JP7096401B1 - Sealing material - Google Patents

Sealing material Download PDF

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JP7096401B1
JP7096401B1 JP2021084531A JP2021084531A JP7096401B1 JP 7096401 B1 JP7096401 B1 JP 7096401B1 JP 2021084531 A JP2021084531 A JP 2021084531A JP 2021084531 A JP2021084531 A JP 2021084531A JP 7096401 B1 JP7096401 B1 JP 7096401B1
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sealing material
elastomer
main body
low
gas phase
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JP2022178035A (en
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純一 坂本
貴史 田邊
龍平 竹田
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Mitsubishi Cable Industries Ltd
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Mitsubishi Cable Industries Ltd
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Priority to TW111114917A priority patent/TW202246683A/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing

Abstract

Figure 0007096401000001

【課題】シール材本体がガスを透過しやすくても、優れたシール性能を得ることができるシール材を提供する。
【解決手段】シール材１０は、環状に形成されているとともに、その外側領域及び内側領域のうちの一方が相対的に高圧気相Ｈ及び他方が相対的に低圧気相Ｌとされて用いられる。シール材１０は、高圧気相Ｈへの暴露面を含み且つ第１エラストマーで形成されたシール材本体１１と、シール材本体１１と複合するとともに低圧気相Ｌへの暴露面の少なくとも一部分を含み且つ第１エラストマーよりもガス透過係数が小さい第２エラストマーで形成された低ガス透過部材１２とを有する。
【選択図】図１Ｄ

Figure 0007096401000001

PROBLEM TO BE SOLVED: To provide a sealing material capable of obtaining excellent sealing performance even if the main body of the sealing material easily permeates gas.
SOLUTION: The sealing material 10 is formed in an annular shape, and one of the outer region and the inner region thereof is used as a relatively high pressure gas phase H and the other as a relatively low pressure gas phase L. .. The sealing material 10 includes a sealing material main body 11 which includes an exposed surface to the high-pressure gas phase H and is formed of the first elastomer, and includes at least a part of an exposed surface to the low-pressure gas phase L while being combined with the sealing material main body 11. Moreover, it has a low gas permeation member 12 made of a second elastomer having a gas permeability coefficient smaller than that of the first elastomer.
[Selection diagram] FIG. 1D

Description

本発明は、シール材に関する。 The present invention relates to a sealing material.

２種の材料で形成された部材が複合したシール材が知られている。例えば、特許文献１には、合成樹脂で形成された第１のシール部材と、フッ素ゴムで形成された第２のシール部材とが複合したシール材が開示されている。特許文献２には、アクリルゴムで形成された外層と、ニトリルゴムで形成された内層とが複合したシール材が開示されている。 A sealing material in which members made of two kinds of materials are combined is known. For example, Patent Document 1 discloses a sealing material in which a first sealing member made of synthetic resin and a second sealing member made of fluororubber are composited. Patent Document 2 discloses a sealing material in which an outer layer made of acrylic rubber and an inner layer made of nitrile rubber are composited.

特開２０１０－６０１０７号公報Japanese Unexamined Patent Publication No. 2010-60107 国際公開第２００６／１１５０６４号International Publication No. 2006/115064

シリコーンゴムは、低温でも柔軟性を保つことができるので、低温環境下で使用されるシール材の形成材料として広く用いられている。しかしながら、シリコーンゴムは、ガス透過係数が比較的大きいので、高圧気相の領域と低圧気相の領域との間のガスシールの用途で用いられるシール材を形成した場合、ガスの透過リークが生じやすいという問題がある。 Silicone rubber can maintain its flexibility even at low temperatures, and is therefore widely used as a material for forming a sealing material used in a low temperature environment. However, since silicone rubber has a relatively large gas permeability coefficient, gas permeation leakage occurs when a sealing material used for gas sealing between a high-pressure gas phase region and a low-pressure gas phase region is formed. There is a problem that it is easy.

本発明の課題は、シール材本体がガスを透過しやすくても、優れたシール性能を得ることができるシール材を提供することである。 An object of the present invention is to provide a sealing material capable of obtaining excellent sealing performance even if the sealing material main body easily permeates gas.

本発明は、環状に形成されているとともに、その外側領域及び内側領域のうちの一方が相対的に高圧気相及び他方が相対的に低圧気相とされて用いられるシール材であって、前記高圧気相への暴露面を含み且つ第１エラストマーで形成されたシール材本体と、前記シール材本体と複合するとともに前記低圧気相への暴露面の少なくとも一部分を含み且つ前記第１エラストマーよりもガス透過係数が小さい第２エラストマーで形成された低ガス透過部材とを有し、前記シール材本体が周方向に延びる環状溝を有し、前記シール材本体の前記環状溝に前記低ガス透過部材が嵌合している。 The present invention is a sealing material which is formed in an annular shape and is used in which one of the outer region and the inner region thereof is a relatively high pressure gas phase and the other is a relatively low pressure gas phase. A sealing material main body including a surface exposed to the high-pressure gas phase and formed of the first elastomer, which is combined with the sealing material main body and includes at least a part of the exposed surface to the low-pressure gas phase and is more than the first elastomer. It has a low gas permeation member made of a second elastomer having a small gas permeation coefficient , the sealing material main body has an annular groove extending in the circumferential direction, and the low gas permeation member is formed in the annular groove of the sealing material main body. Is fitted .

本発明によれば、高圧気相への暴露面を含むシール材本体が第１エラストマーで形成されているとともに、低圧気相への暴露面の少なくとも一部分を含む低ガス透過部材が第１エラストマーよりもガス透過係数が小さい第２エラストマーで形成されているので、シール材本体がガスを透過しやすくても、優れたシール性能を得ることができる。 According to the present invention, the main body of the sealing material including the surface exposed to the high pressure gas phase is formed of the first elastomer, and the low gas permeation member including at least a part of the surface exposed to the low pressure gas phase is made of the first elastomer. Since it is made of a second elastomer having a small gas permeability coefficient, excellent sealing performance can be obtained even if the sealing material body easily permeates gas.

実施形態１に係るシール材の平面図である。It is a top view of the sealing material which concerns on Embodiment 1. FIG. 図１ＡにおけるIB-IB断面図である。It is sectional drawing of IB-IB in FIG. 1A. 実施形態１に係るシール材の取付状態を示す断面図である。It is sectional drawing which shows the attachment state of the seal material which concerns on Embodiment 1. FIG. 実施形態１に係るシール材の部分拡大断面図である。It is a partially enlarged sectional view of the sealing material which concerns on Embodiment 1. FIG. 実施形態２に係るシール材の取付状態を示す断面図である。It is sectional drawing which shows the attachment state of the seal material which concerns on Embodiment 2. FIG. 実施形態３に係るシール材の取付状態を示す断面図である。It is sectional drawing which shows the attachment state of the seal material which concerns on Embodiment 3. FIG.

以下、実施形態について詳細に説明する。 Hereinafter, embodiments will be described in detail.

（実施形態１）
図１Ａ乃至Ｄは、実施形態１に係るシール材１０を示す。実施形態１に係るシール材１０は、平面視形状及び断面形状がいずれも略矩形に形成された環状部品であって、例えば半導体製造装置等において、その外側領域が相対的に高圧気相Ｈ及び内側領域が相対的に低圧気相Ｌとされるガスシールの用途で用いられるものである。 (Embodiment 1)
1A to 1D show the sealing material 10 according to the first embodiment. The sealing material 10 according to the first embodiment is an annular component having a substantially rectangular shape in both a plan view and a cross-sectional shape. For example, in a semiconductor manufacturing apparatus or the like, the outer region thereof has a relatively high pressure gas phase H and It is used in gas seal applications where the inner region is relatively low pressure gas phase L.

実施形態１に係るシール材１０は、環状の外側に設けられたシール材本体１１と、内側に設けられた低ガス透過部材１２とを備える。 The sealing material 10 according to the first embodiment includes a sealing material main body 11 provided on the outside of the annular shape and a low gas permeation member 12 provided on the inside.

シール材本体１１は、内側に周方向に延びる環状溝１１１を有し、断面形状が内側に開口したコの字状に形成されている。シール材本体１１の内側の環状溝１１１は、内側の開口部１１１ａと、それに連続して外側に向かって一定溝幅が続く相対的に幅狭の幅狭部分１１１ｂと、それに連続して外側に向かって溝幅が漸次拡がった後に断面円弧状の外向きに凹の曲面に続くように形成された相対的に幅広の幅広部分１１１ｃと、それに連続する平坦な溝底１１１ｄとを有する。 The sealing material main body 11 has an annular groove 111 extending inward in the circumferential direction, and is formed in a U-shape having an inwardly open cross-sectional shape. The inner annular groove 111 of the sealing material main body 11 has an inner opening 111a, a relatively narrow narrow portion 111b having a constant groove width continuously extending outward, and a narrow portion 111b continuously outward. It has a relatively wide wide portion 111c formed so as to follow an outwardly concave curved surface having an arcuate cross section after the groove width gradually widens toward the groove, and a flat groove bottom 111d continuous thereto.

シール材本体１１は、第１エラストマーで形成されている。第１エラストマーとしては、例えば、シリコーンゴム、ポリブタジエンゴムなどの架橋ゴム、ポリエチレンなどの熱可塑性エラストマー等が挙げられる。シリコーンゴムでは、例えば、ビニルメチルシリコーンゴム（ＶＭＱ）、フェニルメチルシリコーンゴム（ＰＭＱ）等が挙げられる。第１エラストマーは、耐低温性が優れる観点から、シリコーンゴムであることが好ましく、フェニルメチルシリコーンゴム（ＰＭＱ）であることがより好ましい。 The sealing material main body 11 is made of the first elastomer. Examples of the first elastomer include crosslinked rubbers such as silicone rubber and polybutadiene rubber, and thermoplastic elastomers such as polyethylene. Examples of the silicone rubber include vinyl methyl silicone rubber (VMQ) and phenylmethyl silicone rubber (PMQ). The first elastomer is preferably silicone rubber, more preferably phenylmethyl silicone rubber (PMQ), from the viewpoint of excellent low temperature resistance.

第１エラストマーのガラス転移温度は、耐低温性が優れる観点から、好ましくは－５０℃以下である。ガラス転移温度は、ＪＩＳ Ｋ６２４０：２０１１に基づいて測定されるものである。 The glass transition temperature of the first elastomer is preferably −50 ° C. or lower from the viewpoint of excellent low temperature resistance. The glass transition temperature is measured based on JIS K6240: 2011.

第１エラストマーのＴＲ１０は、好ましくは－４０℃以下、より好ましくは－５０℃以下である。このＴＲ１０は、ＪＩＳ Ｋ６２６１：２００６に基づいて測定されるものである。 The TR10 of the first elastomer is preferably −40 ° C. or lower, more preferably −50 ° C. or lower. This TR10 is measured based on JIS K6261: 2006.

第１エラストマーのタイプＡデュロメータで測定される標準試験温度でのゴム硬さは、好ましくは５０以上８０以下、より好ましくは６５以上７５以下である。ゴム硬さは、ＪＩＳ Ｋ６２５３－３：２０１２に基づいて測定されるものである。 The rubber hardness at the standard test temperature measured by the type A durometer of the first elastomer is preferably 50 or more and 80 or less, and more preferably 65 or more and 75 or less. Rubber hardness is measured based on JIS K6253-3: 2012.

第１エラストマーの標準試験温度での１００％応力は、好ましくは１．０ＭＰａ以上、より好ましくは１．５ＭＰａ以上である。第１エラストマーの－６０℃での１００％応力は、好ましくは１．０ＭＰａ以上、より好ましくは１．５ＭＰａ以上である。１００％応力は、ＪＩＳ Ｋ６２５１：２０１０に基づいて測定されるものである。 The 100% stress of the first elastomer at the standard test temperature is preferably 1.0 MPa or more, more preferably 1.5 MPa or more. The 100% stress of the first elastomer at −60 ° C. is preferably 1.0 MPa or more, more preferably 1.5 MPa or more. The 100% stress is measured based on JIS K6251: 2010.

低ガス透過部材１２は、断面形状がシール材本体１１の環状溝１１１の溝断面と同一形状の環状に形成されている。具体的には、低ガス透過部材１２は、平坦な部材内側面１２ａと、それに連続して外側に向かって一定厚さが続く相対的に薄い薄肉部分１２ｂと、それに連続して外側に向かって厚さが漸次大きくなった後に断面円弧状の外向きに凸の曲面に続くように形成された相対的に厚い厚肉部分１２ｃと、それに連続する平坦な部材外側面１２ｄとを有する。 The low gas permeation member 12 is formed in an annular shape having the same cross-sectional shape as the groove cross section of the annular groove 111 of the sealing material main body 11. Specifically, the low gas permeation member 12 includes a flat inner side surface 12a of the member, a relatively thin thin portion 12b having a constant thickness continuously outward, and a thin portion 12b continuously outward. It has a relatively thick thick portion 12c formed so as to follow an outwardly convex curved surface having an arc-shaped cross section after the thickness gradually increases, and a flat member outer surface 12d continuous thereto.

低ガス透過部材１２は、第２エラストマーで形成されている。第２エラストマーは、第１エラストマーよりもガス透過係数が小さい。第１エラストマーがシリコーンゴムの場合、かかる第２エラストマーとしては、例えば、フッ素ゴム、エチレンプロピレンゴム、ウレタンゴム、ニトリルゴム、水素化ニトリルゴム、ブチルゴムなどの架橋ゴム、熱可塑性エラストマー等が挙げられる。フッ素ゴムでは、例えば、ビニリデンフルオライド（ＶＤＦ）とヘキサフルオロプロピレン（ＨＦＰ）との共重合体（二元系ＦＫＭ）、ビニリデンフルオライド（ＶＤＦ）とヘキサフルオロプロピレン（ＨＦＰ）とテトラフルオロエチレン（ＴＦＥ）との共重合体（三元系ＦＫＭ）等が挙げられる。第２エラストマーは、フッ素ゴムであることが好ましく、二元系ＦＫＭであることがより好ましい。 The low gas permeation member 12 is made of a second elastomer. The second elastomer has a smaller gas permeability coefficient than the first elastomer. When the first elastomer is silicone rubber, examples of the second elastomer include fluororubber, ethylene propylene rubber, urethane rubber, nitrile rubber, hydrogenated nitrile rubber, crosslinked rubber such as butyl rubber, and thermoplastic elastomers. In fluororubber, for example, a copolymer of vinylidenefluoride (VDF) and hexafluoropropylene (HFP) (binary FKM), vinylidenefluoride (VDF), hexafluoropropylene (HFP) and tetrafluoroethylene (TFE) ) And the like (ternary FKM) and the like. The second elastomer is preferably fluororubber, and more preferably a binary FKM.

第２エラストマーの標準温度でのガス透過係数は、好ましくは３．０×１０－１２ｍｏｌ・ｍ／（ｍ２・ｓ・Ｐａ）以下、より好ましくは１．０×１０-１２ｍｏｌ・ｍ／（ｍ２・ｓ・Ｐａ）以下である。このガス透過係数は、ＪＩＳ Ｋ６２７５－１：２００９に基づいて測定されるものである。 The gas permeability coefficient of the second elastomer at the standard temperature is preferably 3.0 × 10 -12 mol · m / (m 2 · s · Pa) or less, more preferably 1.0 × 10 -12 mol · m /. It is (m 2 · s · Pa) or less. This gas permeability coefficient is measured based on JIS K6275-1: 2009.

第２エラストマーのガラス転移温度は、好ましくは－１０℃以下、より好ましくは－２０℃以下である。第２エラストマーのＴＲ１０は、好ましくは－５℃以下、より好ましくは－１０℃以下である。第２エラストマーのガラス転移温度及びＴＲ１０は、第１エラストマーのガラス転移温度及びＴＲ１０よりも高くてもよい。第２エラストマーのタイプＡデュロメータで測定される標準試験温度でのゴム硬さは、好ましくは６０以上８０以下、より好ましくは６５以上７５以下である。第２エラストマーの標準試験温度での１００％応力は、好ましくは３．０ＭＰａ以上、より好ましくは３．５ＭＰａ以上である。 The glass transition temperature of the second elastomer is preferably −10 ° C. or lower, more preferably −20 ° C. or lower. The TR10 of the second elastomer is preferably −5 ° C. or lower, more preferably −10 ° C. or lower. The glass transition temperature and TR10 of the second elastomer may be higher than the glass transition temperature and TR10 of the first elastomer. The rubber hardness at the standard test temperature measured by the type A durometer of the second elastomer is preferably 60 or more and 80 or less, and more preferably 65 or more and 75 or less. The 100% stress of the second elastomer at the standard test temperature is preferably 3.0 MPa or more, more preferably 3.5 MPa or more.

実施形態１に係るシール材１０は、シール材本体１１の環状溝１１１に低ガス透過部材１２が嵌合して複合しており、環状溝１１１の開口部１１１ａに低ガス透過部材１２の部材内側面１２ａが露出するとともに、環状溝１１１の幅狭部分１１１ｂ、幅広部分１１１ｃ、及び溝底１１１ｄに、それぞれ低ガス透過部材１２の薄肉部分１２ｂ、厚肉部分１２ｃ、及び部材外側面１２ｄが対応して接触している。ここで、シール材本体１１と低ガス透過部材１２とは接着剤を介して接着されていてもよいが、シール材本体１１の環状溝１１１の幅広部分１１１ｃに、低ガス透過部材１２の厚肉部分１２ｃが係合して抜け止めされているので、接着されていなくても、シール材本体１１から低ガス透過部が脱落するのを抑止することができる。また、シール材本体１１と低ガス透過部材１２とが接着剤で接着されていなければ、シール材本体１１及び低ガス透過部材１２をそれぞれ成形した後、シール材本体１１の環状溝１１１に低ガス透過部材１２を嵌め入れるだけという簡単な作業でシール材１０を製造することができる。 In the sealing material 10 according to the first embodiment, the low gas permeation member 12 is fitted and composited in the annular groove 111 of the sealing material main body 11, and the inside of the member of the low gas permeation member 12 is fitted in the opening 111a of the annular groove 111. The side surface 12a is exposed, and the narrow portion 111b, the wide portion 111c, and the groove bottom 111d of the annular groove 111 correspond to the thin portion 12b, the thick portion 12c, and the member outer surface 12d of the low gas permeation member 12, respectively. Are in contact. Here, the sealing material main body 11 and the low gas permeable member 12 may be adhered to each other via an adhesive, but the thick portion of the low gas permeable member 12 is formed in the wide portion 111c of the annular groove 111 of the sealing material main body 11. Since the portion 12c is engaged and prevented from coming off, it is possible to prevent the low gas permeation portion from falling off from the sealing material main body 11 even if the portion 12c is not adhered. If the sealing material main body 11 and the low gas permeable member 12 are not adhered with an adhesive, the sealing material main body 11 and the low gas permeable member 12 are molded, and then the low gas is formed in the annular groove 111 of the sealing material main body 11. The sealing material 10 can be manufactured by a simple operation of simply fitting the transmission member 12.

実施形態１に係るシール材１０は、突き合わせるように設けられる被シール部材である管状の第１及び第２部材２１，２２間に、厚さ方向の一方面が第１部材２１及び他方面が第２部材２２にそれぞれ接触して挟持されるように設けられる。そして、第１及び第２部材２１，２２の外側は相対的に高圧気相Ｈとされるとともに、内側は相対的に低圧気相Ｌとされる。そのため、シール材１０の外側面及び内側面は、それぞれ高圧気相Ｈ及び低圧気相Ｌへの暴露面となる。シール材本体１１は、高圧気相Ｈへの暴露面を構成するシール材１０の外側面の全面と、低圧気相Ｌへの暴露面を構成するシール材１０の内側面における厚さ方向の両側の部分とを含むこととなる。低ガス透過部材１２は、低圧気相Ｌへの暴露面を構成するシール材１０の内側面における厚さ方向の中央部分を含むこととなる。 In the sealing material 10 according to the first embodiment, one surface in the thickness direction is the first member 21 and the other surface is between the tubular first and second members 21 and 22, which are members to be sealed so as to be abutted against each other. It is provided so as to be in contact with and sandwiched by the second member 22. The outer side of the first and second members 21 and 22 is relatively high pressure gas phase H, and the inner side is relatively low pressure gas phase L. Therefore, the outer surface and the inner surface of the sealing material 10 are exposed surfaces to the high-pressure gas phase H and the low-pressure gas phase L, respectively. The sealing material main body 11 has both sides in the thickness direction on the entire outer surface of the sealing material 10 constituting the exposed surface to the high pressure gas phase H and the inner surface of the sealing material 10 constituting the exposed surface to the low pressure gas phase L. Will include the part of. The low gas permeation member 12 includes a central portion in the thickness direction on the inner side surface of the sealing material 10 constituting the exposed surface to the low pressure gas phase L.

以上の構成の実施形態１に係るシール材１０によれば、高圧気相Ｈへの暴露面の外側面を含むシール材本体１１が第１エラストマーで形成されているとともに、低圧気相Ｌへの暴露面の一部分を含む低ガス透過部材１２が第１エラストマーよりもガス透過係数が小さい第２エラストマーで形成されているので、シール材本体１１がガスを透過しやすくても、第２エラストマーで形成された低ガス透過部材１２がガスの透過リークを規制するため、低温乃至高温の広い温度範囲において、優れたシール性能を得ることができる。 According to the sealing material 10 according to the first embodiment of the above configuration, the sealing material main body 11 including the outer surface of the exposed surface to the high pressure gas phase H is formed of the first elastomer, and the low pressure gas phase L is covered. Since the low gas permeation member 12 including a part of the exposed surface is formed of the second elastomer having a gas permeation coefficient smaller than that of the first elastomer, even if the sealing material main body 11 easily permeates gas, it is formed of the second elastomer. Since the low gas permeation member 12 regulates gas permeation leakage, excellent sealing performance can be obtained in a wide temperature range of low temperature to high temperature.

具体的には、実施形態１に係るシール材１０について、シール材本体１１をシリコーンゴム及び低ガス透過部材１２をフッ素ゴムでそれぞれ形成したとき、ヘリウムリークテストでのＨｅリーク値は、２３℃で２．９×１０－７Ｐａ・ｍ３／ｓ及び－６０℃で１．４×１０－８Ｐａ・ｍ３／ｓであった。一方、シリコーンゴム単体で形成した同一形状のシール材では、Ｈｅリーク値は、２３℃で９．２×１０－７Ｐａ・ｍ３／ｓ及び－６０℃で４．２×１０－８Ｐａ・ｍ３／ｓであった。 Specifically, regarding the sealing material 10 according to the first embodiment, when the sealing material main body 11 is formed of silicone rubber and the low gas permeation member 12 is made of fluorine rubber, the He leak value in the helium leak test is 23 ° C. It was 2.9 × 10 -7 Pa · m 3 / s and 1.4 × 10 -8 Pa · m 3 / s at -60 ° C. On the other hand, in the sealing material having the same shape formed of a single silicone rubber, the He leak value is 9.2 × 10 -7 Pa · m 3 / s at 23 ° C and 4.2 × 10 -8 Pa · at -60 ° C. It was m 3 / s.

実施形態１に係るシール材１０では、かかる優れたシール性能を得る観点から、シール材本体１１の環状溝１１１の深さ、すなわち、低ガス透過部材１２の内側から外側に向かう径方向の幅ｗが、シール材１０の径方向の全幅Ｗにおける３０％以上であることが好ましく、５０％以上であることがより好ましい。低圧気相Ｌへの暴露面の内側面における低ガス透過部材１２の部材内側面１２ａ（図中Ａ）が占める割合は、同様の観点から、５０％以上であることが好ましく、７０％以上であることがより好ましい。低ガス透過部材１２の厚肉部分１２ｃは、周方向に沿った断面の全断面積における低ガス透過部材１２が占める面積の割合が最も大きい部分（図中Ｂ）を含むが、その低ガス透過部材１２が占める面積の割合が最も大きい部分において、その割合は、同様の観点から、６７％以上であることが好ましく、８０％以上であることがより好ましい。 In the sealing material 10 according to the first embodiment, from the viewpoint of obtaining such excellent sealing performance, the depth of the annular groove 111 of the sealing material main body 11, that is, the radial width w from the inside to the outside of the low gas permeation member 12. However, it is preferably 30% or more, and more preferably 50% or more in the total width W in the radial direction of the sealing material 10. From the same viewpoint, the ratio of the member inner surface surface 12a (A in the figure) of the low gas permeation member 12 on the inner surface of the surface exposed to the low-pressure gas phase L is preferably 50% or more, preferably 70% or more. It is more preferable to have. The thick portion 12c of the low gas permeation member 12 includes a portion (B in the figure) in which the ratio of the area occupied by the low gas permeation member 12 to the total cross-sectional area of the cross section along the circumferential direction is the largest, but the low gas permeation member 12 has a low gas permeation. In the portion where the ratio of the area occupied by the member 12 is the largest, the ratio is preferably 67% or more, and more preferably 80% or more from the same viewpoint.

また、実施形態１に係るシール材１０では、第１エラストマーで形成されたシール材本体１１が、被シール部材である第１及び第２部材２１，２２のそれぞれとの接触面の全てを含んでいるので、例えば第１エラストマーがシリコーンゴムの場合、－５０℃程度の低温でも柔軟性が保たれるため、低温乃至高温の広い温度範囲において、いわゆる接面リークを抑制することもできる。加えて、第１及び第２部材２１，２２のそれぞれとの接触面が柔軟であれば、接面リークの抑制のために、シール材１０を厚さ方向に圧縮して第１及び第２部材２１，２２に大きな圧接力で当接させる必要はないので、例えば第１及び第２部材２１，２２がセラミックスで形成されている場合でも、第１及び第２部材２１，２２がシール材１０の圧接力により損傷を受けるのを回避することができる。 Further, in the sealing material 10 according to the first embodiment, the sealing material main body 11 formed of the first elastomer includes all the contact surfaces with the first and second members 21 and 22, which are the members to be sealed. Therefore, for example, when the first elastomer is silicone rubber, the flexibility is maintained even at a low temperature of about −50 ° C., so that so-called contact surface leakage can be suppressed in a wide temperature range from low temperature to high temperature. In addition, if the contact surfaces with the first and second members 21 and 22, respectively, are flexible, the sealing material 10 is compressed in the thickness direction in order to suppress contact surface leakage, and the first and second members are used. Since it is not necessary to bring the first and second members 21 and 22 into contact with the 21 and 22 with a large pressure contact force, for example, even if the first and second members 21 and 22 are made of ceramics, the first and second members 21 and 22 are made of the sealing material 10. It is possible to avoid being damaged by the pressure contact force.

さらに、シリコーンゴムは、ガスの透過リークが生じやすいことに加え、耐プラズマ性が低く、摩滅や発塵が生じやすいというデメリットを有するものの、実施形態１に係るシール材１０では、シール材本体１１を形成する第１エラストマーがシリコーンゴムの場合でも、低圧気相Ｌへの暴露面である内側面では、低ガス透過部材１２が設けられてシール材本体１１の露出が少なくされているので、これらのデメリットを減じることができる。 Further, the silicone rubber has a demerit that gas permeation leakage is likely to occur, plasma resistance is low, and abrasion and dust generation are likely to occur. However, in the sealing material 10 according to the first embodiment, the sealing material main body 11 is used. Even when the first elastomer forming the above is silicone rubber, the low gas permeation member 12 is provided on the inner surface surface which is the exposed surface to the low pressure gas phase L to reduce the exposure of the sealing material main body 11. The disadvantages of can be reduced.

（実施形態２）
図２は、実施形態２に係るシール材１０を示す。なお、実施形態１と同一名称の部分は、実施形態１と同一符号で示す。 (Embodiment 2)
FIG. 2 shows the sealing material 10 according to the second embodiment. The portion having the same name as that of the first embodiment is indicated by the same reference numeral as that of the first embodiment.

実施形態２に係るシール材１０では、シール材本体１１の環状溝１１１及びそこに嵌合した低ガス透過部材１２の断面の形状が略矩形に形成されている。実施形態２に係るシール材１０は、構造が簡易であることから、透過リークの抑制に対する要求が低い用途、シール材本体１１からの低ガス透過部の脱落が問題とならない用途、成形上の理由からシール材本体１１及び低ガス透過部材１２にシンプルな形状が求められる用途等に好適に用いることができる。その他の構成及び作用効果は実施形態１と同一である。 In the sealing material 10 according to the second embodiment, the shape of the cross section of the annular groove 111 of the sealing material main body 11 and the low gas permeation member 12 fitted therein is formed in a substantially rectangular shape. Since the sealing material 10 according to the second embodiment has a simple structure, there is a low demand for suppressing permeation leakage, an application in which the low gas permeation portion from the sealing material main body 11 does not matter, and a reason for molding. Therefore, it can be suitably used for applications where a simple shape is required for the sealing material main body 11 and the low gas permeation member 12. Other configurations and actions and effects are the same as those in the first embodiment.

（実施形態３）
図３は、実施形態３に係るシール材１０を示す。なお、実施形態１と同一名称の部分は、実施形態１と同一符号で示す。 (Embodiment 3)
FIG. 3 shows the sealing material 10 according to the third embodiment. The portion having the same name as that of the first embodiment is indicated by the same reference numeral as that of the first embodiment.

実施形態３に係るシール材１０では、低ガス透過部材１２の断面の形状が略Ｈ形に形成されており、低ガス透過部材１２が、低圧気相Ｌへの暴露面を構成するシール材１０の内側面の全面を含む。したがって、実施形態３に係るシール材１０によれば、低圧気相Ｌへの暴露面を構成するシール材１０の内側面の全面が、第２エラストマーで形成された低ガス透過部材１２で占められているので、ガスの透過リークを一層効果的に抑制することができる。その他の構成及び作用効果は実施形態１と同一である。 In the sealing material 10 according to the third embodiment, the shape of the cross section of the low gas permeation member 12 is formed in a substantially H shape, and the low gas permeation member 12 constitutes the sealing material 10 to be exposed to the low pressure gas phase L. Includes the entire inner surface of the. Therefore, according to the sealing material 10 according to the third embodiment, the entire inner surface of the sealing material 10 constituting the exposed surface to the low pressure gas phase L is occupied by the low gas permeation member 12 formed of the second elastomer. Therefore, it is possible to more effectively suppress the permeation leak of the gas. Other configurations and actions and effects are the same as those in the first embodiment.

（その他の実施形態）
上記実施形態１乃至３では、環状の外側領域が相対的に高圧気相Ｈ及び内側領域が相対的に低圧気相Ｌとされて用いられるシール材１０としたが、特にこれに限定されるものではなく、環状の外側領域が相対的に低圧気相及び内側領域が相対的に高圧気相とされて用いられるもの、したがって、環状の内側にシール材本体が設けられるとともに、外側に低ガス透過部材が設けられたものであってもよい。 (Other embodiments)
In the above embodiments 1 to 3, the sealing material 10 is used in which the outer region of the ring is a relatively high pressure gas phase H and the inner region is a relatively low pressure gas phase L, but the material is particularly limited to this. Instead, the outer region of the ring is used as a relatively low pressure gas phase and the inner region is used as a relatively high pressure gas phase. It may be provided with a member.

上記実施形態１乃至３では、平面視形状及び断面形状がいずれも略矩形に形成されたシール材１０としたが、特にこれに限定されるものではなく、平面視形状及び断面形状がいずれも円形に形成されたいわゆるＯリングであってもよい。 In the above embodiments 1 to 3, the sealing material 10 having a substantially rectangular shape in a plan view and a cross-sectional shape is used, but the sealing material 10 is not particularly limited to this, and both the shape in a plan view and the cross-sectional shape are circular. It may be a so-called O-ring formed in.

本発明は、シール材の技術分野について有用である。 The present invention is useful in the technical field of sealing materials.

１０ シール材
１１ シール材本体
１１１ 環状溝
１１１ａ 開口部
１１１ｂ 幅狭部分
１１１ｃ 幅広部分
１１１ｄ 溝底
１２ 低ガス透過部材
１２ａ 部材内側面
１２ｂ 薄肉部分
１２ｃ 厚肉部分
１２ｄ 部材外側面
２１ 第１部材（被シール部材）
２２ 第２部材（被シール部材）
Ｈ 高圧気相
Ｌ 低圧気相 10 Sealing material 11 Sealing material Main body 111 Circular groove 111a Opening 111b Narrow part 111c Wide part 111d Groove bottom 12 Low gas permeation member 12a Inner side surface of member 12b Thin wall part 12c Thick part 12d Member outer surface 21 First member (to be sealed) Element)
22 Second member (member to be sealed)
H High pressure gas phase L Low pressure gas phase

Claims (9)

環状に形成されているとともに、その外側領域及び内側領域のうちの一方が相対的に高圧気相及び他方が相対的に低圧気相とされて用いられるシール材であって、
前記高圧気相への暴露面を含み且つ第１エラストマーで形成されたシール材本体と、前記シール材本体と複合するとともに前記低圧気相への暴露面の少なくとも一部分を含み且つ前記第１エラストマーよりもガス透過係数が小さい第２エラストマーで形成された低ガス透過部材とを有し、
前記シール材本体が周方向に延びる環状溝を有し、前記シール材本体の前記環状溝に前記低ガス透過部材が嵌合しているシール材。 It is a sealing material that is formed in an annular shape, and one of the outer region and the inner region thereof is used as a relatively high pressure gas phase and the other as a relatively low pressure gas phase.
The sealing material main body including the surface exposed to the high-pressure gas phase and formed of the first elastomer is combined with the sealing material main body and includes at least a part of the exposed surface to the low-pressure gas phase and is more than the first elastomer. Also has a low gas permeation member made of a second elastomer with a small gas permeation coefficient.
A sealing material in which the sealing material main body has an annular groove extending in the circumferential direction, and the low gas permeation member is fitted in the annular groove of the sealing material main body . 請求項１に記載されたシール材において、
前記第１エラストマーが前記第２エラストマーよりもＴＲ１０が低いシール材。 In the sealing material according to claim 1,
A sealing material in which the first elastomer has a lower TR10 than the second elastomer. 請求項１又は２に記載されたシール材において、
前記シール材本体に前記低ガス透過部材が係合しているシール材。 In the sealing material according to claim 1 or 2 ,
A sealing material in which the low gas permeable member is engaged with the sealing material main body. 請求項１乃至３のいずれかに記載されたシール材において、
前記シール材本体が被シール部材との接触面を含むシール材。 In the sealing material according to any one of claims 1 to 3 , the sealing material
A sealing material in which the sealing material main body includes a contact surface with a member to be sealed. 請求項１乃至４のいずれかに記載されたシール材において、
前記低ガス透過部材の径方向の幅が全幅における３０％以上であるシール材。 In the sealing material according to any one of claims 1 to 4 ,
A sealing material in which the radial width of the low gas permeation member is 30% or more of the total width. 請求項１乃至５のいずれかに記載されたシール材において、
前記低圧気相への暴露面における前記低ガス透過部材が占める割合が５０％以上であるシール材。 In the sealing material according to any one of claims 1 to 5 ,
A sealing material in which the proportion of the low gas permeating member on the surface exposed to the low pressure gas phase is 50% or more. 請求項１乃至６のいずれかに記載されたシール材において、
周方向に沿った断面の全断面積における前記低ガス透過部材が占める面積の割合が最も大きい部分において、その割合が６７％以上であるシール材。 In the sealing material according to any one of claims 1 to 6 .
A sealing material having a proportion of 67% or more in a portion where the proportion of the area occupied by the low gas permeating member in the total cross-sectional area along the circumferential direction is the largest. 請求項１乃至７のいずれかに記載されたシール材において、
前記第１エラストマーがシリコーンゴムであるシール材。 In the sealing material according to any one of claims 1 to 7 .
A sealing material in which the first elastomer is silicone rubber. 請求項１乃至８のいずれかに記載されたシール材において、
前記第２エラストマーが、フッ素ゴム、エチレンプロピレンゴム、ウレタンゴム、ニトリルゴム、水素化ニトリルゴム、又はブチルゴムであるシール材。 In the sealing material according to any one of claims 1 to 8 .
A sealing material in which the second elastomer is fluororubber, ethylene propylene rubber, urethane rubber, nitrile rubber, hydride nitrile rubber, or butyl rubber.
JP2021084531A 2021-05-19 2021-05-19 Sealing material Active JP7096401B1 (en)

Priority Applications (3)

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JP2021084531A JP7096401B1 (en) 2021-05-19 2021-05-19 Sealing material
PCT/JP2022/006621 WO2022244353A1 (en) 2021-05-19 2022-02-18 Seal member
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004190806A (en) * 2002-12-12 2004-07-08 Nissan Motor Co Ltd Seal structure
JP2008202787A (en) * 2007-02-21 2008-09-04 Ti Group Automotive Systems Llc Combined seal
JP2016070365A (en) * 2014-09-30 2016-05-09 富士重工業株式会社 Gasket for volatile fuel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004190806A (en) * 2002-12-12 2004-07-08 Nissan Motor Co Ltd Seal structure
JP2008202787A (en) * 2007-02-21 2008-09-04 Ti Group Automotive Systems Llc Combined seal
JP2016070365A (en) * 2014-09-30 2016-05-09 富士重工業株式会社 Gasket for volatile fuel

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