TWI303321B - Examined apparatus - Google Patents

Examined apparatus Download PDF

Info

Publication number
TWI303321B
TWI303321B TW093101906A TW93101906A TWI303321B TW I303321 B TWI303321 B TW I303321B TW 093101906 A TW093101906 A TW 093101906A TW 93101906 A TW93101906 A TW 93101906A TW I303321 B TWI303321 B TW I303321B
Authority
TW
Taiwan
Prior art keywords
lens barrel
optical system
image
barrel
lens
Prior art date
Application number
TW093101906A
Other languages
English (en)
Chinese (zh)
Other versions
TW200415376A (en
Inventor
Nagami Osamu
Ito Kazuya
Fujisaki Nobuo
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200415376A publication Critical patent/TW200415376A/zh
Application granted granted Critical
Publication of TWI303321B publication Critical patent/TWI303321B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008—Systems specially adapted to form image relays or chained systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361—Optical details, e.g. image relay to the camera or image sensor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/02—Diffusing elements; Afocal elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Microscoopes, Condenser (AREA)
TW093101906A 2003-02-10 2004-01-28 Examined apparatus TWI303321B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003032399A JP4409183B2 (ja) 2003-02-10 2003-02-10 検査装置

Publications (2)

Publication Number Publication Date
TW200415376A TW200415376A (en) 2004-08-16
TWI303321B true TWI303321B (en) 2008-11-21

Family

ID=33018758

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093101906A TWI303321B (en) 2003-02-10 2004-01-28 Examined apparatus

Country Status (4)

Country Link
JP (1) JP4409183B2 (ja)
KR (1) KR101042118B1 (ja)
CN (1) CN100374898C (ja)
TW (1) TWI303321B (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006184303A (ja) * 2004-12-24 2006-07-13 Olympus Corp 画像検査装置
EP2175302B1 (en) * 2007-08-07 2018-09-19 Nikon Corporation Microscope
JP5136835B2 (ja) * 2007-10-29 2013-02-06 株式会社ニコン 顕微鏡
JP5109583B2 (ja) * 2007-10-29 2012-12-26 株式会社ニコン 倒立顕微鏡
KR100949342B1 (ko) * 2009-04-17 2010-03-26 한국기계연구원 측면 관찰용 현미경 지그
JP5522989B2 (ja) 2009-07-08 2014-06-18 オリンパス株式会社 観察光学系及びそれを備えた顕微鏡
KR101652356B1 (ko) * 2015-03-30 2016-08-31 (주)넥스틴 광학적 웨이퍼 검사 장치
KR101652355B1 (ko) * 2015-03-30 2016-08-31 (주)넥스틴 광학적 웨이퍼 검사 장치
EP3315090B1 (en) * 2015-06-26 2020-12-30 Sony Olympus Medical Solutions Inc. Microscope device for surgical use, and microscope system for surgical use
KR200484944Y1 (ko) 2016-01-06 2017-11-13 (주) 파루 절연부재가 구비된 온도조절기의 구조

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN88211074U (zh) * 1988-02-05 1988-08-17 周纪征 望远式潜望镜
CN2033127U (zh) * 1988-07-01 1989-02-22 张福庆 望筒夹角可变式潜望镜
CN2156129Y (zh) * 1993-04-13 1994-02-16 季凤林 游乐潜水艇
JPH07174552A (ja) * 1993-11-05 1995-07-14 Olympus Optical Co Ltd 焦点検出装置
JP3827429B2 (ja) * 1997-04-03 2006-09-27 オリンパス株式会社 手術用顕微鏡
JP2002277750A (ja) 2001-03-15 2002-09-25 Olympus Optical Co Ltd 検査装置
JP2002303795A (ja) * 2001-04-04 2002-10-18 Olympus Optical Co Ltd 倒立型顕微鏡

Also Published As

Publication number Publication date
KR101042118B1 (ko) 2011-06-16
TW200415376A (en) 2004-08-16
JP2004245860A (ja) 2004-09-02
CN100374898C (zh) 2008-03-12
CN1521529A (zh) 2004-08-18
KR20040073306A (ko) 2004-08-19
JP4409183B2 (ja) 2010-02-03

Similar Documents

Publication Publication Date Title
CN104111524B (zh) 数码显微镜以及优化数码显微镜中工作流程的方法
TWI303321B (en) Examined apparatus
JP2003510119A (ja) 見通し方向可変の内視鏡
JPS61275713A (ja) 顕微鏡
JP4914761B2 (ja) 外観検査装置
US20060146401A1 (en) Stereomicroscope
US7643209B2 (en) Microscope optical system, microscope apparatus, and microscope observation method
US20140232846A1 (en) Image acquisition apparatus and image acquisition system
CN107228864A (zh) 显示面板表面缺陷的检测系统
CN101904735B (zh) 基于快速倾斜镜的宽视场共焦扫描显微镜
ES2178485T5 (es) Dispositivo y procedimiento para la inspeccion optica de uniones soldadas ocultas.
JPWO2012133623A1 (ja) 走査型顕微鏡
JP2006292404A5 (ja)
US7522336B2 (en) Microscope tube
JP3857888B2 (ja) ビデオ式顕微鏡への防振機構の組込みの決定方法
JP2006201796A (ja) 先端に画像センサを備えた視界器具の可変方向性
JP4755673B2 (ja) 基板検査装置
JP4256974B2 (ja) 基板検査装置
JP2000275594A (ja) 基板検査装置
JP6464021B2 (ja) 測定装置
US11259685B2 (en) Endoscopic OCT probes with immersed MEMS mirrors
Bakas et al. A miniaturised light-sheet microscopy system using MEMS micromirror control
JP4020916B2 (ja) 基板検査装置
JP5300522B2 (ja) 三次元顕微鏡装置及び同装置を用いた観察・測定法
JP3710754B2 (ja) 表示装置

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees