleaning members; a rotating shaft which supports the plurality of cleaning members, respectively; gears provided on the respective rotating shafts; and a rotation driving mechanism that drives the rotation shaft. The glass plate cleaning device adopts a structure that adjacent gears are made of different materials, so that the friction resistance is reduced, and the dust emission caused by the abrasion of the gears is inhibited.
Prior art documents
Patent document
Patent document 1: japanese patent laid-open publication No. 2018-030058
However, in the above glass cleaning device, when the gears are thermally expanded, the gears are strongly engaged with each other, and therefore, the gears are more worn. Such an increase in the wear of gears with each other leads to a reduction in the life of the gears and a reduction in the quality of the glass substrate due to the adhesion of wear debris.
SUMMERY OF THE UTILITY MODEL
Problem to be solved by utility model
The utility model aims to provide a can restrain the wearing and tearing each other of gear and realize the long-lived of gear to prevent to lead to the glass substrate belt cleaning device of glass substrate quality reduction because of the adhesion of wearing and tearing powder.
Means for solving the problems
As described above, the following describes a solution to the problem.
Namely, the utility model discloses a glass substrate belt cleaning device washs glass substrate's glass face, glass substrate belt cleaning device includes: a plurality of cleaning members; a plurality of rotating shafts supporting the plurality of cleaning members, respectively; a plurality of gears respectively provided on the plurality of rotary shafts; and a rotation driving mechanism which drives at least one of the plurality of rotating shafts, wherein adjacent gears of the plurality of gears are meshed with each other, and the glass substrate cleaning device is characterized by further comprising a liquid applying mechanism which applies liquid to a meshing part where the adjacent gears are meshed with each other.
According to the glass substrate cleaning device of the present invention, the gear is cooled by the liquid to prevent thermal expansion of the gear. In addition, the liquid adhering to the meshing portion between the gears reduces the frictional resistance between the gears. Therefore, the wear of the gears is suppressed, the life of the gears is prolonged, and the quality of the glass substrate is prevented from being degraded due to the adhesion of the wear powder.
In the glass substrate cleaning device according to the present invention, it is preferable that one of the adjacent gears is made of metal and the other gear is made of resin.
According to the glass substrate cleaning apparatus of the present invention, metal powder generated when the metal gears are engaged with each other is less likely to be generated. This can prevent the glass surface of the glass plate from being contaminated by the metal powder. Further, since the metal gears are used, the durability of the gears is improved as compared with a case where resin gears are engaged with each other, the frequency of replacing the gears can be suppressed, and time is not required for maintenance of the device.
Further, in the glass substrate cleaning device according to the present invention, it is preferable that the glass substrate is conveyed in a horizontal direction in a horizontal posture, the engagement portion is located above or below the conveyed glass substrate, and the liquid applying mechanism blows the liquid from a side direction of the engagement portion toward the engagement portion.
According to the glass substrate cleaning apparatus of the present invention, the liquid can be directly supplied from the side to the engagement portion, and the liquid can be appropriately supplied to the engagement portion.
In the glass substrate cleaning apparatus according to the present invention, it is preferable that the liquid applying mechanism is located above the engaging portion.
According to the glass substrate cleaning device of the present invention, the liquid blown from the position higher than the meshing portion adheres to the lower side of the meshing portion without dead angle from the upper side thereof by gravity, and the frictional resistance between the gears is reduced by the adhering liquid. Therefore, the wear of the gears is suppressed, the life of the gears is prolonged, and the quality of the glass substrate is prevented from being degraded due to the adhesion of the wear powder.
Preferably, the glass substrate cleaning apparatus of the present invention further comprises a cleaning liquid applying mechanism for applying a cleaning liquid to the glass surface of the glass substrate to be conveyed, wherein the liquid applying mechanism has a liquid nozzle for ejecting the liquid, the cleaning liquid applying mechanism has a cleaning nozzle for ejecting the cleaning liquid, and the liquid nozzle is located above the cleaning nozzle.
According to the glass substrate cleaning apparatus of the present invention, the liquid application by the liquid applying mechanism and the liquid application by the cleaning liquid applying mechanism do not interfere with each other. Therefore, the liquid and the cleaning liquid can be appropriately applied to the predetermined position.
In addition, in the glass substrate cleaning apparatus according to the present invention, it is preferable that the liquid applying mechanism blows out the liquid in a conical shape.
According to the glass substrate cleaning device of the present invention, since the liquid is blown so as to spread toward the meshing portion, the liquid adheres to the entire meshing portion, and the adhering liquid reduces the frictional resistance between the gears. Therefore, the wear of the gears is suppressed, the life of the gears is prolonged, and the quality of the glass substrate is prevented from being degraded due to the adhesion of the wear powder.
In the glass substrate cleaning apparatus according to the present invention, it is preferable that the engaging portions are located above and below the glass substrate, respectively, and the liquid applying mechanism is disposed only above the glass substrate.
According to the glass substrate cleaning apparatus of the present invention, since the liquid applied to the engaging portion and the cleaning liquid applied to the glass substrate fall by gravity on the upper surface side of the glass substrate and adhere to the engaging portion on the lower surface side of the glass substrate, it is not necessary to provide a liquid applying mechanism for the engaging portion on the lower surface side. Therefore, the liquid applying mechanism is not provided at a position where the liquid applying mechanism is not required to be disposed, and the structure is simplified.
Effect of the utility model
As the effect of the present invention, the following effect is provided.
That is, according to the glass substrate cleaning apparatus of the present invention, it is possible to suppress wear of gears and to achieve a long life of the gears, and to prevent a reduction in quality of the glass substrate due to adhesion of wear powder.
Drawings
Fig. 1 is a perspective view showing an overall configuration of a glass substrate cleaning apparatus according to an embodiment of the present invention.
Fig. 2 is a plan view of a glass substrate cleaning apparatus according to an embodiment of the present invention.
Fig. 3 is a side view of a glass substrate cleaning apparatus according to an embodiment of the present invention.
Description of the reference numerals
1 glass substrate cleaning device
2 cleaning member
5 rotating shaft
7 Gear
7a Metal Gear
7b resin gear
8 engaging part
9 liquid applying mechanism
12 cleaning liquid applying mechanism
C cleaning solution
F arrow (carrying direction)
G glass substrate
L liquid
M motor (rotating driving mechanism)
Detailed Description
Next, a glass substrate cleaning apparatus 1 according to an embodiment of the present invention will be described with reference to fig. 1 to 3.
In the following description, for convenience, the vertical direction shown in fig. 1 and 3 is defined as the vertical direction of the glass substrate cleaning apparatus 1, respectively.
In fig. 1 and 2, the direction indicated by the arrow F is defined as the conveyance direction of the glass substrate G.
In fig. 1 and 2, a direction perpendicular to the conveying direction is defined as a width direction, and the description will be given.
As shown in fig. 1, a glass substrate cleaning apparatus 1 (hereinafter, simply referred to as a cleaning apparatus 1) according to the present embodiment is an apparatus that cleans both surfaces (front and back surfaces) of a glass surface of a glass substrate G by rotating a cleaning member 2 by a motor M as a rotation driving mechanism.
The cleaning apparatus 1 is, for example, an apparatus which is disposed on a conveyance path of a conveyance apparatus in a glass substrate G manufacturing apparatus and cleans both surfaces (front and back surfaces) of a glass surface of a rectangular glass substrate G which is conveyed in a horizontal direction in a horizontal posture. Here, the horizontal posture also includes a state in which the glass substrate G is inclined at 0 to 10 ° when viewed from the direction of the conveying direction F in order to smoothly drain water from the glass surface. The glass substrates G may be conveyed not only in a horizontal posture but also in a vertical posture.
The glass substrate G is conveyed from the upstream side to the downstream side by the conveying device.
A processing device (not shown) for performing various processes such as cutting and edge processing on the glass substrate G is provided upstream of the cleaning device 1.
The cleaning apparatus 1 performs a cleaning process for removing foreign matters such as fine glass powder and dust adhering to the front and back surfaces of the glass surface of the glass substrate G through various processing steps provided on the upstream side. The cleaning apparatus 1 includes a plurality of cleaning members 2 on the front surface side and the back surface side of the glass surface of the glass substrate G, respectively.
In the present embodiment, for example, as shown in fig. 3, the cleaning apparatus 1 is configured such that a plurality of cleaning members 2 are arranged to face each other in the vertical direction through the glass substrate G in order to clean the front surface side and the back surface side (the upper surface side and the lower surface side in the present embodiment) of the glass surface of the glass substrate G.
Further, in the cleaning apparatus 1 of the present embodiment, the cleaning apparatus is configured to clean both surfaces of the glass surface of the glass substrate G, but the cleaning apparatus is not limited to this, and may be configured to clean only one surface of the glass substrate G (for example, an effective surface of the glass surface on which electronic functional elements and the like are formed).
The cleaning apparatus 1 mainly includes a plurality of cleaning members 2, a plurality of rotating shafts 5 each supporting the plurality of cleaning members 2, a plurality of gears (spur gears) 7 provided on the plurality of rotating shafts 5, and a motor M as a rotation driving mechanism for driving at least one of the plurality of rotating shafts 5. In fig. 1, the motor M directly rotates the rotary shaft 5, but a gear not shown may be provided on the rotary shaft not shown of the motor M, and the gear 7 may be rotated by the motor M by meshing the gear of the motor M with the gear 7 provided on the rotary shaft 5 of the cleaning member 2.
In fig. 1 and 2, the cleaning member 2, the rotary shaft 5, the gear 7, the motor M, and the cleaning liquid applying mechanism 12 described later on the lower surface side of the glass substrate G are not shown.
The cleaning member 2 is a disk-shaped member, and mainly includes a cleaning pad 3 disposed to face the glass surface of the glass substrate G and a cleaning head 4 for holding the cleaning pad 3.
The cleaning members 2 are arranged in a row in the width direction.
The cleaning pad 3 can be formed in a circular shape from, for example, a felt-like fiber molded body, a sponge-like foamed resin molded body, or a sponge-like foamed rubber molded body, using an elastic body such as a hard resin or a soft resin. In the present embodiment, the material of the cleaning pad 3 is polyvinyl alcohol (PVA).
The cleaning head 4 is formed in a disk shape from a metal material such as an aluminum alloy or stainless steel, or a resin material such as polyvinyl chloride (PVC) or ABS resin, for example.
The rotary shaft 5 is a shaft member of the cleaning head 4 to which the cleaning member 2 is fixed at the front end.
The plurality of rotary shafts 5 are rotatably supported by a rotary shaft support portion 6 (see fig. 3) so that the axial directions of the rotary shafts 5 are parallel to each other.
Here, the rotation shaft support portion 6 is configured to be capable of reciprocating between an advanced position (contact position) where the plurality of cleaning pads 3 are brought into contact with one surface of the glass substrate G and a retracted position (separation position) where the cleaning pads 3 are spaced apart from the glass substrate G by a vertical position drive mechanism (not shown).
In fig. 1 and 2, the rotary shaft support portion 6 is not shown.
One of the plurality of rotary shafts 5 is coupled to a motor M, and the rotary shaft 5 can be driven to rotate by driving the motor M to rotate. The number of the motors M to be connected is not limited to one, and two or more motors M may be connected, and each rotating shaft 5 may be connected to the motor M.
As shown in fig. 1, the plurality of rotary shafts 5 include a drive shaft 5a as a rotary shaft coupled to the motor M and a plurality of driven shafts 5b as rotary shafts not coupled to the motor M.
The gear 7 is a spur gear provided at a middle position in the axial direction of the rotary shaft 5. Adjacent gears 7 of the plurality of gears 7 are engaged with each other. The adjacent gears 7 may be made of the same material, but preferably are made of different materials.
Specifically, the gears 7 are formed by meshing a metal gear 7a and a synthetic resin gear 7b with each other and are alternately arranged in series.
The engaging portion 8 where the adjacent gears 7 engage with each other is located at least one of above and below the conveyed glass substrate G. In the present embodiment, the engaging portions 8 are located both above and below the glass substrate G.
The metal gear 7a is preferably made of a metal which does not easily rust, and is preferably made of stainless steel.
The gear 7b made of synthetic resin is preferably made of hard resin, and for example, polyether ether ketone resin (PEEK resin) or the like can be used.
In this way, when the metal gears 7a and the synthetic resin gears 7b are configured to alternately mesh with each other, the frictional resistance is reduced as compared with the case where the metal gears 7 mesh with each other, so that the wear due to the friction of the tooth portions is reduced, and the dust emission of the wear powder such as the metal powder can be suppressed.
In the present embodiment, a spur gear is used as the gear 7, but the present invention is not particularly limited.
For example, a helical gear may be used instead of the spur gear.
The cleaning apparatus 1 further includes a liquid applying mechanism 9 for applying a liquid L (e.g., water) to the engaging portion 8, and a cleaning liquid applying mechanism 12 for applying a cleaning liquid C to the glass surface of the conveyed glass substrate G. The liquid applying mechanism 9 blows the liquid L toward the engaging portion 8 from the side of the engaging portion 8.
The liquid applying mechanism 9 is located above the engaging portion 8. More specifically, the liquid applying mechanism 9 is preferably located at a position higher than the thickness of the gear 7 (than the upper surface of the gear 7).
The liquid applying mechanism 9 includes a plurality of liquid nozzles 10 that discharge the liquid L and a liquid pipe 11 that supplies the liquid L. The plurality of liquid nozzles 10 communicate with liquid pipes 11, respectively.
The plurality of liquid nozzles 10 are provided so as to extend in a direction toward the engagement portion 8. The liquid pipe 11 is provided so as to extend in parallel with the gear train.
The plurality of liquid nozzles 10 discharge the liquid L in a conical shape having the position of the liquid nozzle 10 as a vertex. That is, the liquid applying mechanism 9 blows out the liquid L in a conical shape.
The cleaning liquid applying mechanism 12 has a plurality of cleaning nozzles 13 for discharging the cleaning liquid C and a cleaning pipe 14 for supplying the cleaning liquid C. The plurality of cleaning nozzles 13 are respectively communicated with the cleaning pipes 14.
The cleaning nozzle 13 is provided to extend in the vertical direction. The cleaning pipe 14 is provided so as to extend in parallel with the gear train.
The plurality of liquid nozzles 10 are located above the plurality of cleaning nozzles 13.
The direction in which the liquid applying mechanism 9 blows the liquid L is not particularly limited, and the liquid L may be blown downward from above the engaging portion 8.
The liquid nozzle 10 may blow the liquid L so that the liquid L is scattered in a fan-shaped range having a position of the liquid nozzle 10 as a vertex.
The liquid applying mechanism 9 is not disposed on the lower surface side of the glass substrate G, but disposed on the upper surface side of the glass substrate G.
According to the cleaning apparatus 1 of the present invention, since the liquid L applied to the engaging portion 8 on the upper surface side of the glass substrate G and the cleaning liquid C applied to the glass substrate G fall by gravity and adhere to the engaging portion 8 on the lower surface side, it is not necessary to provide the liquid applying mechanism 9 to the engaging portion on the lower surface side. Therefore, the liquid applying mechanism 9 is not provided at a position where it is not necessary to arrange, and therefore, the structure can be simplified.
In the cleaning apparatus 1 of the present embodiment, as shown in fig. 2, a plurality of rows of the cleaning members 2 are arranged at predetermined intervals in the conveyance direction of the glass substrate G, and a plurality of the cleaning members 2 are arranged in series in the width direction.
Specifically, in the cleaning apparatus 1 of the present embodiment, three rows are arranged in the conveying direction of the glass substrates G.
The cleaning member 2 is disposed so that no unwashed portion is generated in the cleaning region on the one surface of the glass substrate G.
In the present embodiment, the cleaning members 2 adjacent to each other in the conveying direction of the glass substrate G are arranged so that the positions in the width direction of the glass substrate G are different from each other (offset).
That is, in the rows of the cleaning members 2 adjacent to each other on the upstream side and the downstream side in the conveying direction of the glass substrate G, the positions of the cleaning members 2 in the width direction of the glass substrate G are made different from each other.
This prevents the remaining of the unwashed portion in the cleaning region on the one surface of the glass substrate G.
The arrangement of the cleaning member 2 can be arbitrarily set as long as no unwashed portion is generated on the cleaning surface of the glass substrate G.
Next, a process of cleaning the upper and lower surfaces of the glass substrate G using the cleaning apparatus 1 will be described.
First, when the glass substrate G is carried into the cleaning apparatus 1 in a horizontal posture by the carrying apparatus, the row of the cleaning members 2 positioned on the most upstream side in the cleaning apparatus 1 is moved to the advance position (contact position) while being rotated by the motor M, and the cleaning pad 3 of each cleaning member 2 comes into contact with the upper surface and the lower surface of the glass substrate G, respectively, to start the cleaning process.
At this time, the driving motor M rotates, and the plurality of gears 7 (the plurality of gears 7a and the plurality of gears 7b) engaged with each other are driven to rotate in conjunction with each other.
As shown in fig. 3, the liquid applying mechanism 9 continuously applies the liquid L to the meshing portion 8 (see fig. 1 and 2) when the drive gear 7 rotates.
According to the cleaning device 1 of the present invention, the thermal expansion of the gear 7 is prevented by cooling the gear 7 with the liquid L. Further, the frictional resistance between the gears 7 is reduced by the liquid L adhering to the meshing portion 8. Therefore, abrasion between the gears 7 is suppressed to prolong the life of the gears 7, and the quality of the glass substrate G is prevented from being deteriorated due to adhesion of abrasion powder.
Further, when the drive gear 7 rotates, the liquid applying mechanism 9 blows the liquid L from the side of the meshing portion 8 toward the meshing portion 8.
According to the cleaning device 1 of the present invention, the liquid L can be directly supplied to the engagement portion 8 from the side, and the liquid L can be appropriately supplied to the engagement portion 8.
The liquid applying mechanism 9 is located above the meshing portion 8, and blows the liquid L from a position higher than the meshing portion 8 when the drive gear 7 rotates.
According to the cleaning device 1 of the present invention, the liquid L blown from a position higher than the meshing portion 8 adheres to the lower side of the meshing portion 8 without dead angle from the upper side thereof by gravity, and the frictional resistance between the gears 7 is reduced by the adhering liquid L. Therefore, abrasion between the gears 7 is suppressed to prolong the life of the gears 7, and the quality of the glass substrate G is prevented from being deteriorated due to adhesion of abrasion powder.
The liquid applying mechanism 9 blows out the liquid L in a conical shape when the drive gear 7 rotates.
According to the cleaning device 1 of the present invention, since the liquid L is blown so as to spread toward the meshing portion 8, the liquid L adheres to the entire meshing portion 8, and the frictional resistance between the gears 7 is reduced by the adhered liquid L. Therefore, abrasion between the gears 7 is suppressed to prolong the life of the gears 7, and the quality of the glass substrate G is prevented from being deteriorated due to adhesion of abrasion powder.
Next, during the cleaning process by the cleaning member 2, the cleaning liquid C is continuously blown from the cleaning nozzle 13 to the upper and lower surfaces of the glass substrate G.
Then, the cleaning process of the upper and lower surfaces of the glass substrate G is performed in a state where a predetermined amount of the cleaning liquid C is sandwiched between the cleaning member 2 (cleaning pad 3) and the glass substrate G.
Since the liquid nozzle 10 is positioned above the cleaning nozzle 13, the range in which the liquid applying mechanism 9 blows the liquid L does not overlap with the range in which the cleaning liquid applying mechanism 12 blows the cleaning liquid C.
According to the cleaning device 1 of the present invention, the application of the liquid L by the liquid applying mechanism 9 and the application of the cleaning liquid C by the cleaning liquid applying mechanism 12 do not interfere with each other. Therefore, the liquid L and the cleaning liquid C can be appropriately applied to the predetermined positions.
Thereafter, as the glass substrate G is gradually conveyed to the downstream side, the next row of the cleaning members 2 is sequentially moved from the retreated position (separation position) to the advanced position (contact position) while being rotated, and the cleaning process of the upper surface and the lower surface of the glass substrate G is performed.
The above embodiments are merely representative embodiments, and various modifications can be made without departing from the scope of the present invention. It is needless to say that the present invention can be implemented in various forms, and the scope of the present invention is defined by the claims of the present invention, and includes all modifications within the equivalent meaning and scope described in the claims of the present invention.

Claims (7)

1. A glass substrate cleaning device for cleaning a glass surface of a glass substrate,
the glass substrate cleaning device includes:
a plurality of cleaning members;
a plurality of rotating shafts supporting the plurality of cleaning members, respectively;
a plurality of gears respectively provided on the plurality of rotating shafts; and
a rotation driving mechanism that drives at least one of the plurality of rotation shafts,
adjacent gears of the plurality of gears intermesh with each other,
it is characterized in that the preparation method is characterized in that,
the liquid applying mechanism applies liquid to a meshing portion where the adjacent gears mesh with each other.
2. The glass substrate cleaning apparatus according to claim 1,
one of the adjacent gears is made of metal and the other gear is made of resin.
3. The glass substrate cleaning apparatus according to claim 2,
the glass substrate is conveyed in a horizontal direction in a horizontal posture,
the engaging portion is positioned above or below the conveyed glass substrate,
the liquid supply mechanism blows liquid from the side of the engagement portion toward the engagement portion.
4. The glass substrate cleaning apparatus according to claim 3,
the liquid supply mechanism is located above the engagement portion.
5. The glass substrate cleaning apparatus according to claim 3 or 4,
further comprising a cleaning liquid applying mechanism for applying a cleaning liquid to the glass surface of the conveyed glass substrate,
the liquid applying mechanism has a liquid nozzle for ejecting the liquid,
the cleaning liquid applying mechanism has a cleaning nozzle for ejecting the cleaning liquid,
the liquid nozzle is located above the cleaning nozzle.
6. The glass substrate cleaning apparatus according to claim 3 or 4,
the liquid applying mechanism blows out the liquid in a conical shape.
7. The glass substrate cleaning apparatus according to claim 3 or 4,
the engaging portions are respectively located above and below the glass substrate,
the liquid applying mechanism is disposed only above the glass substrate.
CN201921419548.4U 2019-08-28 2019-08-28 Glass substrate cleaning device Active CN211275818U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921419548.4U CN211275818U (en) 2019-08-28 2019-08-28 Glass substrate cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921419548.4U CN211275818U (en) 2019-08-28 2019-08-28 Glass substrate cleaning device

Publications (1)

Publication Number Publication Date
CN211275818U true CN211275818U (en) 2020-08-18

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114602918A (en) * 2022-03-14 2022-06-10 滕州市畜牧渔业事业发展中心 Glass slide batch cleaning and disinfecting system for livestock and veterinary examination
WO2023090160A1 (en) * 2021-11-16 2023-05-25 日本電気硝子株式会社 Glass plate cleaning device and glass plate manufacturing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023090160A1 (en) * 2021-11-16 2023-05-25 日本電気硝子株式会社 Glass plate cleaning device and glass plate manufacturing method
CN114602918A (en) * 2022-03-14 2022-06-10 滕州市畜牧渔业事业发展中心 Glass slide batch cleaning and disinfecting system for livestock and veterinary examination
CN114602918B (en) * 2022-03-14 2024-03-15 滕州市畜牧渔业事业发展中心 Glass slide batch cleaning and sterilizing system for livestock and veterinary inspection

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