TWI324790B - - Google Patents

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Publication number
TWI324790B
TWI324790B TW095134330A TW95134330A TWI324790B TW I324790 B TWI324790 B TW I324790B TW 095134330 A TW095134330 A TW 095134330A TW 95134330 A TW95134330 A TW 95134330A TW I324790 B TWI324790 B TW I324790B
Authority
TW
Taiwan
Prior art keywords
heat treatment
pattern
substrate
etching
treatment
Prior art date
Application number
TW095134330A
Other languages
English (en)
Chinese (zh)
Other versions
TW200715361A (en
Inventor
Kunie Ogata
Michio Tanaka
Hiroshi Tomita
Ryoichi Uemura
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200715361A publication Critical patent/TW200715361A/zh
Application granted granted Critical
Publication of TWI324790B publication Critical patent/TWI324790B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • H10P72/0431—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW095134330A 2005-09-15 2006-09-15 Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program TW200715361A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005268191 2005-09-15
JP2006179727A JP4666380B2 (ja) 2005-09-15 2006-06-29 基板処理装置、基板処理方法、基板処理プログラム、及びそのプログラムを記録したコンピュータ読み取り可能な記録媒体

Publications (2)

Publication Number Publication Date
TW200715361A TW200715361A (en) 2007-04-16
TWI324790B true TWI324790B (enExample) 2010-05-11

Family

ID=37864962

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095134330A TW200715361A (en) 2005-09-15 2006-09-15 Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program

Country Status (5)

Country Link
US (1) US7862966B2 (enExample)
JP (1) JP4666380B2 (enExample)
KR (1) KR101072330B1 (enExample)
TW (1) TW200715361A (enExample)
WO (1) WO2007032370A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI490936B (zh) * 2010-05-31 2015-07-01 東京威力科創股份有限公司 A substrate processing apparatus, a substrate processing method, and a recording medium on which a computer program for carrying out the substrate processing method is recorded

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4969304B2 (ja) 2007-04-20 2012-07-04 東京エレクトロン株式会社 熱処理板の温度設定方法、熱処理板の温度設定装置及びコンピュータ読み取り可能な記憶媒体
JP4891139B2 (ja) 2007-04-20 2012-03-07 東京エレクトロン株式会社 熱処理板の温度設定方法、熱処理板の温度設定装置及びコンピュータ読み取り可能な記憶媒体
JP5160920B2 (ja) 2008-02-22 2013-03-13 ルネサスエレクトロニクス株式会社 半導体装置の製造方法、半導体装置の製造装置、及び製造プログラム
JP2010267879A (ja) * 2009-05-15 2010-11-25 Tokyo Electron Ltd レジストパターンのスリミング処理方法
JP2014003164A (ja) * 2012-06-19 2014-01-09 Tokyo Electron Ltd 半導体装置の製造方法及び半導体装置並びに半導体装置の製造システム
JP7162541B2 (ja) * 2019-01-22 2022-10-28 東京エレクトロン株式会社 基板処理装置、及び基板処理方法、及び記憶媒体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07211630A (ja) * 1994-01-26 1995-08-11 Sony Corp パターン形成方法及びその装置
KR100700764B1 (ko) * 1999-09-03 2007-03-27 동경 엘렉트론 주식회사 기판처리장치 및 기판처리방법
JP2001143850A (ja) * 1999-09-03 2001-05-25 Tokyo Electron Ltd 基板の加熱処理装置，基板の加熱処理方法，基板処理装置及び基板処理方法
KR100811964B1 (ko) * 2000-09-28 2008-03-10 동경 엘렉트론 주식회사 레지스트 패턴 형성장치 및 그 방법
EP1273973A1 (en) * 2001-07-03 2003-01-08 Infineon Technologies SC300 GmbH & Co. KG Method for adjusting a temperature in a resist process
JP4127664B2 (ja) * 2003-06-30 2008-07-30 株式会社東芝 現像処理装置の調整方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI490936B (zh) * 2010-05-31 2015-07-01 東京威力科創股份有限公司 A substrate processing apparatus, a substrate processing method, and a recording medium on which a computer program for carrying out the substrate processing method is recorded

Also Published As

Publication number Publication date
US20090047586A1 (en) 2009-02-19
KR101072330B1 (ko) 2011-10-11
TW200715361A (en) 2007-04-16
WO2007032370A1 (ja) 2007-03-22
KR20080049018A (ko) 2008-06-03
JP4666380B2 (ja) 2011-04-06
JP2007110080A (ja) 2007-04-26
US7862966B2 (en) 2011-01-04

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MM4A Annulment or lapse of patent due to non-payment of fees