TWI367595B - Variable filter element, variable filter module and fabrication method thereof - Google Patents

Variable filter element, variable filter module and fabrication method thereof

Info

Publication number
TWI367595B
TWI367595B TW097115239A TW97115239A TWI367595B TW I367595 B TWI367595 B TW I367595B TW 097115239 A TW097115239 A TW 097115239A TW 97115239 A TW97115239 A TW 97115239A TW I367595 B TWI367595 B TW I367595B
Authority
TW
Taiwan
Prior art keywords
variable filter
fabrication method
filter element
filter module
module
Prior art date
Application number
TW097115239A
Other languages
English (en)
Other versions
TW200901549A (en
Inventor
Xiaoyu Mi
Takeaki Shimanouchi
Masahiko Imai
Satoshi Ueda
Yoshio Satoh
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of TW200901549A publication Critical patent/TW200901549A/zh
Application granted granted Critical
Publication of TWI367595B publication Critical patent/TWI367595B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/20—Frequency-selective devices, e.g. filters
    • H01P1/201—Filters for transverse electromagnetic waves
    • H01P1/2013—Coplanar line filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/20—Frequency-selective devices, e.g. filters
    • H01P1/201—Filters for transverse electromagnetic waves
    • H01P1/203—Strip line filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/007—Manufacturing frequency-selective devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/0123—Frequency selective two-port networks comprising distributed impedance elements together with lumped impedance elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/0153—Electrical filters; Controlling thereof
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/17—Structural details of sub-circuits of frequency selective networks
    • H03H7/1741—Comprising typical LC combinations, irrespective of presence and location of additional resistors
    • H03H7/175—Series LC in series path
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/17—Structural details of sub-circuits of frequency selective networks
    • H03H7/1741—Comprising typical LC combinations, irrespective of presence and location of additional resistors
    • H03H7/1775—Parallel LC in shunt or branch path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Acoustics & Sound (AREA)
  • Filters And Equalizers (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
TW097115239A 2007-04-27 2008-04-25 Variable filter element, variable filter module and fabrication method thereof TWI367595B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007118583A JP4542117B2 (ja) 2007-04-27 2007-04-27 可変フィルタ素子、可変フィルタモジュール、およびこれらの製造方法

Publications (2)

Publication Number Publication Date
TW200901549A TW200901549A (en) 2009-01-01
TWI367595B true TWI367595B (en) 2012-07-01

Family

ID=39760632

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097115239A TWI367595B (en) 2007-04-27 2008-04-25 Variable filter element, variable filter module and fabrication method thereof

Country Status (6)

Country Link
US (1) US20080266029A1 (zh)
EP (2) EP2101412A1 (zh)
JP (1) JP4542117B2 (zh)
KR (1) KR100889218B1 (zh)
CN (1) CN101295809B (zh)
TW (1) TWI367595B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI738366B (zh) * 2019-06-10 2021-09-01 日商村田製作所股份有限公司 濾波器模組

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JP2010135614A (ja) * 2008-12-05 2010-06-17 Fujitsu Ltd 可変容量素子
JP5294013B2 (ja) * 2008-12-25 2013-09-18 富士通株式会社 フィルタ、通信モジュール、および通信装置
US7863752B2 (en) * 2009-02-25 2011-01-04 Capella Photonics, Inc. MEMS device with integrated via and spacer
JP2010220139A (ja) 2009-03-19 2010-09-30 Fujitsu Ltd フィルタ、フィルタリング方法、および通信装置
CN102356440B (zh) * 2009-03-30 2013-12-25 株式会社村田制作所 可变电容模块及匹配电路模块
US8362853B2 (en) * 2009-06-19 2013-01-29 Qualcomm Incorporated Tunable MEMS resonators
JP5240136B2 (ja) * 2009-09-09 2013-07-17 富士通株式会社 電子部品およびその製造方法
JP5428771B2 (ja) 2009-11-06 2014-02-26 富士通株式会社 可変分布定数線路、可変フィルタ、および通信モジュール
JP5418316B2 (ja) * 2010-03-11 2014-02-19 富士通株式会社 Ｍｅｍｓデバイス
JP5565091B2 (ja) * 2010-05-19 2014-08-06 富士通株式会社 可変バンドパスフィルタ及び通信装置
JP5703813B2 (ja) 2011-02-16 2015-04-22 セイコーエプソン株式会社 波長可変干渉フィルター、光モジュール、及び光分析装置
JP2012191521A (ja) 2011-03-11 2012-10-04 Fujitsu Ltd 可変フィルタ装置および通信装置
JP5884825B2 (ja) * 2011-08-10 2016-03-15 富士通株式会社 可変容量素子を有する電子機器とその製造方法
CN103748646B (zh) * 2011-08-19 2017-05-10 卡文迪什动力有限公司 用于rf应用的mems可变电容器的布线
US9076808B2 (en) 2011-09-02 2015-07-07 Cavendish Kinetics, Inc. RF MEMS isolation, series and shunt DVC, and small MEMS
CN105556635B (zh) 2013-08-01 2018-01-26 卡文迪什动力有限公司 利用mems电阻开关和mim电容器的dvc
CN104854792B (zh) * 2013-10-17 2018-11-06 株式会社村田制作所 高频电路
CN103928731A (zh) * 2014-04-30 2014-07-16 华为技术有限公司 Tem模介质滤波器和制造方法
US9811205B2 (en) * 2015-09-29 2017-11-07 Synaptics Incorporated Variable time anti-aliasing filter
CN108352263A (zh) * 2015-11-16 2018-07-31 卡文迪什动力有限公司 Mems rf应用的esd保护
US10623012B2 (en) 2018-05-10 2020-04-14 Advanced Energy Industries, Inc. Precision digital to analog conversion in the presence of variable and uncertain fractional bit contributions
US11227532B2 (en) 2018-07-27 2022-01-18 Chongqing Boe Optoelectronics Technology Co., Ltd. Panel, manufacturing method thereof, and terminal
US11335238B2 (en) 2018-07-27 2022-05-17 Chongqing Boe Optoelectronics Technology Co., Ltd. Signal transmission method and apparatus, and display device
WO2020020336A1 (zh) * 2018-07-27 2020-01-30 京东方科技集团股份有限公司 功能面板及其制造方法、终端
CN209248493U (zh) 2018-07-27 2019-08-13 京东方科技集团股份有限公司 功能面板及终端
CN117852472A (zh) * 2022-09-30 2024-04-09 腾讯科技（深圳）有限公司 芯片版图的空桥布设方法、装置、设备及存储介质

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US6717496B2 (en) * 2001-11-13 2004-04-06 The Board Of Trustees Of The University Of Illinois Electromagnetic energy controlled low actuation voltage microelectromechanical switch
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US7084724B2 (en) * 2002-12-31 2006-08-01 The Regents Of The University Of California MEMS fabrication on a laminated substrate
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JP2004363961A (ja) * 2003-06-05 2004-12-24 Sony Corp 高周波信号フィルタ装置および電子機器
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI738366B (zh) * 2019-06-10 2021-09-01 日商村田製作所股份有限公司 濾波器模組

Also Published As

Publication number Publication date
US20080266029A1 (en) 2008-10-30
CN101295809B (zh) 2012-11-14
CN101295809A (zh) 2008-10-29
KR100889218B1 (ko) 2009-03-17
KR20080096441A (ko) 2008-10-30
TW200901549A (en) 2009-01-01
EP2101412A1 (en) 2009-09-16
JP2008278147A (ja) 2008-11-13
JP4542117B2 (ja) 2010-09-08
EP1986319A3 (en) 2008-12-03
EP1986319A2 (en) 2008-10-29

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