TW200801384A - Gas supply unit and gas supply system - Google Patents

Gas supply unit and gas supply system

Info

Publication number
TW200801384A
TW200801384A TW95119656A TW95119656A TW200801384A TW 200801384 A TW200801384 A TW 200801384A TW 95119656 A TW95119656 A TW 95119656A TW 95119656 A TW95119656 A TW 95119656A TW 200801384 A TW200801384 A TW 200801384A
Authority
TW
Taiwan
Prior art keywords
gas supply
flow path
supply unit
path block
gas
Prior art date
Application number
TW95119656A
Other languages
English (en)
Other versions
TWI358508B (zh
Inventor
Shuji Moriya
Hideki Nagaoka
Tsuneyuki Okabe
Hiroshi Itafuji
Hiroki Doi
Ito Minoru
Original Assignee
Ckd Corp
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ckd Corp, Tokyo Electron Ltd filed Critical Ckd Corp
Priority to TW95119656A priority Critical patent/TW200801384A/zh
Publication of TW200801384A publication Critical patent/TW200801384A/zh
Application granted granted Critical
Publication of TWI358508B publication Critical patent/TWI358508B/zh

Links

Landscapes

  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
TW95119656A 2006-06-02 2006-06-02 Gas supply unit and gas supply system TW200801384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95119656A TW200801384A (en) 2006-06-02 2006-06-02 Gas supply unit and gas supply system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95119656A TW200801384A (en) 2006-06-02 2006-06-02 Gas supply unit and gas supply system

Publications (2)

Publication Number Publication Date
TW200801384A true TW200801384A (en) 2008-01-01
TWI358508B TWI358508B (zh) 2012-02-21

Family

ID=44765054

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95119656A TW200801384A (en) 2006-06-02 2006-06-02 Gas supply unit and gas supply system

Country Status (1)

Country Link
TW (1) TW200801384A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI668386B (zh) * 2018-09-03 2019-08-11 台灣積體電路製造股份有限公司 流體控制元件及其使用方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI668386B (zh) * 2018-09-03 2019-08-11 台灣積體電路製造股份有限公司 流體控制元件及其使用方法

Also Published As

Publication number Publication date
TWI358508B (zh) 2012-02-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees