JPH0973031A - Movable lens barrel microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a movable lens barrel microscope by which an eye point is moved with simple structure and microscopic observation is performed in easy posture, and where a lens barrel can be pulled in when it disturbs operation. SOLUTION: This microscope 1 equipped with an objective lens 2, an image formation lens 3 and an ocular 4 has an optical system where a luminous flux on the lens 2 side of the lens 3 of the microscope 1 becomes afocal; and an objective lens unit 7 consisting of the lens 2, a 1st mirror 5 bending the luminous flux from the lens 2, and a guide 6 extended in the direction of bent luminous flux is fixed in a microscope body 8; and a lens barrel unit 10 equipped with a 2nd mirror 9 bending the luminous flux from the 1st mirror 5, the lens 3 arranged in the bent luminous flux and the ocular 4 is movably provided along the guide 6.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a movable lens-barrel microscope, and more particularly to a movable lens-barrel microscope suitable for performing a microscope in a comfortable posture.

[0002]

2. Description of the Related Art Conventionally, a device for allowing an observer to perform a microscope in a comfortable posture by moving a position (eye point) looking into an eyepiece of a microscope back and forth or moving it up and down Have been devised. For example, as a lens barrel used in a microscope, there is one in which an eyepiece called a tilting lens barrel rotates up and down. For example, as shown in FIG. 4, this lens barrel includes relay optical systems 43a to 43d for guiding light from an objective lens (not shown) into the lens barrel 41 and a plurality of reflecting mirrors 44a.
44d and the like are arranged between the image forming lens 45 and the eyepiece lens 42 so as to bend the optical path, and rotate together with the eyepiece tube 47 rotating in the directions of arrows A and B with the shaft 46 as the center of rotation. The eye point can be adjusted up and down and back and forth by rotating the mirror 48.

Although the eye point is not changed, a stereoscopic microscope or the like is devised so that the optical path from the objective lens is once bent downward and then upward again to lower the eye point. You can observe it in a comfortable posture.

In addition to the above, it has been used in recent manufacturing of liquid crystal panel displays (hereinafter, LCD) and the like, for example, 400 × 50.
In a large-scale microscope used for inspection of a 0 mm glass plate, for example, as shown in FIG. 5, a long-distance relay optical system 53 is arranged between an objective lens 51 and an eyepiece lens 52, By making the distance between the position of the objective lens 51 and the eye point P large, the observer can perform a microscope without covering the sample.

An optical system for changing the relative position between the objective lens and the eye point is disclosed in US Pat.
No. 4,642, there is an objective lens 61, an imaging lens 62, an eyepiece lens 63, and other optical systems similar to those used in the microscope described above, as shown in FIG. The present invention fixes the lens barrel 64 and moves the optical system on the side of the objective lens 61 in, for example, the directions of arrows A and B. By fixing the eyepoint P and moving the objective lens 61, the observer's head is moved. It is possible to observe each point of the sample without moving the eye, not to change the eye point so that the microscope can be observed in a comfortable posture.

[0006]

By the way, in the conventional microscope, the objective lens unit and the lens barrel unit are generally fixed integrally, and the eye point of the microscope is adjusted with respect to the position of the observer's eyes. Therefore, the tilting lens barrel is used. However, the tilting lens barrel requires a long optical path within the lens barrel,
A long-distance relay optical system for guiding the light from the objective lens to the eyepiece in the lens barrel, and an arrangement of a plurality of mirrors for bending the optical path so that this optical path is housed in the lens barrel and an eyepiece lens. Since it requires a mechanism to rotate it,
The configuration was complicated and the cost was high. Also,
The tilting lens barrel is mainly configured to move the eyepoint up and down, and the forward and backward movement of the eyepoint follows the vertical movement of the eyepiece barrel due to the mechanism of the mechanism. , The eye point could not be adjusted up and down and back and forth independently.

Further, since the above-described LCD inspection microscope is used in a small clean room, the microscope barrel can be pulled out to the observer side so that the microscope can be inspected in a comfortable posture during the inspection work. When not doing so, it is desirable that the lens barrel can be stored compactly so that it does not get in the way of people passing by in front of the microscope by retracting it. In addition, as a recent form of microscopic work, it is common to observe the image of the sample with a TV camera and look into the eyepiece lens only when something abnormal occurs, so that the lens barrel can be pulled out only when necessary. Is preferred. However, the fixed lens barrel as described above cannot meet such a request, and the tilting lens barrel can only change the angle only in the eyepiece tube portion, so that the entire lens barrel can be moved forward and backward. Since it is not moved in the direction, it is not suitable for such a request.

In view of the above problems, the present invention allows the eyepoint to be moved with a simple structure, allows the microscope to be viewed in a comfortable posture, and retracts the lens barrel when it interferes with the work. An object of the present invention is to provide a movable lens barrel microscope that can be stored.

[0009]

In order to achieve the above object, a movable lens barrel microscope according to the present invention is a microscope having an objective lens, an imaging lens and an eyepiece lens. A unit having an optical system that becomes an afocal lens, a unit that includes an objective lens, a mirror that bends the light flux from the objective lens, and a guide that extends in the direction of the folded light flux is fixed to the microscope body. And that a unit including a second mirror that bends the light flux from the mirror, an imaging lens and an eyepiece lens that are arranged in the folded light flux is movably provided along the guide. It is a feature.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be specifically illustrated and described below. FIG. 1 is a schematic diagram showing the basic configuration of a movable lens barrel microscope according to the present invention. As shown in FIG. 1, the movable lens barrel microscope 1 according to this embodiment includes an objective lens 2, an imaging lens 3, and an eyepiece lens 4. In addition, for example, the first mirror 5 which is a half mirror
Are arranged on the optical path, and a predetermined amount of the light flux transmitted through the objective lens 2 is bent toward the eyepiece 4 side, for example, at a right angle, and the other light flux is not shown on the TV side (direction of arrow C).
It is designed to be transmitted toward. Guide 6
Are formed so as to extend in the light beam direction bent by the first mirror 5. In addition, the objective lens 2, the first mirror 5,
An objective lens unit 7 is configured by the guide 6 and the like, and the objective lens unit 7 is a base 8 of the main body of the microscope 1.
It is fixed to a base arm 81 extending from the inside.

A second mirror 9 composed of a reflecting mirror is provided so as to face the first mirror 5 on the optical path, for example, so that the light beam bent by the first mirror 5 is bent toward the imaging lens 3 side. Has become. Further, the imaging lens 3 is arranged on the light flux bent by the second mirror 9, and further, for example, a prism (not shown) is provided between the imaging lens 3 and the eyepiece lens 4. The light flux that has passed through 3 is on the camera side (arrow D
Direction) and the eyepiece side (direction of arrow E). Further, the second mirror 9, the imaging lens 3 and the eyepiece lens 4 constitute a lens barrel unit 10. Further, the light flux on the objective lens 2 side of the imaging lens 3 is optically designed to be afocal, and in the embodiment of FIG. 1, for example, by using an infinity design objective lens or the like for the objective lens 2. , Are optically arranged so that the light flux from the objective lens 2 to the imaging lens 3 via the first mirror 5 becomes afocal. Further, the guide 6 is, for example,
The lens barrel unit 10 including the second mirror 9 can be moved back and forth (directions of arrows A and B) along the guide 6, and as a result, the eyepoint P is formed. Can be moved back and forth with respect to the objective lens 2. It should be noted that the lens barrel unit 10 is not limited to the configuration in which it is laid across the guide 6 as shown in FIG. It may be configured to. In the embodiment of FIG. 1, the objective lens 2 and the imaging lens 3 are optically designed so that they can be separated by a predetermined distance.

In addition to the above, in the present microscope, in addition to the above, for example, a stage 11 for mounting a specimen, an illumination optical system 12, 1 for irradiating the specimen.
3 and the like, and the reflected light or transmitted light of the sample irradiated by the illumination optical systems 12, 13 and the like is used for the objective lens 2,
An image is formed at the eye point P through the first mirror 5, the second mirror 9, the image forming lens 3 and the eyepiece lens 4.

Since the movable lens barrel microscope according to the embodiment of the present invention is constructed as described above, when the lens barrel unit 10 is pushed in the direction of arrow A, the lens barrel unit 10 moves forward along the guide 6, As a result, the eye point P moves forward with respect to the objective lens 2, and the lens barrel unit 10 is moved to the arrow B.
When pushed in the direction, the lens barrel unit 10 moves rearward along the guide 6, and as a result, the eyepoint P moves rearward with respect to the objective lens 2. At this time, a part of the light beam between the objective lens 2 and the imaging lens 3 of the microscope 1 spreads out, but the light beam is afocal and does not affect the focal length. The peeked image is never blurred. In addition, when the microscope is not performed, if the lens barrel unit 10 is moved in the direction of arrow A along the guide 6,
The entire microscope can be made compact.

【Example】

An infinity-designed objective lens is provided as the objective lens of the embodiment of FIG. 1, and an optical design is made so that the distance between the objective lens 2 and the imaging lens 3 can be separated up to 200 mm with 22 fields of view. Has been done. The movable distance of the lens barrel unit 10 in the microscope of this embodiment is about 50 mm.

In the embodiment shown in FIGS. 2 and 3, the relay optical system 14 is provided between the objective lens 2 and the imaging lens 3 to form an L lens.
1 shows an embodiment in which the present invention is applied to a CD panel inspection microscope. In this embodiment, the objective lens 2
And the relay optical system 14 and between the relay optical system 14 and the imaging lens 3 are optically designed to be afocal. In addition, the first that bends the light flux from the objective lens 2
A relay lens barrel 15 including a mirror 5, a relay optical system 14, and a guide 6 and fixed by base arms 81 and 82.
A lens barrel unit 10 including an imaging lens 3, an eyepiece 4, and a second mirror 9 can be moved along a guide 6 integrally formed with the lens. Other configurations are substantially the same as those in the embodiment of FIG. 1, and are denoted by the same reference numerals as those in FIG. The movable distance of the lens barrel unit 10 in the microscope of this embodiment is about 80 mm.

[0016]

As described above, according to the movable lens barrel microscope of the present invention, the eye point can be moved with a simple structure, the microscope can be inspected in a comfortable posture, and the mirror can be used when it is an obstacle to the work. The tube can be retracted and placed.

When the tilting lens barrel is combined with the lens barrel unit of the movable lens barrel microscope according to the present invention, the eyepoint can be adjusted by moving it substantially forward and backward and up and down, thereby expanding the adjustment range of the eyepoint. However, there is a great merit that it is possible to provide an optimal eye point for the body shape of the observer such as height.

[0018]

[Brief description of drawings]

FIG. 1 is a conceptual configuration diagram showing an embodiment of a movable lens barrel microscope according to the present invention.

FIG. 2 is a conceptual configuration diagram showing another embodiment of the movable lens barrel microscope according to the present invention.

FIG. 3 is an enlarged view of a main part of the above embodiment.

FIG. 4 is a conceptual configuration diagram illustrating a tilting lens barrel.

FIG. 5 is a conceptual configuration diagram showing a conventional example of a large-scale microscope used for manufacturing LCDs.

FIG. 6 is a conceptual configuration diagram showing a conventional example of an optical system in which a lens barrel is fixed and an objective lens side is moved.

[Explanation of symbols]

 1 (movable lens barrel) microscope 2 objective lens 3 imaging lens 4 eyepiece 5 first mirror 6 guide 7 objective lens unit 8 base 81, 82 base arm 9 second mirror 10 lens barrel unit 11 stage 12, 13 illumination optical system 14 Relay optical system

Claims (2)

[Claims] 1. A microscope including an objective lens, an imaging lens, and an eyepiece lens, comprising an optical system for making a light beam on the objective lens side of the imaging lens afocal, and the objective lens and the objective lens A unit including a mirror that bends the light beam from the lens and a guide that extends in the direction of the light beam that is bent by the mirror is fixed to the arm of the microscope body, and the light beam that is bent by the mirror is sent to the imaging lens. A movable lens-barrel microscope, wherein a unit including a second mirror, the imaging lens, and the eyepiece lens is provided so as to be movable along the guide. 2. The movable lens barrel microscope according to claim 1, further comprising a relay lens between the imaging lens and the objective lens.