TWI362075B - - Google Patents

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Publication number
TWI362075B
TWI362075B TW100125689A TW100125689A TWI362075B TW I362075 B TWI362075 B TW I362075B TW 100125689 A TW100125689 A TW 100125689A TW 100125689 A TW100125689 A TW 100125689A TW I362075 B TWI362075 B TW I362075B
Authority
TW
Taiwan
Prior art keywords
reaction chamber
pressure
temperature
heat treatment
reaction tube
Prior art date
Application number
TW100125689A
Other languages
English (en)
Chinese (zh)
Other versions
TW201207948A (en
Inventor
Takehiko Fujita
Akitake Tamura
Keisuke Suzuki
Kazuhide Hasebe
Mitsuhiro Okada
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW201207948A publication Critical patent/TW201207948A/zh
Application granted granted Critical
Publication of TWI362075B publication Critical patent/TWI362075B/zh

Links

Classifications

    • H10P95/90—
    • H10P72/0434—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
TW100125689A 2003-08-28 2004-08-16 Heat treatment method and heat treatment equipment TW201207948A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003304297A JP4272484B2 (ja) 2003-08-28 2003-08-28 熱処理方法

Publications (2)

Publication Number Publication Date
TW201207948A TW201207948A (en) 2012-02-16
TWI362075B true TWI362075B (enExample) 2012-04-11

Family

ID=34408021

Family Applications (2)

Application Number Title Priority Date Filing Date
TW100125689A TW201207948A (en) 2003-08-28 2004-08-16 Heat treatment method and heat treatment equipment
TW093124555A TW200524052A (en) 2003-08-28 2004-08-16 Heat-processing method and apparatus for semiconductor process

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW093124555A TW200524052A (en) 2003-08-28 2004-08-16 Heat-processing method and apparatus for semiconductor process

Country Status (4)

Country Link
US (1) US7211514B2 (enExample)
JP (1) JP4272484B2 (enExample)
KR (1) KR100870608B1 (enExample)
TW (2) TW201207948A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4450664B2 (ja) * 2003-06-02 2010-04-14 東京エレクトロン株式会社 基板処理装置及び基板搬送方法
JP2006229040A (ja) * 2005-02-18 2006-08-31 Matsushita Electric Ind Co Ltd 熱処理方法および熱処理装置
TWD122891S1 (zh) * 2006-06-16 2008-05-11 東京威力科創股份有限公司 半導體製造用散熱抑制環
TWD122892S1 (zh) * 2006-06-16 2008-05-11 東京威力科創股份有限公司 半導體製造用散熱抑制環
US8282698B2 (en) * 2010-03-24 2012-10-09 Lam Research Corporation Reduction of particle contamination produced by moving mechanisms in a process tool
JP6082283B2 (ja) * 2012-05-30 2017-02-15 東京エレクトロン株式会社 筐体及びこれを含む基板処理装置
JP6894256B2 (ja) 2017-02-23 2021-06-30 株式会社Ｓｃｒｅｅｎホールディングス 熱処理方法および熱処理装置
CN111370284B (zh) * 2020-03-13 2022-12-09 北京北方华创微电子装备有限公司 半导体热处理设备的清扫方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10289880A (ja) 1997-04-16 1998-10-27 Nec Kyushu Ltd 減圧気相成長装置
KR20000018773A (ko) * 1998-09-04 2000-04-06 윤종용 화학 기상 증착장치
JP3555536B2 (ja) 2000-01-31 2004-08-18 ウシオ電機株式会社 ランプユニット
JP3998906B2 (ja) * 2000-09-28 2007-10-31 株式会社日立国際電気 半導体装置の製造方法
JP3753985B2 (ja) 2001-09-26 2006-03-08 セイコーインスツル株式会社 減圧気相成長装置
JP2003100645A (ja) 2001-09-27 2003-04-04 Hitachi Kokusai Electric Inc 半導体装置の製造方法
JP2003183837A (ja) * 2001-12-12 2003-07-03 Hitachi Kokusai Electric Inc 半導体装置の製造方法及び基板処理装置

Also Published As

Publication number Publication date
JP2005079131A (ja) 2005-03-24
KR100870608B1 (ko) 2008-11-25
US7211514B2 (en) 2007-05-01
TWI362074B (enExample) 2012-04-11
JP4272484B2 (ja) 2009-06-03
KR20050021339A (ko) 2005-03-07
US20050095826A1 (en) 2005-05-05
TW200524052A (en) 2005-07-16
TW201207948A (en) 2012-02-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees