TWI369390B - Method for manufacturing dicing and die-bonding film - Google Patents
Method for manufacturing dicing and die-bonding filmInfo
- Publication number
- TWI369390B TWI369390B TW098129119A TW98129119A TWI369390B TW I369390 B TWI369390 B TW I369390B TW 098129119 A TW098129119 A TW 098129119A TW 98129119 A TW98129119 A TW 98129119A TW I369390 B TWI369390 B TW I369390B
- Authority
- TW
- Taiwan
- Prior art keywords
- die
- bonding film
- manufacturing dicing
- dicing
- manufacturing
- Prior art date
Links
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/04—Non-macromolecular additives inorganic
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- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
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- C—CHEMISTRY; METALLURGY
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- C09J7/00—Adhesives in the form of films or foils
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JP2008223742A JP4801127B2 (ja) | 2008-09-01 | 2008-09-01 | ダイシング・ダイボンドフィルムの製造方法 |
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JP (1) | JP4801127B2 (zh) |
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JP2011216671A (ja) * | 2010-03-31 | 2011-10-27 | Furukawa Electric Co Ltd:The | 半導体ウエハの加工用テープ、その製造方法および半導体ウエハの加工方法 |
JP6013709B2 (ja) * | 2010-06-08 | 2016-10-25 | 日東電工株式会社 | 熱硬化型ダイボンドフィルム、ダイシング・ダイボンドフィルム、及び、半導体装置の製造方法 |
JP5534986B2 (ja) * | 2010-07-09 | 2014-07-02 | 古河電気工業株式会社 | ウエハ加工用テープ |
JP5653675B2 (ja) * | 2010-07-30 | 2015-01-14 | 古河電気工業株式会社 | ウエハ加工用テープ |
JP5435497B2 (ja) * | 2010-08-11 | 2014-03-05 | 古河電気工業株式会社 | ウエハ加工用テープ |
TW201206813A (en) * | 2010-08-11 | 2012-02-16 | Furukawa Electric Co Ltd | Wafer processing tape |
JP2012069586A (ja) * | 2010-09-21 | 2012-04-05 | Nitto Denko Corp | ダイシング・ダイボンドフィルム、ダイシング・ダイボンドフィルムの製造方法、及び、半導体装置の製造方法 |
CN102624352B (zh) * | 2010-10-06 | 2015-12-09 | 日本碍子株式会社 | 复合基板的制造方法以及复合基板 |
JP5767478B2 (ja) * | 2011-01-27 | 2015-08-19 | 古河電気工業株式会社 | 半導体ウエハ加工用テープの製造方法及び半導体ウエハ加工用テープ |
WO2012115701A2 (en) * | 2011-02-22 | 2012-08-30 | Henkel Corporation | Multilayered adhesive film |
JP2012186360A (ja) * | 2011-03-07 | 2012-09-27 | Nitto Denko Corp | ダイシング・ダイボンドフィルム及び半導体素子 |
JP5141853B2 (ja) * | 2011-03-28 | 2013-02-13 | 日立化成工業株式会社 | 多層樹脂シート、樹脂シート積層体、多層樹脂シート硬化物及びその製造方法、金属箔付き多層樹脂シート、並びに半導体装置 |
JP5942261B2 (ja) * | 2012-09-28 | 2016-06-29 | パナソニックIpマネジメント株式会社 | プリプレグ、金属張積層板、プリント配線板 |
CN105027273B (zh) * | 2013-03-07 | 2019-01-22 | 住友电木株式会社 | 粘接膜、叠层体及其固化物、和半导体装置及其制造方法 |
JP2015005636A (ja) * | 2013-06-21 | 2015-01-08 | 日東電工株式会社 | ダイシング・ダイボンディングフィルム |
JP6505362B2 (ja) * | 2013-11-21 | 2019-04-24 | 日東電工株式会社 | 熱硬化型ダイボンドフィルム、ダイシングシート付きダイボンドフィルム、熱硬化型ダイボンドフィルムの製造方法、及び、半導体装置の製造方法 |
JP6716263B2 (ja) * | 2016-01-22 | 2020-07-01 | 株式会社ディスコ | ウエーハの加工方法 |
JP2017190447A (ja) * | 2016-04-12 | 2017-10-19 | 日東電工株式会社 | 剥離ライナー付き粘着シート |
JP6721398B2 (ja) * | 2016-04-22 | 2020-07-15 | 日東電工株式会社 | ダイシングダイボンディングフィルム、ダイシングダイボンディングテープおよび半導体装置の製造方法 |
WO2021005661A1 (ja) * | 2019-07-05 | 2021-01-14 | 昭和電工マテリアルズ株式会社 | ダイシング・ダイボンディング一体型フィルム、ダイボンディングフィルム、及び半導体装置の製造方法 |
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US4961804A (en) * | 1983-08-03 | 1990-10-09 | Investment Holding Corporation | Carrier film with conductive adhesive for dicing of semiconductor wafers and dicing method employing same |
JP2002256238A (ja) * | 2001-03-05 | 2002-09-11 | Hitachi Chem Co Ltd | 接着フィルム、それを用いた半導体装置の製造方法及び半導体装置 |
JP2002256239A (ja) * | 2001-03-05 | 2002-09-11 | Hitachi Chem Co Ltd | 接着フィルム、それを用いた半導体装置の製造方法及び半導体装置 |
JP4107417B2 (ja) * | 2002-10-15 | 2008-06-25 | 日東電工株式会社 | チップ状ワークの固定方法 |
JP4283596B2 (ja) * | 2003-05-29 | 2009-06-24 | 日東電工株式会社 | チップ状ワークの固定方法 |
EP1557880A1 (en) * | 2004-01-21 | 2005-07-27 | Nitto Denko Corporation | Resin composition for encapsulating semiconductor |
JP2006339236A (ja) * | 2005-05-31 | 2006-12-14 | Toyobo Co Ltd | 半導体ウエハ保護用粘着テープ |
JP2008124295A (ja) * | 2006-11-14 | 2008-05-29 | Toyobo Co Ltd | ダイ・アタッチメントテープ及びそれを使用した半導体装置 |
JP2008135448A (ja) * | 2006-11-27 | 2008-06-12 | Nitto Denko Corp | ダイシング・ダイボンドフィルム |
JP4430085B2 (ja) * | 2007-03-01 | 2010-03-10 | 日東電工株式会社 | ダイシング・ダイボンドフィルム |
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- 2009-08-12 KR KR1020107025459A patent/KR20110036698A/ko not_active Application Discontinuation
- 2009-08-12 WO PCT/JP2009/064238 patent/WO2010024121A1/ja active Application Filing
- 2009-08-12 US US12/744,113 patent/US20100304092A1/en not_active Abandoned
- 2009-08-28 TW TW101114556A patent/TW201241142A/zh unknown
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Cited By (1)
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TWI695872B (zh) * | 2015-03-30 | 2020-06-11 | 日商琳得科股份有限公司 | 樹脂膜形成用薄片、及樹脂膜形成用複合薄片 |
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KR20110036698A (ko) | 2011-04-08 |
TW201241142A (en) | 2012-10-16 |
US20100304092A1 (en) | 2010-12-02 |
JP4801127B2 (ja) | 2011-10-26 |
TW201014894A (en) | 2010-04-16 |
JP2010062205A (ja) | 2010-03-18 |
KR20100065401A (ko) | 2010-06-16 |
WO2010024121A1 (ja) | 2010-03-04 |
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