TWI304630B - - Google Patents
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- Publication number
- TWI304630B TWI304630B TW91121990A TW91121990A TWI304630B TW I304630 B TWI304630 B TW I304630B TW 91121990 A TW91121990 A TW 91121990A TW 91121990 A TW91121990 A TW 91121990A TW I304630 B TWI304630 B TW I304630B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- substrate
- fabricating
- gate dielectric
- insulating layer
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 26
- 150000004767 nitrides Chemical class 0.000 claims description 21
- 230000002093 peripheral effect Effects 0.000 claims description 21
- 229920002120 photoresistant polymer Polymers 0.000 claims description 15
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 230000003647 oxidation Effects 0.000 claims description 8
- 238000007254 oxidation reaction Methods 0.000 claims description 8
- 238000002955 isolation Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 229910052707 ruthenium Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 description 101
- 238000004140 cleaning Methods 0.000 description 8
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 230000009977 dual effect Effects 0.000 description 5
- 238000000137 annealing Methods 0.000 description 3
- 238000005121 nitriding Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 101100313164 Caenorhabditis elegans sea-1 gene Proteins 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW91121990A TWI304630B (enrdf_load_stackoverflow) | 2002-09-25 | 2002-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW91121990A TWI304630B (enrdf_load_stackoverflow) | 2002-09-25 | 2002-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWI304630B true TWI304630B (enrdf_load_stackoverflow) | 2008-12-21 |
Family
ID=45070976
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW91121990A TWI304630B (enrdf_load_stackoverflow) | 2002-09-25 | 2002-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI304630B (enrdf_load_stackoverflow) |
-
2002
- 2002-09-25 TW TW91121990A patent/TWI304630B/zh not_active IP Right Cessation
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |