TWI387716B - Precision temperature-control device - Google Patents

Description

Precision temperature adjustment device

The present invention relates to a precision temperature adjustment device, and more particularly to a precision temperature adjustment device for adjusting a temperature of a target fluid to be set by a temperature of a heating device and a cooling device.

Generally, in the field of precision processing such as semiconductor device manufacturing engineering, almost all of its equipment is installed in a clean room where temperature and humidity are controlled.

However, in recent years, in the field of precision machining, precision machining projects with higher processing precision have emerged.

For projects that require such high precision, the temperature change environment in the clean room is usually more demanding. Therefore, higher precision machining engineering is required, and it is installed in a space unit that performs precise temperature management.

For example, the temperature adjustment device for the temperature adjustment of the space unit is described in the temperature adjustment device shown in Fig. 13 of the following Patent Document 1.

The temperature adjusting device shown in Fig. 13 is provided with a compressor 100, a three-way valve 102, a condenser 104, an expansion valve 106, a cooler 108 and a heater 110, and further has a cooling flow path of the cooler 108 and heating. The heating flow path of the device 110.

By relying on the cooler 108 and the heater 110, the air flow temperature which is the object of temperature adjustment blown from the fan 112 can be adjusted.

In the temperature adjusting device shown in Fig. 13, the high-temperature heat medium compressed by the compressor 100 is distributed as a cooling flow path and a heating flow path via a three-way valve. The high-temperature heat medium distributed on the cooling flow path side is cooled in the condenser 104. The cooled heat medium is supplied to the cooler 108 after being cooled by the expansion expansion of the expansion valve 106. In the cooler 108, the air flow of the temperature adjustment target blown from the fan 112 is cooled, and the heat medium which absorbs heat and is heated is supplied to the compressor 100.

On the other hand, the high-temperature heat medium distributed on the heating flow path side is supplied to the heater 110, and the air flow of the temperature adjustment target cooled by the cooler 108 is heated to be adjusted to a desired temperature.

In this manner, the air flow heated by the temperature adjustment target in the heater 110 and the heat medium cooled by the heat release are supplied to the compressor 100 through the expansion valve 106 and the cooler 108.

Patent Document 1: JP-A-51-97048

In the temperature adjustment of Fig. 13, the full amount of the high-temperature heat medium compressed by the compressor 100 passes through the expansion valve 106, is cooled by the thermal expansion expansion, and is supplied to the cooler 108, thereby cooling the air of the temperature adjustment target blown from the fan 112. The cooling energy of the flow belongs to a certain extent.

On the other hand, the flow rate of the high-temperature heat medium distributed to the heating flow path side by the three-way valve 102 and the heating amount of the temperature-adjusted target air flow by the heater 110 to the cooling unit 108 can be adjusted.

Therefore, the temperature of the target air flow can be adjusted by the temperature of the cooler 108 and the heater 110, and the temperature management in the space unit can be performed in a narrow temperature range.

However, in the temperature adjusting device shown in Fig. 13, the high-temperature heat medium compressed by the compressor 100 passes through the expansion valve 106, is cooled by the thermal expansion, and is supplied to the cooler 108 after cooling. The temperature adjustment of the temperature-adjusted target air flow blown from the fan 112 is exclusively performed by the reheating of the high-temperature heat medium compressed by the compressor 100 supplied to the heater 110.

Therefore, in the temperature control method employed in the temperature adjustment device of Fig. 13, the heat medium used for heating also flows through the cooling flow path, and the heat that can be used for heating is only the heat of the compressor power, and the cooler 108 It is difficult to cope with the change in the load of the heater 110.

For this reason, in order to greatly increase the set temperature of the air flow by the temperature adjustment target of the cooler 108 and the heater 110, and the temperature of the temperature adjustment target airflow fails to reach the set temperature, it may take a very time to reach the set temperature.

In order to remedy the insufficient heating amount of the temperature adjusting device shown in Fig. 13, as shown in Fig. 14, it is conceivable to add the auxiliary heating wire 114, but it is a waste of energy.

Accordingly, an object of the present invention is to provide a precise temperature adjustment device which can solve the problem of insufficient heating ability of a fluid for temperature adjustment, and has to provide a prior temperature adjustment device such as a supplementary heating device such as a supplementary heating wire, and can improve temperature adjustment. The heating ability of the target fluid to save energy.

In order to achieve the above-mentioned problem, the inventors of the present invention have considered that a cooling flow path and a heating flow path are provided, and a distribution mechanism is provided to adjust the temperature of the target fluid to the cooling device that passes through the cooling flow path and the heating device that heats the flow path. The present invention has finally been completed by changing the amount of cooling and the amount of heating, and providing a heat pump to transfer heat from the low temperature portion to the high temperature portion to improve the heating ability of the heating flow path.

Therefore, the precision temperature adjusting device of the present invention is provided with a heating flow path for supplying a part of the high temperature first heat medium compressed and heated by the compressor to the heating device, and a cooling flow path for supplying the high temperature A residual portion of the heat medium is cooled in the condensing device and then supplied to the cooling device after being cooled by the first expansion device by being thermally expanded. In order to adjust the temperature of the temperature adjustment target fluid passing through the heating device and the cooling device to a set temperature, the high temperature first heat medium is distributed to the heating flow path and the cooling flow path by the precise temperature adjusting device, and each of the heating flow paths is passed through The first heat medium of the road and the cooling flow path is supplied to the compressor. The utility model comprises a distributing device, which distributes a part of the high temperature first heat medium discharged from the compressor to the heating flow path side, and distributes the residual portion of the high temperature first heat medium to the cooling flow path side, and distributes the The high temperature first heat medium distribution ratio of the heating flow path and the cooling flow path may be changed; in order to increase the heating capacity of the heating flow path, a heat pump device will release heat in the heating device and be cooled in the second expansion device. a first heat medium which is further cooled by thermal expansion and which absorbs heat from a second heat medium belonging to an external heat source, and a first control unit that can control the distribution device to adjust the distribution to the heat flow The high temperature first heat medium distribution ratio of the road and the cooling flow path is controlled to be a set temperature by the temperature adjustment target fluid of the heating device and the cooling device.

In the present invention, the cooling medium supplied to the condensing device of the cooling flow path to cool the high-heat first heat medium is supplied to the condensing device in the same manner as the second heat medium supplied to the heat absorbing device of the heat pump device. It is then ideally supplied to the heat absorbing device so that the heat of the high temperature first heat medium removed by the condensing device can be effectively utilized.

As the second heat medium, if a second heat medium supplied without external heating or cooling is used, it is preferable from the viewpoint of energy saving.

Further, in the present invention, the rotation speed control device for controlling the rotation speed of the compressor is provided, and the high-temperature first heat medium distribution ratio controlled by the first control unit is changed by the second control unit, and the rotation speed control device changes the compressor rotation speed. The amount of heat that the heating device applies to the temperature adjustment target fluid and the amount of cooling that the cooling device applies to the temperature adjustment target fluid cancel each other to a minimum. In this way, it is more energy efficient by adding a heat pump device.

Such a second control unit can control the compressor rotation speed by the rotation speed control device to adjust the distribution ratio of the first heat medium to a high temperature, and to distribute the fluid to be temperature-adjusted to 95 to 85% of the high-temperature first heat medium in the heating side. In the heating device, 5~15% of the residual high temperature first heat medium is distributed in the range of the cooling device. On the other hand, in the case where the temperature adjustment target fluid is on the cooling side, 95 to 85% of the high temperature first heat medium is distributed to the cooling device, and 5 to 15% of the residual high temperature first heat medium is distributed to the range of the heating device. . In this way, it is possible to operate the precise temperature adjustment device in a stable manner while ensuring that the precise temperature adjustment device can save energy. For this speed control device, it is preferable to use a reverse inverter.

Further, in the present invention, the first heat medium flowing through the heating flow path and the cooling flow path and then supplied to the first heat medium flow path of the compressor are separately provided from the distribution device to the first heat medium. The flow path including the heating flow path at the junction and the flow path including the cooling flow path can expand the temperature adjustment range of the temperature adjustment target fluid.

Here, the first heat medium that is absorbed by the cooling device and the heat pump device is re-supplied to the compressor via the accumulator, so that the state of the first heat medium of the compressor can be stably supplied.

The distribution device that distributes the high-temperature first heat medium to the heating flow path and the cooling flow path is a distribution device that can substantially continuously change the distribution ratio of the upper unloading, and the temperature of the temperature-adjusting target fluid can be more precisely adjusted.

By distributing the high-temperature first heat medium to the distribution means of the heating flow path and the cooling flow path, the liquid temperature of the temperature adjustment target can be more precisely adjusted by the distribution means capable of substantially continuously changing the distribution ratio of the upper discharge.

The so-called "distribution device that can be changed substantially continuously" means a two-way valve or a proportional three-way valve that is driven in step control mode, although the two-way valve or proportional three-way valve is carefully watched and driven in a stepwise manner. But it contains all the occasions of continuous drive.

The distribution device used in the present invention is a proportional three-way valve which can proportionally distribute the high temperature first heat medium so that the high temperature first heat medium distributed on the heating flow path side and the high temperature first heat medium distributed on the cooling flow path side are combined. The amount is equal to the high temperature first heat medium discharged from the compressor. Therefore, the distribution ratio of the high temperature first heat medium discharged from the compressor can be smoothly changed.

Further, a two-way valve provided in each of the branching pipes of the hot water first heat medium on the heating flow path side and the cooling flow path side is used as a distribution device. The first control unit adjusts the distribution ratio of the high temperature first heat medium distributed between the heating flow path and the cooling flow path, and controls the temperature adjustment target fluid of the heating device and the cooling device to reach the set temperature while adjusting The opening degree of each of the two-way valves is such that the high-temperature first heat medium distributed on the heating flow path side and the high-temperature first heat medium distributed on the cooling flow path side are equal to the high-temperature first heat medium discharged from the compressor, The high temperature first heat medium distribution ratio discharged by the compressor can be smoothly changed.

In the present invention, a liquid medium is used as a refrigerant supplied to a condensing device of a cooling flow path, and a refrigerant control device is provided to maintain a constant pressure on a discharge side of the compressor to control supply of liquid medium supplied to the condensing device. The amount is prevented from being wasted by the refrigerant flowing into the condensing device at will.

Further, when the temperature-adjusting target fluid belongs to the air flow, the cooling device and the heating device are appropriately disposed, so that the air flow that is blown to the cooling device and cooled to a lower temperature can be blown to the heating device, so that the dehumidification of the air flow of the temperature adjustment target can be performed.

On the other hand, in this case, by appropriately arranging the heating device and the cooling device, the air flow heated by the heating device is blown to the cooling device, whereby the temperature adjustment accuracy of the air flow can be further improved.

Fig. 1 is a schematic view showing an example of a precision temperature adjusting device of the present invention. The precision temperature adjustment device shown in Fig. 1 is provided in the space unit 10 in the temperature-controlled clean room, and is provided with a heating flow path and a cooling flow path to more precisely adjust the fluid to be sucked by the fan 12 in the clean room. Adjust the temperature and humidity of the air.

Further, a heater 14 constituting a heating means for heating the flow path and a cooler 16 constituting a cooling means for cooling the flow path are provided, and the air in the clean room in the space unit 10 is cooled, and then heated to perform precise temperature adjustment. Accordingly, the arrangement of the air flow by the cooler 16 and the heater 14 can be further improved by the dehumidification of the air flow of the two units 16, 14.

Such a heater 14 and a cooler 16 are used as a heat medium, for example, hydrogen fluoride such as propane, isobutane or cyclopentane, ammonia, carbon dioxide, etc., and gasification and liquefaction by the first heat medium. Heat or cool the air in the room to adjust to the set temperature.

The first heat medium is compressed and compressed by the compressor 18 to be a high-temperature (for example, 70 ° C) gas and discharged. The high-temperature first heat medium discharged from the compressor 18 is distributed as a distribution means via the proportional three-way valve 20, and is distributed to the heating flow path side provided by the heater 14 and the cooling flow path side provided by the cooler 16.

In the three-way valve 20, the high-temperature first heat medium distributed on the heating flow path side and the high-temperature first heat medium metering amount distributed on the cooling flow path side are distributed so that the compressor 18 discharges the high-temperature first heat medium amount.

This proportional three-way valve 20 is controlled by the first control unit 22a. The first control unit 22a compares the humidity measured by the temperature sensor 24 provided in the space unit 10 with the set temperature, and substantially continuously changes the distribution of the high-temperature first heat medium distributed on the heating flow path side and the cooling flow path side. The ratio is adjusted to adjust the fluid drawn into the space unit 10 to a set temperature.

The term "substantially continuously changing" means that when the proportional three-way valve 20 is driven by the step control method, it is apparent that the proportional three-way valve 20 is driven by the step, but overall, it is continuous driving.

The set temperature provided in the first control unit 22a can be arbitrarily set. Further, the temperature sensor 24 shown in Fig. 1 is provided on the discharge side of the fan 12, but may be provided on the suction side of the fan 12 or on both sides of the discharge side.

The high-temperature first heat medium distributed on the heating flow path side is directly supplied to the heater 14 and heated to the air flow sucked into the space unit 10 to be adjusted to the set temperature. At this time, the high temperature first heat medium releases heat and is cooled to become the first heat medium containing the condensate.

On the other hand, the high-temperature first heat medium distributed on the side of the cooling flow path is cooled by the condenser 26 as a condensing device, and then used as the expansion valve 28 of the expansion device, and is further cooled by the thermal expansion (for example, 10 ° C). The cooled first heat medium is supplied to the cooler 16, is sucked into the space unit 10, and is cooled to a set temperature by cooling the air flow heated by the heater 14. At this time, the first heat medium supplied to the cooler 16 absorbs heat from the air stream to raise the temperature. In this manner, by blowing the air stream that is blown to the heater 14 and warmed up to the cooler 16, the accuracy of adjusting the temperature of the air flow can be improved.

The cooling water supplied to the condenser 26 passes through a pipe for cooling the high-temperature first heat medium distributed on the heater 14 side, and is not supplied by external heating or cooling. This cooling water is heated in the condenser 26 by the first heat medium of about 70 ° C to a temperature of about 30 ° C, and is discharged from the pipe 31. The cooling water discharged from the pipe 31 is used as a heat pump heat sink, and is supplied to the heat absorber 32 to become a heat source.

The heat sink 32 is supplied by the first heat medium. After the heat medium 14 releases heat, the first heat medium is thermally expanded by the expansion valve 34 to be further cooled to 10 °C. Therefore, in the heat absorber 32, the temperature difference between the cooling water heated to a temperature of 30 ° C by the heat absorption of the condenser 26 and the first heat medium cooled to a temperature of 10 ° C exists. The first heat medium can absorb heat from the cooling water.

The first heat medium that is heated by the heat sink 32 to absorb heat from the cooling water is supplied to the compressor 18 via the accumulator 36. The accumulator 36 also supplies a first heat medium that is supplied from the cooler 16 and that is drawn into the air unit 10 to absorb heat. Since the accumulator 36 belongs to the accumulator which stores the liquid component and supplies only the gas component to the compressor 18, it is possible to supply only the gas component of the first heat medium to the compressor 18.

As the accumulator 36, an accumulator type accumulator is used.

Further, instead of providing the accumulator 36, the heat medium which is heated by the heat sink 32 from the air flow is merged with the heat medium supplied to the cooler 16 and absorbed by the fluid sucked into the air unit 10, and then supplied with compression. machine.

However, although the first heat medium which releases the heat from the heater 14 is cooled by the expansion and expansion of the expansion valve 34, and only the expansion valve 34 is thermally expanded and cooled, there is no heat between the first heat medium and the outside. Therefore, the first heat medium cooled by the heat can be absorbed from the cooling water supplied to the heat absorber 32 as the second heat medium from the outside via the condenser 26.

Therefore, in the high-pressure first heat medium discharged from the compressor 18, the compression kinetic energy of the compressor 18 and the energy of the heat-absorbing heat supplied from the outside by the heat absorber 32 of the heat pump device can be added. Further, in the precision temperature adjusting device shown in Fig. 1, the cooling water supplied from the outside is supplied through the condenser 26, and the high-temperature first heat medium removed from the condenser 26 removes a part of the energy, and may be added. In the high temperature first heat medium discharged from the compressor 18, the heating capacity of the heating flow path is increased. As a result, it is not necessary to use other heating means such as a subsidized electric heater.

Thus, as shown in Fig. 1, the precise temperature adjustment device can increase the heating capacity of the heating flow path by the arrangement of the heat pump, and distribute the proportional three-way valve 20 to the high-temperature first heat medium on the heating flow path side, and distribute it to the cooling flow. The distribution ratio of the high temperature first heat medium on the road side is substantially continuously changed in accordance with the temperature in the space unit 10.

Therefore, in the precision temperature adjustment device shown in Fig. 1, there is often a supply of a high-temperature first heat medium, and a slight load change of the temperature of the target air flow by the heater 14 of the heating flow path and the cooler 16 of the cooling flow path is often performed. The ratio of the high-temperature first heat medium distribution ratio assigned to the heating flow path and the cooling flow path can be finely adjusted by the proportional three-way valve 20 to quickly cope with the responsiveness.

As a result, the set temperature of the temperature adjustment target air flow of the heater 14 that passes through the heating flow path and the cooler 16 of the cooling flow path can be precisely controlled to ±0.1 ° C or less, and the temperature adjustment device shown in FIG. 1 is provided. The temperature change of the space unit 10 is adjusted to be smaller than the temperature change of the clean room, so that the engineering equipment required for precision machining can be set.

Further, in the temperature adjustment device shown in Fig. 1, as described above, the heating ability of the heating flow path can be improved, and the heating flow can be independently provided in the flow path including the heating flow path and the cooling device. The flow path of the road and the flow path including the cooling flow path are passed through the first heat medium of the cooler 16 and the heat absorber 32 from the proportional three-way valve 20 as a distribution device, and then merged with the accumulator 36. Therefore, when the set temperature of the temperature adjustment target air flow by the heater 14 and the cooler 16 is greatly increased, the distribution ratio of the proportional three-way valve 20 to the high-temperature first heat medium is significantly higher than that of the heating flow path. When it is distributed to the cooling flow path, the set temperature of the temperature adjustment target air flow can be quickly adjusted.

As a result, for example, in the temperature adjustment device shown in Fig. 13, the temperature setting range is about 20 to 26 ° C. However, in the temperature adjustment device shown in Fig. 1, the temperature setting range is greatly expanded to about 18 to 35 °C.

In particular, in the temperature adjustment device shown in Fig. 1, the heating ability of the heating flow path is improved, and it is not necessary to use other heating means such as a supplementary heating wire, so that the auxiliary heating wire 114 is provided as shown in Fig. 14. The temperature adjustment device can save energy.

For example, in the temperature adjusting device provided with the auxiliary heating wire 114 as shown in Fig. 14, the total energy consumption is 18% for the compressor 100, 69% for the auxiliary heating wire 114, and 13% for the fan 112. In this regard, in the temperature adjustment device of Fig. 11, the energy consumption of the auxiliary heating wire 114 can be reduced.

Therefore, for a water-cooled air conditioner having a discharge amount of 20 m ³ /min, the maximum consumption capacity is 11.7 KW as in the case of applying the temperature adjustment device shown in Fig. 14, but the temperature adjustment device shown in Fig. 1 is applied. The maximum consumption power can be reduced to 2.4KW.

As described above, in the temperature adjusting device shown in Fig. 1, the control valve 40 is provided as a refrigerant control device in the piping 30 for supplying the cooling water to the condenser 26. This control valve 40 controls the discharge pressure of the compressor 18 to be constant. As shown in Fig. 2, the control valve 40 is provided with a rod-shaped portion having a valve body 40b for closing the opening of the valve portion 40a provided in the cooling water flow path. The first end face of the rod is spliced to the spring 40c, and the direction of the attachment is in the direction in which the valve body 40b closes the opening of the valve portion 40a. Further, the other end surface of the rod portion is connected to the telescopic box 40d which resists the pressure of the first heat medium discharged from the supply compressor 18, and the rod portion opposes the attached force of the spring 40c, and the valve body 40b is attached to the open valve portion. 40a The direction of the opening.

For this reason, when the discharge pressure of the compressor 18 exceeds the biasing force of the spring 40c, the valve body 40b moves in the direction of the opening of the open valve portion 40a by the bellows 40d, so that the amount of cooling water supplied to the condenser 26 increases, and condensation is increased. The cooling capacity of the device 26. Therefore the compressor The discharge pressure of 18 is reduced.

On the other hand, when the discharge pressure of the compressor 18 is lower than the biasing force of the spring 40c, the valve body 40d moves in the direction of closing the opening of the valve portion 40a, reducing the amount of cooling water supplied to the condenser 26 and lowering its cooling capacity. Therefore, the discharge pressure of the compressor 18 is increased.

By keeping the discharge pressure of the compressor 18 constant, the precise temperature adjustment device can be stably operated. The condenser 16 can be adjusted to prevent excess supply of cooling water from being discharged outside the system.

However, when the temperature setting of the air flow passing through the heater 14 and the cooler 16 is greatly increased, the first control unit 22a opens the cooling flow path side discharge opening of the proportional three-way valve 20 to a fully closed or nearly closed state. At the same time, the heating flow path side discharge port is fully open or nearly fully open.

Further, if the air flow temperature of the temperature adjustment target is a low temperature, the first heat medium supplied to the heating flow path heater 14 is condensed by the low temperature air in the heater 14, and the discharge pressure of the compressor 18 is lower than the set pressure, and the control valve 40 is closed and the condenser 26 is not supplied with cooling water.

Thus, when the condenser 26 is not supplied with the cooling water, the heat absorber 32 serving as the heat pump cannot receive the supply of the cooling water from the condenser 26. Therefore, the heat absorber 32 is stopped and the heat pump device is also malfunctioning.

It is not even possible to perform heat exchange between the first heat medium which is condensed by the heat of the heater 14 and the cooling water via the expansion and expansion cooling of the expansion valve 34, causing the heat sink 32 to freeze.

Therefore, as shown in Fig. 3, the precision temperature adjusting device is provided with a control valve 44 to the bypass pipe 42 of the control valve 40 as a supply means for supplying the cooling water heat absorber 32. The control valve 44 is in a fully closed or nearly closed state at the cooling flow path side discharge opening of the proportional three-way valve 20, and is in a fully open or nearly fully open state when the heating flow path side discharge opening is in accordance with the first control portion 22a. The signal is turned on, and the cooling water is forcibly supplied to the condenser 26 to bring the heat absorber 32 into an operating state.

Therefore, the temperature setting of the air flow passing through the heater 14 and the cooler 16 is greatly increased, or when the air flow passing through the heater 14 and the cooler 16 is at a low temperature, the high-temperature first heat medium distribution ratio distributed to the cooling flow path side is At or near zero, a certain amount of cooling water can be supplied to the heat absorber 32 to prevent it from freezing and function as a heat pump.

When the discharge pressure of the compressor 18 rises to be near the set pressure, the control valve 44 is closed in accordance with a signal from the first control unit 22a. Thereafter, the control valve 40 maintains the pressure on the discharge side of the compressor 18 at a constant level, and controls the amount of cooling water supplied to the condenser 26.

In the precision temperature adjustment device shown in FIG. 3, the air stream cooled by the cooler 16 is blown to the heater 14. Thus, the air stream is initially blown to the cooler 16, and the moisture in the air stream can be condensed to dehumidify.

In the precision temperature adjustment device shown in Fig. 3, the constituent materials are the same as those of the precise temperature adjustment device shown in Fig. 1, that is, the same reference numerals are given to the first embodiment, and detailed description thereof will be omitted.

In the precision temperature adjusting device shown in FIGS. 1 to 3, the cooling water is supplied to the condenser 26 and the heat absorber 32 of the heat pump device as the second heat medium, but as shown in FIG. 4, the fan 46 can be supplied. The air flows through the condenser 26 and the heat pump device heat sink 32 as a second heat medium.

In the precision temperature adjusting device shown in Fig. 4, the first heat medium which is heated by the heater 14 is blown to the condenser 26 by the fan 46 by the heat sink 32 which is cooled and expanded by the expansion valve 34 and cooled. The heated air stream is blown. Therefore, in the heat absorber 32, the heat is condensed by the heater 14 to be thermally expanded, so that the more cooled first heat medium absorbs heat from the air stream and heats up.

In the precision temperature adjustment device shown in Fig. 4, the constituent materials are the same as those of the first embodiment, and the detailed description thereof will be omitted.

Further, if the temperature adjustment device shown in FIGS. 1 to 4 is not used as the proportional three-way valve 20 of the distribution device, instead of the two-way valve gate valves 38a and 38b, as shown in FIG. . Each of the gate valves 38a, 38b is controlled by the first control unit 22a. The first control unit 22a adjusts the opening degree of each of the gate valves 38a and 38b, and distributes the gas-like high-temperature first heat medium compressed and heated by the compressor 18 to the continuous adjustment of the distribution ratio of the heating flow path and the cooling flow path. The air passing through the heater 14 and the cooler 16 is controlled to flow at a set temperature. At this time, the opening degrees of the gate valves 32a, 32b are adjusted so as to be continuously proportionally distributed so that the total amount of the high-temperature first heat medium distributed to the heater 14 side and the high-temperature first heat medium amount distributed to the cooler 16 side are equal to the compression. The high temperature first heat medium discharged by the machine.

At this time, as shown in Fig. 6, each of the gate valves 38a and 38b has a linear relationship between the opening degree and the flow rate. Therefore, the first control unit 22a holds the flow rate characteristic data of the gate valves 38a and 38b shown in Fig. 6, and sets the opening degree signal to each of the gate valves 38a and 38b in accordance with the flow characteristics of the two brakes.

Here, "substituting the distribution ratio of the heating flow path and the cooling flow path substantially continuously" or "continuously adjusting the distribution ratio substantially" means that the gate valves 38a, 38b are driven in a step-by-step manner, and are adjusted. At the time of the distribution ratio between the heating flow path and the cooling flow path, the opening degree of the two valves is suspected to be driven by the step drive at the time, but overall, there is a case of continuous drive adjustment.

In the precision temperature adjustment device shown in FIGS. 1 to 5, the temperature of the air flow to be adjusted by the heater 14 and the cooler 16 is adjusted, for example, when the air flow to be temperature-adjusted is on the cooling side. As shown in Fig. 7A, the air flow cooled by the cooler 16 is heated by the heater 14 in a state where the air temperature is stably operated. The energy A required for cooling the air flow is smaller than the energy heated by the heater 14 in the operating state shown in Fig. 7A. In this case, as shown in Fig. 7B, if the energy which can be repeated between the cooler 16 and the heater 14 is minimized, an energy saving effect can be obtained.

On the other hand, when the air flow to the temperature adjustment target is the heating side, as shown in FIG. 8A, when the temperature of the air flow is in the steady operation state, the air heated by the heater 14 is cooled by the cooler 16. As shown in Fig. 8A, the energy B required to heat the air stream is sometimes smaller than the energy cooled by the cooler 16, and as shown in Fig. 8B, the cooler 16 and the heater 14 can be made. Energy savings can be achieved by reducing the amount of energy that is repeated.

However, if the ON-OFF control is performed on the high-temperature first heat medium supplied to the heater 14 and the cooler 16 in order to zero the mutually canceled heat, the operation of the precision temperature adjusting device is unstable, and the air flow is stabilized in the setting. The temperature takes a long time. Therefore, the amount of heat which is offset between the amount of heating applied to the heater 14 and the amount of cooling applied to the cooler 16 is kept to a minimum, so that the precise temperature adjustment device can be stably operated.

Moreover, it is necessary to minimize the mutual offset of heat, depending on how the precision temperature adjustment device differs, preferably by experimental means.

As described above, in order to reduce the energy repeated by the cooler 16 and the heater 14, in the precise temperature adjustment device shown in Fig. 9, from the amount of heating applied to the heater 14 and the amount of cooling applied to the cooler 16, The heat that cancels each other is reduced as much as possible, so that the rotational speed of the compressor 18 is controlled by the second inverter 22b via the inverter #19.

In the precision temperature adjustment device shown in Fig. 9, the constituent materials are the same as those of the precise temperature adjustment device shown in Fig. 1, that is, the same reference numerals are given to the first embodiment, and detailed description thereof will be omitted.

The second control unit 22b cooperates with the first control unit 22a of the proportional three-way valve 20 to minimize the amount of heat applied to the heater 14 and the amount of cooling applied to the cooler 16, thereby performing air. Precision temperature control of the flow.

The control of the proportional three-way valve 20 by the first control unit 22a and the control of the rotational speed of the compressor 18 by the second control unit 22b are shown by the flowchart of Fig. 10.

When the air flow is operated on the cooling side, the heating amount applied to the heater 14 is distributed to the high temperature of the heater 14 side by the proportional three-way valve 20, as a result of the test operation of the temperature adjusting device shown in Fig. 9. The first heat medium distribution rate is set to 5 to 15% (the ratio of the first-stage three-way valve 20 to the high-temperature first heat medium of the cooler 16 side is 95 to 85%), and the stable operation is preferable.

On the other hand, when the air flow is operated on the heating side, the amount of heating applied to the heater 14 side is determined, and the high-temperature first heat medium distribution rate assigned to the heater 14 side by the proportional three-way valve 20 is set to 95~ 85% (the ratio of the first-stage three-way valve 20 to the high-temperature first heat medium on the side of the cooler 16 is 5 to 15%), and it is preferable to operate stably.

Therefore, in the control of the flowchart shown in Fig. 10, the amount of heating applied to the heater 14 side, specifically, the high-pressure first heat medium distribution ratio assigned to the heater 14 side by the proportional three-way valve 20, to the air When the flow is operated on the cooling side, the number of revolutions of the compressor 18 is controlled to be 5 to 15%, and when the air flow is heated, it is 95 to 85%.

In the flowchart shown in Fig. 10, after the compressor 18 is started in step S10, the proportional three-way valve 20 is continuously changed to be distributed to the heater in accordance with the temperature signal measured by the temperature sensor 24 provided in the space unit 10 in step S12. The high temperature first heat medium distribution ratio between the 14 side and the cooler 16 side adjusts the flow of air sucked into the air unit 10 to a set temperature.

Whether or not such air flow reaches the set temperature and is stabilized here is determined in step S14. Assuming that the air flow temperature has not been stabilized, the process returns to step S12, and the proportional three-way valve 20 is continuously changed to the high temperature heat medium distribution ratio of the heater 14 side and the cooler 16 side, and steps S12 and S14 are in the first control unit 22a. get on.

On the other hand, if the air flow in the space unit 10 has reached the set temperature and is stabilized, it is determined in steps S16 to S22 whether or not the high temperature first heat medium distribution ratio assigned to the heater 14 side is within the set range. Steps S16 to S22 are performed by the second control unit 22b.

Further, the so-called average distribution ratio of the high-temperature first heat medium shown in Fig. 10 means that the first heat-distribution ratio in the set time is taken as the first heat-distribution ratio of the high-temperature first heat-distribution ratio is different from the heater 14 side. The average value, hereinafter referred to as the first heat medium distribution rate.

First, in steps S16 and S18, it is assumed that the average distribution ratio of the first heat medium to the heater 14 side is within 5 to 15% when the air flow system is on the cooling side.

In this case, when the average heat distribution rate of the first heat medium on the heater 14 side is within 5 to 15%, the air flow is on the cooling side and is within the range of the stable operation of the precise temperature adjustment device. S16 returns to S16 from S18.

On the other hand, if the average distribution ratio of the first heat medium to the heater 14 side is less than 5%, the average distribution ratio of the first heat medium to the heater 14 side is too low, and the operation of the precision temperature adjusting device is liable to be trapped. stable. Therefore, the first heat medium distribution rate to the heater 14 side should be increased, and the flow rate should be shifted from step S16 to S24 to increase the speed of the compressor 18. In step S24, a signal for increasing the number of revolutions of the compressor 18 set therein with a minimum amount of change is sent from the second control unit 22b to the inverter unit 18. Since the rotation speed of the compressor 18 is increased by the minimum amount of change, the precise temperature adjustment device can be stably operated.

Further, the minimum amount of change in the number of revolutions of the compressor 18 can be varied depending on the precise temperature adjusting device, and it is preferable to obtain it experimentally. When the rotation speed of the compressor 18 is 2000 to 5000 rpm, the minimum variation is preferably in the range of 3 to 10%.

When the average distribution ratio of the first heat medium to the heater 14 side exceeds 15%, it is determined in steps S16 and S18 that the air flow is not on the cooling side, and the processes are shifted to steps S20 and S22. At S20 and S22, if it is assumed that the air flow is on the heating side and also within the stable operation range of the precision temperature adjustment device, the process returns from step S22 to step S16 in step S20.

On the other hand, if the average distribution ratio of the first heat medium on the heater 14 side exceeds 95%, the average distribution ratio is too high, and the operation of the precision temperature adjustment device tends to be unstable. Therefore, the average distribution ratio of the first heat medium to the heater 14 side should be reduced and the flow rate is shifted from step S22 to S24 to increase the number of revolutions of the compressor 18. In step S24, a signal for increasing the number of revolutions of the compressor 18 set therein with a minimum amount of change is sent from the second control unit 22b to the inverter unit 18.

Further, if the average heat distribution rate of the first heat medium on the heater 14 side is less than 85%, the air flow may be determined not to be on the heating side or the cooling side in the step S22. The amount of heat that cancels each other in the amount of heating of the heater 14 and the amount of cooling applied to the cooler 44 is too large. Therefore, the process proceeds to S26 to reduce the rotational speed of the compressor 18. In step S26, a signal for lowering the number of revolutions of the compressor set therein with a minimum amount of change is sent from the second control unit 22b to the inverter converter 18. This is to reduce the rotational speed of the compressor 18 with a minimum amount of change to move the air to the heating side or the cooling side.

Next, the process proceeds to S28 via step S24 or S26, and it is determined whether or not the compressor 18 is in operation. If the compressor 18 is in operation, it returns to step S14. In S14, it is judged whether or not the air flow in the space unit 10 has reached and settled at the set temperature in a state where the rotation speed of the compressor 18 is increased or decreased with the minimum change amount in step S24 or S26. If so, it is determined again according to steps S16 to S26 whether or not the average distribution ratio of the first heat medium on the heater 14 side is within the set range.

On the other hand, if it is determined in step S14 that the temperature of the air flow in the air unit 10 is unsafe, the process returns to step S12, and the first aspect of the proportional three-way valve 20 is distributed to the heater 14 side and the cooler 16 side. The distribution ratio of a heat medium. After the air flow in the air unit 10 reaches and settles at the set temperature, the flow proceeds to steps S16 to S26.

Further, in step S28, when the compressor 18 is not in the operating state, the control of the first control unit 22a and the second control unit 22b is stopped.

In the flowchart shown in Fig. 10 described above, the first control unit 22a controls the average distribution ratio of the first heat medium on the heater 14 side, but it is also possible to pay attention to the first heat medium on the cooler 16 side. The average allocation rate is controlled.

In the precision temperature adjustment device shown in FIGS. 1 to 10, the temperature adjustment target is air flow, but it can also be applied to a coolant used in a work machine or the like as a precise temperature adjustment device for temperature adjustment. One of the precise temperature adjustments of the coolant for such a temperature adjustment target is shown in Fig. 11, for example.

In the coolant precise temperature adjusting device shown in Fig. 11, the reverse inverter 51 controls the high-temperature first heat medium compressed by the compressor 50 that is set to rotate at a set speed, and is used as a proportional three-way valve 52 of the distributing device. It is distributed to the heating flow path and the cooling flow path.

The proportional three-way valve 52 distributes the high-temperature first heat medium compressed by the compressor 50 so that the total amount of the high-temperature first heat medium distributed on the heating flow path side and the high-temperature first heat medium amount distributed on the cooling flow path side are equal to the compressor. The high temperature first heat medium discharged. The proportional three-way valve 52 is controlled by the first control unit 55a, and is continuously changed and distributed to the heating flow path in accordance with a signal from the temperature sensor 62 for measuring the temperature of the coolant at the outlet of the precision temperature adjusting device, as will be described later. The first heat medium distribution rate of the cooling flow path is adjusted, and the coolant is adjusted at the set temperature.

a condenser 56 for distributing a high temperature first heat medium discharged from the compressor 50, and a condenser 56 for condensing the high temperature first heat medium as a cooling device for cooling the high temperature first heat medium, As the first expansion device expansion gate 58 which further cools the first heat medium which has been condensed by the condenser 56 by the thermal expansion, and the cooler 60 which supplies the cooled first heat medium. In the cooler 60, the temperature adjustment target coolant returned from the USER stored in the storage tank 64 is supplied by the pump 66 and then cooled. The first heat medium that has been heated by the heat of the cooler 60 and returned to the accumulator 71 is supplied to the compressor 50.

Further, a heater 54 as a heating means for receiving the supply of the high temperature first heat medium is provided in the heating flow path. The heater 54 receives the temperature adjustment target coolant cooled by the cooler 60, and the supplied high temperature first heat medium is adjusted to the set temperature and sent to the USER.

A heat absorber 68 as a heat pump device is provided in the heating flow path and the cooling flow path. The heat absorber 68 is supplied with a first heat medium which is condensed by the heat of the heater 54 and then further cooled by the expansion valve 70 which is an expansion device, and is supplied to the condenser 56 provided in the cooling flow path. The cooling water of the second heat medium that has been heated by the heat of the high-temperature heat medium is returned to the accumulator 71 and supplied to the compressor 50 by the first heat medium that absorbs heat from the heated cooling water.

In the precision temperature adjusting device shown in Fig. 11, a control valve 72 for cooling the medium control device is provided in the middle of the cooling water pipe supplied to the condenser 56 as the second heat medium to control supply to the condenser. The cooling water supply amount of 56 is to maintain the pressure on the discharge side of the compressor 50 at a certain value. This control valve 72 has the same configuration as the control valve 40 shown in Fig. 2 for controlling the discharge pressure of the compressor 50 to be constant.

That is, when the discharge pressure of the compressor 50 exceeds the set value, the control valve 72 is enlarged in the opening degree of the valve opening portion in the cooling flow path, and the amount of cooling water supplied to the condenser 56 is increased to increase the cooling capacity of the condenser 56. Therefore, the discharge pressure of the compressor 50 is lowered. On the other hand, when the discharge pressure of the compressor 50 falls below the set value, the opening degree of the opening of the control valve 72 becomes small, the amount of cooling water supplied to the condenser 56 decreases, and the cooling capacity of the condenser 56 decreases, so that the compressor The discharge pressure of 50 is increased.

Thus, by keeping the discharge pressure of the compressor 50 constant, the precise temperature adjustment device can be stably operated. It is also possible to adjust to avoid excessive supply of cooling water from the condenser 56 to the outside of the system.

However, when the temperature setting of the coolant is greatly increased, the first control unit 55a causes the cooling flow path side discharge port of the proportional three-way valve 52 to be in a fully closed or nearly fully closed state, and at the same time, the heating flow path side discharge opening is fully open or nearly fully open. In the state, almost all of the high temperature first heat medium is distributed on the high pressure flow path side.

Further, when the coolant in the storage tank 64 is at a low temperature, the high-temperature first heat medium supplied to the heating channel heater 54 is condensed by the low-temperature coolant in the heater 54, and the discharge pressure of the compressor 50 becomes lower than the set pressure. The control valve 72 is closed and the condenser 56 is not supplied with cooling water.

As such, the condenser 56 loses the supply of cooling water, and the heat sink 68, which acts as a heat pump device, also loses the supply of cooling water from the condenser 56. Therefore, the heat absorber 68 stops operating and loses the heat pump function.

In addition, after the heater 54 is released from heat and condensed, the first heat medium which has been further cooled by the expansion valve 70 is not cooled and exchanges with the cooling water, so that the heat absorber 68 freezes.

In this regard, in the precision temperature adjusting device shown in Fig. 11, a control valve 76 is provided in the bypass pipe 74 of the control valve 72 as a cooling water supply device to the heat absorber 68. The control valve 76 is based on the signal from the first control unit 55a when the heating flow path side discharge port of the proportional three-way valve 52 is fully open or nearly fully open (or the cooling flow path side discharge port is fully closed or nearly fully closed). On, the cooling water is forcibly supplied to the condenser 56 to bring the heat absorber 68 into operation.

For this reason, if the temperature setting of the coolant is greatly increased, even if the distribution ratio of the high-temperature first heat medium distributed on the cooling flow path side becomes zero or nearly zero, the heat absorber 18 can be supplied with a set amount of cooling water to prevent The heat sink 68 is frozen and functions as a heat pump.

When the discharge pressure of the compressor 50 rises to be near the set pressure, the control valve 76 is closed by a signal from the first control unit 55a. Thereafter, the amount of cooling water supplied to the condenser 56 is controlled by the control valve 72 while maintaining the pressure on the discharge side of the compressor 50 constant.

In the precise temperature adjustment device for the coolant shown in Fig. 11, the proportional three-way valve 52 may not be used, and instead, the two gate valves of the two-way valve gate valves 38a and 38b shown in Fig. 5 may be used.

Further, in the precise temperature adjusting device for the cooling liquid shown in Fig. 11, cooling water is used as the second heat medium supplied to the condenser 56 and the heat pump device heat sink 68, but as shown in Fig. 12 The air flow of the fan 78 is used as the second heat medium supplied to the condenser 56 and the heat pump unit heat sink 68. In the precision temperature adjusting device shown in Fig. 12, the heat sink 68 heats up the first heat medium in the heater 54, and the expansion valve 70 of the second expansion device is cooled and expanded to be cooled, and the fan 78 is blown to the condensation. The heated air stream is blown to the heat sink 68. Therefore, in the heat absorber 68, there is a heat release by the heater 54, condensation, and the first heat medium cooled by the expansion expansion of the expansion valve 70 absorbs heat from the air stream.

In the precise temperature adjustment device shown in Fig. 12, the constituent materials are the same as those of the precise temperature adjustment device shown in Fig. 11, that is, the same reference numerals are given to those in Fig. 11, and detailed description thereof will be omitted.

In the above-described precision temperature adjustment device of FIGS. 11 and 12, in order to reduce the energy of the cooler 60 and the heater 54, the second control unit is provided to control the compressor in the same manner as the precision temperature adjustment device shown in FIG. The reverse inverter 51 of 50 controls the rotational speed of the compressor 50 as well. In this case, in conjunction with the first control unit 55a, in accordance with the flowchart shown in Fig. 10, in the amount of heating applied by the heater 54 and the amount of cooling applied by the cooler 60, the amount of heat that cancels each other is minimized, and the temperature is lowered. Adjust the precise temperature control of the coolant of the object.

Further, the heaters 14, 54 used in the precision temperature adjustment device shown in Figs. 1 to 12, the coolers 16, 60, the condensers 26, 56, and the heat absorbers 35 and 68 can be used in two types having temperature differences. A conventional heat exchanger in which fluids flow in opposite directions or in parallel. For example, a double tube, a heat sink tube, or a plate heat exchanger is suitable.

In particular, when the cooling water is supplied to the condensers 26 and 56 as the second heat medium, since the temperature of use is in a temperature band where dirt is likely to be generated, it is preferable to use a double tube heat exchanger which is relatively difficult to plug the tubes, so that The inner tube and the outer tube are circulated at different temperatures for heat exchange.

On the other hand, if a good thermal efficiency is required, a plate type heat exchanger in which a plurality of heat transfer tubes are inserted into a plurality of plate-like fin laminates can be used as the heat absorbers 32 and 68.

In particular, in the precision temperature adjustment device shown in FIGS. 1 to 12, the cooling water or the air flow is supplied as the second heat medium to the condensers 26 and 56 and the heat absorbers 32 and 68, but The condensers 26, 56 and one of the heat absorbers 32, 68 can supply cooling water and the other supply air flow.

Further, in the precision temperature adjusting device shown in Figs. 1 to 12, in order to recover a part of the heat removed from the first heat medium in the condensers 26, 56, the second heat medium is passed through the condensers 26, 56. It is supplied to the heat absorbers 32, 68. However, depending on the flow rate of the second heat medium, there is almost no hope of recycling. In this case, the second heat medium can be separately supplied to the condensers 26, 56 and the heat absorbers 32, 68. Specifically, cooling water may be separately supplied to the condensers 26, 56 and the heat absorbers 32, 68, or a cooling fan may be separately provided to separately supply air to the condensers 26, 56 and the heat absorbers 32, 68.

Further, the fluid and the second heat medium to be applied to the temperature adjustment target of the present invention are not limited to air or water, and an oil-gas mixture may be used.

[Effects of the Invention]

In the precision temperature adjustment device of the present invention, the first heat medium discharged from the compressor is supplied to the heating flow path of the heating device and the cooling flow path of the cooling device, respectively. Further, by the distribution device, the high-temperature first heat medium distribution ratio assigned to the heating flow path and the cooling flow path is changed, so that the heating amount and the cooling amount of the temperature adjustment target flow passing through the heating device and the cooling device can be easily adjusted.

In addition, in the present invention, a heat pump device is provided, which is a device that moves heat from a low temperature portion to a high temperature portion, so that a high temperature first heat medium (high temperature portion) that is compressed and compressed by a compressor can be used. After the heating device of the heating flow path releases heat and cools, the first heat medium which is cooled and expanded by the second expansion device is cooled, and the heat absorbing device of the heat pump absorbs heat from the second heat medium (low temperature portion) of the external heat source. Return to the compressor.

Therefore, in the precise temperature adjusting device of the present invention, in the high-temperature first heat medium (high temperature portion) discharged from the compressor, the second heat medium (low temperature portion) from the external heat source by the heat pump can be added to the compression kinetic energy of the compressor. The energy absorbed is increased by the heating capacity of the heating device that supplies the high temperature first heat medium.

In the precision temperature adjustment device of the present invention, the minute load fluctuation of the temperature adjustment target fluid of the heating device and the cooling device is adjusted, and the high temperature first heat medium distribution ratio of the heating flow path and the cooling flow path is adjusted by minute adjustment. It can quickly respond to the temperature adjustment target fluid to achieve precise temperature adjustment.

Further, if the set temperature of the temperature adjustment target liquid by the heating device and the cooling device is to be greatly increased, the distribution ratio of the high temperature first heat medium is increased, and the distribution ratio of the cooling flow path is greatly increased to increase the distribution ratio of the heating flow path to achieve the adjustment temperature. Adjust the target fluid for the purpose of setting the temperature.

In this way, the precision temperature adjustment device of the present invention does not require or miniaturize auxiliary components such as auxiliary heating wires, and can precisely adjust the temperature adjustment target fluid at a set temperature while saving energy.

14, 54. . . Heater

16, 60. . . Cooler

25, 26. . . Condenser

32, 68. . . Heat sink

10. . . Space unit

12. . . fan

20, 52. . . Proportional three-way valve

22a, 55a. . . First control department

30, 42, 74. . . Piping

36, 71. . . Accumulator

28, 34, 58, 70, 76, 106. . . Expansion valve

114. . . Subsidized heating wire

40a. . . Valve department

40b. . . Valve body

40c. . . spring

40d. . . Bellows

40, 44, 72, 76. . . Control valve

38a, 38b. . . gate

22b. . . Second control unit

50, 18. . . compressor

51, 18. . . Inverter

24, 62. . . Temperature sensor

64. . . Storage tank

66. . . Pump

102. . . Three-way valve

114. . . Subsidized heating wire

Fig. 1 is a schematic view showing an example of the life temperature adjusting device of the present invention.

Fig. 2 is an explanatory view showing the internal structure of the control valve 40 used in the precise temperature adjustment device shown in Fig. 1.

Fig. 3 and Fig. 4 are schematic diagrams showing another example and still another example of the precise temperature crucible apparatus of the present invention.

Fig. 5 is an explanatory view for explaining another distribution device which can be used in the precise temperature adjustment device shown in Figs. 1 to 5;

Fig. 6 is a graph showing the flow rate characteristics of the gate valve used in the distribution device of Fig. 5.

Fig. 7A and Fig. 7B are explanatory diagrams for explaining the principle of energy saving when the precision temperature adjusting device of Fig. 1 is on the cooling side.

Fig. 8A and Fig. 8B are explanatory diagrams for explaining the principle of energy saving when the precision temperature adjusting device of Fig. 1 is on the heating side.

Fig. 9 is a schematic view showing still another example of the precise temperature adjusting device of the present invention.

Fig. 10 is a flow chart showing the control procedure of the first control unit 22a and the second control unit 22b of the temperature adjustment device shown in Fig. 9.

11 and 12 are schematic views for explaining another example of the temperature adjusting device of the present invention.

Figure 13 is a schematic view showing a conventional temperature adjusting device.

Fig. 14 is a schematic view showing a modified example of the conventional temperature adjusting device.

10‧‧‧ Space unit

24‧‧‧Temperature Sensor

12‧‧‧Fan

16‧‧‧cooler

14‧‧‧heater

34, 28‧‧‧ expansion valve

32‧‧‧heat absorbers

40‧‧‧Control valve

31, 30‧‧‧Pipe

26‧‧‧Condenser

20‧‧‧Proportional three-way valve

36‧‧‧ accumulator

18‧‧‧Compressor

22a‧‧‧First Control Department

Claims (14)

A precise temperature adjusting device is provided with a heating flow path for supplying a part of a high temperature first heat medium compressed and heated by a compressor to a heating device, and a cooling flow path for supplying the high temperature first heat medium After the residual portion is cooled in the condensing device, the first expansion device is further cooled by the thermal expansion and then supplied to the cooling device, and the precise temperature is adjusted by adjusting the temperature of the target fluid at the set temperature by the heating device and the cooling device. The device distributes the high temperature first heat medium to the heating flow path and the cooling flow path, and supplies the first heat medium passing through the heating flow path and the cooling flow path to the compressor, comprising: a distribution device, a portion of the high temperature first heat medium discharged from the compressor is distributed on the heating flow path side, and the remaining portion of the high temperature first heat medium is distributed to the cooling flow path side, and is distributed to the heating flow path and cooled The high temperature first heat medium distribution ratio of the flow path is changeable; a heat pump device, in order to increase the heating capacity of the heating flow path, will release heat after the heating device is cooled and then The first heat medium which is cooled by the thermal expansion and expansion in the second expansion device absorbs heat from the second heat medium belonging to the external heat source by the heat absorbing device provided therein; and a first control unit can control the distribution device to adjust the distribution The set temperature of the temperature adjustment target fluid passing through the heating device and the cooling device is controlled by the high temperature first heat medium distribution ratio of the heating flow path and the cooling flow path. The precision temperature adjusting device of claim 1, wherein the cooling device that supplies the condensing device of the cooling flow path to cool the high heat first heat medium and the second heat medium that supplies the heat absorbing device to the heat pump device It belongs to the same heat medium and is supplied to the heat sink after being supplied to the condensing device. The precision temperature adjusting device of claim 1, wherein the second heat medium is a second heat medium supplied without external heating or cooling. The precision temperature adjustment device according to claim 1, wherein a rotation speed control device for controlling a rotation speed of the compressor is provided, and the high temperature first heat medium distribution ratio controlled by the first control unit is transmitted through the second control unit. The rotation speed control device changes the compressor rotation speed so that the amount of heating of the heating device to the temperature adjustment target fluid and the amount of cooling of the cooling device to the temperature adjustment target fluid are minimized. The precision temperature adjustment device according to claim 4, wherein the second control unit controls the rotation speed of the compressor through the rotation speed control device, adjusts the distribution ratio of the first heat medium to a high temperature, and adjusts the temperature of the target fluid to On the heating side, 95 to 85% of the high temperature first heat medium is distributed to the heating device, and 5 to 15% of the residual high temperature first heat medium is distributed in the range of the cooling device; on the other hand, the temperature is adjusted Where the target fluid is on the cooling side, 95 to 85% of the high temperature first heat medium is distributed to the cooling device, and 5 to 15% of the residual high temperature first heat medium is distributed in the range of the heating device. The precision temperature adjustment device of claim 5, wherein the rotation speed control device is a reverse inverter. The precision temperature adjusting device according to the first aspect of the patent application is separately supplied to the first heat medium flow path of the compressor through the heating flow path and the first heat medium of the cooling flow path, and is separately provided from the first heat medium flow path. a flow path including the heating flow path at the junction of the distribution device and the first heat medium, and a flow path including the cooling flow path. The precision temperature adjusting device according to claim 1, wherein the first heat medium is absorbed by the cooling device and the heat pump device, and then supplied to the compressor via the accumulator. The precision temperature adjustment device of claim 1, wherein the distribution device is configured to distribute the high temperature first heat medium to the heating flow path and the cooling flow path, so that the high temperature first heat can be substantially continuously changed. A distribution device for media distribution ratio. The precision temperature adjusting device of claim 1, wherein the distributing device is a proportional three-way valve, and the high temperature first heat medium can be proportionally distributed to distribute the high temperature first heat medium distributed on the heating flow path side. The combined amount of the high-temperature first heat medium distributed to the cooling flow path side is equal to the high-temperature first heat medium amount discharged from the compressor. The precision temperature adjustment device according to the first aspect of the invention, wherein the distribution device is a two-way valve respectively disposed on each of the branching pipes of the first heat medium and the cooling flow path on the side of the heating flow path and the cooling flow path, and the first The control unit adjusts a distribution ratio of the high temperature first heat medium distributed between the heating flow path and the cooling flow path, and controls the temperature adjustment target fluid passing through the heating device and the cooling device to set the temperature, and simultaneously adjusts each of the two-way valves The opening degree is such that the high temperature first heat medium distributed on the heating flow path side and the high temperature first heat medium distributed on the cooling flow path side are equal to the high temperature first heat medium quantity discharged by the compressor. The precision temperature adjusting device of claim 1, wherein the refrigerant of the condensing device is supplied to the cooling flow path of the condensing device by using a liquid medium, and a refrigerant control device is provided to maintain the pressure on the discharge side of the compressor. Certainly, to control the supply of liquid medium supplied to the condensing device. According to the precision temperature adjustment device of the first aspect of the invention, if the temperature adjustment target fluid is an air flow, the air flow blown to the cooling device and cooled is blown to the heating device by the arrangement of the cooling device and the heating device. . According to the precision temperature adjustment device of the first aspect of the invention, if the temperature adjustment target fluid is an air flow, the air flow that is heated by the heating device is blown to the cooling device by the arrangement of the cooling device and the heating device.