200907357 九、發明說明 【發明所屬之技術領域】 本發明是關於液晶面板等檢查對象板檢查用的探針單 元及檢查裝置。 【先前技術】 平板顯示器（F P D )例如液晶面板製造步驟中，有一 項作業是對該液晶面板是否具備規格說明書所述之功能進 行檢查。該檢查’一般是使用具備有複數探針之探針單元 的檢查裝置。該狀況是將檢查裝置的各探針以壓在液晶面 板電極的狀態’對指定的電極供應指定的電訊號藉此進行 功能檢查。 上述檢查裝置的一例如第2圖所示。圖示的檢查裝置 1，主要是由面板設置部2和測定部3所構成。 面板設置部2是一種可將從外部插入的液晶面板5搬 運至測定部3，可將檢查結束後的液晶面板5搬運至外部 的載置設備。面板設置部2是在開口部6深處具有面板設 置平台7，以該面板設置平台7支撐著液晶面板5 ’將液 晶面板5搬運至測定部3。此外，面板設置平台7是承接 著測定部3所檢查結束後的液晶面板5 ’將液晶面板5搬 運至外部。 測定部3是一種可支撐來自於面板設置部2所父接的 液晶面板5，對液晶面板5進行測試用的裝置。測定部2 是構成具備卡盤夾頭8及探測器9等。 -4 - 200907357 卡盤夾頭8是一種液晶面板5支撐用構件。該卡盤夾 頭8是支撐在ΧΥΖ Θ平台（未圖示），朝XYZ軸方向的 移動及旋轉受到控制，藉此調整液晶面板5的位置。探測 器9主要是由底座板]0及探針單元】1所構成。探針單元 1 1是設置對於水平面成傾斜。該探針單元Π是以緊貼著 底座板10開口 Ι0Α的狀態支撐在底座板10。 探針單元1 1，如第3圖所示，構成爲具備有探針底座 1 2、支撐部1 3、探針組裝體1 4及連接電纜部1 5。 上述探針底座12是可對支撐著探針組裝體14的複數 支撐部13進行一體支撐的一種板材。在該探針底座12， 複數的探針組裝體〗4是透過支撐部1 3以面對著工作平台 16上之液晶面板5的狀態被支搂著。 上述支撐部1 3是一種以其基端側支撐在上述探針底 座1 2的狀態’用其前端側對上述探針組裝體1 4進行支撐 的構件。該支撐部1 3，如第4圖〜第7圖所示，構成爲具 備：直接安裝在上述探針底座12支撐著全體的懸掛塊18 :支撐在該懸掛塊1 8前端部的滑行塊1 9 ;及一體安裝在 該滑行塊1 9內側面（第4圖中的下側面）的探針板2 0。 探針組裝體1 4是一種對液晶面板5的電路電極進行 接觸藉此傳達檢查訊號的構件。探針組裝體1 4是安裝在 探針板20的下側面。該探針組裝體1 4，如第6圖〜第8 圖所示，構成爲具備有探針塊22及探針23。探針塊22是 直接安裝在探針板2 0的下側面。該探針塊2 2的下側，安 裝著探針2 3。探針2 3是一種直接接觸液晶面板5電路電 -5- 200907357 極用的構件。探針23是在其前端部和基端部分別具備針 部23A ' UB ’前端部的針部23A是接觸液晶面板5的電 路電極，基端部的針部2 3 B是接觸連接電纜部】5的端子 3卜 連接電續部1 5是一種可使上述探針2 3和外部裝置（ 未圖示）形成接電的構件。該連接電纜部1 5，具體而言是 直接連接於上述探針2 3的針部2 3 B和探針板1 2側的電路 ，透過該探針板1 2側的電路和外部裝置形成接電。即， 該連接電纜部1 5是透過探針板1 2的印刷電路板2 6使上 述探針組裝體1 4的探針2 3和外部裝置形成接電。該連接 電纜部15，如第6圖〜第8圖所示，由FPC板27和驅動 用積體電路28及FPC電纜29所構成。 上述FPC板27是一種可將上述連接電纜部15固定在 探針組裝體1 4側的固定用構件。FPC板27是安裝在探針 板20的下側。 驅動用積體電路2 8是執行伴隨檢查之處理的電路。 驅動用積體電路28是安裝在FPC板27的下側。驅動用積 體電路28的一方是連接於FPC電纜29。驅動用積體電路 2 8的另一方是透過各配線3 0連接於各端子3 1。接著’該 端子3 1是和探針2 3基端側的針部2 3 B形成接觸著。探針 2 3的針部2 3 B是以整合在引導薄片3 2的導孔3 3形成接 觸於FPC電纜29的端子31。 FPC電纜29是一種可傳達伴隨著檢查之電訊號的電 纜。FPC電纜29是以其一方固定在FPC板27形成和驅動 12 12 用積 下側 該印 【發 畫顯 60Hz 入至 影響 該電 該傳 ’導 提供 查裝 爲， 藉此 電路 200907357 體電路28接電的狀態，將另一方連接在探針底座 所設置的印刷電路板26。藉此，使FPC電纜29隔 刷電路板2 6形成和外部裝置接電。 明內容】 〔發明欲解決之課題〕 然而，上述檢查裝置，在液晶面板5點燈檢查時的 示呆滞對策方面，採TFT驅動的高速化。例如是 闻速化成120〜180Hz。 不過，高速化成1 2 0〜1 8 0 Η z時，從印刷電路板2 6 驅動用積體電路板2 8的訊號，容易受到雜波干擾 。當產生雜波干擾之電磁波時，FPC電覽29會拾 磁波導致容易產生傳送不良（錯誤：error )的狀況 送不良（誤差：error )，對液晶面板5點燈的影響 致檢查精度降低的問題。 本發明是爲了解決上述問題點而爲的發明，目的在 一種可將雜波的影響抑制在最小限度的探針單元及 〔用以解決課題之手段〕 爲了解決上述課題’本發明相關的探針單元，其特 具備：對檢查對象板表面所設置的電路電極進行接 傳達檢查訊號的探針組裝體；及透過探針底座的印 板使上述探針組裝體和外部裝置形成接電的連接電 著 動 將 輸 等 取 〇 大 於 檢 徵 觸 刷 纜 200907357 部，上述連接 述探針組裝體 積體電路；及 述驅動用積體 上述FPC電纜 裝體。 根據上述 的上述探針組 送至上述驅動 電路的訊號透 難以受到雜波 接著，上 設定在1 ο Ω以 根據上述 的電阻是設定 測的檢查訊號 時，將來自該 纜送至上述探 此外，所 有：可將外部 的板設置部； 加以支撐進行 電纜部，具備：可使該連接電纜部 側的FPC板；執行伴隨檢查之處理 可傳達供應至檢查之電訊號的F P C 電路是安裝在上述探針底座的印刷 是可連接上述驅動用積體電路和上 構成，可將接觸在上述檢查對象板 裝體其所檢測的檢查訊號透過上述 用積體電路，可將來自於該上述驅 過上述FPC電纜送至上述探針組裝 等干擾影響。 述探針組裝體至FPC電纜爲止的電 下爲佳。 構成，基於上述探針組裝體至FPC 在1 〇 Ω以下，因此在將上述探針組 透過上述FPC電纜送至上述驅動用 上述驅動用積體電路的訊號透過上 針組裝體時，都難以受到雜波等干 使用的檢查裝置，其上述探針單元 插入的檢查對象板於檢查結束後搬 及可對來自於該板設置部交接的檢 測試的測定部。 〔發明效果〕 固定在上 的驅動用 電纜，上 電路板， 述探針組 電路電極 FPC電纜 動用積體 體，因此 阻最好是 電纜爲止 裝體所檢 積體電路 述FPC電 擾影響。 最好具備 出至外部 查對象板 -8- 200907357 如以上所述，由於本發明的探針單元及檢查裝置難以 受到雜波等干擾影響’因此能夠不拘τ F T驅動的高速化， 使檢查精度維持在高水準。 【實施方式】 〔發明之最佳實施形態〕 以下’一邊參照附圖一邊對本發明實施形態相關的探 針單元及檢查裝置進行說明。 本實施形態的探針單元及檢查裝置，就整體性而言是 和上述習知的探針單元及檢查裝置大致相同。本實施形態 相關的探針單元及檢查裝置的特徵，是在於對驅動用積體 電路的安裝位置進行改良。由於其他的構成是和上述習知 的檢查裝置相同，因此本說明書中對於同一構件是以標示 同一圖號進行說明。 本實施形態相關的探針單元4 1，如第1圖、第9圖所 示’其構成爲具備有探針底座1 2、支撐部1 3、探針組裝 體14及連接電纜部42。 上述探針底座1 2是和上述習知探針單元1 1的狀況相 同’是一種可對支撐著探針組裝體1 4的複數支撐部1 3進 行一體支撐的板材。 上述支撐部1 3是和上述習知探針單元1 1的狀況相同 ’是一種以其基端側支撐在上述探針底座1 2的狀態，用 其前端側對上述探針組裝體1 4進行支撐的構件。 探針組裝體1 4是和上述習知探針單元1 1的狀況相同 -9- 200907357 ’是一種對液晶面板5的電路電極進行接觸藉此傳達檢查 訊號的構件。探針組裝體1 4是安裝在探針板2 0的下側面 。該探針組裝體1 4是構成爲具備有探針塊22及探針23。 連接電續部4 2是一種透過探針底座1 2的印刷電路板 2 6將上述f木針組裝體1 4和外部裝置形成接電的構件。該 連接電纜部42，具體而言是直接連接於上述探針23的針 部2 3 B ’透過該探針板1 2側的電路形成和外部裝置接電 〇 上述FPC板27是和上述習知探針單元1 1的狀況相同 ’是一種可將上述連接電纜部42固定在上述探針組裝體 1 4側的固定用構件。FPC板27是安裝在探針板20的下側 〇 驅動用積體電路4 3是執行伴隨檢查之處理的電路。 驅動用積體電路4 3是和上述習知探針單元1 1的狀況不同 ，是安裝在探針底座1 2的印刷電路板26。驅動用積體電 路4 3的一方是直接連接於印刷電路板2 6。驅動用積體電 路43的另一方是透過各配線45連接於插接件46。接著， 於該插接件46連接著FPC電纜47。該FPC電纜47是直 接安裝在FPC板27，於FPC電纜47前端設有端子31。 從上述探針組裝體1 4的探針2 3的前端側的針部2 3 a 至FPC電纜47的插接件46爲止的電阻是設定在1〇 Ω以 下。於本申請人所申請製造的探針單元及檢查裝置中，將 上述探針組裝體1 4的探針2 3前端側的針部2 3至F P C電 纜4 7的插接件4 6爲止的電阻設定在1 〇 Ω以下時可獲得最 -10 - 200907357 佳結果。因此，將驅動用積體電路43的探針23側的 探針組裝體14的探針23前端側的針部23 A至FPC 47的插接件46爲止的電阻設定在10Ω以下。 以上所述構成的探針單元4 1及使用該探針單元z 檢查裝置，具有下述作用。 對形成在上述檢查對象板即液晶面板5表面的電 各電極進行上述探針組裝體1 4的接觸，將來自於驅 積體電路43側的檢查訊號透過FPC電纜47流至液晶 5表面的電路，藉此進行點燈檢查。 此外，上述探針組裝體I 4所檢測出的檢查訊號 前端側的針部23A透過基端側的針部23B送訊至上述 電纜47，透過該FPC電纜47送訊至上述驅動用積體 4 3。接著，來自於該上述驅動用積體電路4 3的訊號 過探針底座1 2的印刷電路板2 6送訊至外部裝置。 如此一來，上述F P C電纜4 7所送訊的訊號就難 到雜波等干擾影響。 特別是，上述探針組裝體1 4的探針23前端側的 23A至FPC電纜47的插接件46爲止的電阻設定在 以下，因此在將上述探針組裝體1 4所檢測出的檢查 透過上述FPC電纜47送至上述驅動用積體電路43時 將來自於該上述驅動用積體電路43的訊號透過上述 電纜4 7送至上述探針組裝體1 4時，都難以受到雜波 擾影響。其結果，能夠不拘T F T驅動的高速化，使檢 度維持在高水準。 上述 電纜 "的 路的 動用 面板 是從 FPC 電路 是透 以受 針部 1 0 Ω 訊號 ，在 FPC 等干 查精 -11 - 200907357 [變形例] 具備有上述實施形態相關探針單元4 1的檢查裝置， 並不限於上述習知的檢查裝置，只要是能配備有探針單元 41的所有檢查裝置可應用本發明。 【圖式簡單說明】 第1圖爲表示本發明實施形態相關的探針單元側面圖 〇 第2圖爲表示習知檢查裝置的正面圖。 第3圖爲表示習知檢查裝置的探針單元及工作平台之 透視圖。 第4圖爲表示習知檢查裝置的探針單元透視圖。 第5圖爲表示習知檢查裝置的探針單元平面圖。 第6圖爲表示習知裝檢查置的探針單元側面圖。 第7圖爲表示習知檢查裝置的探針單元側面面圖（第 5圖中的A-A線剖面圖）。 第8圖爲表示習知檢查裝置的探針單元底面圖。 第9圖爲表示本發明實施形態相關檢查裝置的探針單 元底面圖。 【主要元件符號說明】 4 1 :探針單元 4 2 :連接電纜部 -12 - 200907357 43 :驅動用積體電路 4 5 :配線 4 6 :插接件 47 ： FPC電纜200907357 IX. Description of the Invention The present invention relates to a probe unit and an inspection apparatus for inspecting a test target panel such as a liquid crystal panel. [Prior Art] In the manufacturing process of a flat panel display (F P D ) such as a liquid crystal panel, there is an operation of checking whether or not the liquid crystal panel has the function described in the specification sheet. This inspection 'generally uses an inspection device having a probe unit having a plurality of probes. In this case, a function is performed by supplying a predetermined electric signal to a designated electrode in a state where each probe of the inspection device is pressed against the liquid crystal panel electrode. One of the above inspection devices is shown in Fig. 2, for example. The inspection apparatus 1 shown in the figure is mainly composed of a panel installation unit 2 and a measurement unit 3. The panel setting unit 2 is a mounting device that can transport the liquid crystal panel 5 inserted from the outside to the measuring unit 3, and can transport the liquid crystal panel 5 after the inspection to the outside. The panel installation portion 2 has a panel installation stage 7 deep in the opening portion 6, and the liquid crystal panel 5' is supported by the panel installation platform 7 to convey the liquid crystal panel 5 to the measurement portion 3. Further, the panel installation stage 7 carries the liquid crystal panel 5' to the outside by the liquid crystal panel 5' after the inspection by the measurement unit 3. The measuring unit 3 is a device that can support the liquid crystal panel 5 from the panel mounting unit 2 and test the liquid crystal panel 5. The measuring unit 2 is configured to include a chuck chuck 8 and a probe 9 and the like. -4 - 200907357 The chuck chuck 8 is a member for supporting the liquid crystal panel 5. The chuck chuck 8 is supported by a weir platform (not shown), and movement and rotation in the XYZ-axis direction are controlled, thereby adjusting the position of the liquid crystal panel 5. The detector 9 is mainly composed of a base plate 0 and a probe unit 1 . The probe unit 1 1 is set to be inclined with respect to the horizontal plane. The probe unit 支撑 is supported by the base plate 10 in a state of being close to the opening of the base plate 10. As shown in Fig. 3, the probe unit 1 1 is configured to include a probe base 1 2, a support portion 13 , a probe assembly 14 , and a connection cable portion 15 . The probe base 12 is a plate material that can integrally support the plurality of support portions 13 that support the probe assembly 14. In the probe base 12, a plurality of probe assemblies 4 are supported by the support portion 13 in a state of facing the liquid crystal panel 5 on the work platform 16. The support portion 13 is a member that supports the probe assembly 14 with its distal end side in a state where the base end side is supported by the probe base 12. As shown in FIGS. 4 to 7 , the support portion 13 is configured to include a suspension block 18 that is directly attached to the probe base 12 and supported by the probe base 12 : a slide block 1 supported at a front end portion of the suspension block 18 9; and a probe card 20 integrally mounted on the inner side (the lower side in FIG. 4) of the sliding block 19. The probe assembly 14 is a member that contacts the circuit electrodes of the liquid crystal panel 5 to transmit an inspection signal. The probe assembly 14 is mounted on the lower side of the probe card 20. The probe assembly 14 is configured to include a probe block 22 and a probe 23 as shown in FIGS. 6 to 8 . The probe block 22 is directly mounted on the lower side of the probe card 20. On the lower side of the probe block 22, a probe 23 is mounted. The probe 23 is a member that is in direct contact with the liquid crystal panel 5 circuit -5-200907357. The probe 23 has a needle portion 23A having a needle portion 23A 'UB' at its distal end portion and a proximal end portion, and a circuit portion that contacts the liquid crystal panel 5, and a needle portion 2 3B at the proximal end portion is a contact connection cable portion. The terminal 3 of the 5 is connected to the electric continuation unit 15 as a member for electrically connecting the probe 2 and an external device (not shown). The connection cable portion 15 is specifically a circuit directly connected to the needle portion 2 3 B of the probe 23 and the probe card 1 2 side, and is formed by a circuit that passes through the probe card 1 2 side and an external device. Electricity. That is, the connecting cable portion 15 is a printed circuit board 26 that is transmitted through the probe card 12 to electrically connect the probe 2 3 of the probe assembly 14 to an external device. The connection cable portion 15 is composed of an FPC board 27, a drive integrated circuit 28, and an FPC cable 29 as shown in Figs. 6 to 8 . The FPC board 27 is a fixing member that can fix the connecting cable portion 15 to the probe assembly 14 side. The FPC board 27 is mounted on the lower side of the probe card 20. The driving integrated circuit 28 is a circuit that performs processing accompanying the inspection. The drive integrated circuit 28 is mounted on the lower side of the FPC board 27. One of the drive integrated circuits 28 is connected to the FPC cable 29. The other of the driving integrated circuits 28 is connected to each terminal 31 through each wiring 30. Then, the terminal 31 is brought into contact with the needle portion 2 3 B on the proximal end side of the probe 23 . The needle portion 2 3 B of the probe 2 3 is formed with a terminal 31 that is in contact with the FPC cable 29 by a guide hole 33 integrated in the guide sheet 32. The FPC cable 29 is a cable that transmits electrical signals accompanying the inspection. The FPC cable 29 is formed by fixing one side of the FPC board 27 and driving the 12 12 side of the product. The printing is provided with a 60 Hz input to affect the electrical transmission. The circuit is connected to the body circuit 28 by the circuit 200907357. In the electrical state, the other side is connected to the printed circuit board 26 provided on the probe base. Thereby, the FPC cable 29 is shielded from the circuit board 26 to be electrically connected to the external device. [Explanation] The above-mentioned inspection apparatus is designed to increase the speed of the TFT drive in terms of the countermeasure against the display of the liquid crystal panel 5 during the lighting inspection. For example, it is speeding up to 120~180Hz. However, when the speed is increased to 1 2 0 to 1 0 0 Η z, the signal from the integrated circuit board 28 for driving the printed circuit board 26 is susceptible to noise interference. When electromagnetic waves are generated by the clutter, the FPC motor 29 picks up the magnetic wave, which causes a poor transmission (error: error), and the influence of the lighting on the liquid crystal panel 5 causes the inspection accuracy to decrease. . The present invention has been made in order to solve the above problems, and an object of the present invention is to provide a probe unit capable of minimizing the influence of noise and a means for solving the problem. The unit includes: a probe assembly that transmits a check signal to a circuit electrode provided on a surface of the inspection target board; and a printed board that passes through the probe base to form a connection connection between the probe assembly and the external device The driving is to take more than 200907357 parts of the touch cable, and the above-mentioned probe is assembled with the volume body circuit; and the driving integrated body is the FPC cable package. According to the above-mentioned probe set, the signal transmitted to the driving circuit is difficult to be subjected to the clutter, and when it is set to 1 ο Ω to be set according to the above-mentioned resistance, the cable is sent to the above-mentioned probe. All: an external board setting portion; a cable portion supported by: an FPC board that can connect the cable portion side; and an FPC circuit that performs the accompanying inspection process to transmit the electric signal supplied to the inspection is installed in the above-mentioned probe The printing of the needle base is connectable to the driving integrated circuit and the upper structure, and the inspection signal detected by the contact target board assembly can be transmitted through the integrated circuit, and the FPC can be driven from the FPC. The cable is sent to the above probe assembly and other interference effects. It is preferable that the probe assembly is electrically connected to the FPC cable. In the configuration of the probe assembly to the FPC of 1 〇Ω or less, it is difficult to receive the signal transmitted through the FPC cable to the driving integrated circuit through the upper needle assembly. In the inspection device for dry use such as a clutter, the inspection target plate to which the probe unit is inserted is moved after the inspection is completed, and the measurement portion that can be used for the test from the plate installation portion is carried. [Effect of the Invention] The drive cable fixed to the upper circuit board, the upper circuit board, and the probe group circuit electrode FPC cable are used as the integrated body. Therefore, it is preferable that the resistance of the cable is the influence of the FPC disturbance. It is preferable to provide an external inspection target plate-8-200907357 As described above, since the probe unit and the inspection device of the present invention are hardly affected by interference such as clutter, it is possible to maintain the inspection accuracy regardless of the speed of the FT drive. At a high level. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a probe unit and an inspection apparatus according to embodiments of the present invention will be described with reference to the drawings. The probe unit and the inspection device of the present embodiment are substantially the same as the above-described conventional probe unit and inspection device. The probe unit and the inspection apparatus according to the present embodiment are characterized in that the mounting position of the drive integrated circuit is improved. Since the other components are the same as those of the above-described conventional inspection device, the same components will be described with the same reference numerals in the present specification. The probe unit 4 1 according to the present embodiment has a probe base 1 2, a support portion 13 , a probe assembly 14 , and a connection cable portion 42 as shown in Figs. 1 and 9 . The probe base 12 is the same as the above-described conventional probe unit 11 and is a plate material which can integrally support the plurality of support portions 13 supporting the probe assembly 14. The support portion 13 is the same as the above-described conventional probe unit 11 and is in a state in which the base end side is supported by the probe base 12, and the probe assembly 14 is attached to the distal end side thereof. Supported components. The probe assembly 14 is the same as the above-described conventional probe unit 1 -9-200907357' is a member that contacts the circuit electrodes of the liquid crystal panel 5 to transmit an inspection signal. The probe assembly 14 is mounted on the lower side of the probe card 20. The probe assembly 14 is configured to include a probe block 22 and a probe 23. The connection electric continuation unit 4 2 is a member that electrically connects the f-pin assembly 14 and the external device through the printed circuit board 26 of the probe base 12 . Specifically, the connection cable portion 42, specifically, the needle portion 2 3 B ' directly connected to the probe 23, is formed by a circuit formed on the side of the probe card 12, and the external device is electrically connected. The FPC board 27 is the same as the above-described conventional The same condition of the probe unit 1 1 is a fixing member that can fix the connecting cable portion 42 to the probe assembly 14 side. The FPC board 27 is mounted on the lower side of the probe card 20. The driving integrated circuit 43 is a circuit that performs processing accompanying the inspection. The drive integrated circuit 43 is different from the above-described conventional probe unit 11 and is a printed circuit board 26 attached to the probe base 12. One of the drive integrated circuits 43 is directly connected to the printed circuit board 26. The other of the drive integrated circuits 43 is connected to the connector 46 through the respective wires 45. Next, the FPC cable 47 is connected to the connector 46. The FPC cable 47 is directly attached to the FPC board 27, and a terminal 31 is provided at the front end of the FPC cable 47. The electric resistance from the needle portion 2 3 a on the distal end side of the probe 2 3 of the probe assembly 14 to the connector 46 of the FPC cable 47 is set to 1 〇 Ω or less. In the probe unit and the inspection apparatus manufactured by the applicant, the resistance of the probe portion 23 of the probe assembly 14 from the distal end side of the probe 2 3 to the connector 46 of the FPC cable 47 is applied. When the setting is below 1 〇Ω, the best result is -10 - 200907357. Therefore, the resistance of the probe assembly 23 on the distal end side of the probe assembly 23 on the probe 23 side of the drive integrated circuit 43 to the connector 46 of the FPC 47 is set to 10 Ω or less. The probe unit 41 configured as described above and the probe unit z using the probe unit have the following effects. The electric probes formed on the surface of the liquid crystal panel 5, which is the inspection target plate, are brought into contact with the probe assembly 14 to pass the inspection signal from the side of the assembly circuit 43 to the surface of the liquid crystal 5 through the FPC cable 47. To perform the lighting check. Further, the needle portion 23A on the distal end side of the inspection signal detected by the probe assembly I4 is transmitted to the cable 47 through the needle portion 23B on the proximal end side, and is transmitted to the driving assembly 4 through the FPC cable 47. 3. Then, the signal from the above-described driving integrated circuit 43 is transmitted to the external device via the printed circuit board 26 of the probe base 12. As a result, the signal transmitted by the F P C cable 47 is difficult to be affected by interference such as clutter. In particular, since the resistance of 23A of the distal end side of the probe 23 of the probe assembly 14 to the connector 46 of the FPC cable 47 is set to be lower, the inspection detected by the probe assembly 14 is transmitted. When the FPC cable 47 is sent to the drive integrated circuit 43, the signal from the drive integrated circuit 43 is sent to the probe assembly 14 through the cable 47, and is hardly affected by the noise. . As a result, the speed can be maintained at a high level regardless of the speed of the T F T drive. The driving panel of the above-mentioned cable " is a 10 Ω signal from the FPC circuit, and is inspected by the FPC, etc. - 200907357 [Modification] The probe unit 4 1 of the above embodiment is provided. The inspection apparatus is not limited to the above-described conventional inspection apparatus, and any invention can be applied as long as it is equipped with all of the inspection units 41. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view showing a probe unit according to an embodiment of the present invention. Fig. 2 is a front view showing a conventional inspection device. Fig. 3 is a perspective view showing a probe unit and a work platform of a conventional inspection device. Fig. 4 is a perspective view showing a probe unit of a conventional inspection device. Fig. 5 is a plan view showing a probe unit of a conventional inspection device. Fig. 6 is a side view showing the probe unit of the conventional mounting inspection. Fig. 7 is a side elevational view showing the probe unit of the conventional inspection device (cross-sectional view taken along line A-A in Fig. 5). Fig. 8 is a bottom plan view showing a probe unit of a conventional inspection device. Fig. 9 is a bottom plan view showing the probe unit of the inspection apparatus according to the embodiment of the present invention. [Explanation of main component symbols] 4 1 : Probe unit 4 2 : Connection cable section -12 - 200907357 43 : Integrated circuit for drive 4 5 : Wiring 4 6 : Connector 47 : FPC cable