TWI284195B - Capacitance-based position sensor - Google Patents
Capacitance-based position sensor Download PDFInfo
- Publication number
- TWI284195B TWI284195B TW091133076A TW91133076A TWI284195B TW I284195 B TWI284195 B TW I284195B TW 091133076 A TW091133076 A TW 091133076A TW 91133076 A TW91133076 A TW 91133076A TW I284195 B TWI284195 B TW I284195B
- Authority
- TW
- Taiwan
- Prior art keywords
- plates
- axis
- plate
- objects
- board
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 claims abstract description 36
- 230000033001 locomotion Effects 0.000 claims abstract description 29
- 238000003860 storage Methods 0.000 claims description 77
- 230000008859 change Effects 0.000 claims description 25
- 230000000712 assembly Effects 0.000 claims description 22
- 238000000429 assembly Methods 0.000 claims description 22
- 230000009471 action Effects 0.000 claims description 13
- 230000008878 coupling Effects 0.000 claims description 12
- 238000010168 coupling process Methods 0.000 claims description 12
- 238000005859 coupling reaction Methods 0.000 claims description 12
- 230000003247 decreasing effect Effects 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 206010011224 Cough Diseases 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 description 18
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 1
- 241001465754 Metazoa Species 0.000 description 1
- 241000282376 Panthera tigris Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000001356 surgical procedure Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000003442 weekly effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/043,970 US7142500B2 (en) | 2002-01-11 | 2002-01-11 | Sensor with varying capacitance based on relative position between objects |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200301818A TW200301818A (en) | 2003-07-16 |
| TWI284195B true TWI284195B (en) | 2007-07-21 |
Family
ID=21929857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW091133076A TWI284195B (en) | 2002-01-11 | 2002-11-11 | Capacitance-based position sensor |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7142500B2 (enExample) |
| EP (1) | EP1327861B1 (enExample) |
| JP (1) | JP4143420B2 (enExample) |
| KR (1) | KR101012981B1 (enExample) |
| CN (1) | CN100425943C (enExample) |
| DE (1) | DE60336282D1 (enExample) |
| SG (1) | SG107623A1 (enExample) |
| TW (1) | TWI284195B (enExample) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7075317B2 (en) * | 2004-08-06 | 2006-07-11 | Waters Investment Limited | System and method for measurement of small-angle or small-displacement |
| KR100647724B1 (ko) * | 2004-10-28 | 2006-11-28 | 주식회사알에프윈도우 | 이동형 무선 사설교환장치 |
| US7343813B1 (en) * | 2005-02-15 | 2008-03-18 | Harrington Richard H | Multicapacitor sensor array |
| US7893697B2 (en) * | 2006-02-21 | 2011-02-22 | Cyberoptics Semiconductor, Inc. | Capacitive distance sensing in semiconductor processing tools |
| KR101259218B1 (ko) * | 2006-02-21 | 2013-04-29 | 싸이버옵틱스 쎄미콘덕터 인코퍼레이티드 | 반도체 처리 툴의 용량성 거리 감지 장치 및 방법 |
| US7808061B2 (en) * | 2006-07-28 | 2010-10-05 | Hewlett-Packard Development Company, L.P. | Multi-die apparatus including moveable portions |
| KR101388304B1 (ko) | 2006-09-29 | 2014-04-22 | 싸이버옵틱스 쎄미콘덕터 인코퍼레이티드 | 기판형 입자 센서 |
| TW200849444A (en) * | 2007-04-05 | 2008-12-16 | Cyberoptics Semiconductor Inc | Semiconductor processing system with integrated showerhead distance measuring device |
| GB2448821A (en) * | 2007-04-24 | 2008-10-29 | Seiko Instr Inc | Differential capacitive proximity detector |
| JP2008292446A (ja) * | 2007-04-24 | 2008-12-04 | Seiko Instruments Inc | 近接検出装置及び近接検出方法 |
| US20090015268A1 (en) * | 2007-07-13 | 2009-01-15 | Gardner Delrae H | Device and method for compensating a capacitive sensor measurement for variations caused by environmental conditions in a semiconductor processing environment |
| US7570066B2 (en) * | 2007-11-01 | 2009-08-04 | Seagate Technology Llc | Simultaneous detection of in-plane and out-of-plane position displacement with capacitive sensors |
| US20090206846A1 (en) * | 2008-02-14 | 2009-08-20 | Sanchez Francisco J | Capacitor-based position sensor for vehicle |
| EP2112518A1 (en) * | 2008-04-25 | 2009-10-28 | ALSTOM Technology Ltd | Brush wear monitor |
| US7898266B2 (en) | 2008-06-04 | 2011-03-01 | Seagate Technology Llc | Probe with electrostatic actuation and capacitive sensor |
| JP5522961B2 (ja) * | 2009-03-17 | 2014-06-18 | オリンパス株式会社 | 慣性駆動アクチュエータのキャリブレーション方法及び慣性駆動アクチュエータ装置 |
| KR20110129407A (ko) | 2009-03-19 | 2011-12-01 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | 3상 용량 기반 감지 |
| US8272266B2 (en) * | 2009-04-09 | 2012-09-25 | Hewlett-Packard Development Company, L.P. | Gyroscopes using surface electrodes |
| US9658053B2 (en) | 2010-03-09 | 2017-05-23 | Si-Ware Systems | Self calibration for mirror positioning in optical MEMS interferometers |
| US8656778B2 (en) | 2010-12-30 | 2014-02-25 | Rosemount Aerospace Inc. | In-plane capacitive mems accelerometer |
| JP5524170B2 (ja) * | 2011-12-09 | 2014-06-18 | 株式会社東芝 | 記憶装置 |
| US20130320466A1 (en) * | 2012-05-31 | 2013-12-05 | Analog Devices, Inc. | Package for Damping Inertial Sensor |
| US9250143B2 (en) * | 2012-09-19 | 2016-02-02 | College Park Industries, Inc. | Multicapacitor force/moment sensor arrays |
| WO2014117158A1 (en) * | 2013-01-28 | 2014-07-31 | Si-Ware Systems | Self calibration for mirror positioning in optical mems interferometers |
| WO2014120206A1 (en) * | 2013-01-31 | 2014-08-07 | Hewlett-Packard Development Company, L.P. | Sensor having particle barrier |
| KR102489065B1 (ko) * | 2013-03-15 | 2023-01-13 | 어플라이드 머티어리얼스, 인코포레이티드 | Ald 플래튼 서셉터의 위치 및 온도 모니터링 |
| CN104677390B (zh) * | 2013-11-26 | 2017-09-29 | 林立 | 电容式传感器及组合电容式位移测量传感系统 |
| CN104238573B (zh) * | 2014-08-21 | 2017-08-25 | 衡括流体动力实验室（北京）有限公司 | 动力提供装置及系统 |
| CN104268967A (zh) * | 2014-09-29 | 2015-01-07 | 深圳市爱普特微电子有限公司 | 基于电容式传感器的安全门禁方法和装置 |
| TWI575232B (zh) * | 2015-06-12 | 2017-03-21 | 財團法人工業技術研究院 | 感測裝置 |
| US10702658B2 (en) * | 2015-07-12 | 2020-07-07 | Patients Pending Ltd. | Cover for liquid delivery system with integrated plunger position sensing, and corresponding method |
| TWI577974B (zh) * | 2016-02-04 | 2017-04-11 | 台灣艾華電子工業股份有限公司 | 位置感測器及其可變式電容組件 |
| CN107462142B (zh) * | 2016-06-03 | 2019-09-17 | 清华大学 | 电容式接触型位移测量传感器及传感系统 |
| CN106705937B (zh) * | 2016-12-13 | 2019-11-15 | 国家电网公司 | 基于差分电容的电压杆塔倾斜监测系统及其方法 |
| CN109742998A (zh) * | 2018-12-24 | 2019-05-10 | 维沃移动通信有限公司 | 振动组件、马达控制方法及终端 |
| CN109916284A (zh) * | 2019-03-01 | 2019-06-21 | 维沃移动通信有限公司 | 一种位置检测方法及终端设备 |
| CN113116162B (zh) * | 2019-12-31 | 2023-10-03 | 浙江苏泊尔家电制造有限公司 | 烹饪器具和烹饪器具的控制方法 |
| CN112325756A (zh) * | 2020-09-04 | 2021-02-05 | 山东休普动力科技股份有限公司 | 自由活塞发动机动子位移传感器、动子识别系统及方法 |
| US20230143537A1 (en) * | 2021-11-11 | 2023-05-11 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor processing tool and method of operation |
| CN117674536B (zh) * | 2024-01-30 | 2024-06-04 | 基合半导体（宁波）有限公司 | 对焦马达、对焦马达的闭环控制方法及摄像设备 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4879508A (en) * | 1986-04-04 | 1989-11-07 | Mitutoyo Corporation | Capacitance-type measuring device for absolute measurement of positions |
| USRE34741E (en) * | 1986-04-04 | 1994-09-27 | Mitutoyo Corporation | Electrode structure for capacitance-type measurement transducers |
| CH670306A5 (enExample) * | 1986-11-13 | 1989-05-31 | Hans Ulrich Meyer | |
| US4893071A (en) * | 1988-05-24 | 1990-01-09 | American Telephone And Telegraph Company, At&T Bell Laboratories | Capacitive incremental position measurement and motion control |
| CH685214A5 (fr) * | 1991-10-15 | 1995-04-28 | Hans Ulrich Meyer | Capteur capacitif de position. |
| CN2117588U (zh) * | 1992-03-18 | 1992-09-30 | 水利部、能源部地质勘探机电研究所 | 平板电容式位移传感器 |
| US5418771A (en) * | 1993-02-25 | 1995-05-23 | Canon Kabushiki Kaisha | Information processing apparatus provided with surface aligning mechanism between probe head substrate and recording medium substrate |
| JP3625530B2 (ja) * | 1995-06-12 | 2005-03-02 | ヒューレット・パッカード・カンパニー | 位置検出装置及び位置検出方法 |
| US5708367A (en) * | 1995-07-10 | 1998-01-13 | Tousson; Eliahou | Digital position sensor |
| JPH1038508A (ja) * | 1996-07-22 | 1998-02-13 | Hewlett Packard Co <Hp> | 位置検出装置及び位置決め装置 |
| DE69621334T2 (de) * | 1996-10-11 | 2003-01-09 | Brown & Sharpe Tesa S.A., Renens | Kapazitive Dimensionsmesseinrichtung |
| US5896232A (en) | 1997-08-07 | 1999-04-20 | International Business Machines Corporation | Highly efficient and compact frontlighting for polarization-based reflection light valves |
| US6868726B2 (en) * | 2000-01-20 | 2005-03-22 | Analog Devices Imi, Inc. | Position sensing with improved linearity |
| US6738336B2 (en) * | 2001-05-16 | 2004-05-18 | Hewlett-Packard Development Company, L.P. | Data storage device |
| US6504385B2 (en) | 2001-05-31 | 2003-01-07 | Hewlett-Pakcard Company | Three-axis motion sensor |
| US6509620B2 (en) * | 2001-05-31 | 2003-01-21 | Hewlett-Packard Company | Flexure coupling block for motion sensor |
| US6776042B2 (en) | 2002-01-25 | 2004-08-17 | Kinemetrics, Inc. | Micro-machined accelerometer |
-
2002
- 2002-01-11 US US10/043,970 patent/US7142500B2/en not_active Expired - Fee Related
- 2002-11-08 SG SG200206767A patent/SG107623A1/en unknown
- 2002-11-11 TW TW091133076A patent/TWI284195B/zh not_active IP Right Cessation
-
2003
- 2003-01-07 JP JP2003001388A patent/JP4143420B2/ja not_active Expired - Fee Related
- 2003-01-10 EP EP03250162A patent/EP1327861B1/en not_active Expired - Lifetime
- 2003-01-10 DE DE60336282T patent/DE60336282D1/de not_active Expired - Lifetime
- 2003-01-10 KR KR1020030001511A patent/KR101012981B1/ko not_active Expired - Fee Related
- 2003-01-13 CN CNB031016022A patent/CN100425943C/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN100425943C (zh) | 2008-10-15 |
| EP1327861A1 (en) | 2003-07-16 |
| US20030133372A1 (en) | 2003-07-17 |
| EP1327861B1 (en) | 2011-03-09 |
| CN1497237A (zh) | 2004-05-19 |
| TW200301818A (en) | 2003-07-16 |
| KR20030061337A (ko) | 2003-07-18 |
| SG107623A1 (en) | 2004-12-29 |
| JP4143420B2 (ja) | 2008-09-03 |
| DE60336282D1 (de) | 2011-04-21 |
| KR101012981B1 (ko) | 2011-02-10 |
| US7142500B2 (en) | 2006-11-28 |
| JP2003214807A (ja) | 2003-07-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI284195B (en) | Capacitance-based position sensor | |
| JP3029499B2 (ja) | 記録再生装置 | |
| US6404647B1 (en) | Solid-state mass memory storage device | |
| US5053995A (en) | Tunnel current data storage apparatus having separate lever bodies | |
| JP3625530B2 (ja) | 位置検出装置及び位置検出方法 | |
| US8026715B2 (en) | Magneto-resistance based nano-scale position sensor | |
| WO1997004451A1 (en) | Microelectromechanical structure and process of making same | |
| JP2961452B2 (ja) | 情報処理装置 | |
| US7852739B2 (en) | Positioning system mounted on probe memory device and positioning method thereof | |
| US7903532B2 (en) | Elevated electrodes for probe position sensing | |
| JPH05225620A (ja) | 平行平面保持機構及びそれを用いたメモリ装置及びｓｔｍ装置 | |
| JP2851855B2 (ja) | 記録再生装置 | |
| JP3053971B2 (ja) | トンネル電流発生用三次元変位素子、該トンネル電流発生用三次元変位素子を用いたマルチ探針ユニット、および情報処理装置 | |
| JPH0926427A (ja) | 位置決め装置、およびこれを用いたメディア移動型メモリ装置 | |
| JP2673351B2 (ja) | メモリー出力装置 | |
| JP3060142B2 (ja) | カンチレバー型変位素子の駆動方法、走査型トンネル顕微鏡、情報処理装置、及びカンチレバー型変位素子 | |
| Khan et al. | Investigation of leakage flux in a capacitive angular displacement sensor used in torque motors by 3D finite element field modelling | |
| JPH06317404A (ja) | カンチレバー型アクチュエータ及びそれを用いた走査型探針顕微鏡並びに情報処理装置 | |
| JPH0250332A (ja) | 記録再生装置 | |
| US7983138B2 (en) | Surface spacing using rigid spacers | |
| JPH07110969A (ja) | 面合わせ方法，位置制御機構および該機構を有する情報処理装置 | |
| JPH05307778A (ja) | 記録再生装置 | |
| JPH06258017A (ja) | 微小変位素子及びそれを用いたマルチ微小変位素子、トンネル電流検出装置、情報処理装置 | |
| JPH04206536A (ja) | 探針駆動機構、該機構を備えたトンネル電流検出装置及び記録再生装置 | |
| JPH04143943A (ja) | プローブユニット及びこれを備えた記録消去装置、再生装置、記録再生消去装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |