CN1521529A - Detecting device - Google Patents

Detecting device Download PDF

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Publication number
CN1521529A
CN1521529A CNA2004100040950A CN200410004095A CN1521529A CN 1521529 A CN1521529 A CN 1521529A CN A2004100040950 A CNA2004100040950 A CN A2004100040950A CN 200410004095 A CN200410004095 A CN 200410004095A CN 1521529 A CN1521529 A CN 1521529A
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CN
China
Prior art keywords
mentioned
lens barrel
optical system
image rotation
prolongation
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Granted
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CNA2004100040950A
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Chinese (zh)
Other versions
CN100374898C (en
Inventor
永见理
也
伊藤一也
夫
藤崎畅夫
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Olympus Corp
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Olympus Corp
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Publication of CN1521529A publication Critical patent/CN1521529A/en
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Publication of CN100374898C publication Critical patent/CN100374898C/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008—Systems specially adapted to form image relays or chained systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361—Optical details, e.g. image relay to the camera or image sensor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/02—Diffusing elements; Afocal elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

An image formed by an objective optical system is formed through an imaging lens and the formed image is transmitted in respective horizontal extension lens barrels equipped with relay optical systems that transmit the image almost in parallel to an inspection surface for the glass substrate; and images transmitted by the relay optical systems in the horizontal extension lens barrels are transmitted downward by a relay optical system in a vertical extension lens barrel and the image transmitted in the vertical extension lens barrel 45 is visually observed through oculars of an observation optical system.

Description

Testing fixture
Technical field
The present invention relates to a kind of testing fixture that in the inspection of for example checked properties such as glass substrate of large-scale LCD (LCD), is suitable for.
Background technology
Adopt for example testing fixture of large LCD glass substrate (being designated hereinafter simply as glass substrate) of microexamination, for example open in the 2002-277750 communique on the books the spy.This testing fixture carries out imaging by imaging len to the picture of the glass substrate that transmits from the object lens of microscope head, and utilizes each the image rotation optical system that is located in a plurality of image rotation lenses tubes, and this is looked like to be sent to the eyepiece of viewing optical system.The examiner is by eyepiece, and the visualization glass substrate is checked the defective on the glass substrate face thus.
In the manufacturing field of LCD, glass substrate is maximizing.The testing fixture of large-size glass substrate has: take in a plurality of glass substrates box, be used for the mounting glass substrate and check glass substrate objective table, take out the glass substrate be accommodated in the box and be placed on conveyance robot on the objective table.In addition, take in a plurality of glass substrates in box, these a plurality of glass substrates keep taking in predetermined space in the horizontal direction and on above-below direction separately.
If glass substrate maximizes, the interval that is accommodated in each glass substrate in the box increases accordingly with the size of glass substrate.Therefore, be accommodated in each glass substrate in the box,, increase the reception position of uppermost glass substrate along with increasing of the number of this glass substrate.When forming the receiving state of such glass substrate, in order to take out the glass substrate in the box, carrying line (conveyance position) must be increased by the conveyance robot.As increase the carrying line of conveyance robot, also need to increase the height and position of objective table.
In the above-mentioned testing fixture, the height and position of the eyepiece of viewing optical system, promptly the examiner is positioned at than the high position, glass substrate face top that is placed on the objective table by the position of eye point of observation eyepiece sight glass substrate.
In addition, if, increase the height and position of objective table in order to observe large-scale glass substrate, then thereupon also more the highland increase eyespot (eye point) position.Therefore, the examiner can not stand directly on the ground and carry out visualization from eyepiece.The examiner for example must stand in observation eyepiece on the estrade, comes the visualization glass substrate.The examiner must prepare estrade, and is pretty troublesome.
Summary of the invention
According to main points of view of the present invention, a kind of testing fixture can be provided, objective table with mounting checked property, formation is positioned in the objective lens optical system of the picture of the above-mentioned checked property on the above-mentioned objective table, the imaging len that the above-mentioned picture that is formed by above-mentioned objective lens optical system is carried out imaging, the level that possesses the image rotation optical system that will be transmitted with respect to the check surface almost parallel ground of above-mentioned checked property by the above-mentioned picture of above-mentioned imaging len imaging prolongs lens barrel, it is characterized in that, possess: vertically prolong lens barrel, have and the binding of above-mentioned level prolongation lens barrel, transmit the image rotation optical system that is prolonged the picture of the image rotation optical system transmission in the lens barrel by above-mentioned level downwards; Viewing optical system, have with above-mentioned vertical prolongation lens barrel link, the eyepiece of above-mentioned picture that visualization is transmitted by the image rotation optical system in the above-mentioned vertical prolongation lens barrel.
Description of drawings
Fig. 1 is the one-piece construction figure of an embodiment of expression testing fixture of the present invention.
Fig. 2 is the structural drawing of observing from the top of this testing fixture of expression.
Fig. 3 is the figure of the variation of the vertical prolongation lens barrel in this testing fixture of expression.
Fig. 4 is the figure of the variation of the viewing optical system in this testing fixture of expression.
Embodiment
Below, with reference to description of drawings one embodiment of the present invention.
Fig. 1 is the one-piece construction figure of testing fixture.Fig. 2 is a structural drawing of observing this testing fixture from the top.On the column sections 1 of the base station of testing fixture body or door type arm, be provided with and observe the fixed station 2 that lens barrel is used.On this fixed station 2, the lens barrel 3 that the formation level prolongs the part of lens barrel 4 is set.This lens barrel 3 is to prolong the optical axis L optical axis L of (Z direction) bending upward in the lens barrel 4 along level 1Be axle, be arranged on rotationally on the fixed station 2.
In the side of this lens barrel 3, link an end that has level to prolong lens barrel 4.At the other end of this level prolongation lens barrel 4, there is level to prolong lens barrel 6 by linking 5 bindings of lens barrel portion.These levels prolong lens barrel 4,6, and with respect to the upper surface (testing fixture) of the glass substrate 8 on the objective table 7 that is positioned in the testing fixture body, almost parallel ground is provided with.
Link lens barrel portion 5 and can change the angle that prolongs lens barrel 4,6 formation with each level mutually.This binding lens barrel portion 5 is made of the 1st linking part 9 and the 2nd linking part 10.The other end that on the 1st linking part 9, has linked level prolongation lens barrel 4.On the 2nd linking part 10, linked an end of level prolongation lens barrel 6.These the 1st and the 2nd linking parts 9,10 for example by ball bearing 11, are arranged to rotate freely mutually.
In the bottom of the 2nd linking part 10, be provided with mobile sliding part 13 by linking supporting arm 12.This mobile sliding part 13 can for example rotate setting freely by ball bearing 17 on the mobile support 16 that 2 line slideways in Y direction upper edge (linear guide) 14,15 move.In addition, mobile sliding part 13 is arranged to and can be moved on directions X on mobile support 16.
Each line slideway 14,15 is laid on the upper surface of the horizontal arm section of type arm 18 19.These line slideways 14,15 are arranged in parallel with predetermined space.The objective table 6 that leap can be moved on directions X is provided with a type arm 18.
The other end (top ends) at level prolongation lens barrel 6 is provided with the microscope head 20 that constitutes objective lens optical system.On the electrodynamic transducer of this microscope head 20, a plurality of object lens 21,22 are installed.In this microscope head 20,1 object lens 21 in each object lens 21,22 or 22 are inserted on the optical axis a.This microscope head 20 is entrenched in the level that is arranged at rotationally and prolongs on the maintenance body 23 of lens barrel 6 leading sections.
Microscope head 20 as shown in Figure 2, is contained in microlens with on the pallet 24.This microlens is placed on 2 line slideways 14,15 with pallet 24, can move on the Y direction.
Therefore, for example, when microlens is come and gone on Y direction shown in Figure 2 when mobile with pallet 24, mobile support 16 and the round mobile interlock of mobile microlens with pallet 24 come and go mobile along each line slideway 14,15.Meanwhile, mobile sliding part 13 and mobile support 16 interlocks come and go on the Y direction on mobile slide mass 16 and move.In addition, move on directions X by the objective table 7 of placing glass substrate 8, microscope head 20 can be observed the whole face of glass substrate 8.
Below, optical system is described.By on the optical axis a of object lens 21, be provided with imaging len 30.This imaging len 30 is located at and keeps in the body 23.This imaging len 30, with from the picture of the directional light of object lens 21 incidents as 1 picture, in image space Q1 imaging once more.
On the optical axis a in keeping body 23, be provided with catoptron 31.This catoptron 31 prolongs the picture of lens barrel 6 internal reflections (deflection) by imaging len 30 imagings to level.
In level prolongs lens barrel 6, each image rotation lenses 32～34 is set.These image rotation lenses 32～34 constitute the image rotation optical system that will be transmitted by the picture of imaging len 31 imagings.Position by these image rotation lenses 32～34 imagings is Q 2
The end, binding lens barrel portion 5 and the level that prolong lens barrel 6 in level prolong in the lens barrel 4, are provided with each image rotation lenses 35,36 and each catoptron 37,38.These image rotation lenses 35,36 and each catoptron 37,38, formation will be transmitted by the picture that each image rotation lenses 32～34 transmits again turns to optical system.Position by these image rotation lenses 35,36 and each catoptron 37,38 imaging is Q 3Wherein catoptron 37 is on vertical direction (top), towards the picture of catoptron 38 reflections (deflection) from image rotation lenses 35.Catoptron 38 prolongs the picture of lens barrel 4 internal reflections from catoptron 37 towards level in the horizontal direction.
Prolong the top of the lens barrel 3 of lens barrel 4 in the binding level, the lens barrel 39 of turning back that the formation level prolongs lens barrel is set.In level prolongs lens barrel 4, image rotation lenses 40 is set.Catoptron 41 is set in lens barrel 3.In the lens barrel 39 of turning back, image rotation lenses 42 and each catoptron 43,44 are set.
These image rotation lenses 40, catoptron 41, image rotation lenses 42 and each catoptron 43,44, the image rotation optical system that formation will be transmitted by the picture that each image rotation lenses 35,36 and each catoptron 37,38 transmit again.Position by these image rotation lenses 40, catoptron 41, image rotation lenses 42 and 43,44 imagings of each catoptron is Q 4
Catoptron 41 wherein is on vertical direction (top), towards the picture of catoptron 43 reflections (deflection) from image rotation lenses 40.Catoptron 43 reflects (deflection) picture from image rotation lenses 42 towards catoptron 44 in the horizontal direction.Catoptron 44 will reflect (deflection) to vertical direction (below) from the picture of catoptron 43.
In the bottom of turning back lens barrel 39, link the vertical lens barrel 45 that prolongs towards the below.Should vertical prolong lens barrel 45, for example, the length of the predetermined observation place of the below, mounting position of the glass substrate 8 on forming from the bottom of the lens barrel 39 of turning back to objective table 7.This vertical prolongation in the lens barrel 45, be provided with each image rotation lenses 46～48 that constitutes the image rotation optical system.These image rotation lenses 46～48 will prolong the picture that each the image rotation optical system in the lens barrel 6,4 transmits by level, transmit downwards.
In the vertical bottom that prolongs lens barrel 45, binding has the viewing optical system 50 of eyepiece 49.This viewing optical system 50 have turning back of L word shape that an end and vertical prolongation lens barrel 45 link observe lens barrel 52 and with the eyepiece stalk portion 53 of the other end binding of this observations lens barrel 52.Turn back with an end of observing lens barrel 52,, be attached at the bottom of vertical prolongation lens barrel 45 by linking part 51.
Catoptron 54 is set in linking part 51.This catoptron 54 reflects the picture that (deflection) is transmitted by each image rotation lenses 46～48 in the horizontal direction.In addition, the position of the image rotation optical system imaging that is made of each image rotation lenses 46～48 is Q 5
In observing lens barrel 52, each image rotation lenses 55,56 and catoptron 57 of being made of the image rotation optical system are set.These image rotation lenses 55,56 and catoptrons 57 transmit the picture that is transmitted by each image rotation lenses 46～48 in the vertical prolongation lens barrel 45 to eyepiece stalk portion 53.Wherein catoptron 57 is towards the picture of vertical direction (top) reflection (deflection) from image rotation lenses 56.The image space of the picture that each image rotation lenses 55,56 forms becomes the installation site of each eyepiece 49.
Eyepiece stalk portion 53 is installed in can be with each eyepiece 45 on the inclination lens barrel that rotates on the above-below direction b.
In addition, on the reflection optical axis of the catoptron 41 on lens barrel 39 tops of turning back, camera heads 58 such as CCD camera can be installed.In addition, on the top of the maintenance body 23 of eyepiece stalk portion 53 or microscope head 20, camera heads 58 such as CCD camera can be installed also.
Below, the effect of the device that as above constitutes is described.
The picture of the glass substrate 47 that the object lens 21 by microscope head 20 obtain incides imaging len 30 with directional light, and in these imaging len 30 imagings, and is reflected by along continuous straight runs at catoptron 31, and the level that incides prolongs in the lens barrel 6.
In this level prolongs lens barrel 6, the picture that utilizes each image rotation lenses 32～34 to transmit by imaging len 31 imagings.By the picture that these image rotation lenses 32～34 transmit, the image rotation lenses 36 that prolongs in the lens barrel 4 by image rotation lenses 35, each catoptron 37,38 and level is transmitted.In this transmitted, to vertical direction (top) reflection, the mirror 38 that is reflected reflected to horizontal direction as the mirror 37 that is reflected.
So, the picture by image rotation lenses 35, each catoptron 37,38 and image rotation lenses 36 transmit prolongs image rotation lenses 40, the catoptron 41 in the lens barrel 4, each catoptron 43,44 transmission in the lens barrel 39 of turning back by level.In this transmits, as by catoptron 41 to vertical direction (top) reflection, by catoptron 43 to the horizontal direction reflection, by catoptron 44 on vertical direction (below), towards vertical prolongation lens barrel 45 internal reflections.
In addition, picture by image rotation lenses 40, catoptron 41, image rotation lenses 42 and 43,44 transmission of each catoptron, by each image rotation lenses 46～48 in the vertical prolongation lens barrel 45, transmit downwards vertical the prolongation in the lens barrel 45, and incide in the linking part 51 of viewing optical system 50, and the mirror 54 that is reflected reflects to horizontal direction.At this moment, prolong in the lens barrel 45, brush the position as between the below, mounting position that is sent to the glass substrate 8 on the objective table 7 predetermined vertical.
The picture of catoptron 54 reflection is imaged on by image rotation lenses 55, catoptron 57 and image rotation lenses 56 on the installation site of each eyepiece 49 of eyepiece stalk portion 53.Thus, the examiner is by each eyepiece 49, the upright intensified image of visualization glass substrate 8.
So, in an above-mentioned embodiment, the picture that is formed by microscope head 20 is by imaging len 30 imagings, and will be somebody's turn to do by the picture of imaging, each level of each the image rotation optical system that transmits on the check surface almost parallel ground that possesses with respect to glass substrate 8 prolongs in lens barrel 6,4, transmit, to prolong the picture that each the image rotation optical system in the lens barrel 6,4 transmits by each level, utilize the vertical image rotation optical system that prolongs in the lens barrel 45, transmit downwards, by each eyepiece 49 of viewing optical system 50, visualization is at this vertical picture that is transmitted in the lens barrel 45 that prolongs.
As mentioned above, can reduce the position of eye point by at this vertical picture that transmits in the lens barrel 45 that prolongs downwards.Thus, along with the maximization of glass substrate 8, even the carrying line of conveyance robot increases, and the height and position of objective table 7 increases, also need not prepare estrade that the examiner pedals etc., the examiner stands directly on the ground just can be by each eyepiece 49 of observation, visualization glass substrate.Like this, no matter be a high or individual short examiner, all easy visualization glass substrate.
In addition, owing to each eyepiece 45 is installed on the inclination lens barrel, so the overlooker can reduce the position of eye point by rotate each eyepiece 45 on above-below direction b.
In addition, the present invention is not limited to an above-mentioned embodiment, the implementation phase, in the scope that does not break away from aim of the present invention, can carry out many variations.
For example, in an above-mentioned embodiment, prolong lens barrel 4,6 by linking lens barrel portion 2 levels of 5 bendings, microscope head 20 is moved on whole of glass substrate 8, but be not limited to this, also can prolong lens barrel 4,6, form 1 level and prolong lens barrel by directly linking 2 levels.In addition, prolong under the situation of lens barrel forming 1 level, if be loaded with the objective table 7 that is located at the glass substrate 8 below the microscope head 20, whole of then can observe glass substrate 8 moving on the XY direction.
In addition, be located at the image rotation optical system in each level prolongation lens barrel 4,6, also can be one or more, so long as can utilize 1 image rotation optical system or a plurality of image rotation optical system, to vertical prolongation lens barrel 45, transmit by objective lens optical system 20 formation and by the structure of the picture of imaging len imaging and just can.
The vertical prolongation in the lens barrel 45 also can be provided with the non-focusing optical system in the part in this lens barrel, in the lens barrel part that transmits directional light by this non-focusing optical system, makes this lens barrel telescopically formation in vertical direction.For example, as shown in Figure 3, will vertically prolong lens barrel 45 and be divided into the vertical prolongation of the 1st vertical lens barrel 45a of prolongation lens barrel 45b, and make the 1st vertical lens barrel 45a that prolongs to insert or to extract in the 2nd vertical inside that prolongs lens barrel 45b with the 2nd.In addition, between each image rotation lenses 47,48, each lens 60,61 that constitutes the non-focusing optical system are set.Lens 60 are located at the 1st vertical inside that prolongs lens barrel 45a, and lens 61 are located at the 2nd vertical inside that prolongs lens barrel 45b.By such structure, the entire length that vertically prolongs lens barrel 45 is scalable.Thus, with observing the position of eye point of each eyepiece 49 of viewing optical system 50, be adjusted to according to the examiner on the optional position of vertical direction.
The vertical lens barrel 45 that prolongs is not limited to has 1 image rotation optical system that transmits picture in vertical direction in this lens barrel, a plurality of image rotation optical systems also can be set transmit picture.
In the viewing optical system 50, also the observation lens barrel 2 that is provided with rotationally with respect to vertical prolongation lens barrel 47, promptly be provided with in the horizontal direction can being arranged to respect to vertical prolongation lens barrel 47, is that the center is rotatable with this vertical axle that prolongs lens barrel 47.Thus, as shown in Figure 2, can with viewing optical system 50 after arrow ィ direction or arrow mouth direction (preferred arrow ィ direction) rotation, be accommodated in the testing fixture base side.In addition, when being accommodated in the testing fixture base side, viewing optical system 50 is configurable on the side of testing fixture body, also can use recess by being provided with to take on the testing fixture body, it is accommodated in this takes in in the recess.
In addition, in viewing optical system 50, eyepiece stalk portion 53 links with vertical prolongation lens barrel 45 by observing lens barrel 52, but also can directly be attached on the vertical prolongation lens barrel 45.Thus, can make the position of each eyepiece 49, further reduce the vertical-direction length size of observing lens barrel 52 downwards.
In addition, in the viewing optical system 50, as shown in Figure 4, it is scalable also can to make turning back of L word shape observe lens barrel 52, and makes eyepiece stalk portion 53 removable on above-below direction.At this moment, eyepiece stalk portion 53, the part that will be connected with eyepiece stalk portion 53 conduct is the observation lens barrel 62 of usefulness up and down, can insert on observation lens barrel 52 and extract.In addition, replace image rotation lenses 56 with the non-focusing optical system.Thus, eyepiece stalk portion 53 can move up at upper and lower.Fig. 4 represents to be moved upward the state of eyepiece stalk portion 53.
Macroscopic view illumination when the present invention can be used in glass substrate to flat-panel monitors such as semiconductor wafer, LCD or Plasmia indicating panels and carries out macro check.

Claims (10)

1, a kind of testing fixture has: the objective table of mounting checked property; Objective lens optical system forms the picture that is positioned in the above-mentioned checked property on the above-mentioned objective table; Imaging len carries out imaging to the above-mentioned picture that is formed by above-mentioned objective lens optical system; Level prolongs lens barrel, possesses the image rotation optical system, and this image rotation optical system will be by the above-mentioned picture of above-mentioned imaging len imaging, with respect to transmitting on the check surface almost parallel ground of above-mentioned checked property, it is characterized in that possessing:
The vertical lens barrel that prolongs has the image rotation optical system, and this image rotation optical system and above-mentioned level prolong lens barrel and link, and the above-mentioned picture that will be transmitted by the image rotation optical system in the above-mentioned level prolongation lens barrel transmits downwards;
Viewing optical system has eyepiece, and this eyepiece links with above-mentioned vertical prolongation lens barrel, is used for the above-mentioned picture that is transmitted by the image rotation optical system in the above-mentioned vertical prolongation lens barrel is carried out visualization.
2, as the testing fixture of claim 1 record, it is characterized in that:
Above-mentioned vertical prolongation lens barrel has a plurality of above-mentioned image rotation optical systems that transmit above-mentioned picture in vertical direction in this lens barrel.
3, as the testing fixture of claim 1 or 2 records, it is characterized in that:
Above-mentioned vertical prolongation lens barrel, the part in this lens barrel has the non-focusing optical system, has the structure of scalable above-mentioned lens barrel in vertical direction in the part of this non-focusing optical system.
4, as the testing fixture of claim 1 record, it is characterized in that:
Above-mentioned viewing optical system is set to can rotate with respect to above-mentioned vertical prolongation lens barrel.
5, as the testing fixture of claim 1 record, it is characterized in that:
Above-mentioned viewing optical system can be accommodated in above-mentioned testing fixture base side.
6, as the testing fixture of claim 1 record, it is characterized in that:
Above-mentioned viewing optical system have to the top that above-mentioned vertical prolongation lens barrel links turn back the observation lens barrel of an end and the eyepiece stalk portion that links with the other end of above-mentioned observation lens barrel.
7, as the testing fixture of claim 6 record, it is characterized in that:
Above-mentioned viewing optical system has the eyepiece stalk portion that links with above-mentioned vertical prolongation lens barrel.
8, as the testing fixture of claim 1 record, it is characterized in that:
The camera head that the above-mentioned picture that is transmitted by the above-mentioned image rotation optical system in the above-mentioned vertical prolongation lens barrel is made a video recording can be installed on the above-mentioned viewing optical system.
9, as the testing fixture of claim 1 record, it is characterized in that:
Above-mentioned vertical prolongation lens barrel forms and above-mentioned level prolongs the position of lens barrel and is in pairing length between the observation place of the above-mentioned checked property below that is positioned on the above-mentioned objective table.
10, a kind of testing fixture has: the objective table of mounting checked property; Objective lens optical system forms the picture that is positioned in the above-mentioned checked property on the above-mentioned objective table; Imaging len carries out imaging to the above-mentioned picture that is formed by above-mentioned objective lens optical system; A plurality of levels prolong lens barrels, have the image rotation optical system separately, and described image rotation optical system will be by the above-mentioned picture of above-mentioned imaging len imaging, with respect to transmitting on the check surface almost parallel ground of above-mentioned checked property; Column sections; Fixed station is located on the above-mentioned column sections, and is arranged to make 1 level prolongation lens barrel in above-mentioned a plurality of level prolongation lens barrel rotatable, it is characterized in that, comprising:
At least 1 links lens barrel portion, and each level of being arranged to above-mentioned a plurality of level prolongation lens barrels prolongs between lens barrel rotatable respectively;
Line slideway;
Mobile sliding part is arranged to move above-mentioned binding lens barrel portion above above-mentioned line slideway, and make above-mentioned 1 level prolong lens barrel and rotate with respect to the said fixing platform, and, above-mentioned a plurality of level is prolonged between the lens barrel bend to predetermined angle;
The vertical lens barrel that prolongs has the image rotation optical system, and this image rotation optical system and above-mentioned level prolong lens barrel and link, and the picture that will be transmitted by the image rotation optical system in the above-mentioned level prolongation lens barrel transmits downwards;
Viewing optical system has eyepiece, and this eyepiece links with above-mentioned vertical prolongation lens barrel, is used for the above-mentioned picture that is transmitted by the image rotation optical system in the above-mentioned vertical prolongation lens barrel is carried out visualization.
CNB2004100040950A 2003-02-10 2004-02-09 Detecting device Expired - Fee Related CN100374898C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP032399/2003 2003-02-10
JP2003032399A JP4409183B2 (en) 2003-02-10 2003-02-10 Inspection device

Publications (2)

Publication Number Publication Date
CN1521529A true CN1521529A (en) 2004-08-18
CN100374898C CN100374898C (en) 2008-03-12

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KR (1) KR101042118B1 (en)
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107735046A (en) * 2015-06-26 2018-02-23 索尼奥林巴斯医疗解决方案公司 Microscope for operation and operation microscope system

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006184303A (en) * 2004-12-24 2006-07-13 Olympus Corp Image inspecting device
JP5136835B2 (en) * 2007-10-29 2013-02-06 株式会社ニコン microscope
WO2009020161A1 (en) 2007-08-07 2009-02-12 Nikon Corporation Microscope
JP5109583B2 (en) * 2007-10-29 2012-12-26 株式会社ニコン Inverted microscope
KR100949342B1 (en) * 2009-04-17 2010-03-26 한국기계연구원 Jig of microscope for view of side
JP5522989B2 (en) 2009-07-08 2014-06-18 オリンパス株式会社 Observation optical system and microscope equipped with the same
KR101652355B1 (en) * 2015-03-30 2016-08-31 (주)넥스틴 optical apparatus for examining pattern image of semiconductor wafer
KR101652356B1 (en) * 2015-03-30 2016-08-31 (주)넥스틴 optical apparatus for examining pattern image of semiconductor device
KR200484944Y1 (en) 2016-01-06 2017-11-13 (주) 파루 Structure of temperature controller equipped with an insulating member

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN88211074U (en) * 1988-02-05 1988-08-17 周纪征 Tele-periscope
CN2033127U (en) * 1988-07-01 1989-02-22 张福庆 Tube included angle-changable periscopic sight
CN2156129Y (en) * 1993-04-13 1994-02-16 季凤林 Submarine for tourism
JPH07174552A (en) * 1993-11-05 1995-07-14 Olympus Optical Co Ltd Apparatus for detecting focal point
JP3827429B2 (en) * 1997-04-03 2006-09-27 オリンパス株式会社 Surgical microscope
JP2002277750A (en) 2001-03-15 2002-09-25 Olympus Optical Co Ltd Inspecting device
JP2002303795A (en) * 2001-04-04 2002-10-18 Olympus Optical Co Ltd Inverted microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107735046A (en) * 2015-06-26 2018-02-23 索尼奥林巴斯医疗解决方案公司 Microscope for operation and operation microscope system

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TWI303321B (en) 2008-11-21
JP4409183B2 (en) 2010-02-03
KR20040073306A (en) 2004-08-19
KR101042118B1 (en) 2011-06-16
TW200415376A (en) 2004-08-16
CN100374898C (en) 2008-03-12
JP2004245860A (en) 2004-09-02

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