TWI358508B - - Google Patents
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- Publication number
- TWI358508B TWI358508B TW95119656A TW95119656A TWI358508B TW I358508 B TWI358508 B TW I358508B TW 95119656 A TW95119656 A TW 95119656A TW 95119656 A TW95119656 A TW 95119656A TW I358508 B TWI358508 B TW I358508B
- Authority
- TW
- Taiwan
- Prior art keywords
- flow path
- block
- gas supply
- path block
- supply unit
- Prior art date
Links
- 239000012530 fluid Substances 0.000 claims description 82
- 238000012546 transfer Methods 0.000 claims description 11
- 238000004891 communication Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000010926 purge Methods 0.000 description 20
- 238000010586 diagram Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 230000000149 penetrating effect Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000011144 upstream manufacturing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000002699 waste material Substances 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 235000006040 Prunus persica var persica Nutrition 0.000 description 1
- 240000006413 Prunus persica var. persica Species 0.000 description 1
- 239000003708 ampul Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 210000003754 fetus Anatomy 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000009941 weaving Methods 0.000 description 1
Landscapes
- Pipeline Systems (AREA)
- Valve Housings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95119656A TW200801384A (en) | 2006-06-02 | 2006-06-02 | Gas supply unit and gas supply system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95119656A TW200801384A (en) | 2006-06-02 | 2006-06-02 | Gas supply unit and gas supply system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200801384A TW200801384A (en) | 2008-01-01 |
| TWI358508B true TWI358508B (https=) | 2012-02-21 |
Family
ID=44765054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW95119656A TW200801384A (en) | 2006-06-02 | 2006-06-02 | Gas supply unit and gas supply system |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200801384A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI668386B (zh) * | 2018-09-03 | 2019-08-11 | 台灣積體電路製造股份有限公司 | 流體控制元件及其使用方法 |
-
2006
- 2006-06-02 TW TW95119656A patent/TW200801384A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200801384A (en) | 2008-01-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |