TWI377169B - Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area - Google Patents

Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area Download PDF

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Publication number
TWI377169B
TWI377169B TW094145880A TW94145880A TWI377169B TW I377169 B TWI377169 B TW I377169B TW 094145880 A TW094145880 A TW 094145880A TW 94145880 A TW94145880 A TW 94145880A TW I377169 B TWI377169 B TW I377169B
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TW
Taiwan
Prior art keywords
substrate
accelerometer
gap
conductive
plates
Prior art date
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TW094145880A
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English (en)
Chinese (zh)
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TW200635847A (en
Inventor
Andrew C Mcneil
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Freescale Semiconductor Inc
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Publication of TW200635847A publication Critical patent/TW200635847A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
TW094145880A 2005-01-28 2005-12-22 Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area TWI377169B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/046,596 US7121141B2 (en) 2005-01-28 2005-01-28 Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area

Publications (2)

Publication Number Publication Date
TW200635847A TW200635847A (en) 2006-10-16
TWI377169B true TWI377169B (en) 2012-11-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW094145880A TWI377169B (en) 2005-01-28 2005-12-22 Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area

Country Status (5)

Country Link
US (1) US7121141B2 (enExample)
JP (1) JP5356689B2 (enExample)
KR (1) KR101228164B1 (enExample)
TW (1) TWI377169B (enExample)
WO (1) WO2006083376A1 (enExample)

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Also Published As

Publication number Publication date
US20060169043A1 (en) 2006-08-03
TW200635847A (en) 2006-10-16
JP2008529001A (ja) 2008-07-31
WO2006083376A1 (en) 2006-08-10
KR101228164B1 (ko) 2013-01-30
JP5356689B2 (ja) 2013-12-04
KR20070095987A (ko) 2007-10-01
US7121141B2 (en) 2006-10-17

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