200914755 六、發明說明： 【發明所屬之技術領域】 姑ίίΓί、有關於一種例如在超真空狀態使用之複合密封 【先前技術】 件的 氣體ΞΞίϊί空能以外，對於被要求耐電漿性及而_ 、鈇而畔二:迈7係使用不易受流體影響的氟橡膠者。 足立^件的嚴格化，僅以氟橡膠已有無法充分滿 ίίΐ氣體性等性能，而希望有新材料者。 腐魏體性等=:J空J封性能、耐電漿性、耐 本i明人提胃a_」_材，如; 【=:;:特開2°°5_164。27號 〔發明所欲解決之課題〕 部分=橡專f文獻1的複合密封材巾，因其貞責密封的 /u A丄二構件’故於重複使用雖不致於有直空密封性沪夕泼 脂製的構、耐腐佩體性作用的部分為合成樹 、复使用時有所謂之彈性緩和現象，因此與對象構件之密 IP080255/SF-1963f 200914755 .降躺有無法縣充分性能之問題。 能、对電漿性Γ以的係提供一種可兼具有真空密封性 亦不致使直空性能Μ賴讀性等雜’㈣使重複使用時， 爲達成上述目的，本發_提供·· 材，其fir雄封材，係組裝於鳩尾槽狀之密封槽的複合密封 構件配f於上核封槽的外周侧之由彈性構件所組成之第1密封 上述第Τίί1=Τί:;ΐ複合密封材之特徵為： 周側向徑向方向内側突本體、自前述密封本體的内 狀嵌合部； 攻在封本體的徑向方向内侧突設之環 第1密^構件中間部設有形狀可略與前述 有彎曲部，該並^軸方向兩端部設 所形成的段差部。…；月"逸封本體及前述環狀凸部之間 性的ί=;ΐ= 另的第=二 質’則將__產生耐腐異之材 受到；材r 科月之複口在封材係一種組襄於場尾槽狀之密封槽的 IP080255/SF-1963f 200914755 複合密封材，其具傷： Ϊ置於上述密封槽的内周側之由彈性構件所成之 件 第1密封構 硬質Ιίίϋ述，槽的外周側且由較上述第1密封麻 上述第1密封構件係材之特徵為： 以與前述“體及前 :::則將使得外徑側能發揮耐電漿性及ί=ίί性 確保内控側的第1密封構件的密封性。祕孔體/·生並成 及耐=氣=本發明’除了密封性以外，亦可兼具有耐電裝性 分出合密封材亦可於彎曲部及密封本體之間，到 佑述密封本體彈性變形之變形緩衝空間。 依據如此構成，複合密封材在壓接時，因 體及形成於第2密封構件的·料部的較i部分向變形 進彈性魏’故即使使用於如人口栓_部般之將重複 進^丁開閉處之複合密封材的情況，也可以防止第〗密封構件 费封構件破損、損傷，並可抑制密封性降低。 2者’本發明之複合密封材中，於第】密封構件的環狀歲合 #敗5於作為與其配對構件的被嵌合凹部時，該前述嵌合部亦可 形成為無法自前述被嵌合凹部拔出的形狀。 藉由如此構成，可以確實達到防止第】密封構件及第2密封 IP〇8〇255/SF-1963f 5 200914755 構件分離之虞。 〔發明效果〕 PTFEm==材’由嫩橡轉晴構件及如 能、耐=^真空密封性 曲部及第1密封構件的密#_件之彎 性變形，故即使一再重複姊向變形緩衝空間内彈 會降低。另，藉由使用能及與配對構件的密著性亦不 合成樹脂作為第2密封·;乍等的 具有較料製造及贿宜仙日林致纽麵則。更且 【實施方式】 2了:參照圖式詳細說明本發明之複合密封材。 圖1 ΐ第?嶋之複合密封材。圖2為表示 構件單ΐ之ίΐΐΓ剖_。圖3為表相1中第2密封 環狀合密封材1Q形成為騎狀，例如可安裝於略 二Ξ ί 2 ,11係表示水平狀態配置之密封槽2的左 ==頭H兩端細、晴別表示徑向; 向方向〔卜側，以下圖4〜圖8中亦同。 ⑽讎位 之半例如形成於乾蝕刻裝置以權CVD裝置等 封頭部份，該密封槽2其底部26側的寬度較密 曰rau·汗^ 2的寬度為寬，形成所謂的鳩尾槽。 上配置第i ίϊίϊ封材於密封槽2的—側壁28(外周侧） 置第2密封構件，件6 ’於密封槽2的另一側壁30(内周侧)上配 配ί^Ϊί ^ °即，該複合密封材1G係將第2密封構件8 侧，並於夂裝置中面對腐滅體性及電漿等嚴格之環境之一 側並於s亥嚴格％境侧的相對侧(譬如大氣侧）配置有第1密封構 IP〇80255/SF-1963f 200914755 件6。 田1密封構件6具有環狀密封本體6A、自漆私士挪& 面略成梯形之嵌合部6C。 咖工向方向内側突設之剖 該橡以;的橡膠所構成。作為 橡膠的5:;性材質的橡膠所構成，因該 間壓接之ϊ 1G與作為與其崎構件36之 妒6A㈣工^7猎由配對構件36壓接第1密封構件6之密封太 膠所構成敢蝴生。構成第1密封構件6之橡膠更好為由氟橡 作=種氟橡谬，可使用偏氟乙烯/六氣 ί Γ氣氯乙婦系共聚物、偏氟乙烯/五氟丙 兀糸偏氟乙烯系橡膠；偏氟乙烯/四 等之一 偏氟乙稀/四氟乙嫌/全翁、产其g ^丙浠系〃、聚物、 烯/丙稀系共聚物等之三^ i 系共聚物、、偏氟乙稀/四氟乙 共聚物、四氟乙稀/全氟烧基乙稀四氟乙烯/丙烯系 此種構成第1密封槿株，=茅、4物、熱可塑性氟橡膠等。 1玄44拔If#封構件之橡膠若為氟橡膠，則即使萬-筮 性也極佳，且密封性也不會變差電1 #顧乳體及電漿的耐久 純If封構件8係配置於第1密封構件6的内周側，為第i ;〇Τ,ΐί2 8 ^200914755 VI. Description of the invention: [Technical field to which the invention pertains] There is a gas ΞΞίϊί space energy, such as a composite seal used in an ultra-vacuum state, for which the plasma resistance is required and _鈇 畔 2: The Mai 7 series uses fluororubbers that are not susceptible to fluids. The strictness of the foot piece is only due to the fact that the fluororubber has not been able to fully satisfy the gas and other properties, and it is hoped that there will be new materials.腐魏体性等=: J empty J seal performance, resistance to plasma, resistance to the person's stomach a_" _ material, such as; [=:;: special open 2 ° ° 5 _ 164. 27 [invented to solve The problem is that the composite sealing material of the article 1 of the rubber article 1 is sealed by the /u A 丄 two components, so it is not used in the re-use of the direct-empty seal. The part that is rotted is a synthetic tree, and there is a so-called elastic relaxation phenomenon when it is used repeatedly. Therefore, it is close to the object member IP080255/SF-1963f 200914755. There is a problem that the county can not fully perform. It is possible to provide a vacuum sealability to the plasma-based enthalpy, and it does not cause the direct-air performance to be readable. (4) For repeated use, in order to achieve the above objectives, the present invention provides The fir sealing material is a composite sealing member assembled in the groove of the dovetail groove, and the first sealing member composed of the elastic member on the outer peripheral side of the upper core sealing groove is formed by the first sealing member 上述ίί1=Τί:; The material is characterized in that: the circumferential side protrudes inward in the radial direction, and the inner fitting portion from the sealing body; the ring protruding inward in the radial direction of the sealing body is provided with a shape in the middle portion of the first sealing member. The curved portion is slightly formed, and the step portion formed at both ends in the axial direction is provided. ...;月"Yifeng body and the above-mentioned annular convexity between the ί=; ΐ = another nd = second quality' will produce __ corrosion-resistant material is subject to; The sealing material is a kind of IP080255/SF-1963f 200914755 composite sealing material which is set in the groove of the tail groove of the field, and has a wound: the first sealing of the piece formed by the elastic member placed on the inner circumferential side of the sealing groove In the outer peripheral side of the groove, the first sealing member of the first sealing member is characterized in that: the body and the front::: the outer diameter side can exhibit the plasma resistance and ί=ίί性 ensures the sealing property of the first sealing member on the inner control side. The secret hole body/·synthesis and resistance=gas=in addition to the sealing property, the sealing property can also be combined with the electrical resistance. Between the curved portion and the sealing body, the deformation buffer space for elastically deforming the sealing body can be described. According to the configuration, the composite sealing material is formed by the body and the material portion formed in the second sealing member during the pressure bonding. Partially deformed into elasticity, so even if used in the case of population plugs, it will repeat In the case of the composite sealing material, it is also possible to prevent the sealing member from being damaged or damaged, and to suppress the deterioration of the sealing property. In the composite sealing material of the present invention, the sealing member is annularly aged # When the recessed portion is a fitting recessed portion that is a mating member, the fitting portion may be formed in a shape that cannot be pulled out from the fitting recessed portion. With such a configuration, the first sealing member and the first sealing member can be surely prevented. 2 Sealing IP〇8〇255/SF-1963f 5 200914755 Component separation. [Invention effect] PTFEm==material' from tender rubber to clearing member and if it can withstand, ^^ vacuum seal curved part and first sealing member The bending of the dense #_piece is deformed, so that even if it is repeatedly repeated, the elastic deformation will be reduced in the deformation buffer space. In addition, the resin can be used as the second seal by using the adhesion to the mating member. The composite sealing material of the present invention is described in detail with reference to the drawings. Fig. 1 The composite sealing material of the first layer is shown in Fig. 2 In order to represent the component ΐ ΐΐΓ _ _. Figure 3 In the first phase, the second sealed annular sealing material 1Q is formed in a riding shape, for example, it can be attached to a slightly Ξ 2 ί 2 , and the 11 series indicates that the left side of the sealing groove 2 in the horizontal state is thin. The direction of the radial direction; the direction of the side (the same as in the following FIG. 4 to FIG. 8). (10) The half of the 雠 position is formed, for example, in a dry etching apparatus, such as a CVD apparatus, etc., and the sealing groove 2 is on the bottom 26 side thereof. The width of the denser rau·sweat 2 is wider, forming a so-called dovetail groove. The first sealing member is disposed on the side wall 28 (outer peripheral side) of the sealing groove 2, and the second sealing member is placed, and the member 6' is sealed. The other side wall 30 (inner peripheral side) of the groove 2 is provided with ί^Ϊί ^ °, that is, the composite sealing material 1G is disposed on the side of the second sealing member 8 and faces the decomposing body and the plasma in the crucible device. The first sealing structure IP〇80255/SF-1963f 200914755 piece 6 is disposed on the opposite side of the strict environment side (such as the atmosphere side). The field 1 sealing member 6 has an annular sealing body 6A, a fitting portion 6C which is slightly trapezoidal in shape. The coffee cutter protrudes from the inside of the direction and is formed by the rubber of the rubber. It is composed of a rubber of a rubber material of 5:;, because the pressure is 1G between the pressure and the sealing member 1A which is pressed against the first sealing member 6 by the pairing member 36 as the 妒6A (4) Form a dare to live. The rubber constituting the first sealing member 6 is preferably made of fluoroelastomer = fluoroelastomer, and a vinylidene fluoride/hexafluoroethylene phthalate copolymer, vinylidene fluoride/pentafluoropropene fluoride vinylidene fluoride can be used. Rubber; vinylidene fluoride / tetrafluoroethylene / tetrafluoroethylene / omnibearing, producing g ^ propyl hydrazine, polymer, olefin / propylene copolymer, etc. ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, Wait. 1 Xuan 44 pull If# rubber of the sealing member is fluororubber, even if the 筮-筮 property is excellent, and the sealing property will not deteriorate. 1 #乳乳 and plasma durable pure If sealing member 8 series It is disposed on the inner peripheral side of the first sealing member 6, and is i; 〇Τ, ΐί2 8 ^
Hi度鳩辦㈣ 體6A與環狀凸部6B之間所 :也57铒什0之在封本 該彎曲邱8B之具卢太a * P斤形成之奴差部6D之彎曲部8B，於 度方向中間部形成有較薄部分8C。 ^ ’弟1讀構件6之歲合部6C嵌合於 之被肷合部8A，同時藉由彎曲邱 二封構件8 密封構件6與第2密封構件8緊密地組裝為：!又體差⑽，使第2 IP080255/SF-1963f 200914755 此種第2密封構件8, up 質合成樹脂所構成，較好宜由第匕1密封構件6更硬的硬 π由璲自氟樹脂、聚醯亞胺樹脂、聚醯 桝r帶笠·^ φ ^掛’亞胺樹脂、聚醯胺醯亞胺樹脂、聚苯硫醚 =曰4本开♦坐樹脂、聚__旨之1種以上之合成樹脂所構 構件所構成之第〗密封構等之耐久性良好，且由彈性 氣體、爾增====聽護綱受雜性 四氟例為聚四氟乙稀(PTFE)樹脂、 乒聚物(FEP)樹浐t四翁、、聚物(PFA)樹脂、四氟乙烯-六氟丙烯 聚物Φ㈣)樹脂、聚氣乙^ ^旨=三氟2乙烯共 性、耐細生氣體、耐電:)則曰^^中，若考慮耐熱 第1密封構件6之環狀裝於第1密封構件6之際， 形緩衝空間S。 。 ^噚曲部8Β之間形成環狀之變 合密封材10 第2密封構件8所構成之複 變形緩衝空間S内彈性。马谷許環狀凸部6B與弯曲部8B向 又，複合密封材10安「 有必要為容易安裝但難脫落^及^場尾槽」之密封槽2時， 於密封材壓縮時，有必要 义入。因此，複合密封材10 因此，複合密封材^二口 端部之R部分接觸。 為凸形狀第第自密封面至剖面中央成 狀A)，為了提高對密 g面开^(管曲部纽之外側面形 〈益者陡而成為直線(平面），又，於 IP080255/SF-1963f 200914755 第2密封構件8，自該密封面A向軸方 分成為由直線賴線所構狀形狀。以心之連續外側部 藉由此構成，於壓接複合密封材1〇之 之密封本體6A彈性變形而於外徑侧賦予二第1被封構件6 徑側之第2密封構件8係由比第！密封6痛而且，由於内 構成，因此，藉由將第2密封構件8 材料所 或電將CVD裝置等之半導體製造裝乾姓刻裝置 聚等之嚴格環境側的腔室側，使第心:，蝕性氣體、電 該等氣體、電漿等之影響，而且密封性亦；免於受 質^耐腐雜及耐電漿性優異之之第件6更硬 1被封構件6亦受到第2密封構件8之保護’，因^第 材10全體之密封性降低。 、 可防止複合密封 6又，於壓接複合密封材10之際，由於可 之抢封本體6A與形成於第2密封構件彎：雄場件6 分向變形緩衝空間S内彈性變彡 =曲邛8B之較薄部 6與第2密封構件8之密封性劣化。”抑制第1密封構件 錯誤地將複合密騎上下減馳ίΐίΐ蝴才1G安裝時， 定於=，雖就本發明之較佳實施形態加以說明，但本發明不限 例如，亦可構成為如圖4所示之變形例，y 4〇之第i㈣構件6=域合密封材 喪合部4!壓入構成第/密長方形’將此 之被喪合凹部43内。爾件軸為郝略呈長方形狀 構件Ϊ與2 變f例，複合密封材5Q之第1密封 缓衝空間s亦可^件51之間之於前述實施形態中所述之變形 IP080255/SF-1963f 200914755 又’如圖6所示之篥 封構件6]，亦可H，於複合密封材6〇之第 部分sc。 χ厚心62替代前述實施形態所述之較| ’亦可構成為如圖7 之第1密封構件刀與第U第4^形例，複合密封材7〇 -部分内凹而設置變形緩衝空間H72中之第1密封構件71之 5 _ ’於複合密封材 合部2密^ 82 y A，將該嵌 係形成為圓形環:實:所示之複合密封材ω全體 複合密封材1〇,全體形成為矩形^可。如圓ί0所示之第6變形例使 之外周側，1第2 密^構件配置於密封槽 明，但本發日月之複合密封材，於之情況加以說 槽之_，二置於密封 =易可使用於在其他環境嚴苛條件τ使用之f 部分。又，亦可使用鳩尾槽以外之密封槽。 #置之在封 【圖式簡單說明】 圖2係表示圖1中的第i密封構件之剖面圖； 圖3係表示圖1中的第2密封構件之剖面圖； 圖4係表示第1變形例之複合密封材之剖面圖； 圖5係表示第2變形例之複合密封材之剖面圖； 圖6係表示第3變形例之複合密封材之剖面圖； 圖7係表示第4變形例之複合密封材之剖面圖； IP080255/SF-1963f 10 200914755 圖8係表示第5變形例之複合密封材之剖面圖； 圖9係表示本發明實施形態之複合密封材之平面圖； 圖10係表示第6變形例之複合密封材之刮面圖。 【主要元件符號說明】 2 6 、 71 、 81Hi degree (4) between the body 6A and the annular convex portion 6B: also 57 铒 0 0 in the seal of the curved Qiu 8B with Lu Tai a * P kg formed by the 7D bending part 8B, A thin portion 8C is formed in the intermediate portion of the degree direction. ^ 'The first part 6C of the member 1 reading member 6 is fitted to the engaged portion 8A, and at the same time, the sealing member 6 and the second sealing member 8 are tightly assembled by bending the second sealing member 8 :! In the second IP080255/SF-1963f 200914755, the second sealing member 8 is made of an up-synthesis resin, and it is preferable that the second sealing member 6 is harder hard π from the fluororesin or the polyimine. Resin, polyfluorene 笠 笠 · ^ φ ^ hanging 'imine resin, polyamidoximine resin, polyphenylene sulfide = 曰 4 open ♦ sitting resin, poly __ one or more synthetic resin The durability of the first sealing structure composed of the structural members is good, and the elastic gas, the ergium ====the hearing aid is tetrafluoroethylene, and the polytetrafluoroethylene (PTFE) resin, the phenopolymer (FEP) Tree 浐 t 四,, (PFA) resin, tetrafluoroethylene-hexafluoropropylene polymer Φ (4)) resin, gas-gathering = trifluoroethylene ethylene common, resistance to fine gas, electricity: In the case where the heat-resistant first sealing member 6 is attached to the first sealing member 6, the buffer space S is formed. . The annular deformation seal member 10 is formed between the curved portions 8 and the second sealing member 8 is elastic in the complex deformation buffer space S. When the sealant is compressed, it is necessary to seal the sealing material 2 when the seal member 8A and the bent portion 8B are facing each other, and the seal groove 2 of the composite seal member 10 is required to be easily installed but difficult to fall off and the field tail groove is required. Righteousness. Therefore, the composite sealing material 10 is thus in contact with the R portion of the end portion of the composite sealing material. In the shape of the first self-sealing surface of the convex shape to the center of the cross section, A), in order to improve the opening of the dense g-plane (the outer surface of the curved part is a straight line (plane), and in IP080255/SF -1963f 200914755 The second sealing member 8 is formed into a shape formed by a straight line from the sealing surface A. The continuous outer portion of the core is configured to seal the pressure-bonded composite sealing material 1 The second sealing member 8 which is elastically deformed by the main body 6A and provided on the outer diameter side of the second first sealing member 6 on the outer diameter side is pained by the second sealing member 6 and has an inner structure. Therefore, the second sealing member 8 is provided by the material. Or electrically, the semiconductor manufacturing such as a CVD apparatus is mounted on the chamber side of the strict environment side, such as a device, such as a corrosive gas, an electric gas, a plasma, etc., and a sealing property; The first member 6 which is excellent in resistance to corrosion and plasma resistance is also protected by the second sealing member 8 from the first sealing member 8, and the sealing property of the entire material 10 is lowered. The composite seal 6 is, in the case of crimping the composite sealing material 10, because it can seal the body 6A and form The second sealing member is bent: the male field member 6 is elastically deformed in the deformation buffer space S = the sealing property between the thin portion 6 of the curved portion 8B and the second sealing member 8 is deteriorated. "The first sealing member is suppressed from being erroneously The composite close-up and down-down ΐ ΐ 才 才 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 4th member i (four) member 6 = domain sealing material splicing portion 4! Pressing into the first / dense rectangle 'to be smashed into the concave portion 43. The axis of the member is a slightly rectangular member Ϊ and 2 change f For example, the first sealed buffer space s of the composite sealing material 5Q may be between the members 51 and the deformation described in the above embodiment. IP080255/SF-1963f 200914755 and the sealing member 6 as shown in FIG. And H may be in the first part of the composite sealing material 6〇sc. The thick core 62 may be formed as the first sealing member knife and the Uth 4th shape as shown in FIG. 7 instead of the above-mentioned embodiment. For example, the composite sealing material 7〇-part is recessed and the first sealing member 71 of the deformation buffer space H72 is provided 5 _ 'in the composite sealing material portion 2 mils 82 y A, the embedded system is formed into a circular ring: solid: the composite sealing material ω is shown as a composite sealing material 1 〇, and the whole is formed into a rectangular shape. The sixth modification shown as a circle ί0 The outer peripheral side, the 1st second member is placed in the sealing groove, but the composite sealing material of the present day and the month is said to be the groove, and the second is placed in the seal = easy to be used in other environments. The condition τ is used in part f. Further, a sealing groove other than the tail groove can be used. #置在封封 [Simple description of the drawing] Fig. 2 is a sectional view showing the ith sealing member of Fig. 1; Fig. 4 is a cross-sectional view showing a composite sealing material according to a first modification; Fig. 5 is a cross-sectional view showing a composite sealing material according to a second modification; Fig. 7 is a cross-sectional view showing a composite sealing material according to a fourth modification; IP080255/SF-1963f 10 200914755; Fig. 8 is a sectional view showing a composite sealing material according to a fifth modification; 9 is a plan view showing a composite sealing material according to an embodiment of the present invention; and FIG. 10 is a view showing a sixth modification. Scraped-surface engagement of the seal member of FIG. [Main component symbol description] 2 6 , 71 , 81
6A 密封槽 第1密封構件 密封本體6A sealing groove 1st sealing member sealing body
6B6B
6C ' 41 > 81A 8、42、51、6卜 72、826C ' 41 > 81A 8, 42, 51, 6 Bu 72, 82
8A、43、83 8B 10、10,、40、50、60、70、80 22 環狀凸部 嵌合部 第2密封構件 被嵌合凹部 彎曲部 複合密封材 開口部 26 底面 28 侧壁8A, 43, 83 8B 10, 10, 40, 50, 60, 70, 80 22 Annular convex part fitting part 2nd sealing member fitting recessed part bending part composite sealing material opening part 26 bottom surface 28 side wall
30 36 S、S， Η hi h2 V 侧壁 配對構件 變形緩衝空間 徑向方向箭頭 徑向方向内側 徑向方向外侧 軸方向箭頭 IP080255/SF-1963f 1130 36 S, S, Η hi h2 V Side wall Pairing member Deformation buffer space Radial direction arrow Radial direction inside Radial direction outside axis direction arrow IP080255/SF-1963f 11