TWI300024B - - Google Patents
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- Publication number
- TWI300024B TWI300024B TW094129005A TW94129005A TWI300024B TW I300024 B TWI300024 B TW I300024B TW 094129005 A TW094129005 A TW 094129005A TW 94129005 A TW94129005 A TW 94129005A TW I300024 B TWI300024 B TW I300024B
- Authority
- TW
- Taiwan
- Prior art keywords
- ceramic
- powder layer
- layer
- polishing pad
- substrate
- Prior art date
Links
- 239000000919 ceramic Substances 0.000 claims description 50
- 239000010410 layer Substances 0.000 claims description 41
- 239000010432 diamond Substances 0.000 claims description 33
- 229910003460 diamond Inorganic materials 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 28
- 239000000843 powder Substances 0.000 claims description 25
- 238000005498 polishing Methods 0.000 claims description 23
- 239000004033 plastic Substances 0.000 claims description 17
- 229920003023 plastic Polymers 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 10
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 10
- 238000002844 melting Methods 0.000 claims description 9
- 239000004575 stone Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 239000012790 adhesive layer Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000003082 abrasive agent Substances 0.000 claims description 3
- 238000007650 screen-printing Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 238000009966 trimming Methods 0.000 claims description 2
- 229910052582 BN Inorganic materials 0.000 claims 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 238000007639 printing Methods 0.000 claims 1
- 238000009987 spinning Methods 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 239000002585 base Substances 0.000 description 13
- 238000000227 grinding Methods 0.000 description 8
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- 238000005553 drilling Methods 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 1
- 206010011469 Crying Diseases 0.000 description 1
- 241000289669 Erinaceus europaeus Species 0.000 description 1
- 241000282320 Panthera leo Species 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 238000004814 ceramic processing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 239000012770 industrial material Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW094129005A TW200708375A (en) | 2005-08-24 | 2005-08-24 | Ceramic polishing pad conditioner/dresser having plastic base and manufacturing method thereof |
| US11/466,716 US7467989B2 (en) | 2005-08-24 | 2006-08-23 | Ceramic polishing pad dresser and method for fabricating the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW094129005A TW200708375A (en) | 2005-08-24 | 2005-08-24 | Ceramic polishing pad conditioner/dresser having plastic base and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200708375A TW200708375A (en) | 2007-03-01 |
| TWI300024B true TWI300024B (enExample) | 2008-08-21 |
Family
ID=37804925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094129005A TW200708375A (en) | 2005-08-24 | 2005-08-24 | Ceramic polishing pad conditioner/dresser having plastic base and manufacturing method thereof |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7467989B2 (enExample) |
| TW (1) | TW200708375A (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI537097B (zh) * | 2012-04-10 | 2016-06-11 | 宋健民 | 組合式修整器及其製法與化學機械平坦化應用 |
| US20080014845A1 (en) * | 2006-07-11 | 2008-01-17 | Alpay Yilmaz | Conditioning disk having uniform structures |
| TWI289093B (en) * | 2006-07-26 | 2007-11-01 | Kinik Co | Method of manufacturing diamond disk |
| EP2411181A1 (en) | 2009-03-24 | 2012-02-01 | Saint-Gobain Abrasives, Inc. | Abrasive tool for use as a chemical mechanical planarization pad conditioner |
| TWI380878B (zh) * | 2009-04-21 | 2013-01-01 | Sung Chien Min | Combined Dressing Machine and Its Making Method |
| US20110159784A1 (en) * | 2009-04-30 | 2011-06-30 | First Principles LLC | Abrasive article with array of gimballed abrasive members and method of use |
| MY155563A (en) * | 2009-06-02 | 2015-10-30 | Saint Gobain Abrasives Inc | Corrosion-resistant cmp conditioning tools and methods for making and using same |
| TWI383860B (zh) * | 2009-06-19 | 2013-02-01 | 宋健民 | Modular dresser |
| US20110097977A1 (en) * | 2009-08-07 | 2011-04-28 | Abrasive Technology, Inc. | Multiple-sided cmp pad conditioning disk |
| CH701596B1 (de) * | 2009-08-11 | 2013-08-15 | Meister Abrasives Ag | Abrichtwerkzeug. |
| WO2011028700A2 (en) | 2009-09-01 | 2011-03-10 | Saint-Gobain Abrasives, Inc. | Chemical mechanical polishing conditioner |
| US9242342B2 (en) | 2012-03-14 | 2016-01-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Manufacture and method of making the same |
| EP2880117B1 (de) | 2012-08-02 | 2017-03-01 | Robert Bosch GmbH | Schleifkorn, enthaltend eine erste fläche ohne ecke und zweite fläche mit ecke |
| CN203390712U (zh) * | 2013-04-08 | 2014-01-15 | 宋健民 | 化学机械研磨修整器 |
| TWI546158B (zh) * | 2013-12-20 | 2016-08-21 | 中國砂輪企業股份有限公司 | 低磁性化學機械研磨修整器 |
| TWI551399B (zh) * | 2014-01-20 | 2016-10-01 | 中國砂輪企業股份有限公司 | 高度磨料品質之化學機械研磨修整器 |
| JP2017035751A (ja) * | 2015-08-10 | 2017-02-16 | 株式会社ディスコ | パッドドレッサー |
| TWI623382B (zh) * | 2015-10-27 | 2018-05-11 | 中國砂輪企業股份有限公司 | Hybrid chemical mechanical polishing dresser |
| WO2017177072A1 (en) | 2016-04-06 | 2017-10-12 | M Cubed Technologies, Inc. | Diamond composite cmp pad conditioner |
| CN105729308A (zh) * | 2016-05-09 | 2016-07-06 | 廊坊西波尔钻石技术有限公司 | 一种钎焊式金刚石笔条修整笔及加工方法 |
| TWI636854B (zh) * | 2017-06-12 | 2018-10-01 | 中國砂輪企業股份有限公司 | 研磨工具及其製造方法 |
| CN116619246B (zh) * | 2023-07-24 | 2023-11-10 | 北京寰宇晶科科技有限公司 | 一种具有金刚石柱状晶簇的cmp抛光垫修整器及其制备方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2118409A (en) * | 1937-03-20 | 1938-05-24 | Julius E Loewy | Abrasive assembly |
| US4907376A (en) * | 1988-05-10 | 1990-03-13 | Norton Company | Plate mounted grinding wheel |
| JP3527448B2 (ja) * | 1999-12-20 | 2004-05-17 | 株式会社リード | Ｃｍｐ研磨布用ドレッサー及びその製造方法 |
-
2005
- 2005-08-24 TW TW094129005A patent/TW200708375A/zh not_active IP Right Cessation
-
2006
- 2006-08-23 US US11/466,716 patent/US7467989B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US7467989B2 (en) | 2008-12-23 |
| TW200708375A (en) | 2007-03-01 |
| US20070049185A1 (en) | 2007-03-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |