TWI322039B - - Google Patents

Download PDF

Info

Publication number
TWI322039B
TWI322039B TW096118659A TW96118659A TWI322039B TW I322039 B TWI322039 B TW I322039B TW 096118659 A TW096118659 A TW 096118659A TW 96118659 A TW96118659 A TW 96118659A TW I322039 B TWI322039 B TW I322039B
Authority
TW
Taiwan
Prior art keywords
coating
cleaning
tool
liquid
tip end
Prior art date
Application number
TW096118659A
Other languages
English (en)
Chinese (zh)
Other versions
TW200824798A (en
Inventor
Toshiya Doi
Masanori Kouda
Hisaya Nagai
Takashi Kuroki
Original Assignee
Chugai Ro Kogyo Kaisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Kogyo Kaisha Ltd filed Critical Chugai Ro Kogyo Kaisha Ltd
Publication of TW200824798A publication Critical patent/TW200824798A/zh
Application granted granted Critical
Publication of TWI322039B publication Critical patent/TWI322039B/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0283Flat jet coaters, i.e. apparatus in which the liquid or other fluent material is projected from the outlet as a cohesive flat jet in direction of the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04Cleaning by suction, with or without auxiliary action

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
TW096118659A 2006-12-15 2007-05-25 Equipment for cleaning coating die TW200824798A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006337686A JP4808147B2 (ja) 2006-12-15 2006-12-15 塗布用ダイの清掃装置

Publications (2)

Publication Number Publication Date
TW200824798A TW200824798A (en) 2008-06-16
TWI322039B true TWI322039B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2010-03-21

Family

ID=39565303

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096118659A TW200824798A (en) 2006-12-15 2007-05-25 Equipment for cleaning coating die

Country Status (4)

Country Link
JP (1) JP4808147B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR100839781B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN (1) CN101204687B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW200824798A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4850680B2 (ja) * 2006-12-15 2012-01-11 中外炉工業株式会社 吐出ノズルの清掃装置
CN104923448B (zh) * 2015-05-13 2017-07-18 加通汽车内饰(常熟)有限公司 在线除胶系统以及在线除胶方法
CN107899822B (zh) * 2017-12-10 2020-06-30 天长市金陵电子有限责任公司 一种用于静电喷涂设备中的清洁装置
KR102263229B1 (ko) * 2018-11-29 2021-06-10 (주)동성화인텍 자동화 발포성형용 스프레이 장치
CN112007826A (zh) * 2019-05-29 2020-12-01 夏普株式会社 涂布装置
CN110252598B (zh) * 2019-06-27 2021-08-06 京东方科技集团股份有限公司 刮刀模组及刮刀装置
JP7197525B2 (ja) * 2020-01-22 2022-12-27 株式会社Screenホールディングス ノズル清掃装置、塗布装置、ノズル清掃方法、および、スクレーパー

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3914311B2 (ja) * 1997-11-18 2007-05-16 中外炉工業株式会社 ダイコータのリップ部における塗布液除去方法およびその装置
JP4521505B2 (ja) * 1999-10-19 2010-08-11 東レ株式会社 塗布ヘッドの清掃方法および清掃装置並びにプラズマディスプレイ用部材の製造方法および装置
JP4645926B2 (ja) 2000-03-09 2011-03-09 東レ株式会社 塗布ヘッドの清浄方法および清浄装置並びにこれらを用いたカラーフィルタの製造方法および製造装置
JP2002177848A (ja) * 2000-12-15 2002-06-25 Toray Ind Inc 塗布用ダイの清掃装置および清掃方法並びにこれを用いたカラーフィルターの製造装置および製造方法
JP2003236438A (ja) * 2002-02-14 2003-08-26 Matsushita Electric Ind Co Ltd 塗布液除去装置およびプラズマディスプレイパネルの製造方法
JP4188043B2 (ja) * 2002-09-18 2008-11-26 中外炉工業株式会社 塗布用ダイの清掃装置及び塗布装置
JP4451175B2 (ja) 2004-03-19 2010-04-14 大日本スクリーン製造株式会社 ノズル洗浄装置および基板処理装置
JP4489480B2 (ja) * 2004-03-25 2010-06-23 東京応化工業株式会社 スリットノズル洗浄装置
JP2006167508A (ja) 2004-12-13 2006-06-29 Toray Ind Inc 塗布用ダイの清掃方法および清掃装置並びにディスプレイ用部材の製造方法および製造装置

Also Published As

Publication number Publication date
KR100839781B1 (ko) 2008-06-19
JP4808147B2 (ja) 2011-11-02
CN101204687B (zh) 2010-06-02
TW200824798A (en) 2008-06-16
CN101204687A (zh) 2008-06-25
JP2008149224A (ja) 2008-07-03

Similar Documents

Publication Publication Date Title
TWI322039B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR101184720B1 (ko) 슬릿 노즐 세정장치
TWI335245B (en) Discharge nozzle cleaning apparatus
CN104106125B (zh) 擦拭垫、使用该垫的喷嘴维护装置和涂覆处理装置
CN104081515A (zh) 粘贴装置
CN108855778B (zh) 涂敷装置、涂敷方法和喷嘴
TWI710411B (zh) 清掃系統、透明基板的清掃方法及電子設備的製造方法
CN108855719B (zh) 喷嘴清扫装置、涂敷装置和喷嘴清扫方法
CN112547415B (zh) 涂布装置及涂布方法
TWI322717B (en) Coating device
CN210411380U (zh) 基板处理装置
KR20160049227A (ko) 은페이스트 충진장치
TWI803629B (zh) 塗布用管嘴的清掃裝置
CN108855720B (zh) 喷嘴清扫装置、涂敷装置和喷嘴清扫方法
JP4188043B2 (ja) 塗布用ダイの清掃装置及び塗布装置
CN107004621B (zh) 喷嘴唇口清洗装置及其狭缝式涂抹装置
JP2011056374A (ja) 塗布装置
CN103008179B (zh) 涂敷装置及涂敷方法
JP2003275149A (ja) 窓ガラス掃除装置
JP2016056032A (ja) エッチング装置、およびこのエッチング装置に用いるガラス基板用エッチング液
TW200822974A (en) Apparatus for jetting fluid
JP4497802B2 (ja) 塗布用ダイの清掃方法
KR101466005B1 (ko) 기판연마장치
JP2008018329A (ja) 洗浄装置