TWI414700B - 複合密封材 - Google Patents

複合密封材 Download PDF

Info

Publication number
TWI414700B
TWI414700B TW97135622A TW97135622A TWI414700B TW I414700 B TWI414700 B TW I414700B TW 97135622 A TW97135622 A TW 97135622A TW 97135622 A TW97135622 A TW 97135622A TW I414700 B TWI414700 B TW I414700B
Authority
TW
Taiwan
Prior art keywords
sealing
sealing member
composite
annular
groove
Prior art date
Application number
TW97135622A
Other languages
English (en)
Chinese (zh)
Other versions
TW200914755A (en
Inventor
Akira Muramatsu
Original Assignee
Nihon Valqua Kogyo Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Valqua Kogyo Kk filed Critical Nihon Valqua Kogyo Kk
Publication of TW200914755A publication Critical patent/TW200914755A/zh
Application granted granted Critical
Publication of TWI414700B publication Critical patent/TWI414700B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Gasket Seals (AREA)
  • Drying Of Semiconductors (AREA)
TW97135622A 2007-09-21 2008-09-17 複合密封材 TWI414700B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007245236 2007-09-21

Publications (2)

Publication Number Publication Date
TW200914755A TW200914755A (en) 2009-04-01
TWI414700B true TWI414700B (zh) 2013-11-11

Family

ID=40467838

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97135622A TWI414700B (zh) 2007-09-21 2008-09-17 複合密封材

Country Status (3)

Country Link
JP (1) JP5126995B2 (ja)
TW (1) TWI414700B (ja)
WO (1) WO2009038022A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI770111B (zh) * 2017-01-31 2022-07-11 日商華爾卡股份有限公司 複合密封材

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1394270B1 (it) * 2009-03-31 2012-06-06 Sacmi Apparato di soffiaggio di preforme.
US8623145B2 (en) * 2010-03-25 2014-01-07 Parker-Hannifin Corporation Substrate processing apparatus with composite seal
TWI401376B (zh) * 2011-01-21 2013-07-11 Chime Ball Technology Co Ltd Piston airtight device
JP6104927B2 (ja) * 2012-10-09 2017-03-29 日本バルカー工業株式会社 複合シール
JP7068464B2 (ja) * 2018-08-02 2022-05-16 株式会社バルカー 複合シール材
CN113969980A (zh) * 2020-07-23 2022-01-25 中国科学院微电子研究所 一种真空装置
JP2024139045A (ja) * 2023-03-27 2024-10-09 株式会社バルカー 複合シール材

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3833228A (en) * 1973-07-19 1974-09-03 Chenprene Inc Stackable sealing mechanism
JP2007120738A (ja) * 2005-09-30 2007-05-17 Tokyo Electron Ltd シール部品及び基板処理装置
TW200730750A (en) * 2006-02-14 2007-08-16 Nihon Valqua Kogyo Kk Composite sealing material

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1087157A3 (en) * 1999-09-27 2003-01-08 Greene, Tweed Of Delaware, Inc. Seal and protective shield
JP4601993B2 (ja) * 2004-05-18 2010-12-22 三菱電線工業株式会社 シール材
US7784637B2 (en) * 2007-02-21 2010-08-31 Ti Group Automotive Systems, L.L.C. Multi-piece seal

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3833228A (en) * 1973-07-19 1974-09-03 Chenprene Inc Stackable sealing mechanism
JP2007120738A (ja) * 2005-09-30 2007-05-17 Tokyo Electron Ltd シール部品及び基板処理装置
TW200730750A (en) * 2006-02-14 2007-08-16 Nihon Valqua Kogyo Kk Composite sealing material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI770111B (zh) * 2017-01-31 2022-07-11 日商華爾卡股份有限公司 複合密封材

Also Published As

Publication number Publication date
JPWO2009038022A1 (ja) 2011-01-06
WO2009038022A1 (ja) 2009-03-26
JP5126995B2 (ja) 2013-01-23
TW200914755A (en) 2009-04-01

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