TWI408500B - 感光性樹脂組成物、其層合物、其硬化物及使用該組成物之圖型的形成方法(1) - Google Patents
感光性樹脂組成物、其層合物、其硬化物及使用該組成物之圖型的形成方法(1) Download PDFInfo
- Publication number
- TWI408500B TWI408500B TW96125748A TW96125748A TWI408500B TW I408500 B TWI408500 B TW I408500B TW 96125748 A TW96125748 A TW 96125748A TW 96125748 A TW96125748 A TW 96125748A TW I408500 B TWI408500 B TW I408500B
- Authority
- TW
- Taiwan
- Prior art keywords
- resin composition
- photosensitive resin
- pattern
- same
- exposure
- Prior art date
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 88
- 238000000034 method Methods 0.000 title claims description 13
- 239000003822 epoxy resin Substances 0.000 claims abstract description 32
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 32
- 125000006340 pentafluoro ethyl group Chemical group FC(F)(F)C(F)(F)* 0.000 claims abstract description 7
- JFZKOODUSFUFIZ-UHFFFAOYSA-N trifluoro phosphate Chemical compound FOP(=O)(OF)OF JFZKOODUSFUFIZ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229920005989 resin Polymers 0.000 claims description 33
- 239000011347 resin Substances 0.000 claims description 33
- 239000003505 polymerization initiator Substances 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 19
- -1 glycidyl ether compound Chemical class 0.000 claims description 18
- 239000004593 Epoxy Substances 0.000 claims description 16
- 239000002904 solvent Substances 0.000 claims description 14
- 150000001875 compounds Chemical class 0.000 claims description 9
- 239000000178 monomer Substances 0.000 claims description 9
- 238000011161 development Methods 0.000 claims description 8
- 239000007787 solid Substances 0.000 claims description 8
- 238000001035 drying Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 5
- HGEPCTDTYIDUPS-UHFFFAOYSA-N diphenyl-(4-phenylsulfanylphenyl)phosphane Chemical compound S(c1ccccc1)c1ccc(cc1)P(c1ccccc1)c1ccccc1 HGEPCTDTYIDUPS-UHFFFAOYSA-N 0.000 claims description 3
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 claims description 2
- 239000012953 triphenylsulfonium Substances 0.000 claims description 2
- 239000003999 initiator Substances 0.000 abstract description 3
- 239000007983 Tris buffer Substances 0.000 abstract 1
- 238000012663 cationic photopolymerization Methods 0.000 abstract 1
- 239000000243 solution Substances 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 description 27
- 239000000203 mixture Substances 0.000 description 23
- 239000003795 chemical substances by application Substances 0.000 description 11
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 11
- 238000010538 cationic polymerization reaction Methods 0.000 description 10
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 8
- 229910052707 ruthenium Inorganic materials 0.000 description 8
- 230000018109 developmental process Effects 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical group CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- 239000007822 coupling agent Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000002156 mixing Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 4
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 4
- 239000004743 Polypropylene Substances 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000002518 antifoaming agent Substances 0.000 description 4
- 125000000524 functional group Chemical group 0.000 description 4
- OAKJQQAXSVQMHS-UHFFFAOYSA-N hydrazine Substances NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 229920001155 polypropylene Polymers 0.000 description 4
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 150000002923 oximes Chemical class 0.000 description 3
- 125000001424 substituent group Chemical group 0.000 description 3
- 229920001169 thermoplastic Polymers 0.000 description 3
- 229920005992 thermoplastic resin Polymers 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000011256 inorganic filler Substances 0.000 description 2
- 229910003475 inorganic filler Inorganic materials 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229920003986 novolac Polymers 0.000 description 2
- 239000004843 novolac epoxy resin Substances 0.000 description 2
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000003208 petroleum Substances 0.000 description 2
- UZRUZACOSHWLOC-UHFFFAOYSA-M phenoxyaluminum Chemical compound [Al]OC1=CC=CC=C1 UZRUZACOSHWLOC-UHFFFAOYSA-M 0.000 description 2
- 125000003356 phenylsulfanyl group Chemical group [*]SC1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- UOHMMEJUHBCKEE-UHFFFAOYSA-N prehnitene Chemical compound CC1=CC=C(C)C(C)=C1C UOHMMEJUHBCKEE-UHFFFAOYSA-N 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical group CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000004416 thermosoftening plastic Substances 0.000 description 2
- 125000005409 triarylsulfonium group Chemical group 0.000 description 2
- 125000000229 (C1-C4)alkoxy group Chemical group 0.000 description 1
- AGGJWJFEEKIYOF-UHFFFAOYSA-N 1,1,1-triethoxydecane Chemical compound CCCCCCCCCC(OCC)(OCC)OCC AGGJWJFEEKIYOF-UHFFFAOYSA-N 0.000 description 1
- CZVXEAWVGZTLON-UHFFFAOYSA-N 1,1-dibenzylhydrazine Chemical compound C=1C=CC=CC=1CN(N)CC1=CC=CC=C1 CZVXEAWVGZTLON-UHFFFAOYSA-N 0.000 description 1
- VYWINCYKCJHXLU-UHFFFAOYSA-N 1,2,3-trinaphthalen-1-ylanthracene Chemical compound C1=CC=C2C(C3=C(C=4C5=CC=CC=C5C=CC=4)C4=CC5=CC=CC=C5C=C4C=C3C=3C4=CC=CC=C4C=CC=3)=CC=CC2=C1 VYWINCYKCJHXLU-UHFFFAOYSA-N 0.000 description 1
- AHPTYTKEMRDWPA-UHFFFAOYSA-N 1,2,3-trinaphthalen-2-ylanthracene Chemical compound C1=C(C=CC2=CC=CC=C12)C=1C(=C(C2=CC3=CC=CC=C3C=C2C=1)C1=CC2=CC=CC=C2C=C1)C1=CC2=CC=CC=C2C=C1 AHPTYTKEMRDWPA-UHFFFAOYSA-N 0.000 description 1
- LDSXSDLOBOKHEP-UHFFFAOYSA-N 1,2-bis(4-methylphenyl)-1-(4-phenylsulfanylphenyl)hydrazine Chemical compound C1(=CC=CC=C1)SC1=CC=C(C=C1)N(NC1=CC=C(C=C1)C)C1=CC=C(C=C1)C LDSXSDLOBOKHEP-UHFFFAOYSA-N 0.000 description 1
- YBQZXXMEJHZYMB-UHFFFAOYSA-N 1,2-diphenylhydrazine Chemical compound C=1C=CC=CC=1NNC1=CC=CC=C1 YBQZXXMEJHZYMB-UHFFFAOYSA-N 0.000 description 1
- IZVCNSKRRSTZHL-UHFFFAOYSA-N 1-[4-[4-(2,3-diphenyl-9H-fluoren-1-yl)phenyl]sulfanylphenyl]-2,3-diphenyl-9H-fluorene Chemical compound C1(=CC=CC=C1)C=1C(=C(C=2CC3=CC=CC=C3C=2C=1)C1=CC=C(C=C1)SC1=CC=C(C=C1)C1=C(C(=CC=2C3=CC=CC=C3CC1=2)C1=CC=CC=C1)C1=CC=CC=C1)C1=CC=CC=C1 IZVCNSKRRSTZHL-UHFFFAOYSA-N 0.000 description 1
- IMJYOSCHGQBHBZ-UHFFFAOYSA-N 1-[4-[4-[2,3-bis(4-fluorophenyl)-1H-inden-1-yl]phenyl]sulfanylphenyl]-2,3-bis(4-fluorophenyl)-1H-indene Chemical compound FC1=CC=C(C=C1)C1=C(C(C2=CC=CC=C12)C1=CC=C(C=C1)SC1=CC=C(C=C1)C1C(=C(C2=CC=CC=C12)C1=CC=C(C=C1)F)C1=CC=C(C=C1)F)C1=CC=C(C=C1)F IMJYOSCHGQBHBZ-UHFFFAOYSA-N 0.000 description 1
- BRURSUGTCIOHHR-UHFFFAOYSA-N 1-benzyl-1-(naphthalen-2-ylmethyl)hydrazine Chemical compound C1=C(C=CC2=CC=CC=C12)CN(N)CC1=CC=CC=C1 BRURSUGTCIOHHR-UHFFFAOYSA-N 0.000 description 1
- GTIMRWFTQOOCSG-UHFFFAOYSA-N 1-benzyl-1-[(4-methoxyphenyl)methyl]hydrazine Chemical compound C1=CC(OC)=CC=C1CN(N)CC1=CC=CC=C1 GTIMRWFTQOOCSG-UHFFFAOYSA-N 0.000 description 1
- SMLNDVNTPWRZJH-UHFFFAOYSA-N 1-chloro-4-(trimethoxymethyl)dodecane Chemical compound ClCCCC(C(OC)(OC)OC)CCCCCCCC SMLNDVNTPWRZJH-UHFFFAOYSA-N 0.000 description 1
- ZIKLJUUTSQYGQI-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxypropoxy)propane Chemical compound CCOCC(C)OCC(C)OCC ZIKLJUUTSQYGQI-UHFFFAOYSA-N 0.000 description 1
- 125000001637 1-naphthyl group Chemical group [H]C1=C([H])C([H])=C2C(*)=C([H])C([H])=C([H])C2=C1[H] 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- SRLNUMAYAIBSMR-UHFFFAOYSA-N 2-(2,3-diphenyl-1H-inden-1-yl)thioxanthen-9-one Chemical compound C1(=CC=CC=C1)C1=C(C(C2=CC=CC=C12)C1=CC=2C(C3=CC=CC=C3SC=2C=C1)=O)C1=CC=CC=C1 SRLNUMAYAIBSMR-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- HSDVRWZKEDRBAG-UHFFFAOYSA-N 2-[1-(oxiran-2-ylmethoxy)hexoxymethyl]oxirane Chemical compound C1OC1COC(CCCCC)OCC1CO1 HSDVRWZKEDRBAG-UHFFFAOYSA-N 0.000 description 1
- AOBIOSPNXBMOAT-UHFFFAOYSA-N 2-[2-(oxiran-2-ylmethoxy)ethoxymethyl]oxirane Chemical compound C1OC1COCCOCC1CO1 AOBIOSPNXBMOAT-UHFFFAOYSA-N 0.000 description 1
- SEFYJVFBMNOLBK-UHFFFAOYSA-N 2-[2-[2-(oxiran-2-ylmethoxy)ethoxy]ethoxymethyl]oxirane Chemical compound C1OC1COCCOCCOCC1CO1 SEFYJVFBMNOLBK-UHFFFAOYSA-N 0.000 description 1
- MFAWEYJGIGIYFH-UHFFFAOYSA-N 2-[4-(trimethoxymethyl)dodecoxymethyl]oxirane Chemical compound C(C1CO1)OCCCC(C(OC)(OC)OC)CCCCCCCC MFAWEYJGIGIYFH-UHFFFAOYSA-N 0.000 description 1
- PLDLPVSQYMQDBL-UHFFFAOYSA-N 2-[[3-(oxiran-2-ylmethoxy)-2,2-bis(oxiran-2-ylmethoxymethyl)propoxy]methyl]oxirane Chemical compound C1OC1COCC(COCC1OC1)(COCC1OC1)COCC1CO1 PLDLPVSQYMQDBL-UHFFFAOYSA-N 0.000 description 1
- RRXBOAFUCKTFOJ-UHFFFAOYSA-N 2-benzyl-1,1-dimethylhydrazine Chemical compound CN(C)NCC1=CC=CC=C1 RRXBOAFUCKTFOJ-UHFFFAOYSA-N 0.000 description 1
- AKSPRESAUMCQOC-UHFFFAOYSA-N 2-benzyl-1,1-diphenylhydrazine Chemical compound C=1C=CC=CC=1CNN(C=1C=CC=CC=1)C1=CC=CC=C1 AKSPRESAUMCQOC-UHFFFAOYSA-N 0.000 description 1
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- BWLBGMIXKSTLSX-UHFFFAOYSA-N 2-hydroxyisobutyric acid Chemical compound CC(C)(O)C(O)=O BWLBGMIXKSTLSX-UHFFFAOYSA-N 0.000 description 1
- GBTCTAIQIWWVBD-UHFFFAOYSA-N 2-thiabicyclo[2.2.2]octa-1(6),4,7-trien-3-one Chemical compound C1(=O)C2=CC=C(C=C2)S1 GBTCTAIQIWWVBD-UHFFFAOYSA-N 0.000 description 1
- VEORPZCZECFIRK-UHFFFAOYSA-N 3,3',5,5'-tetrabromobisphenol A Chemical compound C=1C(Br)=C(O)C(Br)=CC=1C(C)(C)C1=CC(Br)=C(O)C(Br)=C1 VEORPZCZECFIRK-UHFFFAOYSA-N 0.000 description 1
- CFSRYSNJOVVGIH-UHFFFAOYSA-N 3-(trichloromethyl)undec-1-ene Chemical compound C(=C)C(C(Cl)(Cl)Cl)CCCCCCCC CFSRYSNJOVVGIH-UHFFFAOYSA-N 0.000 description 1
- LBIHNTAFJVHBLJ-UHFFFAOYSA-N 3-(triethoxymethyl)undec-1-ene Chemical compound C(=C)C(C(OCC)(OCC)OCC)CCCCCCCC LBIHNTAFJVHBLJ-UHFFFAOYSA-N 0.000 description 1
- QSMBWQLNNWHMAG-UHFFFAOYSA-N 3-naphthalen-2-yl-1,2-diphenyl-9H-fluorene Chemical compound C1=C(C=CC2=CC=CC=C12)C=1C(=C(C=2CC3=CC=CC=C3C=2C=1)C1=CC=CC=C1)C1=CC=CC=C1 QSMBWQLNNWHMAG-UHFFFAOYSA-N 0.000 description 1
- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 description 1
- MECNWXGGNCJFQJ-UHFFFAOYSA-N 3-piperidin-1-ylpropane-1,2-diol Chemical compound OCC(O)CN1CCCCC1 MECNWXGGNCJFQJ-UHFFFAOYSA-N 0.000 description 1
- GIXNHONPKYUROG-UHFFFAOYSA-N 4-(9h-fluoren-1-yl)phenol Chemical compound C1=CC(O)=CC=C1C1=CC=CC2=C1CC1=CC=CC=C12 GIXNHONPKYUROG-UHFFFAOYSA-N 0.000 description 1
- SXPGQGNWEWPWQZ-UHFFFAOYSA-N 4-(triethoxymethyl)dodecan-1-amine Chemical compound NCCCC(C(OCC)(OCC)OCC)CCCCCCCC SXPGQGNWEWPWQZ-UHFFFAOYSA-N 0.000 description 1
- DFYGYTNMHPUJBY-UHFFFAOYSA-N 4-(trimethoxymethyl)dodecane-1-thiol Chemical compound SCCCC(C(OC)(OC)OC)CCCCCCCC DFYGYTNMHPUJBY-UHFFFAOYSA-N 0.000 description 1
- CPNDDTGXIGEDHJ-UHFFFAOYSA-N 4-[[amino(benzyl)amino]methyl]phenol Chemical compound OC1=CC=C(CN(N)CC2=CC=CC=C2)C=C1 CPNDDTGXIGEDHJ-UHFFFAOYSA-N 0.000 description 1
- 125000001255 4-fluorophenyl group Chemical group [H]C1=C([H])C(*)=C([H])C([H])=C1F 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- DAXJSNCFYAQDLN-UHFFFAOYSA-N 9,10-bis(4-fluorophenyl)-1-(4-phenylsulfanylphenyl)anthracene Chemical compound C1(=CC=CC=C1)SC1=CC=C(C=C1)C1=CC=CC2=C(C3=CC=CC=C3C(=C12)C1=CC=C(C=C1)F)C1=CC=C(C=C1)F DAXJSNCFYAQDLN-UHFFFAOYSA-N 0.000 description 1
- NYBPVVQTWHSWMB-UHFFFAOYSA-N 9,10-bis(4-methoxyphenyl)-1-(4-phenylsulfanylphenyl)anthracene Chemical compound C1(=CC=CC=C1)SC1=CC=C(C=C1)C1=CC=CC2=C(C3=CC=CC=C3C(=C12)C1=CC=C(C=C1)OC)C1=CC=C(C=C1)OC NYBPVVQTWHSWMB-UHFFFAOYSA-N 0.000 description 1
- SXDHACYSAKKOGS-UHFFFAOYSA-N 9,10-bis(4-methoxyphenyl)-1-[4-(4-methoxyphenyl)sulfanylphenyl]anthracene Chemical compound COC1=CC=C(C=C1)SC1=CC=C(C=C1)C1=CC=CC2=C(C3=CC=CC=C3C(=C12)C1=CC=C(C=C1)OC)C1=CC=C(C=C1)OC SXDHACYSAKKOGS-UHFFFAOYSA-N 0.000 description 1
- GJNKQJAJXSUJBO-UHFFFAOYSA-N 9,10-diethoxyanthracene Chemical compound C1=CC=C2C(OCC)=C(C=CC=C3)C3=C(OCC)C2=C1 GJNKQJAJXSUJBO-UHFFFAOYSA-N 0.000 description 1
- JWJMBKSFTTXMLL-UHFFFAOYSA-N 9,10-dimethoxyanthracene Chemical compound C1=CC=C2C(OC)=C(C=CC=C3)C3=C(OC)C2=C1 JWJMBKSFTTXMLL-UHFFFAOYSA-N 0.000 description 1
- LBQJFQVDEJMUTF-UHFFFAOYSA-N 9,10-dipropoxyanthracene Chemical compound C1=CC=C2C(OCCC)=C(C=CC=C3)C3=C(OCCC)C2=C1 LBQJFQVDEJMUTF-UHFFFAOYSA-N 0.000 description 1
- DEVXQDKRGJCZMV-UHFFFAOYSA-K Aluminum acetoacetate Chemical compound [Al+3].CC(=O)CC([O-])=O.CC(=O)CC([O-])=O.CC(=O)CC([O-])=O DEVXQDKRGJCZMV-UHFFFAOYSA-K 0.000 description 1
- 241000208340 Araliaceae Species 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- JZHKIUBMQMDQRG-UHFFFAOYSA-N C(=C)C(C(OC)(OC)OC)CCCCCCCC Chemical compound C(=C)C(C(OC)(OC)OC)CCCCCCCC JZHKIUBMQMDQRG-UHFFFAOYSA-N 0.000 description 1
- DBJFSFSBHGPDPG-UHFFFAOYSA-N C(C(=C)C)(=O)OCCCC(C(OC)(OC)OC)CCCCCCCC Chemical compound C(C(=C)C)(=O)OCCCC(C(OC)(OC)OC)CCCCCCCC DBJFSFSBHGPDPG-UHFFFAOYSA-N 0.000 description 1
- RXLXHBWNBOMMHU-UHFFFAOYSA-N C(C)C(C([CH2-])=O)CC Chemical compound C(C)C(C([CH2-])=O)CC RXLXHBWNBOMMHU-UHFFFAOYSA-N 0.000 description 1
- VPLKXGORNUYFBO-UHFFFAOYSA-N C1(CC2C(CC1)O2)CCC(C(OC)(OC)OC)CCCCCCCC Chemical compound C1(CC2C(CC1)O2)CCC(C(OC)(OC)OC)CCCCCCCC VPLKXGORNUYFBO-UHFFFAOYSA-N 0.000 description 1
- HYEBODYQOXQJDS-UHFFFAOYSA-N CNN.C(CCCCCCCCCCCCCCCCC)C1=C(C(C=CC1=O)=O)C Chemical compound CNN.C(CCCCCCCCCCCCCCCCC)C1=C(C(C=CC1=O)=O)C HYEBODYQOXQJDS-UHFFFAOYSA-N 0.000 description 1
- YMJQSFCAZCCPLV-UHFFFAOYSA-N CNN.C1=C(C=CC2=CC=CC=C12)NN(C1=CC=CC=C1)CCCCCCCCCCCCCCCCCC Chemical compound CNN.C1=C(C=CC2=CC=CC=C12)NN(C1=CC=CC=C1)CCCCCCCCCCCCCCCCCC YMJQSFCAZCCPLV-UHFFFAOYSA-N 0.000 description 1
- HIPJXPVHSANVLE-UHFFFAOYSA-N CNN.C1=CC=CC=2C3=CC=CC=C3C(C12)CN(N)C1=CC=CC=C1 Chemical compound CNN.C1=CC=CC=2C3=CC=CC=C3C(C12)CN(N)C1=CC=CC=C1 HIPJXPVHSANVLE-UHFFFAOYSA-N 0.000 description 1
- PDQAIMVFQQXFMF-UHFFFAOYSA-N COC1=CC=C(C=C1)C1=C(C(C2=CC=CC=C12)C1=CC=C(C=C1)SC1=CC=C(C=C1)C1C(=C(C2=CC=CC=C12)C1=CC=C(C=C1)OC)C1=CC=C(C=C1)OC)C1=CC=C(C=C1)OC Chemical compound COC1=CC=C(C=C1)C1=C(C(C2=CC=CC=C12)C1=CC=C(C=C1)SC1=CC=C(C=C1)C1C(=C(C2=CC=CC=C12)C1=CC=C(C=C1)OC)C1=CC=C(C=C1)OC)C1=CC=C(C=C1)OC PDQAIMVFQQXFMF-UHFFFAOYSA-N 0.000 description 1
- ZTSQKDOFXLMGFO-UHFFFAOYSA-N COC1=CC=C(C=C1)C1=CC=CC=2C3=CC=CC=C3CC12.C1(=CC=CC=C1)C=CC1=CC=CC=C1 Chemical compound COC1=CC=C(C=C1)C1=CC=CC=2C3=CC=CC=C3CC12.C1(=CC=CC=C1)C=CC1=CC=CC=C1 ZTSQKDOFXLMGFO-UHFFFAOYSA-N 0.000 description 1
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 1
- QORKIWFOSKOXJG-UHFFFAOYSA-N FC1=CC=C(C=C1)C1=CC=CC=2C3=CC=CC=C3CC12.C1(=CC=CC=C1)C=CC1=CC=CC=C1 Chemical compound FC1=CC=C(C=C1)C1=CC=CC=2C3=CC=CC=C3CC12.C1(=CC=CC=C1)C=CC1=CC=CC=C1 QORKIWFOSKOXJG-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- LJLYQRFCYIABDM-UHFFFAOYSA-N NN.C(C1=CC=CC=C1)C1SCCC1 Chemical compound NN.C(C1=CC=CC=C1)C1SCCC1 LJLYQRFCYIABDM-UHFFFAOYSA-N 0.000 description 1
- CYHISBZCEIAIFF-UHFFFAOYSA-N NN.CC1SCCC1.C1(C=CC(C=C1)=O)=O Chemical compound NN.CC1SCCC1.C1(C=CC(C=C1)=O)=O CYHISBZCEIAIFF-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229910018286 SbF 6 Inorganic materials 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- CBIFDJDRCNEMQB-UHFFFAOYSA-N [Al].O[As](O)(O)=O Chemical compound [Al].O[As](O)(O)=O CBIFDJDRCNEMQB-UHFFFAOYSA-N 0.000 description 1
- ONYYNZZIEBQWJS-UHFFFAOYSA-N [CH2-]C(=O)C.[Al+3].[CH2-]C(=O)C.[CH2-]C(=O)C Chemical compound [CH2-]C(=O)C.[Al+3].[CH2-]C(=O)C.[CH2-]C(=O)C ONYYNZZIEBQWJS-UHFFFAOYSA-N 0.000 description 1
- ULMRSEKUUDFGQP-UHFFFAOYSA-N [H]C([H])([H])ONNCC Chemical compound [H]C([H])([H])ONNCC ULMRSEKUUDFGQP-UHFFFAOYSA-N 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 239000003377 acid catalyst Substances 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 125000005599 alkyl carboxylate group Chemical group 0.000 description 1
- 125000005227 alkyl sulfonate group Chemical group 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- CEGOLXSVJUTHNZ-UHFFFAOYSA-K aluminium tristearate Chemical compound [Al+3].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O CEGOLXSVJUTHNZ-UHFFFAOYSA-K 0.000 description 1
- 229940063655 aluminum stearate Drugs 0.000 description 1
- MQPPCKJJFDNPHJ-UHFFFAOYSA-K aluminum;3-oxohexanoate Chemical compound [Al+3].CCCC(=O)CC([O-])=O.CCCC(=O)CC([O-])=O.CCCC(=O)CC([O-])=O MQPPCKJJFDNPHJ-UHFFFAOYSA-K 0.000 description 1
- DMGNPLVEZUUCBT-UHFFFAOYSA-K aluminum;propanoate Chemical compound [Al+3].CCC([O-])=O.CCC([O-])=O.CCC([O-])=O DMGNPLVEZUUCBT-UHFFFAOYSA-K 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- FMCQFYCLUGGPPB-UHFFFAOYSA-N benzhydrylhydrazine Chemical compound C=1C=CC=CC=1C(NN)C1=CC=CC=C1 FMCQFYCLUGGPPB-UHFFFAOYSA-N 0.000 description 1
- 229910052614 beryl Inorganic materials 0.000 description 1
- 238000003339 best practice Methods 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 125000006267 biphenyl group Chemical group 0.000 description 1
- VPCAAUUIFCAFRZ-UHFFFAOYSA-N butylalumane Chemical compound CCCC[AlH2] VPCAAUUIFCAFRZ-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000007766 curtain coating Methods 0.000 description 1
- DIOQZVSQGTUSAI-NJFSPNSNSA-N decane Chemical group CCCCCCCCC[14CH3] DIOQZVSQGTUSAI-NJFSPNSNSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- GUJOJGAPFQRJSV-UHFFFAOYSA-N dialuminum;dioxosilane;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3].O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O GUJOJGAPFQRJSV-UHFFFAOYSA-N 0.000 description 1
- JPZJANYNZOVAQN-UHFFFAOYSA-N diethoxy(propoxy)alumane Chemical compound CCCO[Al](OCC)OCC JPZJANYNZOVAQN-UHFFFAOYSA-N 0.000 description 1
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- RMBPEFMHABBEKP-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2C3=C[CH]C=CC3=CC2=C1 RMBPEFMHABBEKP-UHFFFAOYSA-N 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical class I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- FRCAGVUKJQCWBD-UHFFFAOYSA-L iodine green Chemical compound [Cl-].[Cl-].C1=CC(N(C)C)=CC=C1C(\C=1C=CC(=CC=1)[N+](C)(C)C)=C/1C=C(C)C(=[N+](C)C)C=C\1 FRCAGVUKJQCWBD-UHFFFAOYSA-L 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 231100000053 low toxicity Toxicity 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- FTWKTOVWPKRLHM-UHFFFAOYSA-N methoxyaluminum Chemical compound CO[Al] FTWKTOVWPKRLHM-UHFFFAOYSA-N 0.000 description 1
- GRURXNZQEMTGGF-UHFFFAOYSA-N methyl 9,10-dimethoxyanthracene-2-carboxylate Chemical compound C1=CC=CC2=C(OC)C3=CC(C(=O)OC)=CC=C3C(OC)=C21 GRURXNZQEMTGGF-UHFFFAOYSA-N 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- HDZGCSFEDULWCS-UHFFFAOYSA-N monomethylhydrazine Chemical compound CNN HDZGCSFEDULWCS-UHFFFAOYSA-N 0.000 description 1
- 229910052901 montmorillonite Inorganic materials 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 1
- 150000004714 phosphonium salts Chemical class 0.000 description 1
- 238000001782 photodegradation Methods 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000012985 polymerization agent Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- JTBKFHQUYVNHSR-UHFFFAOYSA-N propan-2-yloxyalumane Chemical compound CC(C)O[AlH2] JTBKFHQUYVNHSR-UHFFFAOYSA-N 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- PXQLVRUNWNTZOS-UHFFFAOYSA-N sulfanyl Chemical compound [SH] PXQLVRUNWNTZOS-UHFFFAOYSA-N 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 1
- RIOQSEWOXXDEQQ-UHFFFAOYSA-O triphenylphosphanium Chemical group C1=CC=CC=C1[PH+](C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-O 0.000 description 1
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Materials For Photolithography (AREA)
- Epoxy Resins (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006194591A JP4789726B2 (ja) | 2006-07-14 | 2006-07-14 | 感光性樹脂組成物、その積層体、その硬化物及び該組成物を用いたパターン形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200813633A TW200813633A (en) | 2008-03-16 |
| TWI408500B true TWI408500B (zh) | 2013-09-11 |
Family
ID=39076783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96125748A TWI408500B (zh) | 2006-07-14 | 2007-07-13 | 感光性樹脂組成物、其層合物、其硬化物及使用該組成物之圖型的形成方法(1) |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4789726B2 (enExample) |
| TW (1) | TWI408500B (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5072101B2 (ja) * | 2008-04-25 | 2012-11-14 | 日本化薬株式会社 | Mems用感光性樹脂組成物及びその硬化物 |
| JP5137673B2 (ja) * | 2008-04-26 | 2013-02-06 | 日本化薬株式会社 | Mems用感光性樹脂組成物及びその硬化物 |
| JP5137674B2 (ja) * | 2008-04-26 | 2013-02-06 | 日本化薬株式会社 | Mems用感光性樹脂組成物及びその硬化物 |
| JP5247396B2 (ja) * | 2008-07-02 | 2013-07-24 | 日本化薬株式会社 | Mems用感光性樹脂組成物及びその硬化物 |
| CN102317258B (zh) | 2009-02-20 | 2014-06-04 | 三亚普罗股份有限公司 | 锍盐、光酸产生剂及光敏性树脂组合物 |
| JP5967824B2 (ja) * | 2012-10-26 | 2016-08-10 | 日本化薬株式会社 | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 |
| JP5901070B2 (ja) * | 2012-10-26 | 2016-04-06 | 日本化薬株式会社 | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 |
| JP6066413B2 (ja) * | 2012-11-22 | 2017-01-25 | 日本化薬株式会社 | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 |
| JP5939965B2 (ja) * | 2012-11-22 | 2016-06-29 | 日本化薬株式会社 | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 |
| JP6066414B2 (ja) * | 2012-11-22 | 2017-01-25 | 日本化薬株式会社 | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 |
| JP5939963B2 (ja) * | 2012-11-22 | 2016-06-29 | 日本化薬株式会社 | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 |
| JP5939964B2 (ja) * | 2012-11-22 | 2016-06-29 | 日本化薬株式会社 | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 |
| JP6021180B2 (ja) * | 2012-11-22 | 2016-11-09 | 日本化薬株式会社 | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 |
| WO2022130796A1 (ja) | 2020-12-14 | 2022-06-23 | サンアプロ株式会社 | 光酸発生剤及びこれを用いた感光性組成物 |
| CN114940857A (zh) * | 2022-06-23 | 2022-08-26 | 上海镭利电子材料有限公司 | 一种抗腐蚀复合型环氧树脂光固化薄膜及其制备方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03245149A (ja) * | 1990-02-23 | 1991-10-31 | Hitachi Chem Co Ltd | 感光性樹脂組成物及び感光性エレメント |
| JPH05140267A (ja) * | 1991-11-25 | 1993-06-08 | Nippon Kayaku Co Ltd | 樹脂組成物、透明薄膜の形成法及び透明薄膜 |
| JPH08165333A (ja) * | 1994-12-14 | 1996-06-25 | Sumitomo Bakelite Co Ltd | プリプレグの製造方法 |
| US5844062A (en) * | 1997-04-29 | 1998-12-01 | Industrial Technology Research Institute | Process for preparing phenolepoxy resins in the absence of an aqueous phase |
| JPH115826A (ja) * | 1997-04-22 | 1999-01-12 | Matsushita Electric Works Ltd | ビルドアップ用エポキシ樹脂組成物 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0987366A (ja) * | 1995-09-22 | 1997-03-31 | Hitachi Ltd | 感光性樹脂組成物とそれを用いた多層配線板の製法 |
| JPH1097068A (ja) * | 1996-09-20 | 1998-04-14 | Nippon Kayaku Co Ltd | 樹脂組成物、永久レジスト樹脂組成物及びこれらの硬化物 |
| JP5095208B2 (ja) * | 2004-05-28 | 2012-12-12 | サンアプロ株式会社 | 新規なオニウムおよび遷移金属錯体のフッ素化アルキルフルオロリン酸塩 |
-
2006
- 2006-07-14 JP JP2006194591A patent/JP4789726B2/ja active Active
-
2007
- 2007-07-13 TW TW96125748A patent/TWI408500B/zh active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03245149A (ja) * | 1990-02-23 | 1991-10-31 | Hitachi Chem Co Ltd | 感光性樹脂組成物及び感光性エレメント |
| JPH05140267A (ja) * | 1991-11-25 | 1993-06-08 | Nippon Kayaku Co Ltd | 樹脂組成物、透明薄膜の形成法及び透明薄膜 |
| JPH08165333A (ja) * | 1994-12-14 | 1996-06-25 | Sumitomo Bakelite Co Ltd | プリプレグの製造方法 |
| JPH115826A (ja) * | 1997-04-22 | 1999-01-12 | Matsushita Electric Works Ltd | ビルドアップ用エポキシ樹脂組成物 |
| US5844062A (en) * | 1997-04-29 | 1998-12-01 | Industrial Technology Research Institute | Process for preparing phenolepoxy resins in the absence of an aqueous phase |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008020839A (ja) | 2008-01-31 |
| JP4789726B2 (ja) | 2011-10-12 |
| TW200813633A (en) | 2008-03-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI408500B (zh) | 感光性樹脂組成物、其層合物、其硬化物及使用該組成物之圖型的形成方法(1) | |
| TWI425311B (zh) | 感光性樹脂組成物、其層合物、其硬化物及使用該組成物之圖型的形成方法(3) | |
| JP6049076B2 (ja) | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 | |
| JP2010276694A (ja) | 感光性樹脂組成物及びその積層体並びにそれらの硬化物 | |
| TWI418934B (zh) | 感光性樹脂組成物 | |
| WO2014065394A1 (ja) | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物(2) | |
| JP2008026667A (ja) | 永久レジスト組成物、及びレジスト積層体 | |
| JP5901070B2 (ja) | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 | |
| JP4789725B2 (ja) | 感光性樹脂組成物、その積層体、その硬化物及び該組成物を用いたパターン形成方法 | |
| WO2014080970A1 (ja) | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物(7) | |
| JP4789733B2 (ja) | 感光性樹脂組成物、その積層体、その硬化物及び該組成物を用いたパターン形成方法 | |
| TWI406088B (zh) | 感光性樹脂組成物、其層合物、其硬化物及使用該組成物之圖型的形成方法(2) | |
| JP5939964B2 (ja) | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 | |
| JP6049075B2 (ja) | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 | |
| WO2014080975A1 (ja) | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物(8) | |
| TW200813626A (en) | Photosensitive resin composition, laminate comprising the same, cured product of the same and method for forming pattern using the same (4) | |
| JP5939963B2 (ja) | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 | |
| JP6021180B2 (ja) | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 | |
| JP5939965B2 (ja) | 感光性樹脂組成物、レジスト積層体及びそれらの硬化物 | |
| JP4789728B2 (ja) | 感光性樹脂組成物、その積層体、その硬化物及び該組成物を用いたパターン形成方法 |