TW200801384A - Gas supply unit and gas supply system - Google Patents

Gas supply unit and gas supply system

Info

Publication number
TW200801384A
TW200801384A TW95119656A TW95119656A TW200801384A TW 200801384 A TW200801384 A TW 200801384A TW 95119656 A TW95119656 A TW 95119656A TW 95119656 A TW95119656 A TW 95119656A TW 200801384 A TW200801384 A TW 200801384A
Authority
TW
Taiwan
Prior art keywords
gas supply
flow path
supply unit
path block
gas
Prior art date
Application number
TW95119656A
Other languages
English (en)
Chinese (zh)
Other versions
TWI358508B (https=
Inventor
Shuji Moriya
Hideki Nagaoka
Tsuneyuki Okabe
Hiroshi Itafuji
Hiroki Doi
Ito Minoru
Original Assignee
Ckd Corp
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ckd Corp, Tokyo Electron Ltd filed Critical Ckd Corp
Priority to TW95119656A priority Critical patent/TW200801384A/zh
Publication of TW200801384A publication Critical patent/TW200801384A/zh
Application granted granted Critical
Publication of TWI358508B publication Critical patent/TWI358508B/zh

Links

Landscapes

  • Pipeline Systems (AREA)
  • Valve Housings (AREA)
TW95119656A 2006-06-02 2006-06-02 Gas supply unit and gas supply system TW200801384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95119656A TW200801384A (en) 2006-06-02 2006-06-02 Gas supply unit and gas supply system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95119656A TW200801384A (en) 2006-06-02 2006-06-02 Gas supply unit and gas supply system

Publications (2)

Publication Number Publication Date
TW200801384A true TW200801384A (en) 2008-01-01
TWI358508B TWI358508B (https=) 2012-02-21

Family

ID=44765054

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95119656A TW200801384A (en) 2006-06-02 2006-06-02 Gas supply unit and gas supply system

Country Status (1)

Country Link
TW (1) TW200801384A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI668386B (zh) * 2018-09-03 2019-08-11 台灣積體電路製造股份有限公司 流體控制元件及其使用方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI668386B (zh) * 2018-09-03 2019-08-11 台灣積體電路製造股份有限公司 流體控制元件及其使用方法

Also Published As

Publication number Publication date
TWI358508B (https=) 2012-02-21

Similar Documents

Publication Publication Date Title
ATE454568T1 (de) Kupplungssystem
TW200630556A (en) Liquid discharge device
TW200720593A (en) Device for controlling the delivery of a combustible gas to a burner apparatus
WO2008066586A3 (en) System and method for controlling elution from a radioisotope generator with electronic pinch valves
WO2007109664A3 (en) Modulating gas valves and systems
MXPA05004513A (es) Regulador de presion y valvula de cierre.
DE50312064D1 (de) Regeleinrichtung für Gasbrenner
ATE458121T1 (de) Autonomes absperrventilsystem
WO2008020966A3 (en) Systems and methods for fluid flow control in an immersion lithograthy system
DE602006010589D1 (de) Sequentielles steuerventil
NO20084884L (no) Trykkregulator for sanitaerfluid
WO2008021963A3 (en) Hydraulic system safety shut off valve
WO2011051944A8 (en) Flow control valve
NO20063786L (no) Apparat for a forandre bronnfluidtemperatur
DK1861176T3 (da) Servicevenlig ventil til brandslukningssystemer
WO2007141828A1 (ja) ガス供給ユニット及びガス供給システム
WO2008076864A3 (en) Pressure relieved thermal regulator air conditioning application
GB2435588A (en) Butterfly valve seal and bypass shutoff
TW200801384A (en) Gas supply unit and gas supply system
TW200704877A (en) Electronic control system for carburetor
WO2008104664A3 (fr) Dispositif d'alimentation d'air et procede de sterilisation d'un evaporateur pour habitacle de vehicule automobile
DK1840477T3 (da) Volumentstrømregulator, især til klima- og ventilationsanlæg
ATE468916T1 (de) Ventilvorrichtung für ein mikrofluidsystem
JP2006234110A (ja) ガス供給ユニット及びガス供給システム
GB2458397A (en) Linear motor to control hydraulic force

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees