TWI289532B - Housing method to glass substrate carrying box and glass substrate carrying box used therefor - Google Patents

Housing method to glass substrate carrying box and glass substrate carrying box used therefor Download PDF

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Publication number
TWI289532B
TWI289532B TW92103313A TW92103313A TWI289532B TW I289532 B TWI289532 B TW I289532B TW 92103313 A TW92103313 A TW 92103313A TW 92103313 A TW92103313 A TW 92103313A TW I289532 B TWI289532 B TW I289532B
Authority
TW
Taiwan
Prior art keywords
glass substrate
cover
opening portion
gasket
top plate
Prior art date
Application number
TW92103313A
Other languages
English (en)
Chinese (zh)
Other versions
TW200410880A (en
Inventor
Takao Hirabayashi
Original Assignee
Kyokuhei Glass Kako Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyokuhei Glass Kako Co Ltd filed Critical Kyokuhei Glass Kako Co Ltd
Publication of TW200410880A publication Critical patent/TW200410880A/zh
Application granted granted Critical
Publication of TWI289532B publication Critical patent/TWI289532B/zh

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Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Wrapping Of Specific Fragile Articles (AREA)
  • Closures For Containers (AREA)
TW92103313A 2002-12-27 2003-02-18 Housing method to glass substrate carrying box and glass substrate carrying box used therefor TWI289532B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002381749A JP3926265B2 (ja) 2002-12-27 2002-12-27 ガラス基板搬送用ボックス

Publications (2)

Publication Number Publication Date
TW200410880A TW200410880A (en) 2004-07-01
TWI289532B true TWI289532B (en) 2007-11-11

Family

ID=32817580

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92103313A TWI289532B (en) 2002-12-27 2003-02-18 Housing method to glass substrate carrying box and glass substrate carrying box used therefor

Country Status (2)

Country Link
JP (1) JP3926265B2 (ja)
TW (1) TWI289532B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5146903B2 (ja) * 2007-03-07 2013-02-20 日本電気硝子株式会社 ガラス基板梱包装置
JP2010129674A (ja) * 2008-11-26 2010-06-10 Shin Etsu Polymer Co Ltd 基板収納容器、クランプハンド、及び基板の取り出し方法

Also Published As

Publication number Publication date
JP3926265B2 (ja) 2007-06-06
TW200410880A (en) 2004-07-01
JP2004210350A (ja) 2004-07-29

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees