JP2009166975A - Processor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small processor having a simple and stable carrying mechanism good in carrying accuracy. <P>SOLUTION: The processor comprises a processing basket 30 for carrying and processing electronic devices and their substrates, a plurality of processing tanks 20-1 to 3 for processing the electronic devices and their substrates, vertically moving parts 40-1 to 5 arranged over an input part in which the processing basket 30 is set, the plurality of processing tanks 20-1 to 3 and an output part out of which the processing basket 30 is picked, for moving the processing basket 30 in the vertical direction, a holding part 50 for holding the processing basket 30 and moving it in the horizontal direction, and a horizontally moving part 60 for moving the processing basket 30 held by the holding part 50 in the horizontal direction. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a processing apparatus for processing an electronic device and its substrates, and more particularly, to a processing apparatus having a stable transport mechanism with a simple mechanism and good transport accuracy.

  FIG. 3 is a processing apparatus configuration diagram showing a processing apparatus for processing a conventional electronic device and its substrates. In FIG. 3, the processing apparatus 200 includes a housing 10, processing tanks 20-1 to 20-3, a processing basket 30, and a transfer robot 60. When the object to be cleaned is placed in the processing basket 30 and set on the transfer hook 65, the transfer robot 60 moves to the position of the processing tank 20-1, and lowers the transfer hook 65. The treatment basket 30 is set at a predetermined position in the treatment tank 20-1 and subjected to treatment.

  When the processing in the processing tank 20-1 is completed, the transfer robot 60 raises the processing basket 30 to the transfer position of the transfer hook 65 to the processing tank 20-2. When the processing basket 30 rises to the transfer position, the transfer robot 60 moves to the process tank 20-2, and a predetermined process is performed in the same manner. This processing apparatus 200 has a feature that processing can be performed continuously by inputting predetermined processing information to the transport robot 60. However, the transport robot 60 is enlarged, the space of the transport path is widened, and the entire apparatus is large. There is a problem that the processing basket becomes unstable due to the shaping and conveyance by the hook.

  FIG. 4 is a processing apparatus configuration diagram showing a processing apparatus for processing another conventional electronic device and its substrates. In FIG. 4, the processing apparatus 300 includes a housing 10, processing tanks 20-1 to 20-3, a processing basket 30, a processing basket moving jig 70, a guide rail 72, and processing basket vertical movement units 74-1 to 74-74. -3. The processing basket moving jig 70 moves the processing basket 30 to the position of the processing tank 20-1 when the object to be cleaned is placed in the processing basket 30 and set on the guide rail 72. The processing basket up-and-down moving unit 74-1 detects this, and the vertical movement hook 75 lowers the processing basket 30 to the processing tank 20-1. At this time, the guide rail 72 opens to both sides so as not to prevent the processing basket 30 from passing. The treatment basket 30 is set at a predetermined position in the treatment tank 20-1 and subjected to treatment.

  When the processing in the processing tank 20-1 is completed, the processing basket up-and-down moving unit 74-1 raises the processing basket 30 to the transfer position of the vertical movement hook 75 to the processing tank 20-2. When the processing basket 30 is raised to the transfer position, the processing basket moving jig 70 moves the processing basket 30 to the processing tank 20-2, and a predetermined process is performed in the same manner. This processing apparatus 300 has a feature that the transport mechanism is simple and can be miniaturized. However, when the processing basket 30 is sequentially moved to the processing tanks 20-1 to 20-3, the transport accuracy of the processing basket moving jig 70 is poor. There is a problem that the delivery position of the treatment basket 30 with the treatment basket up-and-down moving parts 74-1 to 74-3 is not stable, and the treatment basket becomes unstable because the vertical movement is performed by the hook.

In Patent Document 1, a plurality of cleaning tanks to which ultrasonic transducers are fixed are provided in a plurality of rows along a conveyance line of an object to be cleaned and in a direction perpendicular to the conveyance line, and each direction orthogonal to the conveyance line. The transport chain equipped with a transport hook that has a U-shaped leakage prevention member on the outer periphery of the upper end of the cleaning tank is kept at a constant descent position in each transport process, and a cleaning rod is pulled in part. A hook motor that rotates the hook moving rod that moves the carrying hook to be inclined is installed, and a scissor support that moves up and down is provided in the washing tank to move the washing tank perpendicular to the transport line. An ultrasonic cleaning apparatus that controls the speed so as to be a sine curve speed is described.
JP-A-7-108237

  The present invention has been made to solve such a problem, and an object of the present invention is to provide a small processing apparatus having a transport mechanism that is simple in mechanism, stable in transport accuracy, and stable.

The processing apparatus of the present invention is a processing apparatus for processing an electronic device and its substrates,
A processing basket for transporting and processing the electronic device and its substrates;
A plurality of processing tanks for processing the electronic device and its substrates;
An up-and-down moving unit that is disposed in an input unit in which the processing basket is set, the plurality of processing tanks, and an output unit in which the processing basket is taken out, and moves the processing cart up and down;
A holding unit for holding the processing basket and moving in a horizontal direction;
A horizontal movement unit that moves the processing basket held in the holding unit in a horizontal direction;
The up-and-down moving unit guides the cradle, a cradle on which the processing basket is set, a chain installed on the cradle, a motor that drives the chain to move the cradle up and down With a support,
The holding portion includes a holding arm that holds the processing basket, and an air cylinder that sandwiches and holds the processing basket by the holding arm,
The horizontal movement unit includes a ball screw installed in the holding unit and a motor that rotates the ball screw to move the holding unit in a horizontal direction.

  The cradle of the processing apparatus of the present invention includes a processing basket tilting mechanism, and in the plurality of processing tanks, the processing basket is tilted at a predetermined angle while moving upward.

  The plurality of processing tanks of the processing apparatus of the present invention include an ultrasonic unit, and ultrasonically process the electronic device and its substrates.

  According to the present invention, it is possible to provide a transport mechanism that is simple, has good transport accuracy, and can stably move the processing basket. Therefore, it is possible to provide a processing apparatus that is small and has high processing capacity. .

  Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram of a processing apparatus according to the present invention as viewed from the input unit side. FIG. 2 is a configuration diagram of the processing apparatus according to the present invention as seen from the rear side. In FIG. 1, the processing apparatus 100 includes a housing 10, processing tanks 20-1 to 20-1, a processing basket 30, vertical movement units 40-1 to 5, a holding unit 50, and a horizontal movement unit 60. The processing tanks 20-1 to 20-3 are arranged as shown in FIG. 2, and the vertical movement units 40-1 to 40-3 are respectively arranged on the rear side thereof, and the vertical movement unit 40-4 is arranged on the input unit side. The up / down moving unit 40-5 is disposed on the output unit side.

  The vertical movement unit 40 includes a cradle 42 on which the processing basket 30 is set, a chain 44 installed on the cradle 42, a motor 46 that drives the chain 44 to move the cradle 42 up and down, and a cradle 42. And a support column 48 for guiding. The holding unit 50 includes a holding arm 52 that holds the processing basket 30, and an air cylinder 54 that holds the processing basket 30 by the holding arm 52. The horizontal moving unit 60 includes a ball screw 62 that moves the holding unit 50 in the horizontal direction, a motor 64 that rotates the ball screw 62, and an LM guide 66 that guides the horizontal movement of the holding unit 50.

  1 and 2, when the processing basket 30 is set on the cradle 42 of the vertical movement unit 40-4 on the input unit side, the motor 46 drives the chain 44 to move the cradle 42 to the horizontal movement position. Raise. When the processing basket 30 rises to the horizontal movement position, the air cylinder 54 of the holding unit 50 drives the holding arm 52 to sandwich and hold the processing basket 30. When the holding arm 52 holds the processing basket 30, the motor 64 of the horizontal moving unit 60 rotates the ball screw 62 and moves the holding unit 50 in the horizontal direction along the LM guide 66.

  When the holding unit 50 comes to the position of the processing tank 20-1, the air cylinder 54 of the holding unit 50 drives the holding arm 52 and opens the processing basket 30. At this time, the motor 46 of the up-and-down moving unit 40-1 on the rear side of the processing tank 20-1 drives the chain 44 to raise the receiving table 42 to the receiving position and receive the processing basket 30. Subsequently, the up-and-down moving unit 40-1 lowers the cradle 42 and sets the processing basket 30 at a predetermined position in the processing tank 20-1. When the treatment basket 30 is set at a predetermined position in the treatment tank 20-1, the treatment is started.

  When the processing is completed, the motor 46 of the vertical movement unit 40-1 drives the chain 44 again to raise the receiving table 42 to the receiving position, and passes the processing basket 30 to the holding unit 50. When the holding unit 50 receives the processing basket 30, the horizontal moving unit 60 starts moving again in the horizontal direction, moves the holding unit 50 to the position of the processing tank 20-2, and performs the same processing as the processing tank 20-1. enter.

  When the processing up to the processing tank 20-3 is completed in this way, the holding unit 50 passes the processing basket 30 to the vertical moving unit 40-5 on the output unit side. When the cradle 42 of the vertical movement unit 40-5 receives the processing basket 30, the motor 46 of the vertical movement unit 40-1 drives the chain 44 to lower the cradle 42 to the take-out position, so that all processing steps are performed. Exit.

  The cradle 42 of the up-and-down moving units 40-1 to 40-3 disposed on the rear side of the processing baths 20-1 to 20-3 may include a processing basket tilting mechanism. Accordingly, the processing basket 30 can be inclined at a predetermined angle during the upward movement, and the processing liquid can be easily discharged. The processing tanks 20-1 to 20-3 may include an ultrasonic unit. Thus, more efficient processing can be performed by applying ultrasonic waves to the electronic device and its substrates.

  As described above, according to the present invention, it is possible to provide a transport mechanism that is simple, has good transport accuracy, and can stably move the processing basket. It becomes possible to provide.

The block diagram which looked at the processing apparatus by this invention from the input part side. The block diagram which looked at the processing apparatus by this invention from the rear side. The processing apparatus block diagram which shows the conventional processing apparatus. The processing apparatus block diagram which shows the other conventional processing apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Case 20-1, 2, 3 Processing tank 30 Processing basket 40-1-5 Vertical moving part 42 Base 44 Chain 46 Motor 50 Holding part 52 Holding arm 54 Air cylinder 60 Horizontal moving part 62 Ball screw 64 Motor 66 LM guide 100 processing equipment

Claims (3)

A processing apparatus for processing electronic devices and their substrates,
A processing basket for transporting and processing the electronic device and its substrates;
A plurality of processing tanks for processing the electronic device and its substrates;
An up-and-down moving unit that is disposed in an input unit in which the processing basket is set, the plurality of processing tanks, and an output unit in which the processing basket is taken out, and moves the processing cart up and down;
A holding unit for holding the processing basket and moving in a horizontal direction;
A horizontal movement unit that moves the processing basket held in the holding unit in a horizontal direction;
The up-and-down moving unit guides the cradle, a cradle on which the processing basket is set, a chain installed on the cradle, a motor that drives the chain to move the cradle up and down With a support,
The holding portion includes a holding arm that holds the processing basket, and an air cylinder that sandwiches and holds the processing basket by the holding arm,
The horizontal moving unit includes a ball screw that moves the holding unit in a horizontal direction, a motor that rotates the ball screw, and an LM guide that guides the horizontal movement of the holding unit.   The processing apparatus according to claim 1, wherein the cradle includes a processing basket tilting mechanism, and the processing basket is tilted at a predetermined angle while moving upward in the plurality of processing tanks. .   The processing apparatus according to claim 1, wherein each of the plurality of processing tanks includes an ultrasonic unit, and ultrasonically processes the electronic device and its substrates.

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