JP2007091464A - Wet treatment apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a wet treatment apparatus simplified in structure, reduced in size, and formed of inexpensive parts, and generally reduced in cost. <P>SOLUTION: This wet treatment apparatus for washing an article 1 to be treated by carrying it to the upper side of a washing tank 19 and immersing it in the tank comprises the washing tank 19, a vertical moving plate 12 installed liftably on the upper side of the washing tank 19, opening at its center part, and extending in a frame-shape therearound so that the washing tank 19 can be passed through the opened center part thereof, a lifting means 14 detachably installed on the vertical moving plate 12 and transmitting thrust, a transport means 16 installed on the upper both sides of the vertical moving plate 12, a drive source 18 driving the transport means 16, and a transport tool 20 having an installation part 24 for installing the article 1 to be treated in a suspended state from the upper part to the center of the frame body 22 formed by placing it on the transport means 16 of the vertical moving plate 12 and integrally forming the side part and the upper part thereof to be transported with each other and immersing only the installation part 24 in the washing tank 19 passed through the center part when the vertical moving plate 12 is lowered. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a wet processing apparatus, and more particularly to a wet processing apparatus that automatically transports an object to be processed to the upper part of a cleaning tank and immerses the object in the tank for cleaning.

Conventionally, wet processing apparatuses are widely used in processing steps such as chemical cleaning of a lens, film formation (coating), and rinsing, or processing steps such as degreasing (cleaning) of metal parts. An apparatus is known that holds and conveys an object to be processed, etc., conveys it to the upper part of the washing tank, and immerses it in a washing solution for washing. Here, in this apparatus, the present applicant does not use a structure in which lifting / lowering means for lifting and lowering the workpiece to be immersed from the upper periphery of the cleaning tank, and a dead space is formed in the lower part of the lifting / lowering means. In order to prevent this, the lifting means is disposed in the vicinity of the lower part of the cleaning tank, and a wet processing apparatus having a structure in which the cleaning tank itself is moved up and down and immersed in an object to be processed has already been filed (for example, patent document) 1).
JP, 2004-216237, A An embodiment by the structure mentioned above is described with reference to Drawing 13 and Drawing 14. FIG. FIG. 13 is a configuration diagram showing an embodiment of a conventional wet processing apparatus for raising and lowering the cleaning tank in this way. 14 is an operation explanatory view showing the operation of raising and lowering the cleaning tank shown in FIG. 13. FIG. 14 (a) shows the lowered state, and FIG. 14 (b) shows the raised state. ing.

  As shown in FIG. 13, an embodiment of a conventional wet processing apparatus transports the transport jig 50 that holds the workpiece 1 such as a lens or a metal part in a suspended state, and transports the transport jig 50. Rail-shaped transport means 46, a cleaning tank 49 disposed below the transport means 46 for immersing and cleaning the workpiece 1, and holding the cleaning tank 49 so as to be movable up and down, the rail shape of the transport means 46 And an elevating means 44 for immersing the workpiece 1 conveyed by being raised from between the two in the processing liquid. Here, the cleaning tank 49, the transport means 46, and the elevating means 44 are housed in a module main body 40 that surrounds the unit and is maintained in a clean state at all times. Further, the transport jig 50 integrally forms a housing 54 for storing a plurality of objects 1 to be processed, and side portions and upper portions on both sides for transporting the housing 54 by hanging it on the transport means 46. Frame body 52 and a lower end portion 56 that extends under the frame body 52 and is placed on the conveying means 46. Further, as shown in FIG. 14A, the cleaning tank 49 is formed in an overflow tank, and the overflowed processing liquid is circulated by supplying the filtered liquid to the pump 48b and the filter 48c via the pipe 48 and filtering them. . At this time, the flexible pipe 48a is interposed in the pipe 48 so that a load is not generated when the cleaning tank 49 moves up and down.

  When performing wet processing of the workpiece 1 using one embodiment of a conventional wet processing apparatus having such a configuration, first, the lifting means 44 shown in FIG. Are placed in the lower part of the conveying means 46, a plurality of workpieces 1 are stored in the housing 54 of the conveying jig 50, placed on the conveying means 46, and conveyed to the upper part of the cleaning tank 49. Then, when the transport jig 50 is transported to the upper part of the cleaning tank 49, as shown in FIG. 14B, the lifting / lowering means 44 rises and pushes the cleaning tank 49 above the transport means 46, whereby the workpiece 1 is processed. Only the housing 54 of the transport jig 50 storing a plurality of the above can be dipped in the processing liquid and wet-processed.

  As described above, the conventional wet processing apparatus has a structure in which the elevating means 44 is disposed in the vicinity of the lower cleaning tank 49 in the module main body 40 to raise and lower the cleaning tank 49. As compared with the structure in which the lifting / lowering means 44 is disposed on the workpiece 1 (the transport jig 50), the dead space can be prevented from being formed in the lower part of the module main body 40. It was formed so that a new arrangement space could be secured.

  However, in the conventional wet processing apparatus, as shown in FIG. 14A, the cleaning tank 49 is moved up and down by the lifting means 44 in the module body 40, so that the pipe 48 connected to the cleaning tank 49 is moved up and down. It is necessary to interpose the flexible piping 48a that can withstand, and there is a problem that the cost of parts of the flexible piping 48a itself is high, and as a result, the cost of the entire apparatus also increases. Further, the elevating means 44 needs to use an elevating means having a strong structure capable of elevating a certain weight and a strong thrust in order to elevate the cleaning tank 49 storing the processing liquid, and such elevating means. However, there is a problem that the cost of the apparatus is high and the cost of the entire apparatus becomes high after all.

  The present invention has been made in view of the foregoing points, and an object of the present invention is to provide a wet processing apparatus that can be downsized with a simple structure, can be configured with inexpensive parts, and can reduce the cost of the entire apparatus.

  In order to solve the above-mentioned problems, the present invention is a wet processing apparatus for automatically transporting an object to be processed to the upper part of a cleaning tank and immersing it in the tank for cleaning. A vertical motion plate that extends in the frame around the cleaning tank so that it can be moved up and down at the top and passes through the central part where the central part opens and the cleaning tank opens. Lifting and lowering means for transmitting a vertically moving thrust, a conveying means provided on both sides of the upper and lower moving plates to convey the workpiece, a drive source for driving the conveying means, and conveying on both upper and lower moving plates. There is an installation part that installs a frame that is integrally formed on both sides and the upper part that are placed and transported on the means, and is suspended from the upper part of the frame to the center to install the workpiece. A transport jig that only immerses the installation part in the cleaning tank that passes through the center when the vertical moving plate is lowered. Obtain.

  Here, it is preferable that the conveying means is connected to and driven by a drive source via a magnetic coupling, and the drive source is provided so that the magnetic coupling can be separated without moving up and down simultaneously during the vertical movement of the vertical motion plate. In addition, a locking portion that extends by connecting the side portions on both sides is provided on the front lower end side of the frame body of the conveying jig, and a pair of protrusions that can be projected and retracted at the front end portion of the vertical moving plate that conveys the conveying jig. By providing a pin, it is preferable that the pin is in contact with the engaging portion of the conveying jig to be a positioning stopper during conveyance. In addition, the upper end of the cleaning tank is high with respect to the transport surface of the transport unit when the vertical moving plate is raised, and low so as not to come into contact with the engaging portion in front of the transport jig transported by the transport unit. It is preferable to provide it. Further, as another embodiment of the upper end of the cleaning tank, when the up-and-down moving plate is raised, it is higher than the conveying surface of the conveying means and is installed on the conveying jig or conveyed by the conveying means It is preferable to provide it low so as not to come into contact. Moreover, it is preferable that the installation part of a conveyance jig is a housing | casing which accommodates two or more to-be-processed objects, or a holding body holding at least one to-be-processed object. Moreover, it is preferable that the conveying means is formed by an endless track conveying mechanism such as a rotary roller, a chain, or a belt that horizontally conveys the conveying jig to the next processing step. Moreover, it is preferable that the raising / lowering means is formed by a vertical movement mechanism including a motor or a cylinder capable of transmitting a vertical movement force to the vertical movement plate. Further, it is preferable that the elevating means is provided so that both the motor and the cylinder can be replaced by being attached to and detached from the vertical moving plate. Further, it is preferable that the elevating means also has an oscillating means capable of performing an oscillating operation within a variable range in the up / down direction or an oscillating operation in the left / right direction perpendicular to the ascent / descent when the up / down moving plate is raised / lowered. Moreover, it is preferable that the washing tank, the vertical moving plate, the lifting / lowering means, the conveying means, and the drive source are built in a box-shaped module body that is hollow and surrounds the periphery. Further, it is preferable that a plurality of module bodies are connected in series according to the purpose, and provided so as to be able to flexibly cope with a change in the number of modules.

  Further, it is preferable to further provide a jig circulating means that is interposed between an outlet and an inlet where a plurality of module main bodies are arranged and processed, and collects the transport jig at the outlet and transfers and circulates it to the inlet. This jig circulating means is formed between the outlets and the inlets at both ends where a plurality of module bodies are arranged in a straight line, and the conveying jig is lifted upward from the outlets, and the inlets at the upper part of the rising parts It has a moving part that moves horizontally to the top of the module, and finally a descending part that descends from the top of the transfer part to the entrance, and moves and circulates so as to extend back across the top of the module body. Is preferred. In another embodiment of the jig circulating means, a first group and a second group in which a plurality of module bodies are linearly arranged are arranged in parallel, and the processing directions of the first group and the second group are reversed. The second group of inlets beside the first group of outlets and the second group of outlets beside the first group of inlets at both ends parallel to each other. It is preferable that the outlets and inlets adjacent to each other are connected to form an O-shape, and the conveyance jig is horizontally transferred from the outlets at both ends to the inlet and circulated. In another embodiment of the jig circulating means, when horizontally transferring from the outlet to the inlet, the conveying jig is collected at the outlet, rotated 180 degrees on the spot, and the front surface is directed rearward, and then horizontally transferred to the adjacent inlet. Or, it is connected to the inlet by extending in a semicircle from the outlet, and the transfer jig is guided along the semicircular arc so that the front is gradually turned 180 degrees rearward and is horizontally transferred to the adjacent inlet. It is preferable to be provided in any of the above.

  As described above, according to the wet processing apparatus according to the present invention, the cleaning tank is not moved up and down by the elevating means, but is moved up and down the vertical moving plate on which the conveying jig storing the object to be processed is placed. In addition, it is not necessary to use flexible piping as in the prior art, and it is possible to use inexpensive parts with a simple structure using ordinary piping, and as a result, the cost of the entire apparatus can be reduced. In addition, the lifting and lowering means lifts and lowers the vertical moving plate on which the conveying jig storing the object to be processed is placed. Therefore, the lifting and lowering means is lighter than the lifting and lowering of the cleaning tank storing the processing liquid, and the lifting and lowering means can be lifted and lowered using an inexpensive lifting means. As a result, the cost of the entire apparatus can be reduced.

  Next, an embodiment of a wet processing apparatus according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a configuration diagram showing an embodiment of a wet processing apparatus according to the present invention. 2 is an external view showing a state in which a plurality of module main bodies 10 shown in FIG. 1 are arranged. FIG. 3 is a diagram showing details of the conveying jig 20 shown in FIG. FIG. 4 is a view showing another embodiment of the conveying jig shown in FIG. FIG. 5 is a view showing still another embodiment of the conveying jig shown in FIG. FIG. 6 is an operation explanatory view showing the positioning operation by the pin 13 shown in FIG. 1, FIG. 6 (a) shows a state in which the carrying jig 20 is carried in, and FIG. 6 (b) shows the carrying jig 20. 6C shows a state where the positioning of the conveying jig 20 is released, and FIG. 6D shows a state where the conveying jig 20 is unloaded. 7 is an operation explanatory view showing an operation of immersing in the cleaning tank 19 shown in FIG. 1. FIG. 7 (a) shows a state before immersion, and FIG. 7 (b) shows a state after immersion. Show. FIG. 8 is a view showing an embodiment in which a jig circulating means 210 is provided in the plurality of module main bodies 10 shown in FIG. Further, FIG. 9 is a perspective view showing the entire appearance with the jig circulating means shown in FIG. 8 attached. FIG. 10 is a view showing another embodiment of the jig circulating means shown in FIG. FIG. 11 is a top view of the jig circulating means 220 shown in FIG. 10 as viewed from above. FIG. 12 is a diagram showing another embodiment of the base shown in FIG.

  As shown in FIG. 1, an embodiment of a wet processing apparatus according to the present invention is employed in a processing step such as cleaning a chemical solution of a lens, film formation (coating), rinsing, or degreasing (cleaning) of a metal part. A cleaning tank 19 for transporting the object to be processed 1 (not shown: see FIG. 8) such as a lens and a metal part and immersing the object to be cleaned, and a central part of the cleaning tank 19 which can be moved up and down. The vertical movement plate 12 extending in a frame shape around the cleaning tank 19 so as to pass through the central portion where the cleaning tank 19 is opened and the vertical movement plate 12 is detachably provided on the vertical movement plate 12 and moves up and down. Lifting means 14 for transmitting thrust, conveying means 16 provided on both upper sides of the vertical moving plate 12 for conveying the workpiece 1, a driving source 18 for driving the conveying means 16, and an upper portion of the vertical moving plate 12 Both sides to be transported by being placed on the transport means 16 on both sides A frame body 22 in which a side portion and an upper portion are integrally formed is provided, and an installation portion 24 is provided that is hung from the upper portion of the frame body 22 in the center to install the workpiece 1 in a suspended state. A transport jig 20 for immersing only the installation part 14 in the cleaning tank 19 that passes through the central part when descending is provided. That is, according to the present invention, the lifting means 14 is disposed in the vicinity of the cleaning tank 19 as in the prior art shown in FIG. 8, and the cleaning tank 19 is not moved up and down. It is provided so that it can be comprised with an inexpensive component with a simple structure.

  Here, the cleaning tank 19, the vertical moving plate 12, the lifting / lowering means 14, the conveying means 16, and the drive source 18 are built in the box-shaped module body 10 that is hollow and surrounds the periphery, and is always kept clean. Yes. As shown in FIG. 2, the module main body 10 is configured by connecting a plurality (three in FIG. 2) in series according to the purpose, and is provided so as to flexibly cope with a change in the number of modules. That is, when three module main bodies 10 are connected in series as shown in FIG. 2, for example, at the time of cleaning, one central lifting / lowering means 14 is stopped (conveying means 16 is operated) so as not to be cleaned, and the number of modules is changed. It is also possible to respond by operating the central lifting / lowering means 14 that has been stopped according to the situation. Therefore, a plurality of module main bodies 10 can be freely connected in series according to the usage situation, and their operations can be appropriately selected and used.

  Further, the vertical moving plate 12 shown in FIG. 1 is supported in the module main body 10 so as to be able to move up and down. By attaching the lifting and lowering means 14 to the vertical moving plate 12, the workpiece 1 (conveying jig 20). ) Can be raised and lowered. The lifting / lowering means 14 is constituted by a vertical movement mechanism (motor in FIG. 1) composed of a motor or a cylinder capable of transmitting a vertical movement force to the vertical movement plate 12. Here, when using a vertical movement mechanism by a motor, the elevating means 14 has an elevating plate that forms a spiral screw portion on the rotating shaft of the motor and is screwed up and down by this screw portion. Is detachably provided on the vertical moving plate 12 (see FIG. 1). On the other hand, when a vertical movement mechanism using a cylinder is used, a fluid cylinder that moves the shaft in the cylinder up and down by a fluid such as hydraulic pressure or pneumatic pressure is used, and the tip of the vertical movement shaft is detachably attached to the vertical movement plate. (Not shown). The lifting / lowering means 14 is detachably attached to the vertical moving plate 12 so that both the motor and the cylinder described above can be replaced. Therefore, the lifting / lowering means 14 can select and use a motor or a cylinder as appropriate according to the cleaning method or weight of the workpiece 1. The elevating means 14 is an oscillating means (not shown) that can perform an oscillating operation within a variable range in the vertical direction or an oscillating operation in the left-right direction perpendicular to the elevating when the vertical moving plate 12 is raised or lowered. It is also possible to form so as to have both. When such a swinging means is employed, a more effective cleaning effect of the workpiece 1 can be obtained by swinging the vertical moving plate 12 during the cleaning of the workpiece 1.

  Further, the vertical moving plate 12 is provided with a conveying means 16 for carrying the conveying jig 20 on the upper part thereof attached to the upper surface on both sides in a rail shape. The transport means 16 is formed by an endless track transport mechanism such as a rotary roller, chain, or belt that horizontally transports the transport jig 20 to the next processing step. The transport means 16 includes a rotating shaft 16a that connects and rotates a rail-shaped transport mechanism provided on both sides of the vertical moving plate 12, and connects the drive source 18 to one end of the rotating shaft 16a. It is formed to drive. At this time, the conveying means 16 drives the rotary shaft 16a to be connected to the driving source 18 via the magnetic coupling 18a, and the driving source 18 can separate the magnetic coupling 18a without moving up and down simultaneously with the vertical movement of the vertical moving plate 12. It is provided as follows. Thereby, the conveying means 16 can reduce the space (dead space) in which the drive source 18 moves up and down at the same time in the module main body 10 when the vertical moving plate 12 is raised and lowered, and also at the time of prevention due to a sudden overload in the drive transmission at the time of conveyance. It can be formed to have an overload prevention mechanism that can be separated.

  Here, when the up-and-down moving plate 12 is raised and the transport jig 20 is carried in or out, the upper end of the cleaning tank 19 is higher than the transport surface of the transport means 16 and is transported by the transport means 16. It is provided low so as not to contact the installation part 24 of the transport jig 20 or the workpiece 1. As described above, according to the structure in which the upper end of the cleaning tank 19 is provided higher than the conveying means 16 and lower than the installation unit 24 or the workpiece 1, dust generated from each mechanism portion including the conveying means 16 enters the cleaning tank 19. It can be installed at a height that does not mix, and can maintain a clean condition.

  Further, as shown in FIG. 3, the conveying jig 20 includes a frame body 22 in which side portions 22 a on both sides and an upper portion 22 b that connects the upper ends are integrally formed, and is suspended from the upper portion 22 b of the frame body 22. It is formed by providing the installation part 24 to perform. More specifically, the frame body 22 has side portions 22a that are formed in a rectangular frame shape and are placed so as to stand on both sides of the rail-shaped transport means 16, respectively. The upper part 22b which connects the upper end of the part 22a mutually is provided. In addition, the frame body 22 is provided with a hanging portion 22c in which a rod-like body extends in parallel in the conveying direction in the center of the upper portion 22b so that the installation portion 24 can be suspended. A rod-like locking portion 22d that connects the side portions 22a on both sides is provided on the lower end side in parallel with the upper portion 22b. The locking portion 22d will be described in detail later (see FIG. 7), but the transport jig 20 transported by the transport means 16 is brought into contact with the pin 13 at the upper position of the cleaning tank 19 shown in FIG. Provided for positioning. Further, the locking portion 22d is provided at a certain height from the lower end of the side portion 22a of the frame body 22, and is substantially the same as or slightly the same as the lower end position of the installation portion 24 or the workpiece 1 suspended from the frame body 22. It is provided below. Here, when the locking portion 22d is provided below the lower end of the installation portion 24 or the workpiece 1 (see FIG. 7A), the vertical moving plate 12 is raised and the frame body 22 is conveyed. At this time, it is important that the upper end of the cleaning tank 19 does not come into contact. That is, the upper end of the cleaning tank 19 in this case is higher than the transport surface of the transport means 16 when the vertical moving plate 12 is raised, and the front of the transport jig 20 transported by the transport means 16 is locked. It is provided low so as not to contact the portion 22d. Further, the installation portion 24 of the frame body 22 is formed in a concave casing made of a wire mesh so that a plurality of objects to be processed 1 such as lenses and metal parts can be accommodated.

  Here, since the conveying jig 20 has only the locking portion 22d to connect (reinforce) the side portion 22a at both lower ends other than the upper portion 22b shown in FIG. 3, the entire outer shape of the frame 22 is external force. Therefore, it is formed in a shape that is easily deformed. Therefore, as another embodiment of the conveying jig, the lower end of the frame body can be reinforced by a locking portion made of a plate material so as to have the function of a stopper at the same time. As shown in FIG. 4, another embodiment of such a conveying jig includes a side portion 32a and an upper portion 32b. A suspension portion 32c is formed on the upper portion 32a to suspend the installation portion 34, which is a casing. It is formed. At this time, the frame 32 is provided with a rectangular plate-like locking portion 32d having a thickness at a position substantially the same as or slightly below the lower end position of the installation portion 34 or the workpiece 1 suspended from the upper portion 32b. The engaging portion 32d is formed so as to be attached and reinforced so as to surround the outer periphery of the side portion 32a. The frame body 32 is provided with notches 31 on both sides of a locking portion 32d provided at the lower rear end in the direction of conveyance by the conveyance means 16. As will be described later, the notch 31 is positioned after the pin 13 shown in FIG. 1 abuts the locking portion 32d in front of the delivery jig 20 in the delivery direction and is wet-processed. 30 is cut out so as to pass through without being abutted when transporting 30. According to another embodiment of such a conveying jig, the strength of the entire frame body 32 is increased and deformation can be suppressed, and rattling can be prevented when it is placed on the conveying means 16.

  Furthermore, although the conveying jigs 20 and 30 shown in FIGS. 3 and 4 have been described in the embodiment in which the installation parts 24 and 34 are formed in a concave casing, the present invention is not limited to this example. It is also possible to use a holding body that is supported by the body and holds and holds the object 1 such as a lens or a metal part. As shown in FIG. 5, another embodiment of the conveying jig provided with the holding body as described above includes an installation portion 44 formed of a holding body for holding at least one object to be processed 1, and the installation portion 44. And a frame 42 for suspending a plurality of frames. At this time, the frame body 42 is the same as the frame bodies 22 and 32 of the conveying jigs 20 and 30 shown in FIG. 3 or 4, and redundant description is omitted here. According to still another embodiment of such a conveying jig, for the structure in which the workpiece 1 is held by the installation portion 44 made of the holding body shown in FIG. The plurality of objects to be processed 1 do not come into contact with each other, and the surface of the object to be processed 1 can be reliably prevented from being scratched.

  Referring again to FIG. 1, when the conveying means 16 conveys the conveying jig 20 to the upper portion of the cleaning tank 19, the conveying means 16 is provided with a pin 13 that can be projected and retracted at the end of the vertical moving plate 12 forward in the conveying direction. The pins 13 are formed so as to contact the frame body 22 of the conveying jig 20 and serve as positioning stoppers. At this time, the pin 13 comes into contact with the locking portions 22d and 32d of the frame bodies 22 and 32 provided at the lower front end in the transport direction of the transport jigs 20 and 30 shown in FIGS. Positioning is performed. Further, the pin 13 is a shaft of a fluid cylinder formed so as to move up and down in a cylindrical shape by a fluid such as hydraulic pressure or pneumatic pressure.

  Next, the operation of the pin 13 will be described in detail with reference to FIG. FIG. 6 illustrates an example in which two module main bodies 10 shown in FIG. 1 are arranged in parallel. First, as shown in FIG. 6A, the pin 13 is fixed in the module main body 10 and is disposed at the front end in the conveying direction by the vertical moving plate 12, and normally, when processing is not performed. It is set in a state of projecting upward from the transport surface of the transport means 16 and acts as a positioning stopper. Thereafter, as shown in FIG. 6B, the conveying jig 20 is completely accommodated in the module main body 10, and the frame 22 (the locking portion 22d shown in FIGS. 32d) abuts and is positioned. This positioned position is a state (see FIG. 1) in which the installation part 24 (casing) is located at the center upper portion of the cleaning tank 19, and is a position where the installation part 24 can be satisfactorily immersed when the installation part 24 is lowered. Here, after the frame 22 of the conveyance jig 20 is brought into contact with the pin 13 shown in FIG. 6B, the conveyance means 16 is driven without stopping for a certain period of time, and is conveyed on the conveyance surface. It operates to slide the tool 20. As a result, the conveying jig 20 is brought close to the pin 13 and can be accurately positioned at a predetermined position by correcting, for example, bending or misalignment with respect to the installation position when the conveying jig 20 is placed on the conveying means 16. After this positioning, the conveying means 16 stops and the vertical moving plate 12 is lowered to immerse the installation portion 24 in the cleaning tank 19 to execute the wet process. When the wet process is completed, the vertical moving plate 12 is raised, and the conveying means 16 is driven again to convey the conveying jig 20 to the next step. At this time, as shown in FIG. 6C, the pin 13 is once lowered below the conveying surface to release the positioning so as not to obstruct the conveyance, and the conveying jig 20 is passed. Thereafter, as shown in FIG. 6 (d), the pin 13 positions the transport jig newly carried into the module body 10 to position the transport jig for a certain period of time (for example, the transport jig after processing). When it has advanced about halfway). Here, the conveying jig 20 shown in FIG. 3 has a locking portion 22d of the frame 22 formed only in the front in the conveying direction, and the conveying jig 30 shown in FIG. A cutout 31 is provided in 32d. Therefore, when the carrying jig is carried out from the inside of the module main body 10 shown in FIG. 6D, the rear lower end side of the frame body 22 can be passed through and carried out without being caught by the pin 13. . Thereafter, as shown in FIG. 6A, a new transfer jig 20 is carried into the module body 10, and a plurality of transfer jigs 20 can be carried in and out by repeating the above operation. . When the pins 13 are moved in and out in accordance with the carrying-in and carrying-out of the carrying jig 20, for example, a sensor for detecting that the carrying jig 20 shown in FIG. This can be performed by providing a detection control unit (not shown) provided with a sensor for detecting the state of being slightly carried out shown in FIG. 6D from the start of carrying out of the carrying jig 20 shown in FIG. In addition, when the conveyance means 16 is stopped after the conveyance jig 20 abuts on the pin 13 and is driven for a predetermined time, a sensor for detecting the position of the conveyance jig 20 abutted on the pin 13 is provided. By transmitting the detection result to the above-described detection control unit and controlling it, the conveyance jig 20 can be brought into contact with the pin 13 and stopped after a predetermined time.

  Further, the operation in the case where the installation portion 24 of the conveying jig 20 positioned by the pins 13 in the module body 10 is immersed in the cleaning tank 19 will be described in detail with reference to FIG. First, when the conveying jig 20 is positioned by the pin 13 shown in FIG. 6, as shown in FIG. 7A, the installation portion 24 is positioned at the upper center of the cleaning tank 19, and the installation portion 24 is It arrange | positions so that it can immerse, without contacting the outer periphery of the upper end of the washing tank 19. FIG. At this time, the upper end of the cleaning tank 19 is arranged at a high position with respect to the conveying surface of the conveying means 16 in a state where the vertical moving plate 12 is raised by the elevating means 14 to maintain a clean state. Further, the conveying jig 20 is provided with a locking portion 22d for positioning the pin 13 (see FIG. 6) in contact therewith. Therefore, as shown in FIG. 7A, the upper end of the cleaning tank 19 is preferably arranged at a position higher than the conveying surface of the conveying means 16 and lower than the locking portion 22d described above. Then, as shown in FIG. 7B, the conveying jig 20 positioned in this way drives the elevating means 16 (drives the motor in FIG. 7), thereby moving the vertical moving plate 12 and the conveying means 1 together. It is possible to perform the wet processing by lowering and dipping only the installation portion 24 in which the workpiece 1 is stored in the cleaning tank 19.

  By the way, if the wet jig is repeatedly executed, the transfer jig 20 finishes the wet process and is carried out from the outlet of the module body 10 and collected outside. In this case, it is important that the conveying jig 20 is returned from the outlet of the module body 10 to the inlet and always circulated, and the returning operation is automatically performed by the jig circulating means rather than manually performed by the operator. Most preferably. An embodiment of such a jig circulating means will be described in detail with reference to FIGS. The module main body 10 and the conveying jig 20 shown in FIGS. 8 to 12 are the same as the constituent elements shown in FIG. 1, and the same constituent elements are denoted by the same reference numerals, and redundant description is omitted. . Here, the jig circulating means can be formed in various structures depending on how the plurality of module main bodies 10 are installed. For example, the jig circulating means is moved up and down (FIGS. 8 to 9) and horizontally moved left and right. A horizontal motion type (FIGS. 10 to 12) can be selected.

First, as shown in FIG. 8, in the embodiment of the lifting jig circulating means 210, a plurality of module main bodies 10 are arranged between the outlet 10a and the inlet 10b to be processed, and the conveying jig 20 is inserted at the outlet 10a. It is provided so as to be collected, transferred to the inlet 10b and circulated. The jig circulating means 210 is formed between the outlet 10a and the inlet 10b at both ends where a plurality of the module main bodies 10 are arranged in a straight line, and the ascending portion 212 for raising the conveying jig 20 from the outlet 10a to the upper part, A moving part 214 that horizontally moves to the upper part of the inlet 10b above the ascending part 212 and a lowering part 216 that finally descends from the upper part of the transfer part 214 to the inlet 10b are provided. That is, the elevating-type jig circulating means 210 is formed in a structure that extends so as to traverse the upper part of the module body 10 and moves and circulates so as to return the transport jig 20. Accordingly, as shown in FIG. 9, the lifting jig circulating means 210 has the height H ₁ shown in FIG. 9 where the conveying jig 20 (see FIG. 8) is moved up and down by the ascending portion 212 and the descending portion 216. Although the need, since it sets a narrow thickness D ₁ shown in FIG. 9, for example, allows for a good installation if the place can be sufficiently ensured even height narrow footprint. Here, jig circulating means 210, raised portions 212 shown in FIG. 9, the mobile unit 214, each thickness _{D 1} of the dropper 216, a width for circulating the conveying jig 20 (see FIG. 8), the upper and lower can be formed substantially equal, or less than a thickness D ₁ as compared with the rotation plate 12 and lifting means 14 the module body 10 with a built-in (see FIG. 1). Therefore, as shown in FIG. 9, the entire apparatus (especially the thickness D ₁ ) can be formed in a compact size.

  Here, the ascending part 212 and the descending part 216 are provided with a belt part 211b that moves up and down by driving a motor 211a from the outlet 10a and the inlet 10b of the module body 10 to the upper moving part 214. A lift 211 is provided to carry the carrying jig 20 into or out of the module main body 10 by feeding the part 211b. In addition, the moving unit 214 includes a belt portion 214b that is disposed at an upper portion where a plurality of module main bodies 10 are arranged and extends long, and is driven by a motor 214a at one end of the belt portion 214b. Is moved from the outlet 10a side to the inlet 10b side and returned. Further, the ascending portion 212 and the descending portion 216 are respectively provided with shutters 212a and 216a that open and close at the outlet 10a and the inlet 10b at both ends in which a plurality of module main bodies 10 are arranged.

  In the embodiment of the elevating type jig circulating means 210 formed in this way, first, the shutter 212a on the outlet 10a side of the ascending portion 212 shown in FIG. 8 is closed and the shutter 216a on the inlet 10b side of the descending portion 216 is opened. Then, the conveying jig 20 storing the object to be processed (not shown) is placed on the belt portion 211b of the lift 211 through the inlet 10b, and is fed into the module body 10 to close the shutter 216a of the inlet 10b. When the transport jig 20 is wet-processed while passing through a plurality of module bodies 10 and reaches the outlet 10a, the shutter 212a on the outlet 10a side is opened, and the belt portion 211b of the lift 211 in the vicinity thereof is opened. Drive to bring it out to the top and collect. And all the processed materials wet-processed are taken out and transferred to another process. Thereafter, the motor 211a of the lift 211 is driven to raise the empty transfer jig 20 that does not contain the workpiece to the upper moving unit 214. Then, the moving unit 214 receives the raised conveying jig 20 on the upper part of the belt unit 214b, and drives the motor 214a to move the conveying jig 20 to the descending unit 216 in the direction opposite to the wet processing direction. As a result, the conveying jig 20 returns to the upper part of the lowering portion 216, drives the motor 211a of the lift 211 placed first and lowers it to the position of the inlet 10b of the module body 10, thereby returning to the original position and circulating. Can be made.

Thus, according to an embodiment of the lift-type jig circulating means 210, as shown in FIG. 9, since the direction of the thickness D ₁ that is perpendicular to the module body 10 and arrayed the direction can be maintained as narrow as possible, the height just ensure H ₁ direction space, can be arranged efficiently in a compact in correspondence in tight arrangement space a plurality of module body 10.

On the other hand, in the embodiment of the horizontal motion type jig circulating means 220, as shown in FIG. 10, a first group 110 and a second group 120 in which a plurality of module main bodies 10 are linearly arranged are arranged in parallel. The inlet 120b of the second group 120 is placed beside the outlet 110a of the first group 110 and the inlet 110b of the first group 110 is placed next to the outlet 110a of the first group 110 at both ends parallel to each other with the processing directions of the first group 110 and the second group 120 reversed. The outlets 120a of the second group 120 are respectively disposed in the first group 110 and the second group 120. The outlets 110a and 120a and the inlets 110b and 120b adjacent to each other at both ends of the first group 110 and the second group 120 are connected to form an O-shape. The transfer jig 20 is horizontally transferred from the outlets 110a and 120a at both ends to the inlets 110b and 120b and circulated. That is, the horizontal movement type jig circulating means 220 is not divided into a plurality of linearly long module bodies 10 like the elevating type shown in FIG. 9, but divided into the first group 110 and the second group 120. Arranged in parallel, a pair is arranged at both ends of the first group 110 from the outlet 110a of the first group 110 to the inlet 120b of the second group 120 on one end side, and from the outlet 120a of the second group 120 on the other end side of the first group 110. The transfer jig 20 is circulated by moving horizontally to the inlet 110b. Therefore, the jig circulating means 220, as compared to the lifting type shown in FIG. 9, although the thickness D ₂ shown in FIG. 10 becomes doubled, suppress a height H ₂ and a width W ₂ Therefore, the overall size can be reduced to a compact size.

  Here, as shown in FIG. 10, the horizontal motion type jig circulating means 220 is a rectangular base 222 extending long in a box shape so as to connect both ends of the first group 110 and the second group 120. And a plurality of rollers that can be mounted and transported on the tip of a shaft extending vertically on the upper surface of the base 222 and pivoting on the upper surface of the base 222 and centering the shaft And a transfer section 224 that rotates. Further, as shown in FIG. 11, the jig circulating means 220 collects the conveying jig 20 at the outlets 110a and 120a on the base 222 and transfers the jig 20 when horizontally transferring from the outlets 110a and 120a to the inlets 110b and 120b. After rotating 180 degrees in the field and directing the front face backward, it is horizontally transferred to the adjacent inlets 110b and 120b. This is because, for example, when the conveying jig 20 exits from the outlet 110a of the first group 110 shown in FIG. 11, the locking portion 22d (see FIG. 3) is on the front surface from the outlet 110a and moves horizontally. This is because if it tries to carry into the inlet 120b of the second group 120, it will be on the rear side. Therefore, in the horizontal motion type jig circulating means 220, as shown in FIG. 11, the conveying jig 20 is collected at the outlets 110a and 120a on the diagonal lines at both ends where the first group 110 and the second group 120 are parallel. It is rotated 180 degrees on the spot.

  At this time, the jig circulating means 220 is not limited to rotating the transfer unit 224 by 180 degrees. For example, as shown in FIG. 12, the base 232 does not extend linearly, but a semicircle. It is not necessary to rotate by bending and extending in the shape. That is, as shown in FIG. 12, the semicircular jig circulating means 230 is used to transfer the jig from the outlet 110a, 120a of the first group 110 and the second group 120 to the inlet 110b, 120b. 20 has a simple structure in which the transfer unit 234 is transferred by a base 232 that extends in a semicircular shape from the outlets 110a and 120a and is connected to the inlets 110b and 120b. By guiding along the semicircular arc of 232, the front locking portion 22d (see FIG. 3) can be horizontally transferred to the adjacent inlets 110b and 120b while gradually turning backward 180 degrees. Therefore, according to another embodiment of such a semicircular base 232, it is not necessary to rotate the transfer unit 234 by 180 degrees compared to the linear base 222 shown in FIG. The manufacturing cost of the H.232 can be reduced and the structure can be reduced.

  When using this horizontal motion type jig circulating means, first, as shown in FIGS. 10 and 11, the transfer unit 224 is moved to the inlet 110b and the outlet 110a of the first group 110, and this inlet 110b is moved. A transfer jig 20 (see FIG. 10) in which an object to be processed is stored is installed in the transfer section 224 on the side. When the transport jig 20 is placed, the transfer unit 224 drives the plurality of rollers to carry the transport jig 20 into the module body 10. Thereby, the conveying jig 20 finishes a predetermined process inside the first group 110 and is carried out from the outlet 110a, and is transferred to a further transfer unit 224 waiting on the outlet 110a side and collected. Further, the transfer jig 20 is moved from the outlet 110a to the transfer section 224, and at the same time, rotated by 180 degrees on the spot, and the front locking section 22d (see FIG. 3) is directed rearward. It is horizontally transferred to the entrance 120b of the second group 120. And a conveyance jig is carried in the inside of the 2nd group 120, finishes predetermined processing, and is carried out from exit 120a. At this time, the transfer unit 224 stopped at the inlet 110a of the first group 110 is moved to the outlet 120a of the second group 120, and the transfer jig 20 that has completed all the wet processing is placed again and collected. To do. As a result, the transfer jig 20 returns to the inlet 110b of the original first group 110, and the wet process is completed by transferring the wet processed object to another process, and a new object to be processed is stored again. Circulation from the inlet 110b of the first group 110 is possible. In the case of the base 232 shown in FIG. 12, the transfer unit 234 can be processed without the need to rotate the outlets 110a and 120a by 180 degrees.

As described above, according to the embodiment of the horizontal motion type jig circulating means 220 and 230, the height H ₂ and the width W _{2 of the} entire apparatus shown in FIG. 10 can be reduced, and the height shown in FIG. even if you can not secure a layout space of an H ₁ can be sufficiently disposed, it can be arranged compactly and efficiently in response to various narrow arrangement space.

According to one embodiment of the wet processing apparatus according to the present invention formed as described above, the conveying jig for storing the object to be processed 1 is used instead of moving the cleaning tank up and down by the lifting means as in the prior art shown in FIG. Since the vertical moving plate 12 on which the 20 is placed is moved up and down, there is no need to use flexible piping as in the prior art for the piping of the cleaning tank 19, and it is possible to use inexpensive parts with a simple structure using ordinary piping. As a result, the cost of the entire apparatus can be reduced. Moreover, since the raising / lowering means 14 raises / lowers the conveyance jig 20 which accommodated the to-be-processed object 1 in the state mounted on the up-and-down moving plate 12, it becomes light compared with the washing tank 19 which stored the process liquid, and is cheap. The lifting and lowering means 14 can be used to lift and lower the overall cost of the apparatus.
Moreover, since the conveyance jig 20 can be reliably positioned by the simple structure provided with the latching | locking part 22d of the conveyance jig 20, and the pin 13, the wet process of the to-be-processed object 1 can be performed favorably. Moreover, since the raising / lowering means 14 can select a motor or a cylinder suitably and can replace | exchange to the up-and-down moving plate 12, it becomes possible to change a setting easily according to the washing | cleaning state or the weight of the to-be-processed object 1, etc. Further, since the conveying means 16 and the drive source 18 are connected by the magnetic coupling 16a and the drive source 18 is provided so that the connection can be disconnected without raising and lowering the vertical moving plate 12, the drive source 18 is provided in the module body 10. It is possible to reduce the dead space that moves up and down.
Furthermore, the conveying jig 20 can be circulated to the original inlet again without being collected and collected at the outlet after finishing the wet process, and various methods can be selected by the jig circulating means shown in FIGS. Thus, the entire apparatus can be circulated without increasing the size.

As mentioned above, although the embodiment of the wet processing apparatus according to the present invention has been described in detail, the present invention is not limited to the embodiment described above, and can be changed without departing from the gist thereof.
For example, the embodiment in which the side part and the upper part of the conveying jig are formed by combining bar-shaped members has been described, but the present invention is not limited to this. For example, the side part and the upper part are made of a plate material made of a transparent resin. It may be provided.

The block diagram which shows one Embodiment of the wet processing apparatus by this invention. FIG. 2 is an external view showing a state in which a plurality of module bodies shown in FIG. 1 are arranged. The figure which shows the detail of the conveyance jig shown in FIG. The figure which shows the other Example of the conveyance jig shown in FIG. The figure which shows the further another Example of the conveyance jig shown in FIG. Operation | movement explanatory drawing which shows the positioning operation | movement by the pin shown in FIG. Operation | movement explanatory drawing which shows the operation | movement immersed in the washing tank shown in FIG. The figure which shows the Example which provided the jig | tool circulation means in the some module main body shown in FIG. The perspective view which shows the whole external appearance which attached the jig | tool circulation means shown in FIG. The figure which shows the other Example of the jig | tool circulation means shown in FIG. The top view which looked at the jig | tool circulation means shown in FIG. 10 from the upper part. The figure which shows the other Example of the base shown in FIG. The block diagram which shows one Embodiment of the conventional wet processing apparatus. Operation | movement explanatory drawing which shows the operation | movement which raises / lowers the washing tank shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Processed object 10 Module main body 12 Vertical moving plate 13 Pin 14 Elevating means 16 Conveying means 16a Rotating shaft 18 Drive source 18a Magnetic coupling 20 Conveying jig 22 Frame 22a Side part 22b Upper part 22c Hanging part 22d Locking part 24 Installation part

Claims (17)

In a wet processing apparatus that automatically transports the workpiece to the upper part of the cleaning tank and immerses it in the tank for cleaning,
The washing tank;
A vertical motion plate provided in a manner capable of moving up and down at the upper part of the cleaning tank, and having a central part opened and extending in a frame shape around the cleaning tank so that the cleaning tank passes through the opened central part,
Elevating means for detachably providing to the vertical moving plate and transmitting thrust that moves up and down,
Conveying means provided on both sides of the upper and lower moving plates to convey the object to be processed;
A driving source for driving the conveying means;
A frame body in which side portions on both sides and an upper portion that are placed on and transported on the transport means on both upper sides of the up-and-down moving plate are integrally formed is provided, and the workpiece is suspended from the upper portion of the frame body in the center. And a transfer jig for immersing only the installation part in the cleaning tank that passes through the central part when the vertical moving plate is lowered. apparatus. The wet processing apparatus according to claim 1,
The conveying means is connected to and driven by a magnetic coupling to the driving source, and the driving source is provided so that the magnetic coupling can be separated without being raised and lowered at the same time when the vertical moving plate is raised and lowered. Wet processing equipment. The wet processing apparatus according to claim 1 or 2,
A locking portion that extends by connecting the side portions on both sides is provided on the front lower end side of the frame body of the conveying jig, and can be projected and retracted at the end of the vertical moving plate in front of conveying the conveying jig. A wet processing apparatus, wherein a pair of pins are provided so that the pins come into contact with the engaging portions of the transport jig and serve as positioning stoppers during transport. The wet processing apparatus according to claim 3, wherein
The upper end of the cleaning tank is higher than the transfer surface of the transfer unit when the vertical moving plate is raised, and does not come into contact with the locking portion in front of the transfer jig transferred by the transfer unit. A wet processing apparatus characterized by being provided as low as possible. The wet processing apparatus according to claim 1 or 2,
The upper end of the cleaning tank is higher than the transfer surface of the transfer means when the vertical moving plate is raised, and abuts against the installation part of the transfer jig or the workpiece to be transferred by the transfer means A wet processing apparatus characterized in that it is provided low so as not to occur. The wet processing apparatus according to any one of claims 1 to 5,
The wet processing apparatus is characterized in that the transfer jig installation section is a housing that houses a plurality of the objects to be processed or a holding body that holds at least one of the objects to be processed. The wet processing apparatus according to any one of claims 1 to 6,
The wet processing apparatus is characterized in that the transport means is formed by an endless track transport mechanism such as a rotary roller, chain, or belt that transports the transport jig horizontally to the next processing step. The wet processing apparatus according to any one of claims 1 to 7,
The wet processing apparatus is characterized in that the elevating means is formed by a vertical movement mechanism including a motor or a cylinder capable of transmitting a vertical movement force to the vertical movement plate. The wet processing apparatus according to claim 8,
The wet processing apparatus is characterized in that the elevating means is provided so that both the motor and the cylinder can be replaced by being attached to and detached from the vertical moving plate. The wet processing apparatus according to any one of claims 1 to 9,
The elevating means further includes an oscillating means capable of performing an oscillating operation in a variable range in the up / down direction or an oscillating operation in the left / right direction perpendicular to the ascent / descent when the up / down moving plate is raised / lowered. Wet processing equipment. The wet processing apparatus according to any one of claims 1 to 10,
The wet processing apparatus, wherein the cleaning tank, the vertical moving plate, the lifting and lowering means, the transporting means, and the driving source are built in a box-shaped module body that is hollow and surrounds the periphery. The wet processing apparatus according to claim 11, wherein
The module main body is configured by connecting a plurality of modules in series according to the purpose, and is provided so as to flexibly cope with a change in the number of modules. The wet processing apparatus according to claim 12, wherein
A plurality of module main bodies are interposed between an outlet and an inlet for processing, and further provided with jig circulating means for collecting the transport jig at the outlet, transferring it to the inlet and circulating it. Wet processing equipment. The wet processing apparatus according to claim 13,
The jig circulating means is formed between an outlet and an inlet at both ends in which a plurality of the module main bodies are arranged in a straight line, and an ascending portion that raises the conveying jig upward from the outlet, A moving part that moves horizontally to the upper part of the inlet at the upper part, and a lowering part that finally descends from the upper part of the transfer part to the inlet, and extends back across the upper part of the module body The wet processing apparatus, wherein the wet processing apparatus is circulated and circulated. The wet processing apparatus according to claim 13,
The jig circulating means has a first group and a second group in which a plurality of the module main bodies are arranged in a straight line arranged in parallel, and both ends parallel to each other with the processing directions of the first group and the second group reversed. Then, the second group inlet is disposed beside the first group outlet, the second group outlet is disposed beside the first group inlet, and both ends of the first group and the second group are arranged. The wet processing apparatus is characterized in that the adjacent outlet and inlet are connected to form an O-shape, and the transfer jig is horizontally transferred from the outlets at both ends to the inlet for circulation. The wet processing apparatus according to claim 15,
When the jig circulating means horizontally transports from the outlet to the inlet, the transport jig is recovered at the outlet, rotated 180 degrees on the spot and turned frontward, and then horizontally transported to the adjacent inlet. A wet processing apparatus. The wet processing apparatus according to claim 15,
When the jig circulating means is horizontally transferred from the outlet to the inlet, it extends in a semicircular shape from the outlet and is connected to the inlet to guide the conveying jig along the semicircular arc. The wet processing apparatus is characterized in that it is horizontally transferred to the adjacent inlets while the front surface is gradually turned backward 180 degrees.

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