TW200415376A - Examined apparatus - Google Patents

Abstract

An image formed by an objective optical system is constructed by an imaging lens, and the image is transferred in a horizontally extended cone of a transmission optical system for transferring the image according to a angle almost in parallel with the examined surface of the examined apparatus. The image transferred by the transmission optical system in the horizontally extended cone is transferred downward by a relay optical system in a vertically extended cone. The transferred image in the vertically extended cone can be observed by an observation optical system.

Description

200415376

V. Description of the invention (1) ^-[Technical field to which the invention belongs] The present invention relates to an inspection device for an object to be inspected, such as a glass panel suitable for a large-sized liquid crystal display (LCD). [Prior Art] An inspection apparatus for inspecting a large LCD glass panel (hereinafter referred to simply as a glass panel) using a microscope is disclosed in JP-A No. 2002-2 7 7 7 50. This inspection device 'transmits the image of the glass panel transmitted from the objective lens of the microscope head through the imaging lens, and then passes through each transmission optical system installed in a plurality of relay lays. , And transmit the < image to the eyepiece of the observation optical system. The inspector visually observes the glass panel through the eyepiece, thereby inspecting the defects on the glass panel. In the manufacturing range of liquid crystal display screens, glass panels are gradually becoming larger. A large glass panel inspection device includes a plurality of broken glass panel cassettes, a flat floor on which glass panels are placed and inspected, and a tray for removing glass substrates stored in the cassette and placing them on a platform `` Hand '' arm. In addition, in order to maintain a plurality of glass panels in a horizontal direction in the cassette, the glass panels are respectively stored at a certain interval in the vertical direction. 'Once the glass panel becomes large, the glass door partitions of each glass stored in the cassette' must also be widened according to the size of the glass panel. Therefore, as each glass panel stored in giL |, as the number of the glass panels increases, the storage position of the uppermost glass panel will increase accordingly. When the glass panel is stored in the state of "g", the handling when the robot arm is taken out of the glass panel in the cassette ^ &

Page 6 200415376 V. Description of the invention (2) 'Set (Pass 1 in ^ must also be raised. Once the pass Hne of the robot arm is raised, the platform's position must also be raised. The above inspection beans The device makes the eyepiece height position of the observation optical system, that is, the eye point where the inspector observes the glass panel through the eyepiece, located higher than the glass panel placed on the platform. However, in order to observe the large glass When the height of the platform is raised by the panel, the Eye Point position will also rise to a higher position. Therefore, the inspector cannot stand directly on the ground 'and observe visually through the eyepiece. The inspector must stand on the stage Visual inspection through the eyepiece. The inspector must prepare a platform, which is really troublesome. Φ [Contents of the Invention] According to the main point of the present invention, a platform equipped with an object to be inspected is provided, and the platform is formed on the platform. An object optical system of an image of the object to be inspected, an imaging lens for imaging an image formed by the object optical system, and The image is transmitted by being transmitted almost parallel to the inspection surface of the sequential inspection object (re 1 ay). Optical system water = extension lens tube inspection device, which is connected to the horizontal extension lens tube and passes through the horizontal extension lens. The optical system transmits the transmitted image downward to the vertical extension lens barrel of the transmission optical system, and the transmission optical system is provided with the vertical extension lens barrel, and the transmission optical system in the vertical extension lens barrel is used to visually observe the transmission # image of the eyepiece observation Inspection system for optical system, etc. [Embodiment]

Page 7 200415376 V. Description of the invention (3) Hereinafter, the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing the entire configuration of the inspection device. Figure 2 is a block diagram of the device viewed from above. On the base of the inspection device body or on the gate-shaped arm-like support part 1, a fixing table 2 for observing the lens barrel is provided. The fixed base 2 is provided with a lens barrel 3 as a part of the structure of the horizontally extended lens barrel 4. The lens barrel 3 is a rotatable lens tube with respect to the fixed base 2 as an axis that is an optical axis L1 that is bent above the optical axis L (in the Z direction) in the horizontally extended lens barrel 4. One side of the horizontally extending lens barrel 4 is connected to the side of the lens barrel 3. The other end of the horizontally-extended lens barrel 4 is connected to the horizontally-extended lens barrel 6 by connecting the lens barrel portion 5. These horizontally-extended lens barrels 4, 6 are arranged slightly parallel to the glass panel 8 (inspection surface) placed on the inspection device main body platform 7 and above them. The angles formed by connecting the barrel sections 5 and the horizontally extending barrels 4 and 6 can be changed to each other. The connecting lens barrel portion 5 is composed of a first connecting portion 9 and a second connecting portion 10. The first connecting portion 9 is connected to the other end of the horizontally extending lens barrel 4. The second connecting portion 10 is connected to the other end of the horizontally-extended ‘lens barrel 6. Both are provided on the first and second connecting portions 9, 10, and are freely rotatable by a ball bearing 11 or the like. At the bottom of the second connection portion 10, a movement folding portion 13 is provided by a connection support arm 12. The movable folding section 13 is provided between two linear guides 14 and 15 and can freely rotate with a ball bearing 17 with respect to the movable support 16 that can move in the Y direction. In addition, the movable folding portion 13 can be moved in the X direction on the movable support 16.

Page 8 200415376 V. Description of the invention (4) '' A 'The linear guides 1 4 and 1 5 are erected on the level of the gate arm 丨 8. The linear guides 1 4 and 1 5 are in parallel for privacy at certain intervals. Fang 19 1 8 is located on a platform 6 that can move in the X direction. 1See the arm. On the other end (tip) of the horizontally extended lens barrel 6, a microscope head 20 is provided with an objective optical system. The top cover of the microscope is paired (heaC section 20, and the object 22 is mounted on the electric revolver. The top cover section 20 of the microscope passes through each of the objective lenses 2 to 22, above the incident axis a. The top cover plus part 20 is fitted with the holder 23 provided in the water extension to the plug end part and can be rotated. ^ See the same as 6 pointed cover part 20, as shown in Figure 2, placed on the top of the microscope $ m ξ. The microscope cover 24 is mounted on the linear V rails 14 and 15 and can be moved in the γ direction. Therefore, if the microscope cover 24 is moved back and forth as shown in Figure 2 If it moves on the square, the moving support 16 will move in conjunction with the back and forth movement of the microscope stage 2 ^ 4, and move the moving wood back and forth along the linear guides 14, 15. Same as the moving folding section 13 moves with The supporting body 16 is linked, and moves back and forth in the Y direction on the moving body 16. In addition, the platform 7 of the glass panel 8 is moved in the X direction, so that the microscope top cover 20 can fully observe the glass panel. 8. The explanation is an optical system. There is no imaging lens 30 on the optical axis a of the objective lens 2 丨. The imaging lens 30 is set in Inside the holding body 2 3. The f-image lens 30 uses the parallel image incident from the objective lens 21 as an image and re-images at the imaging position Q1. On the optical axis a in the holding body 23, a reflecting mirror 3 is provided. Reflector

Page 9 200415376 V. Description of the invention (5) 3 1. The image formed by the imaging lens 30 is reflected (deflected) into the horizontally extending lens barrel 6. A reiay lens 3 2 to 3 4 is provided in the horizontal extension lens barrel 6 ′. These transmissions, lenses 3 2 to 3 4, constitute an optical system for transmitting an image formed by the imaging lens 31. The imaging positions of these transfer lenses 3 2 to 34 are at Q 2.

One end of the horizontally extended lens barrel 6 and the inside connecting the barrel portion 5 and the horizontally extended lens barrel 4 are provided with transmission lenses 35, 36, and reflectors 37, 38. These transmission lenses 35 and 36 and the reflection mirrors 37 and 38 constitute a transmission optical system for transmitting the images transmitted by the transmission lenses 3 2 to 34 again. The imaging positions of these transmission lenses 35 and 36 and the reflection mirrors 37 and 38 are at Q3. The reflecting mirror 37 reflects (deflects) the image from the transmitting lens 35 in the vertical direction (upward) to the reflecting mirror 38. The reflecting mirror 38 reflects the image from the reflecting mirror 37 to the horizontally extending lens barrel 4 in the horizontal direction. An upper portion of the lens barrel 3 connected to the horizontally extending lens barrel 4 is provided with a folding lens barrel 39 constituting the horizontally extending lens barrel. Inside the horizontally extending lens barrel 4, a transmission lens 40 is provided. Inside the mirror 3 is provided with a reflecting mirror 41. Inside the folding lens barrel 39, a transmission lens 42 and reflection mirrors 43, 44 are provided. k

These transmission lens 40, mirror 4 and transmission lens 42 and reflection mirrors 43 and 44 constitute a transmission optical system for transmitting the images transmitted by transmission lenses 35 and 36 and reflection mirrors 37 and 38 again. The imaging positions of the transmission lens 40, the reflection mirror 41, the transmission lens 42, and the reflection mirrors 43, 44 are at Q4. The reflection mirror 41 reflects (deflects) the image from the transmission lens 40 to the reflection mirror 43 in the vertical direction (upper direction). The reflecting mirror 4 3 reflects (deflects) the image from the reflecting mirror 42 to the reflecting mirror 4 4 in the horizontal direction.

Page 10 200415376 V. Description of the invention (6) The reflecting mirror 44 reflects (deflects) the image from the reflecting mirror 43 in the vertical direction (below). The lower part of the folding lens barrel 39 is connected to the lower part by a vertically extending lens barrel 45. The vertical extension of the lens barrel 45 can extend from the lower portion of the folding lens barrel 39 to a fixed observation position lower than the placement position of the glass panel 8 on the platform 7. The vertical extension lens barrel 45 is provided with transmission lenses 46 to 48 constituting a transmission optical system. These transmission lenses 4 6 to 48 transmit the images transmitted by the transmission optical systems in the horizontally extended lens barrels 6 and 4 to the lower side.

A lower end portion of the vertically extended lens barrel 45 is connected to an observation optical system 50 having an eyepiece 49. The observation optical system 50 includes an L-shaped folding observation lens barrel 52 connected at one end to a vertically extending lens barrel 45, and an eyepiece 53 connected to the other end of the folded observation lens barrel 52. One end of the folding observation lens barrel 52 is connected to the lower end portion of the vertically extended lens barrel 45 through the connecting portion 51. A reflecting mirror 54 is provided in the connecting portion 51. The reflecting mirror 54 reflects (deflects) the images transmitted by the transmission lenses 46 to 48 in the horizontal direction. In addition, the images from each of the transmission lenses 46 to 48 have an imaging position of Q 5 through the transmission optical system. .

Inside the observation lens barrel 5 2 'are provided transmission lenses 5 5 and 5 6 and a reflection mirror 57 which constitute a transmission optical system. These transmission lenses 5 5 and 5 6 and the reflection mirror 5 7 transmit the images transmitted by the transmission lenses 4 6 to 4 8 in the vertically extended lens barrel 4 5 to the eyepiece tube portion 53. The reflecting mirror 57 reflects (deflects) the image from the transmitting lens 56 in the vertical direction (upper direction). The imaging positions of the transfer lenses 5 5 and 5 6 are at the mounting positions of the eyepieces 49. The eyepiece tube portion 53 is mounted so that each eyepiece 45 can be moved in the vertical direction b.

Page 11 200415376 V. Description of the invention (7) On the rotating adjustable lens barrel. In addition, the folding lens barrel 3 9 _L 1 μ = CCD camera and other photography dreams can be installed. ^ On the reflected optical axis of the reflecting mirror 41, the micromirror top cover portion 20 can be held up. In addition, the eyepiece barrel portion 53 or development装置 58。 Device 58. "Upward, you can also install a CCD camera, etc. and then 'use the lights from the top of the microscope through the top cover of the microscope 20 through the use of light into the lights. Nhh Zhengyi 丨, Li " 上 价 丨The glass panel 4 7 obtained by the objective lens 21 is shot to the imaging lens 30. At the imaging lens 30, the reflection is reflected by the reflector 31 in the horizontal direction to the horizontal extension lens barrel 6. # At this horizontal extension lens barrel The image imaged through the imaging lens 3 within 6 is transmitted by the transmission lenses 32 to 34. The transmitted image is reflected by the mirror 3 in the vertical direction (upper), and then reflected by the mirror "in square To reflect. The images transmitted by the transmission lens 35, the reflection mirrors 37, 38, and the transmission lens 36 are transmitted through the transmission lens 40, the reflection mirror 41, the folding lens 39 in the horizontally extending lens barrel 4, and the reflection mirror 43 in the folding lens barrel 39. , 44, etc. are transmitted. The transmitted and closed images are reflected by the mirror 41 in the vertical direction (above), reflected by the mirror 43 in the horizontal direction, and reflected by the mirror 44 in the vertical direction (

(Square) reflected to the vertically extended lens barrel 45. In addition, the images transmitted by the transmission lens 40, the reflection mirror 41, the transmission lens 42, and the reflection mirrors 43 and 44 are vertically extended by the inside of the lens barrel 45. Each transmission lens 4 6 to 4 8 is vertically extended. The inside of the lens barrel 4 5 is transmitted to the square, and is incident on the connecting portion 5 1 ′ of the observation optical system 50 through the mirror $ &

Page 12 200415376 V. Description of the invention (8) Reflected in the horizontal direction. At this time, the image of the vertically extended lens barrel 45 is transmitted to a predetermined intermediate brush position lower than the placement position of the glass panel 8 on the platform 7. The image reflected by the mirror 54 is imaged on the mounting position of each eyepiece 49 of the eyepiece tube portion 53 by the transmission lens 55, the mirror 57 and the transmission lens 56. This allows the inspector to visually observe the upright magnified image of the glass panel 8 through each of the eyepieces 49.

In the embodiment described above, the image formed by the microscope top cover portion 20 is imaged through the imaging lens 30, and the imaged image is provided at each level of each transmission optical system that is transmitted almost parallel to the inspection surface of the glass = plate 8 Extending, the tubes 6 and 4 are transmitted internally, and each of the transmission optical systems in the horizontally extending lens barrels 6 and * is transmitted by the vertically extending transmission optical system in the lens barrel 45 Ϊ Ϊ Ϊ i: ί in the vertical The image transmitted in the extension lens barrel 45 is visually observed through each eyepiece 49 of the advance system 50. ί ί The second step is to lower the image by transmitting the image in the vertical extension lens barrel 45 downward. In this way, even if the robot arm ^ is enlarged: the height position of the second platform 7 must be raised as the glass panel 8 is changed, the inspector does not need to prepare a platform anymore, and the ^^ face can pass through the eyepieces 49. Visual inspection of the glass panel. In addition, the inspector can press the position of P oint 〇 an adjustable lens barrel is installed on each eyepiece 45, so the eyepiece 45 can be rotated in the following direction b, thereby reducing Eye

Furthermore, the present invention is not limited to the above-mentioned embodiments, and the implementation stage is

Page 13 200415376 V. Description of the invention (9) Without departing from the scope of the invention, there can be various deformed lens barrels. In the above-mentioned embodiment, two horizontally extended lens barrels 4, 6 are formed by the speed and the upper surface. 5. Move the curved microscope cover 20 to the square of the glass panel 8. In addition, two horizontally-extended lens barrels 4 can be directly connected to form one horizontally-extended lens barrel. In addition, one horizontally extending town f 7 is formed, and the glass panel 8 can be fully observed if it is placed below the microscope top cover part 20 and the life test on which the glass panel 8 is placed is moved in the XY direction. , / 统,

In addition, one or more transmission optical systems may be provided in each of the horizontally extended lens barrels 4 and 6, and an image formed by the imaging optical system f ^ through the object-receiving optical system 20 may be transmitted through 1 A transmission optical system and a plurality of transmission optical systems are transmitted to the vertical extension lens barrel 45 ° and the vertical extension lens barrel 45, and a focal point (Af oca 1) optical system is provided in a certain part of the lens barrel. The lens barrel portion of the point optical system transmitting parallel light can constitute a vertically extended lens barrel 45 that can be expanded and contracted in the vertical direction. As shown in FIG. 3, the vertical extension lens barrel 45 is divided into a first vertical extension lens barrel 45a and a second vertical extension lens barrel 45b, and the first vertical extension lens barrel 45a can be inserted into and detached from the second vertical extension lens. The inside of the barrel 45b. In addition, between each of the transmission lenses 47, 48, each lens 60 and lens 60 constituting a focal point (A f oca 1) optical system is provided inside the first vertical extension lens barrel 45a. ; The lens 61 is provided inside the second vertical extension lens barrel 4 5 b. The vertically-extended lens barrel 45 configured in this manner is expandable and contractible over its entire length. In this way, the Eye Point position of each eyepiece 49 of the observation optical system 50 can be adjusted arbitrarily vertically according to the condition of the examiner. It can make the image in the vertical extension of the lens barrel 45 in the vertical direction

Page 14 200415376 V. Description of the invention (10) The transmission optical system is not limited to one, and a plurality of transmission optical systems can also be used to transmit images. The installation of the observation optical system 50 is to face the vertical extension of the lens barrel 4 7 to rotate, that is, the viewing lens barrel 2 arranged in the horizontal direction is centered on the axis of the vertical long lens barrel 47 and can face Vertically extend the lens barrel 4 7 to rotate. In this way, when viewing the optical system 50, as shown in FIG. 2 ', it will move in the direction of the arrow 、 or the direction of the arrow mouth (preferably to the direction of the arrow 彳) and can be housed on the side of the inspection device. In addition, when it is stored on the side of the inspection apparatus main body, the 'viewing optical system 50' can be placed on the side of the inspection apparatus main body or in the storage recess of the inspection apparatus main body. In addition, the eyepiece unit 53 'on the observation optical system 50 is connected to the vertical extension lens barrel 45 through the observation lens barrel 52, or may be directly connected to the vertical extension lens barrel 45. In this way, the position of each eyepiece 49 can be lowered below the vertical length of the observation tube 52. In addition, the observation optical system 50, as shown in FIG. 4, is opened; the M-pinch observation lens barrel 52 is retractable, and the eyepiece barrel portion 53 can also be moved in the vertical direction. At this time, the portion connected to the eyepiece tube portion 5 3 is an observation lens tube 62 for up and down, which can be inserted and removed from the observation lens tube 52. Furthermore, the transfer lens 56 can replace the focus point optical system. In this way, the eyepiece tube portion 53 can be moved in the up-down direction. FIG. 4 shows a state where the eyepiece tube portion 53 is moved upward. [Industrial use value] The present invention is suitable for flat panel displays such as semiconductor wafers, liquid crystal display screens, and plasma display panes.

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200415376 V. Description of the invention (π) p a n e 1 d i s p 1 a y) For visual inspection of the glass panel, it is used for visual lighting. «Φ Draw · Page 16 200415376 Brief description of the drawings [Simplified description of the drawings] Fig. 1 is an overall configuration diagram of one embodiment of the inspection device of the present invention. FIG. 2 is a structural view of the inspection device described in FIG. 1 according to the present invention. FIG. 3 is a modified embodiment of the straightening extension mirror of the inspection device of the present invention. FIG. 4 shows a modified embodiment of the observation system of the inspection device of the present invention. [Explanation of Symbols] 1 ............. Gate-shaped columnar pillar part 2 ............ • Fixed stand 3hiu ........ ..... 闾 4 .............. Horizontal extension lens barrel # 5 .............. connecting lens barrel section 6 ... ............ Shuipi extension lens barrel 7 .................. • Body platform 8 ............ ... • Glass panel 9 .................. • The first connection part 10 .................. • The second connection part · 12 ............... Connecting the support arm 13 ....... moving the bending part 14 ........ .......... linear guide 15 ........ linear guide 16 ............... ... support body 17 ........ ball bearing 18 ........ gate arm

Page 17 200415376 Schematic description 19 ..... above the horizontal arm 20 ........ .Microscope top cover 21 ........ Objective lens 22 ........ Objective lens 23 .. ...... Retainer 24 ... ......... Imaging lens 31 ..................... Reflector 3 2 ............. ..... • Transferring lens 3 3 ....................... •• Transferring lens 34 ...... .. •• Transferring Lens 35 ........................ • Transferring Lens 3 6 ........ ..Passing lens 37 ........ reflector 38 ........ reflector 39 ... ............ • Folding lens barrel * 40 ........ •• Transferring lens > '41 ..... ............. Reflector 4 2 ............. Passing lens 43 .......... ........ Reflector 44 ........ Reflector 45 ...... .. • Extending the barrel 45b .................. 2nd vertical extending barrel 46 .............. Pass lens

Page 18 200415376 Schematic description 47 ......... 48 ......... 49 ......... 50 ......... 51. ........ 52 ......... 53 ......... 54 ......... 55 ......... 56. ........ 57 ......... 58 ......... 60 ......... 61 ......... 62. ... .. transfer lens. Transfer lens. Eyepiece. Observation optical system. Connecting part .. observation tube ... eyepiece. Reflector. Transfer system. Transfer system. .Lens .. Viewing tube # Φ

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Claims (1)

200415376 VI. Scope of patent application1. An inspection device, which is provided on a platform having an object to be inspected, an optical system for receiving the object on the platform to form an image of the object to be inspected, and an interface between the foregoing An imaging lens for imaging the image formed by the object optical system, and a horizontally extended lens barrel provided with a transmission optical system for transmitting the image formed by the imaging lens according to an inspection surface almost parallel to the inspection object, including: connected to the foregoing The horizontally extended lens barrel is provided with a vertically extended lens barrel that transmits the aforementioned image downward through the transmission optical system in the horizontally extended lens barrel; & is connected to the vertical extended lens barrel and visually inspects the By the front The transmission optical system in the vertical extension lens barrel is used for the observation optical system of the eyepiece for transmitting the aforementioned image; 2. An inspection device as described in item 1 of Fan f, wherein the aforementioned transmission optical system of the front & image conveys its characteristics in a straight direction, and the second side is the right inspection device, wherein the front by & τ # ί The telescopic + knife with telescopic direction has a focusing point optical system, Cheng Kezhen's rigid lens barrel is a feature of it. 4. An inspection wear as described in item 1 of the patent application fan garden. 200415376 VI. The scope of patent application will be characterized by those. 5. — An inspection device as described in item 1 of the scope of patent application, wherein the aforementioned optical observation system can be housed in the inspection device body side as its characteristic. And the tube length of the tube mirror is straight forward and the second task is the first one. The first and second ends of the previous description are all encouraging. Please refer to the end of the application of the observation of Ruguang Xueguang 6 and the other one before the observation. The zhengzheng mirror specially observes the perspective of the folded tube folding mirror, and the length of the tube connected to the project is described in the previous paragraph b. For the purpose of this report, please refer to the special application for checking the length of the inner tube lens before the view described in the description of a light tube installation inspection in the Department of Seed Science. The first extension of the filming and enclosing An Fan Keli, please apply to the Department of Appreciation of the Spectacles-Guangzheng, especially for the installation of the image and the image of the image before the film. The passer was Fan Qili, the first perimeter, and asked Jing Shen to extend the straight and vertical position. 9 The installation of the inspection and inspection of the above-mentioned tube lens length Yanping Shuishu should be set in front of each other. The prosecutor's property was checked. The characteristics of the previous sign of the narrator are flat on the platform. Page 21 200415376 VI. Patent application scope 10 · —A kind of inspection device, which is the object optics on the platform that has the object to be inspected and the image of the object to be inspected that is formed on another platform. A system, an imaging lens for imaging the image formed by the object-connecting optical system, and a transmission optical system provided with the image for transmitting the image formed by the imaging lens according to an inspection surface almost parallel to the object to be inspected ^ plural levels are extended The lens barrel, and the pillar portion, and a fixing table provided on the pillar portion f to enable one of the plurality of horizontally-extended lens barrels to be rotatable, include: At least one rotatably connected connecting lens barrel portion is provided between the plurality of horizontally extended lens barrels; and a linear guide rail; and the foregoing connecting lens barrel portion is movable along the linear guide rails and horizontally The moving surface of the extension lens barrel is rotated to the fixed table, and the movable folding part bent at a predetermined angle between the plurality of horizontal extension lens barrels is connected to the horizontal extension lens barrel. The vertical extension lens barrel of the transmission optical system for transmitting the aforementioned image downward by the internal transmission optical system; And the observation optical system of the eyepiece which is connected to the vertical extension lens barrel, and the visual observation transmits the image through the light transmission system in the vertical extension lens barrel. Page 22