KR20140118262A

KR20140118262A - Dry scrubber capable of automatic gap adjustment

Info

Publication number: KR20140118262A
Application number: KR1020130033850A
Authority: KR
Inventors: 이대준
Original assignee: 씨티에스(주)
Priority date: 2013-03-28
Filing date: 2013-03-28
Publication date: 2014-10-08

Abstract

The present invention relates to a dry scrubber capable of automatic gap adjustment, and more particularly, to a dry scrubber capable of automatically adjusting a gap when the substrate is drawn on a gap to clean foreign matter remaining on the substrate, In order to automatically remove the gap between the substrate and the vibration damping device in order to automatically remove the gap between the substrate and the vibration damping device in order to remove foreign substances remaining on the substrate with the vibration damping device provided in the scrubber, It is possible to automatically adjust the gap by providing a dry type cleaner capable of automatically adjusting the gap distance of the vibration damper device by driving the servo motor by driving the servo motor so as to automatically adjust the gap, The substrate to be introduced into the gap can not be spaced apart from the gap when the substrate is drawn into the gap The substrate can be prevented from being damaged and the time required for adjusting the gap can be saved so that the productivity and efficiency of the work can be increased. As a result, there is an advantage in that labor can be reduced and time can be saved for adjusting the gap. It is a great invention.

Description

[0001] Dry scrubber capable of automatic gap adjustment [

The present invention relates to a dry scrubber capable of automatic gap adjustment, and more particularly, to a dry scrubber capable of automatically adjusting a gap when the substrate is drawn on a gap to clean foreign matter remaining on the substrate.

In general, various devices such as a liquid crystal display device (LCD), a plasma display panel (PDP), an electroluminescent display (ELD), and a vacuum fluorescent display (VFD)

Among them, LCD is most used because it has excellent image quality and low power despite various disadvantages.

In order to manufacture such a liquid crystal panel, a very large number of cleaning processes are required. As a method for this cleaning, a method of removing organic substances or inorganic substances deposited on a substrate by using physical force or ultrasonic waves using pure water is used. One of the most commonly used methods is brush cleaning The foreign substances adhering to the surface of the substrate were removed using a brush.

In the cleaning section, one surface of the substrate is cleaned by brushing the surface of the substrate with a certain amount of cleaning liquid to remove foreign substances, and one of the brushes is installed in the cleaning apparatus in a horizontal posture corresponding to the moving direction of the substrate, And two surfaces of the substrate are cleaned by cleaning the both side surfaces of the substrate.

Generally, the gap between the substrate and the brush is adjusted according to the fine pattern formed on the substrate by the gap adjusting device, and the position of the brush can be changed corresponding to the operation of the brush or the standby.

As for the cleaning of the prior art,

No. 10-0789684 relates to a method of cleaning and adjusting a plasma reaction chamber for processing a substrate, comprising the steps of: removing a deposited material on a surface inside the chamber; Comprising the steps of: cleaning the plasma reaction chamber, introducing a control gas comprising a fluorine-containing gas and a carbon-containing gas into the chamber, energizing the control gas into a plasma state, and removing the polymer coating formed by the plasma Comprising the steps of: adjusting the plasma reaction chamber by depositing on an inner surface of the chamber; and processing the substrate in the chamber after the conditioning step, wherein the conditioning comprises: Is carried out while not including All.

Open No. 10-2007-0116419 relates to a method of driving a substrate cleaning apparatus, comprising: measuring interval data between brushes; calculating an actual moving distance of the brush according to a substrate thickness using the measured data; A step of automatically adjusting an interval of the brush according to an actual moving distance of the brush, and a step of cleaning the substrate.

Open No. 10-2007-0016182 relates to a cleaning roller gap adjusting device in a cleaning device using a tacky cleaning roller. The present invention relates to a cleaning roller gap adjusting device in a cleaning device using a tacky cleaning roller, The horizontal rotation shaft coupled with the bearing fixing bracket transmits the driving force to the vertical rotation shaft through the gear coupled with the pair of right angle structure of the bearing fixing bracket. Therefore, a shaft coupled with the position indicator for simultaneously adjusting the spacing of the brackets of the upper and lower cleaning rollers of the front and rear portions, and a rear portion horizontal rotation shaft coupled with the coupling are fixed to the front and rear bearing brackets, When the drive is transmitted to the vertical rotation shaft through the gear coupled to the gear train, the gear is moved up and down finely.

Conventional cleaning devices, however, were able to manually adjust the spacing between the substrate and the brush, or only adjust for certain points. Therefore, it is difficult to adjust the distance between the substrate and the brush, and the cleaning effect is deteriorated.

In recent years, a cleaning apparatus for cleaning a substrate has been applied to a dry cleaning method other than a brush. However, there is also a problem in that the cleaning effect is deteriorated because the gap between the substrate and the substrate must be controlled manually.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the prior art, and it is an object of the present invention to provide a dust removing device provided in a dry scrubber, which automatically removes foreign matter remaining on a substrate, A gap is adjusted by the control unit to adjust the gap, and the servo motor is driven by the input value, so that the gap interval of the vibration damper can be automatically adjusted by driving the servo motor. And the technical problem was completed.

In order to accomplish the above object, according to the present invention, there is provided a substrate to be cleaned, wherein the substrate is transferred by a roller connected to a frame, the substrate is pulled into a gap formed under the vibration suppression device, A rotary member provided on both sides of the vibration suppression device and flowing through the vibration suppression device; a speed reducer provided on the upper side of the vibration suppression device, the speed reducer being connected to the vibration suppression device and operated by driving the servo motor; And a control unit for specifying a gap interval on one side of the frame and transmitting the designated value to the servo motor.

According to the dry scrubber capable of automatic gap adjustment according to the present invention, it is possible to automatically adjust the gap, thereby adjusting the gap of the correct numerical value, so that the gap between the substrate and the gap, The substrate can be prevented from being damaged and the time required for adjusting the gap can be saved so that the productivity and efficiency of the work can be increased. As a result, there is an advantage in that labor can be reduced and time can be saved for adjusting the gap. It is a great invention.

1 is a front view showing a preferred configuration of the present invention;
2 is a right side view showing a preferred configuration of the present invention
3 is an enlarged view showing an enlargement of A in Fig.
4 is a plan view showing a preferred embodiment of the present invention

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail with reference to the accompanying drawings.

1 to 4, a substrate to be cleaned is provided, the substrate is transferred by a roller connected to the frame, the substrate is drawn into a gap formed under the vibration suppression device, (30) provided on both sides of the vibration suppressing device (20) and flowing the vibration suppressing device (20), and a vibration suppressing device provided on the upper side of the vibration suppressing device A speed reducer 50 connected to the vibration suppression device 20 and operated by driving the servo motor 40 and a limit sensor 50 for measuring the gap interval h of the vibration suppression device 20, And a control unit 60 for driving the servo motor 40 by comparing the measured value measured by the limit sensor 11 and the input value with each other to complete the dry scrubber 100.

Alternatively, the substrate to be cleaned may be provided, and the substrate may be transferred by the rollers connected to the frame, the substrate may be drawn into a gap formed between the upper and the lower vibration damping apparatuses, (30) provided on both sides of the vibration elimination device (20) and flowing the vibration elimination device (20), and a flow member (30) provided on the upper side of the vibration elimination device (20) A limit sensor 50 connected to the apparatus 200 and operated by the servo motor 40 and a limit sensor 11 for measuring the gap interval h of the vibration suppression apparatus 20 on one side of the frame 10, And a control unit 60 for driving the servo motor 40 by comparing the measured value measured by the limit sensor 11 with an input value to complete the dry scrubber 100.

The vibration damping device 20 may be constructed as a unit on the upper side of the gap h according to the use of the dry scrubber 100 or may be constituted by the vibration damping device 20 to remove the foreign substances remaining on the substrate p from above and below. The apparatus 20 can be applied to the dry scrubber 100 configured to face each other on the upper and lower sides.

The flow member 30 is configured to flow the damping device 20 so that even when the damping device 20 is constructed so as to face each other singly or upwards or downwards, . In the present invention, the flow member 30 is configured as an LM guide, but this is not limited to the LM guide.

The servomotor 40 is capable of adjusting the interval of the gap h by the flow of the vibration suppression device 20 according to an input value input from the controller 60. The servomotor And drives the speed reducer 50 connected to the vibration isolation device 20 to move the vibration isolation device 20 up and down.

The speed reducer 50 is connected to the servo motor 40 and operates by driving the servo motor. The speed reducer 50 is connected to the vibration suppression device 20, and the vibration suppression device 20 .

The control unit 60 controls the overall operation of the dry cleaner 100. The control unit 60 is configured on one side of the frame and inputs the interval of the gap h in the control unit 60 The servomotor 40 is driven through the inputted input value and the vibration reducer 20 is operated by driving the speed reducer 50 connected to the servo motor 40 so that the interval of the gap h can be adjusted. At this time, the controller 60 must always measure the gap interval h.

The description of the operation of the controller 60 is typical and is not described in the present invention.

A limit sensor 11 is provided on one side of the frame 10 for sensing the operation of the vibration isolation device 20 and measuring the interval of the gap h.

The limit sensor 11 measures the interval of the gap h and transmits the measured gap to the controller 60. The limit sensor 11 compares the gap with the input value input by the controller 60 and controls the vibration damper 20 by the operation of the servo motor 40. [ So that the interval of the gap h can be adjusted. This makes it possible to finely adjust the interval by adjusting the input value measured by the controller 60.

Such a limit sensor 11 generally indicates a switch for switching contacts when the operation reaches a predetermined limit position in a mechanical device or the like, and a contact mechanism and a pin or bar mechanism for operating the polarity are combined. Among these switches, switches are made in a structure that can be turned on or off with respect to the position and time to be set, and these switches are mainly used for an automatic control device, a crane, and other operation control or safety devices.

There is also a photoelectric type (non-contact type), and the limit sensor 11 applied to the present invention is not limited to the above description.

In addition, the dry scrubber 100 according to the present invention can be applied to a structure in which the vibration isolation device 20 is provided on one side, and the vibration isolation device can be applied to the upper and lower sides.

The driving method according to the present invention having the above-described structure and capable of automatic gap adjustment will now be described in detail with reference to FIGS. 1 to 4. FIG.

A substrate p on which a foreign substance is to be removed is provided and the substrate p is placed and transferred to a frame 10 provided with rollers 12 to form a gap h formed in the vibration- Can be drawn in and the foreign material of the substrate p can be removed by the vibration isolation device 20. [

At this time, the vibration suppression device 20 flows to adjust the interval of the gap h so that the substrate p can be drawn into the gap h formed in the vibration suppression device 20.

[0051] Regulating the gap of the gap h described above,

When the interval h is inputted through the control unit 60, the servomotor 40 is driven by the input value, the decelerator 50 is operated by the servo motor 40, The vibration damper 20 connected to the speed reducer 50 flows through the flow member 30 to form a gap h as the input value inputted from the controller 60.

At this time, in the servomotor 40, the gap h is measured, and the gap h is formed to be wider and narrower by flowing the vibration damper 20 according to the gap interval h measured.

If the adjustment of the gap interval h is automatically made as in the present invention,

It is possible to remarkably reduce the manpower and time waste required for adjusting the gap which is generated by adjusting the gap between the conventional attraction force and the gap h manually. Further, when the gap p is manually adjusted, The substrate p can be prevented from being damaged due to the substrate p not being drawn into the center by adjusting the gap h manually so that the productivity and efficiency can be improved.

10: frame 11: limit sensor 12: roller
20: Vibration isolation device 30: Flow member 40: Servo motor
50: Reducer 60:
100: Dry scrubber
p: substrate h: gap

Claims

A dry cleaner having a substrate to be cleaned and transferring the substrate by a roller connected to a frame and drawing the substrate into a gap formed on the lower side of the vibration suppression device to clean foreign substances remaining on the substrate with the vibration suppression device,
A flow member 30 provided at both sides of the vibration isolation device 20 for flowing the vibration isolation device 20;
A decelerator 50 disposed on the upper side of the vibration suppression device 20 and connected to the vibration suppression device 20 to operate by driving the servo motor 40;
A limit sensor 11 for measuring a gap interval h of the vibration isolation device 20 on one side of the frame 10;
A controller (60) for comparing the measured value measured by the limit sensor (11) with an input value and driving the servo motor (40); Characterized in that the dry scrubber for automatically adjusting the gap

A substrate to be cleaned is provided, and the substrate is transported by the rollers connected to the frame, the substrate is pulled into a gap formed between the upper and the lower dust collecting apparatuses so that the foreign substances remaining on the upper and lower surfaces of the substrate The dry scrubber comprising:
A flow member 30 provided at both sides of the vibration isolation device 20 for flowing the vibration isolation device 20;
A decelerator 50 disposed on the upper side of the vibration isolation device 20 and connected to the vibration isolation device 200 to operate by driving the servo motor 40;
A limit sensor 11 for measuring a gap interval h of the vibration isolation device 20 on one side of the frame 10;
A controller (60) for comparing the measured value measured by the limit sensor (11) with an input value and driving the servo motor (40); Characterized in that the dry scrubber for automatically adjusting the gap

3. The method of claim 2,
Characterized in that the speed reducer (50) is divided into upper and lower parts according to a vibration suppressing device (20) divided into upper and lower parts to constitute a servo motor (40) and a speed reducer (50)

3. The method according to claim 1 or 2,
Characterized in that one or more limit sensors (11)