KR100693760B1 - Apparatus for treating of works capable of high-density developing and method of the same - Google Patents

Abstract

Disclosed are a substrate processing apparatus and method capable of high density development. Such a substrate processing apparatus includes a chamber in which a substrate processing process is performed, a transfer unit rotatably provided in the chamber, and a transfer unit capable of taking over a plurality of substrates sequentially to advance a developing process in a rotation process, and the transfer unit. It is provided with a fixing portion for preventing the fall when the substrate is rotated by fixing the substrate.

Substrate, development, chamber, substrate, transfer, rotation

Description

Substrate processing apparatus and method capable of high-density development {APPARATUS FOR TREATING OF WORKS CAPABLE OF HIGH-DENSITY DEVELOPING AND METHOD OF THE SAME}

1 is a view schematically showing a substrate processing line including a high density developing apparatus according to a preferred embodiment of the present invention.

Fig. 2 is a perspective view of the high density developing device shown in Fig. 1;

3 is a partial perspective view showing the first roller portion shown in FIG.

4 is a view showing an internal structure of the high density developing apparatus shown in FIG.

FIG. 5 is an enlarged view of a portion “A” of FIG. 4; FIG.

The present invention relates to a substrate processing apparatus and method, and more particularly, a plurality of substrate transfer roller portions are integrally formed and rotatably provided so that each roller portion can take over the substrate sequentially and develop while rotating for a predetermined time. The present invention relates to a substrate processing apparatus and method.

In general, a process of forming a circuit pattern or the like on a glass substrate in a manufacturing process of a display device includes cleaning a substrate, applying a photosensitive resin to a surface of the cleaned substrate, and forming a photosensitive film, and forming a photosensitive film with a constant circuit. Exposure is performed through a pattern and development is performed.

In the manufacturing process of such a display device, the developing process may be performed by appropriately arranging a plurality of chambers and spraying the developer onto the substrate in the process of passing the substrate into the chamber.

However, this developing process has a problem in that the line length is increased by arranging several chambers.

In addition, since the development process is performed by the substrate sequentially passes through the various chambers, there is a problem that the development time is increased.

Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to provide a plurality of substrate transfer rollers integrally and rotatably so that each roller unit takes over the substrate sequentially and rotates for a predetermined time. The present invention provides a substrate processing apparatus and method capable of developing.

In addition, another object of the present invention is to provide a substrate processing apparatus and method in which the developing time and efficiency are improved by performing the developing process of the substrate in one chamber.

In order to realize the object of the present invention, the present invention comprises a chamber in which a substrate processing process is performed; A transfer unit rotatably provided in the chamber and configured to sequentially take a plurality of substrates and to advance a developing process in a rotating process; And a fixing part provided in the conveying part to fix the substrate to prevent the substrate from falling when the substrate rotates.

In addition, in order to achieve another object of the present invention, the present invention comprises a first step of mounting the substrate transferred along the pass line to the roller; A second step of preventing the substrate from falling during rotation of the roller part by fixing the substrate seated on the roller part on the roller part by a fixing part; If the roller portion rotates, a third step of rotating the other roller portion on the pass line; And a fourth step of placing another substrate on the roller portion on the pass line, fixing the substrate by the fixing portion, and rotating the substrate, thereby providing a substrate processing method for treating the substrate by repeatedly performing the above steps.

Hereinafter, with reference to the accompanying drawings will be described in detail the structure of the high-density developing apparatus of the substrate processing apparatus according to a preferred embodiment of the present invention.

1 is a view schematically showing a substrate processing apparatus including a high density developing apparatus according to a preferred embodiment of the present invention.

As shown in the drawing, the substrate processing line 1 proposed by the present invention includes a loading unit 3 on which a substrate is loaded, and a developing apparatus 5 for simultaneously developing by loading and rotating a plurality of substrates transferred from the loading unit. ), A rinsing unit 7 for rinsing the developed substrate, a drying unit 9 for drying the rinsed substrate, and an unloading unit 11 for discharging the processed substrate.

In such a substrate processing line, the developing device 5 is rotatably provided in the chamber 15 and the chamber 15 where the developing process is performed, as shown in FIGS. The transfer unit 17 and the transfer unit 17 provided in the transfer unit 17 to fix the substrate (G) in order to proceed with the development process in the rotation process by taking over a plurality of substrates (G) in order to fall when the substrate rotates And fixing parts 31, 33, 35, and 37 for preventing.

In the developing apparatus having such a structure, the chamber 15 has a hexahedral shape and the substrate G may be introduced or discharged through the inlet I and the outlet O (Fig. 4).

In addition, the developer injector 20 is provided in the chamber 15 to inject the developer onto the substrate G so that the developing process may proceed.

At this time, the developer injector 20 is provided on the ceiling inside the chamber 15, and preferably consists of two.

In addition, the transfer part 17 is provided between the connection bars 27 and 28 rotatably mounted on both sides of the chamber 15 and the connection bars 27 and 28, respectively, and is rotatable, and the substrate ( G) A rotation capable of rotating the rollers 19, 21, 23, 25 by rotating the roller parts 19, 21, 23, 25 for mounting / transferring and the connecting bars 27, 28. And a motor 29.

In the transfer part of the structure, the connection bars 27 and 28 are formed of a first connection bar 27 provided on one side of the chamber 15 and a second connection bar 28 provided on the other side.

Each of the first and second connecting bars 27 and 28 is arranged in a cross shape, and a plurality of connecting bars are preferable. In addition, the rotation shafts 30a and 30b protrude from the intersection points of the first and second connection bars 27 and 28 and are coupled to the walls of the chamber 15 by bearings B and B '.

In addition, the rotation shaft 30a of the first connection bar 27 is connected to the rotation motor 29, so that the rotation shaft 29 may rotate when the rotation motor 29 is driven.

In addition, rollers 19, 21, 23, and 25 are provided between the first and second connection bars 27 and 28 to be rotatable.

That is, since the first and second connection bars 27 and 28 are rotatably mounted in the chamber 15, respectively, the first connection bar 27 is rotatable by the rotation motor 29, As a result, the roller portions 19, 21, 23, 25 are rotatable.

The rollers 19, 21, 23, 25 include a plurality of, preferably the first to fourth rollers (19, 21, 23, 25), each roller portion is rotated structure so that the substrate (G) The substrate may be transferred to the substrate at a pass line, and may be separated from the pass line while the substrate is transferred.

Since the rollers 19, 21, 23, and 25 each have the same structure, the first roller 19 will be described below.

That is, as shown in Fig. 3, the first roller portion 19 is rotatably mounted between the pair of frames 40a and 40b and the pair of frames 40a and 40b to form the substrate G. A plurality of rotary rollers 42 for seating / transfer, a power transmission member 48 for driving by connecting the plurality of rotary rollers 42 with each other, and a motor assembly 44 for rotating the power transmission member 48. ).

The first roller 19 is a pair of frames (40a, 40b) are connected to each other integrally by a connecting frame (45a, 45b), the intermediate portion of each of the connecting frame (45a, 45b) first and second It is connected to the connecting bar (27, 28) integrally.

In addition, the plurality of rotating rollers 42 are rotatably mounted in a pair of frames 40a and 40b by bearings, respectively, to allow idle rotation in place.

In addition, one end of the plurality of rotary rollers 42 is connected to each other by a power transmission member 48, preferably a chain or a belt. The power transmission member 48 is then connected to the motor assembly 44.

Therefore, when the motor assembly 44 is driven, the rotational force is transmitted by the power transmission member 48 so that the plurality of rotating rollers 42 may be driven to transport the seated substrate G.

Since the first roller portion 19 as described above has the same structure as the second to fourth roller portions 21, 23 and 25, the second to fourth roller portions 21, 23 and 25 are also substrates. (G) can be transported and seated.

On the other hand, when the rollers 19, 21, 23, 25 are rotated, the respective roller parts 19 to prevent the substrate G from falling off the upper surface of the rollers 19, 21, 23, 25 and falling. 21, 23, and 25 are provided with fixing parts 31, 33, 35, and 37, respectively.

Also, the fixing parts 31, 33, 35, and 37 are also provided with four of the first to fourth fixing parts 31, 33, 35, and 37, so that the first to fourth roller parts 19, 21, 23, 25) respectively.

Since the fixing parts 31, 33, 35, 37 all have the same structure, the first fixing parts 31, 33, 35, 37 will be described below.

That is, as shown in FIGS. 3 to 5, the first fixing part 31 raises and lowers the base 52 and the base 52, and is fixed to the connecting bar 62 of the transfer part 17. And a fastener 31 protruding from the upper surface of the base 52 and fixing the substrate G seated on the first roller part 19 when raised.

In the fixed part having such a structure, the driving part 50 is integrally connected to the first connection bar 27 by the connecting bar 62. One end of the connecting bar 62 is provided with a hydraulic motor 58. In addition, the piston 60 is protruded to the upper and lower portions of the hydraulic motor 58, the upper end of the piston 60 is integrally connected to the bottom of the base (52).

Therefore, when the hydraulic motor 58 is driven, the base 52 can be raised and lowered in the direction of the first roller portion 19 by the piston 60 protruding / contracting.

At least one fastener 31 protrudes to a predetermined height on the upper surface of the base 52.

The fixture 31 is composed of a support pin 54 protruding from the upper surface of the base 52, and the adsorption plate 56 integrally coupled to the upper end of the support pin 54.

And, the support pin 54 has a diameter that the diameter can pass between the (D) of the plurality of rotary rollers 42. In addition, the suction plate 56 includes a conventional suction plate 56 made of a flexible material.

Therefore, when the base 52 is raised by the driving unit 50, the support pin 54 is raised through the rotation roller 42, the suction plate 56 is the first roller portion ( 19 is adsorbed to the bottom surface of the substrate G seated on 19).

As a result, the substrate G can be stably fixed on the first roller portion 19 by the suction plate 56, so that the substrate G is rotated laterally and tilted. (G) is stably fixed to the first roller portion 19 can be prevented from falling.

Hereinafter, a driving process of the high density developing apparatus according to the preferred embodiment of the present invention will be described in more detail with reference to the accompanying drawings.

As shown in FIGS. 1 to 5, when the developing process is performed on the substrate G, the substrate G is first introduced into the chamber 15 of the developing apparatus 5 through the loading unit 3. Inflow. In this case, the substrate G enters through the entrance opening I of the chamber 15 along the pass line P / S.

The substrate G introduced into the chamber 15 is transferred to the first roller portion 19 arranged on the pass line P / S. That is, the motor assembly 44 of the first roller unit 19 is driven to rotate the plurality of rotary rollers 42 to transport the substrate G introduced into the chamber 15 a little distance to be seated.

In this state, by driving the drive part 50 of the 1st fixed part 31, the piston 60 will raise and the base 52 will raise to a fixed height.

Then, as the base 52 is raised, the fastener 31 is raised, and the adsorption plate 56 of the fastener 31 is adsorbed on the bottom surface of the substrate G seated on the first roller portion 19. It is to stably fix (G).

As described above, the developing process is performed by spraying the developing solution from the developer injector 20 onto the surface of the substrate G while the substrate G is fixed on the first roller portion 19.

After a certain period of time, the rotary motor 29 is driven to rotate the feed section 17, so that the first roller section 19 rotates laterally.

When the 1st roller part 19 is located in the lateral direction, the developing solution injected on the board | substrate G will flow down, and it will be easy to remove a developing solution.

Thus, when the 1st roller part 19 rotates laterally, the 2nd roller part 21 rotates and arrange | positions on the position where the 1st roller part 19 was located, ie, the pass line P / S. do. Subsequently, the substrate G, which is waiting for the loading unit 1, is transferred and seated on the second roller unit 21, and the developing process is performed through the same process as the first roller unit 19.

In this order, the first to fourth roller parts 19, 21, 23, and 25 are sequentially rotated through the pass line P / S, so that a developing process is performed in one chamber 15. Can be.

Then, when this process has finished one cycle and the first roller portion 19 returns to its original position, that is, on the pass line P / S, the hydraulic motor 58 of the first roller portion 19 The piston 60 is lowered downward by driving. As the piston 60 descends, the suction plate 56 adsorbed on the bottom surface of the substrate G is separated from the substrate G.

Then, by driving the motor assembly 44 of the first roller 19, the substrate G seated by rotating the rotary roller 42 is transferred to the post process through the outlet O of the chamber 15.

The developing process for the substrate G may be performed through the process as described above.

In the above description, the present invention is limited to the developing step, but the present invention is not limited thereto, and the present invention can also be applied to processing lines such as etching and washing.

As described above, in the substrate processing apparatus and method according to the preferred embodiment of the present invention, a plurality of substrate transfer roller parts are integrally formed and rotatably provided so that each roller part takes over the substrate sequentially and rotates for a predetermined time. There is an advantage to improve the development efficiency by the treatment.

In addition, there is an advantage that the development time and efficiency can be improved by developing the substrate in one chamber.

The present invention can be variously changed by those skilled in the art without departing from the gist of the present invention claimed in the claims, and is not limited to the specific preferred embodiments described above. .

Claims (12)

A chamber in which a substrate processing process is performed; A transfer unit rotatably provided in the chamber and configured to sequentially take over a plurality of substrates and to advance a developing process in a rotating process; And And a fixing part provided in the conveying part to fix the bottom surface of the substrate by adsorption to prevent the substrate from falling when the substrate rotates. The substrate processing apparatus of claim 1, wherein a developer is sprayed into the chamber to spray the developer onto the substrate. The method of claim 1, wherein the transfer unit is provided between a pair of connecting bars rotatably provided on both sides of the interior of the chamber, and a pair of connecting bars are rotatable interlocking when the pair of connecting bars is rotated. And a roller unit capable of mounting / transferring the substrate on the upper surface thereof, and a rotating motor for rotating the pair of connecting bars. According to claim 3, wherein the roller portion comprises a first to fourth roller portion, the first to fourth roller portion a pair of frames, each side of which is connected between the pair of connecting bars, a pair of And a plurality of rotary rollers rotatably mounted between the frames to seat / transfer the substrate, a power transmission member for driving by connecting the plurality of rotation rollers to each other, and a motor assembly for rotating the power transmission member. The substrate processing apparatus of claim 4, wherein the power transmission member selectively includes any one of a belt and a chain. The substrate treating apparatus of claim 4, wherein the fixing parts are provided inside the first to fourth roller parts, respectively, to fix the substrate seated on the first to fourth roller parts. The substrate processing apparatus of claim 6, wherein the fixing part includes a base, a driving part for raising and lowering the base, and a fixing part protruding to an upper surface of the base, and fixing the substrate seated on the roller part when raised. The substrate processing apparatus of claim 7, wherein the driving unit comprises a piston connected to the bottom of the base, a hydraulic motor for raising and lowering the piston, and a connecting bar for connecting the hydraulic motor to the pair of frames. 8. The substrate treating apparatus of claim 7, wherein the fixture comprises a support pin protruding from the base and an adsorption plate integrally coupled to an upper end of the support pin, wherein the adsorption plate is adsorbed on a bottom surface of the substrate to fix the substrate. A first step of placing the substrate transferred along the pass line on the roller unit; A second step of preventing the substrate from falling during rotation of the roller by adsorbing the bottom surface of the substrate seated on the roller by the fixing unit and fixing the lower surface on the roller unit; If the roller portion rotates, a third step of rotating the other roller portion on the pass line; And And a fourth step in which another substrate is seated on the roller portion on the pass line, and the substrate is fixed and rotated by the fixing portion, And treating the substrate by repeatedly performing the above steps. 10. The substrate processing method according to claim 10, wherein the substrate is provided by four roller portions in the first and third steps, respectively. The substrate processing method according to claim 10, wherein in the second step, the base of the fixing unit is lifted so that a plurality of adsorption plates provided on the base are adsorbed onto the bottom surface of the substrate.

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