KR20050015760A - apparatus for cleaning flat display panel - Google Patents

Abstract

PURPOSE: An apparatus of cleaning a flat display panel is provided to improve a cleaning effect by using a gap controller for correctly controlling a stance of a roll brush. CONSTITUTION: A roll brush(2) is in contact with an upper surface or a lower surface of a substrate. A gap controller(4) is used for moving the roll brush on the surface of the substrate. A drive unit(6) rotates the roll brush. The gap controller includes a driving shaft(8) coupled to the roll brush, a fixing bracket(10) located at both sides of the driving shaft, a rotary plate(12) fixed to the fixing bracket to move the driving shaft, a driving source(14) for providing power to the rotary plate, and a power transmission member for transmitting the driving force of the driving source to the rotary plate.

Description

Cleaning device for flat panel display {apparatus for cleaning flat display panel}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel display cleaning apparatus. More particularly, the present invention relates to a flat panel display cleaning apparatus. The present invention relates to a flat panel display cleaning apparatus that can be used for cleaning a flat panel display panel.

In general, a cleaning apparatus related to a roll brush is a flat panel display panel, that is, a foreign matter adhered to a surface of a substrate using a roll brush, and a cleaning apparatus for cleaning a substrate, that is, corresponding to a substrate transfer section in a bath. For example, it is divided into a predetermined section and set together with a drying apparatus.

The roll brush is used to brush the surface of the substrate with a certain amount of the cleaning liquid in the cleaning section to remove foreign substances, and one of the roll brushes is installed in a horizontal position corresponding to the moving direction of the substrate in the cleaning equipment, that is, the one side of the substrate. It consists of a structure that cleans both surfaces of the substrate by placing two within the separation distance range that can be cleaned or the substrate passes.

The roll brushes are configured to be rolled by being inserted into a drive shaft that is rotated by a drive source such as a motor in the bath, and the drive shaft is configured to allow the roll brush to be rotated in a horizontal position corresponding to the substrate moving direction in the bath. It is supported by a bracket or the like and positioned in the bath.

In addition, the driving shaft is generally made of a gap control between the substrate and the roll brush according to the fine pattern formed on the substrate by a gap control device installed on the outside of the bath, and in response to the operation of the roll brush or stand-by It is fixed to the bracket so that the position can be changed.

The gap adjusting device has a structure in which the position of the driving shaft is changed while the bracket is guided in the vertical direction by the driving of a driving source such as a cylinder or a motor. Such a cleaning device may be set between each process for substrate processing or provided as a single device in a separate cleaning process.

However, such a conventional washing apparatus has a gap adjusting device for moving the roll brush in a vertical direction so that power can be transmitted from the outside of the bath to which the substrate is transferred, and thus the bracket is moved in the vertical direction. And not only the transport structure is complicated, but also because the structure occupies an excessive space inside or outside the bath there is a problem that space utilization is extremely reduced when setting the cleaning equipment.

In addition, when the roll brush is composed of two sets so as to clean both surfaces of the substrate, the power transmission structure with the transfer device becomes more complicated, and thus, excessive time and cost are required during manufacturing.

In addition, when a driving unit such as a motor is installed outside the bath, power is transmitted through one side wall of the bath, so that foreign matters are easily introduced into the cleaning space, thereby reducing the cleaning effect. In addition, the gap adjusting device is difficult to finely adjust the cleaning position of the roll brush in the vertical direction due to its structure, and the posture of the roll brush is easily changed by physical shock and vibration, so that the contact with the substrate is smooth. It may not be achieved and may be a factor to lower the cleaning effect.

The present invention has been made to solve the conventional problems as described above, an object of the present invention is to change the cleaning position of the roll brush with a simple structure to improve the cleaning effect, to facilitate the cleaning area inside the bath The present invention provides a cleaning device for a flat panel display that can be secured.

In order to realize the object of the present invention as described above, in the cleaning apparatus for cleaning the substrate using a roll brush,

A roll brush positioned to be in contact with the upper or lower surface of the substrate, a gap adjusting means for fixing the roll brush so as to be movable upward and downward corresponding to the surface of the substrate, and a driving unit for rotating the roll brush. Include,

The gap adjusting means includes a drive shaft to which the roll brush is coupled, a fixed bracket positioned at both ends of the drive shaft, and a rotation plate fixed to the fixed bracket so as to be rotatable and to allow the drive shaft to move upward and downward. And a drive source for generating power to rotate the rotary plate, and a power transmission member for transmitting power of the drive source to the rotary plate.

Hereinafter, with reference to the accompanying drawings, preferred embodiments of the present invention will be described in more detail.

1 to 3, the roll brush 2 is positioned to be in contact with the upper or lower surface of the substrate P, and the roll brush 2 corresponds to the surface of the substrate P. Referring to FIGS. Gap adjusting means (4) for fixing to move in the vertical direction, and a drive unit (6) for rotating the roll brush (2), as shown in the substrate (P) to transfer in one direction inside the bath (B) ) To correspond to.

Although not shown in the drawings, the substrate P is moved in a horizontal posture inside the bath B by a substrate conveying apparatus such as a well-known transfer roller or a belt.

The roll brush 2 is formed of a conventional structure for cleaning the substrate P by fixing a plurality of cleaning caps 2a in a posture as shown in the drawing on the outer circumferential surface of a hollow cylindrical pipe. It is manufactured in the corresponding length range so that the whole surface of P) can be brushed.

In this embodiment, as shown in the drawing, two roll brushes 2 are positioned in the vertical direction so as to clean the upper and lower surfaces corresponding to the moving direction of the substrate P.

The gap adjusting means 4 is rotatably fixed to the drive shaft 8 to which the roll brush 2 is coupled, the fixed bracket 10 supporting the drive shaft 8, and the fixed bracket 10. In addition, the rotary plate 12 for fixing the drive shaft 8 so as to be movable in the vertical direction, the drive source 14 for generating power to rotate the rotary plate 12, and the power of the drive source 14 It includes a power transmission member 16 for transmitting to the rotating plate (12).

The drive shaft 8 is positioned in a posture penetrating the center of the roll brush 2 as shown in FIG. 2, and is set to be rotatable with the roll brush 2.

The drive shaft 8 is made of a metal or synthetic resin material and is formed to protrude to a predetermined length at both ends of the roll brush 2 as shown in the drawing, and is supported by a fixing bracket 10 to be described later, and also driven with the drive unit 6. Delivery is possible.

In the above description, the roll brush 2 is fitted and fixed to a single drive shaft 8 as an example and shown in the drawings. In addition, two pieces are manufactured to have a constant length and the structure described above at both ends of the roll brush 2. Each can be set.

The fixing bracket 10 may be manufactured in the shape of a square plate having a predetermined thickness as shown in FIG. 1, and both ends of the driving shaft 8 may be caught by a predetermined portion by the rotating plate 12 to be described later. To be located. Although not shown in the drawing, the fixing bracket 10 may be firmly fixed by a fastening member such as a bolt on the bottom surface of the substrate transfer device or the base B.

As shown in FIG. 2, the one side fixing bracket 10 is provided with a sensor 18 for detecting the position of the substrate P in response to the transfer section of the substrate P. As shown in FIG. In the present embodiment, as shown in Fig. 3, the two roll brushes 2 are arranged in one pair with the two roll brushes 2 interposed therebetween.

The sensor 18 may be a conventional optical sensor, and although not shown in the figure, a light receiving unit is installed on the opposite fixing bracket 10 which is spaced apart from one side fixing bracket 10 on which the sensor 18 is installed. The structure of sensing the position of the substrate P entering the cleaning area while irradiating light to the light receiving portion.

In addition, the sensors 18 are electrically connected to control the driving sources 14 to be described later. For example, when the substrate enters the cleaning region P, the sensors 18 narrow the gap between the two roll brushes 2 so that the substrate ( The brush is positioned so as to correspond to the upper and lower surfaces of P), and when the substrate P passes, the roll brushes 2 are set so as to be spaced apart from each other. Since such an electrical connection structure can be easily implemented by those skilled in the art, more detailed description thereof will be omitted.

The rotating plate 12 is manufactured in a disk shape having a constant diameter, and as shown in FIGS. 1 and 3, each of the two rotating brackets 10 in the areas corresponding to both ends of the two driving shafts 8 is fixed. The excitation guide groove 20 is rotatably fitted.

In the open area of the guide groove 20, a cover C in the form of a flange is installed as shown in the figure so that the rotating plate 12 is not separated from the guide groove 20 (see FIG. 9).

In addition, a through hole 22 having a diameter smaller than that of the guide groove 20 is drilled in the guide groove 20 region of the fixing bracket 10 so that both ends of the driving shaft 8 penetrate. .

A fixing hole 24 is drilled in the rotating plate 12 so that both ends of the driving shaft 8 pass and are supported, and the fixing hole 24 has the fixing bracket 10 as shown in FIG. 3. In the center of the rotating plate 12 that rotates in the guide groove (20) of the) is located and drilled.

The drive shaft 8 penetrating the fixing hole 24 is supported by the shaft support member 26 in the fixing hole 24 and is rotatably fixed.

The shaft support member 26 may be a sliding bearing, a rolling bearing or a bush, and the like, and is firmly fixed by fitting to the fixing hole 24. In the present embodiment, the ball bearing is used in the drawings as an example.

The rotation plate 12 may be manufactured by selecting a synthetic resin or a metal material that can be smoothly rotated and minimized friction while being inserted into the guide groove 20 in consideration of the material of the fixing bracket 10. have.

Meanwhile, as shown in FIGS. 2 and 4, a driving source 14 and a power transmission member 16 are installed in the fixing bracket 10 to correspond to the two rotating plates 12, respectively. Either linear power or rotary power generating devices can be used. In this embodiment, the drive source 14 is shown as an example that the geared motor (geared motor) to which the reducer is integrally mounted and is installed in the fixing bracket 12 in the same posture as in FIG.

The power transmission member 16 has a power transmission structure that allows the rotation plate 12 to be rotated by the power of the drive source 14, and in this embodiment, the worm shaft 16a and the worm wheel 16b. ) Is shown as an example. Such a worm gear (Worm Gear) is a structure that transmits the power between the two axes which are positioned in a perpendicular position to each other.

The worm shaft 16a is horizontally connected to the drive source 14, that is, the motor shaft, and is installed to the fixing bracket 10 in a posture as shown in FIG. At this time, both ends of the worm shaft (16a) is rotatably supported by a bearing or bush as shown in the figure so as to be smoothly rotated in the fixing bracket (10).

The worm wheel 16b is fixed to the outer circumferential surface of the rotating plate 12, as shown in Figures 4 and 6, and fitted into the guide groove 20 of the fixing bracket 10, as shown in the figure It is set to engage with the worm shaft (16a).

When the rotating plate 12 is set in the guide groove 20 of the fixing bracket 10, the driving shaft 8 fitted into the fixing hole 24 located away from the center of the rotating plate 12 is illustrated. When the rotating plate 12 is rotated at a predetermined angle by the driving source 14 and the power transmission member 16 as set in a symmetrical posture as in 4, the two roll brushes 2 as shown in FIG. ) Is set so that the interval between them can be narrowed or widened.

In the above description, the worm wheel 16b is separately manufactured and fixed to the outer circumferential surface of the rotating plate 12 by fitting, and is illustrated in the description and drawings as an example, but is not limited thereto. In addition, for example, the rotating plate 12 ) May be manufactured integrally by processing a gear part such as the worm wheel 16b on the outer circumferential surface of the plate 12.

The driving source 14 and the power transmission member 16 are the rotary plate 12 is the guide groove 20 of the fixing bracket 10 so that the gap between the roll brush (2) can be as narrowed or widened as shown in the drawing It is set so that it can be rotated within approximately 180 degrees.

The gap adjusting means 4 having the above structure changes the positions of the two roll brushes 2 as follows while being controlled by the sensor 18 when the substrate P passes through the cleaning area.

As shown in FIG. 3, when the substrate P enters the cleaning area, the sensor 18 at the entry side senses the same, and the rotation plate 12 is moved by the driving source 14 and the power transmission member 16 in FIG. 5. Rotate in the same direction as

Then, the driving shafts 8 installed on the two rotating plates 12 are narrowed as shown in FIG. 7 so that the roll brush 2 can be cleaned in correspondence with the upper and lower surfaces of the substrate P. FIG. When the substrate P passes through the cleaning area while the substrate P passes through the cleaning area, the discharge sensor 18 of the fixing bracket 10 senses this and the driving source 14 is moved. And the power transmission member 16 by rotating the rotating plate 12 to the original position by the opposite operation to the above to separate the two roll brush (2) in a range not in contact with each other as shown in FIG.

In addition, the gap adjusting means 4 adjusts the separation distance of the two roll brushes 2 by the above-described operation, for example, corresponding cleaning according to a fine pattern formed on the substrate P to be processed. The position can be adjusted to have a posture.

In the above description, the drive source 14 includes a geared motor generating rotational power, and the power transmission member 16 has a worm gear structure corresponding to the rotational power of the drive source 14. And the drawings, but the present invention is not limited thereto.

For example, as shown in FIG. 8, the driving source 14 generates linear power, and is formed of a cylinder, and the power transmission member 16 includes a pair of rack gear 16c and a pinion gear 16d. As the linear power of the driving source 14 is converted into rotational power, the rotating plate 12 may be rotated in the guide groove 20.

The rack 16c is connected to the driving source 14, that is, the piston rod of the cylinder, as shown in the drawing, and the pinion gear 16d is manufactured in the form of an external gear to the outer circumferential surface of the rotating plate 12. It can be fitted or made integrally.

In the above description, the rotating plates 12 corresponding to both ends of the two driving shafts 8 are independently operated from each other by the corresponding driving sources 14, but are illustrated in the description and the drawings. It doesn't happen.

For example, although not shown in the drawings, the two rotating plates 12 positioned adjacent to each other by fixing brackets 10 at both ends of the two driving shafts 8 may transmit power to each other. The worm wheel 16b or the pinion gear 16d set on the wheels are set to a position where they can be engaged with each other, or by installing or integrally manufacturing a spur gear for power transmission on the outer circumferential surface of the rotating plates 12. It may be configured to operate in conjunction with one drive source 14 at both ends of the two drive shaft (8).

The power transmission structure of the power transmission member 16 may be variously applied as long as the power transmission structure satisfies the object of the present invention in addition to the above embodiments.

Referring to FIG. 1, the driving unit 6 may use a motor M generating rotational power, and in this embodiment, two units are configured as one set.

The two motors M are positioned in a position capable of transmitting power corresponding to one end of the two driving shafts 8, and are connected to the reducer M1 so that the rotational power is decelerated at a constant reduction ratio and set. At this time, the speed reducer M1 in which the motor M is installed is firmly fixed to the bottom surface or a separate fixture from the outside of the bath B although not shown in the drawing.

And, between the two drive shaft 8 and the output shaft of the reducer M1 is connected to the shaft coupling member 28 as shown in Figure 9, the shaft coupling member 28 is the two drive shaft (8) For example, a ball joint or a universal joint may be used so that power can be easily transmitted even if the position fixed in the vertical direction by the gap adjusting means 6 is changed.

The shaft joint member 28, that is, the ball joint and the universal joint, has a structure in which the linkage can be moved by a ball or hinge coupling so that the two shafts have different angles after the two shafts are connected. It is an axis joint structure that allows power transmission while changing angle.

And the motor (M) is set so that the roll brush (2) installed on the drive shaft (8) can be rotated in the same direction as in FIG. 3 corresponding to the transfer direction of the substrate (P), The rotation speed is set to be decelerated by the reducer M1 so that the roll brush 2 can be rotated within the rotation speed range applied to the normal substrate P cleaning process.

In the above description, the driving shaft 8 is physically connected by the reducer M1 and the shaft joint member 28 of the motor M to transmit power. The two axes may be spaced apart at regular intervals without being physically connected as described above. For example, power may be transmitted by a magnetic force.

FIG. 10 is a view showing a structure of a drive unit 6 in which power is transmitted by the magnetic force, wherein the leading ends of the drive shaft 8 and the output shaft of the reduction gear M1 are spaced at regular intervals as shown in the drawing, and the front ends are electrically For example, two connecting plates 30a and 30b, such as electromagnets, which generate magnetic force in response to the application of the magnetic force, are provided.

Among the two connecting plates 30a and 30b, the connecting plate 30a positioned on the motor M side has a larger diameter than that of the connecting plate 30b positioned on the drive shaft 8 as shown in the drawing. For example, even if the position of the said drive shaft 8 is changed by the said rotation plate 12, it is produced in the range which can accommodate the moving range of the connecting plate 30b provided in this drive shaft 8.

In addition, the connecting plates 30a and 30b are set to be supplied with electricity when the motor M of the driving unit 6 is driven so that the two spaced apart when the motor M of the driving unit 6 rotates. A structure in which magnetic force is generated between the connecting plates 30a and 30b while the driving force of the motor M is transmitted to the driving shaft 8 by the two connecting plates 30a and 30b. to be.

In this power transmission structure, as shown in FIG. 10, the two connecting plates 30a and 30b are spaced apart from each other without passing through the sidewalls of the bath B. By fundamentally blocking the inflow to further improve the cleaning environment inside the bath (B), as well as the simple power transmission structure to meet the miniaturization of the device, and easy maintenance.

Next, a preferred cleaning embodiment of the cleaning apparatus for flat panel display according to the present invention described above will be described in detail.

First, the structure of the cleaning bath B in which the cleaning device according to the present invention is installed will be briefly described. Although not shown in the drawings, the cleaning water supply device and the substrate before or after cleaning are provided in correspondence with the transfer section of the substrate P. For example, an air knife or the like for removing water remaining in (P) with the jet air is located.

1 and 3, the front end portion of the substrate P, which is transferred by the sensor 18 by moving the substrate P into the area of the roll brush 2 along the transfer section inside the bath B, is transferred. Is detected, the power of the gap adjusting means 4, that is, the driving source 14, is transmitted to the rotating plate 12 by the power transmission member 16 so that the rotating plate 12 is fixed to the fixing bracket 10. Rotate in the direction shown in FIG.

Then, the separation distance between the two drive shafts 8 fitted in the fixing holes 24 formed at the position away from the rotation center of the rotating plate 12 is narrowed, and the two roll brushes 2 provided on the drive shafts 8 are As shown in FIG. 7, the substrate moves to a position where cleaning can be performed corresponding to the upper and lower surfaces of the substrate P. FIG.

At this time, the roll brush (2) is changed to a position that can be cleaned by the gap adjusting means (4) and the cleaning brush while rotating in the same direction as shown in Figure 7 by the motor (M) of the drive unit (6) While 2a) brushes the surface of the substrate P and is not shown in the figure, a certain amount of cleaning water is supplied to the surface of the substrate P and the distal end of the cleaning cap 2a to remove foreign substances adhering to the surface.

Then, the substrate P, whose surface is cleaned while moving in one direction as described above, passes between the two roll brushes 2 and is discharged by the discharge side sensor 18 of the fixing bracket 10 of the substrate P. When the rear tip is sensed, the gap adjusting means 4 operates in the opposite direction and moves the two roll brushes 2 to their original positions so as not to contact each other as shown in FIG.

Accordingly, since the roll brush 2 is changed to an optimum cleaning posture in response to the substrate P passing through the cleaning area by the gap adjusting means 4, brushing can be performed, so that the continuous processing of the substrate P is performed. Of course, the cleaning effect can be improved.

In the above description of the preferred embodiment of the cleaning device for a flat panel display according to the present invention, the present invention is not limited to this, but the present invention is not limited to the claims and the detailed description of the invention and various modifications are carried out within the scope of the accompanying drawings. It is possible and this also belongs to the scope of the present invention.

As described above, in the flat panel display cleaning apparatus according to the present invention, the roll brush for cleaning while brushing the substrate is switched to the optimum cleaning posture correspondingly according to the fine pattern formed on the substrate in the cleaning region by the gap adjusting means. As a result, the substrate can be processed continuously and the cleaning effect can be greatly improved.

In addition, the gap adjusting means has a structure in which the gap between the roll brush is adjusted while the rotational power or the linear power of the driving source is switched by the power transmission member, so that the power switching structure is simple, so that the device can be miniaturized, and easily within the bath. The space for cleaning can be secured, and the cost for manufacturing and maintenance can be greatly reduced.

1 is an overall perspective view of a cleaning device for a flat panel display according to the present invention.

Figure 2 is a partially enlarged perspective view for explaining the structure of the gap adjusting means of the cleaning device for a flat panel display according to the present invention.

3 is a side cross-sectional view of FIG.

4 is a partially enlarged cross-sectional view for explaining the structure of the power transmission member of FIG.

5 is a partially enlarged cross-sectional view for explaining a process of changing the cleaning position of the roll brush by the action of the power transmission member of FIG.

6 is a partially enlarged perspective view for explaining the power transmission action of FIG.

7 is a cross-sectional view showing a state in which the substrate is cleaned with a roll brush by the gap adjusting means of FIG.

8 is a partially enlarged cross-sectional view for explaining another embodiment of FIG. 4.

9 is a partially enlarged cross-sectional view for explaining a power transmission structure of the driving unit and the roll brush of FIG.

10 is a partially enlarged perspective view for explaining another embodiment of FIG. 9.

Claims (9)

In the cleaning apparatus for cleaning a substrate using a roll brush, A roll brush positioned to be in contact with the upper or lower surface of the substrate, a gap adjusting means for fixing the roll brush so as to be movable upward and downward corresponding to the surface of the substrate, and a driving unit for rotating the roll brush. Include, The gap adjusting means includes a drive shaft to which the roll brush is coupled, a fixed bracket positioned at both ends of the drive shaft, and a rotation plate fixed to the fixed bracket so as to be rotatable and to allow the drive shaft to move upward and downward. And a drive source for generating power to rotate the rotary plate, and a power transmission member for transmitting power of the drive source to the rotary plate. The cleaning device for a flat panel display according to claim 1, wherein the power transmission member rotates the rotating plate by changing a linear or rotational power of the driving source. The cleaning device for a flat panel display according to claim 2, wherein the power transmission member comprises one of a pair of rack gears and a pinion gear, a pair of worm shafts, a worm wheel, and a pair of spur gears. The cleaning device for a flat panel display according to claim 1, wherein the rotating plate is formed with a hole through which the drive shaft penetrates and is supported, and the hole is drilled at a position away from the rotation center of the rotating plate. The cleaning device for a flat panel display according to claim 1, wherein the fixing bracket is formed to correspond to both ends of the driving shaft, and a guide groove for rotatably fixing the rotating plate on which the driving shaft is supported. The cleaning device for a flat panel display according to claim 1, wherein the driving source is any one of a motor and a cylinder. The cleaning device for a flat panel display of claim 1, wherein the driving unit is connected to the driving shaft to allow a power transmission to a contact joint member or a non-contact joint member. The cleaning device for a flat panel display according to claim 7, wherein the contact joint member is made of any one of a ball joint and a universal joint. The cleaning device for a flat panel display according to claim 7, wherein the non-contact joint member is made of a magnetic force generating member for allowing power to be transmitted by a magnetic force in the non-contact section.