TWI354796B - Probe unit and inspection apparatus - Google Patents

Probe unit and inspection apparatus Download PDF

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Publication number
TWI354796B
TWI354796B TW097106062A TW97106062A TWI354796B TW I354796 B TWI354796 B TW I354796B TW 097106062 A TW097106062 A TW 097106062A TW 97106062 A TW97106062 A TW 97106062A TW I354796 B TWI354796 B TW I354796B
Authority
TW
Taiwan
Prior art keywords
probe
inspection
fpc
probe assembly
cable
Prior art date
Application number
TW097106062A
Other languages
English (en)
Chinese (zh)
Other versions
TW200907357A (en
Inventor
Tomoaki Kuga
Syuji Naraoka
Original Assignee
Nihon Micronics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Micronics Kk filed Critical Nihon Micronics Kk
Publication of TW200907357A publication Critical patent/TW200907357A/zh
Application granted granted Critical
Publication of TWI354796B publication Critical patent/TWI354796B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Liquid Crystal (AREA)
  • Tests Of Electronic Circuits (AREA)
TW097106062A 2007-03-20 2008-02-21 Probe unit and inspection apparatus TWI354796B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007073346A JP5364240B2 (ja) 2007-03-20 2007-03-20 プローブユニット及び検査装置

Publications (2)

Publication Number Publication Date
TW200907357A TW200907357A (en) 2009-02-16
TWI354796B true TWI354796B (en) 2011-12-21

Family

ID=39905820

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097106062A TWI354796B (en) 2007-03-20 2008-02-21 Probe unit and inspection apparatus

Country Status (4)

Country Link
JP (1) JP5364240B2 (ja)
KR (1) KR100931598B1 (ja)
CN (1) CN101271147B (ja)
TW (1) TWI354796B (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102081110B (zh) * 2009-11-26 2014-03-26 日本麦可罗尼克斯股份有限公司 探针装置
JP5597564B2 (ja) * 2011-02-04 2014-10-01 株式会社日本マイクロニクス プローブ装置及びその製造方法
KR20150142142A (ko) * 2014-06-10 2015-12-22 솔브레인이엔지 주식회사 Display 장비 검사 Noise 제거방안
CN114966418A (zh) * 2022-05-30 2022-08-30 大洋电机燃料电池科技(中山)有限公司 一种模块化电堆电压巡检采集装置及燃料电池

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10288627A (ja) * 1997-04-16 1998-10-27 Reitetsuku Kk 検査用プローブ
JPH1114556A (ja) 1997-06-25 1999-01-22 Fujitsu Ltd Ｔｆｔ液晶パネルの検査方法及びその装置
JP3958875B2 (ja) * 1998-07-24 2007-08-15 株式会社日本マイクロニクス プローバ及びプローブ針接触方法
JP4046929B2 (ja) * 2000-06-05 2008-02-13 株式会社日本マイクロニクス 電気的接続用シート
JP4245113B2 (ja) * 2000-12-06 2009-03-25 Ｎｅｃ液晶テクノロジー株式会社 プローブブロック
JP2005315798A (ja) * 2004-04-30 2005-11-10 Micronics Japan Co Ltd 検査装置
JP2006058217A (ja) * 2004-08-23 2006-03-02 Seiko Epson Corp 検査用プローブおよび電気光学装置の製造方法

Also Published As

Publication number Publication date
KR20080085689A (ko) 2008-09-24
JP5364240B2 (ja) 2013-12-11
CN101271147A (zh) 2008-09-24
KR100931598B1 (ko) 2009-12-14
CN101271147B (zh) 2010-12-22
JP2008232851A (ja) 2008-10-02
TW200907357A (en) 2009-02-16

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MM4A Annulment or lapse of patent due to non-payment of fees