KR101012981B1 - 이동가능한 시스템 및 센서 - Google Patents

이동가능한 시스템 및 센서 Download PDF

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Publication number
KR101012981B1
KR101012981B1 KR1020030001511A KR20030001511A KR101012981B1 KR 101012981 B1 KR101012981 B1 KR 101012981B1 KR 1020030001511 A KR1020030001511 A KR 1020030001511A KR 20030001511 A KR20030001511 A KR 20030001511A KR 101012981 B1 KR101012981 B1 KR 101012981B1
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South Korea
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plate
plates
axis
objects
capacitance
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KR1020030001511A
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Korean (ko)
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KR20030061337A (ko
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파센도날드제이
호엔스토스티
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휴렛-팩커드 컴퍼니(델라웨어주법인)
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
KR1020030001511A 2002-01-11 2003-01-10 이동가능한 시스템 및 센서 Expired - Fee Related KR101012981B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/043,970 2002-01-11
US10/043,970 US7142500B2 (en) 2002-01-11 2002-01-11 Sensor with varying capacitance based on relative position between objects

Publications (2)

Publication Number Publication Date
KR20030061337A KR20030061337A (ko) 2003-07-18
KR101012981B1 true KR101012981B1 (ko) 2011-02-10

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KR1020030001511A Expired - Fee Related KR101012981B1 (ko) 2002-01-11 2003-01-10 이동가능한 시스템 및 센서

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US (1) US7142500B2 (enExample)
EP (1) EP1327861B1 (enExample)
JP (1) JP4143420B2 (enExample)
KR (1) KR101012981B1 (enExample)
CN (1) CN100425943C (enExample)
DE (1) DE60336282D1 (enExample)
SG (1) SG107623A1 (enExample)
TW (1) TWI284195B (enExample)

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KR101259218B1 (ko) * 2006-02-21 2013-04-29 싸이버옵틱스 쎄미콘덕터 인코퍼레이티드 반도체 처리 툴의 용량성 거리 감지 장치 및 방법
US7808061B2 (en) * 2006-07-28 2010-10-05 Hewlett-Packard Development Company, L.P. Multi-die apparatus including moveable portions
KR101388304B1 (ko) 2006-09-29 2014-04-22 싸이버옵틱스 쎄미콘덕터 인코퍼레이티드 기판형 입자 센서
TW200849444A (en) * 2007-04-05 2008-12-16 Cyberoptics Semiconductor Inc Semiconductor processing system with integrated showerhead distance measuring device
GB2448821A (en) * 2007-04-24 2008-10-29 Seiko Instr Inc Differential capacitive proximity detector
JP2008292446A (ja) * 2007-04-24 2008-12-04 Seiko Instruments Inc 近接検出装置及び近接検出方法
US20090015268A1 (en) * 2007-07-13 2009-01-15 Gardner Delrae H Device and method for compensating a capacitive sensor measurement for variations caused by environmental conditions in a semiconductor processing environment
US7570066B2 (en) * 2007-11-01 2009-08-04 Seagate Technology Llc Simultaneous detection of in-plane and out-of-plane position displacement with capacitive sensors
US20090206846A1 (en) * 2008-02-14 2009-08-20 Sanchez Francisco J Capacitor-based position sensor for vehicle
EP2112518A1 (en) * 2008-04-25 2009-10-28 ALSTOM Technology Ltd Brush wear monitor
US7898266B2 (en) 2008-06-04 2011-03-01 Seagate Technology Llc Probe with electrostatic actuation and capacitive sensor
JP5522961B2 (ja) * 2009-03-17 2014-06-18 オリンパス株式会社 慣性駆動アクチュエータのキャリブレーション方法及び慣性駆動アクチュエータ装置
KR20110129407A (ko) 2009-03-19 2011-12-01 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. 3상 용량 기반 감지
US8272266B2 (en) * 2009-04-09 2012-09-25 Hewlett-Packard Development Company, L.P. Gyroscopes using surface electrodes
US9658053B2 (en) 2010-03-09 2017-05-23 Si-Ware Systems Self calibration for mirror positioning in optical MEMS interferometers
US8656778B2 (en) 2010-12-30 2014-02-25 Rosemount Aerospace Inc. In-plane capacitive mems accelerometer
JP5524170B2 (ja) * 2011-12-09 2014-06-18 株式会社東芝 記憶装置
US20130320466A1 (en) * 2012-05-31 2013-12-05 Analog Devices, Inc. Package for Damping Inertial Sensor
US9250143B2 (en) * 2012-09-19 2016-02-02 College Park Industries, Inc. Multicapacitor force/moment sensor arrays
WO2014117158A1 (en) * 2013-01-28 2014-07-31 Si-Ware Systems Self calibration for mirror positioning in optical mems interferometers
WO2014120206A1 (en) * 2013-01-31 2014-08-07 Hewlett-Packard Development Company, L.P. Sensor having particle barrier
KR102489065B1 (ko) * 2013-03-15 2023-01-13 어플라이드 머티어리얼스, 인코포레이티드 Ald 플래튼 서셉터의 위치 및 온도 모니터링
CN104677390B (zh) * 2013-11-26 2017-09-29 林立 电容式传感器及组合电容式位移测量传感系统
CN104238573B (zh) * 2014-08-21 2017-08-25 衡括流体动力实验室（北京）有限公司 动力提供装置及系统
CN104268967A (zh) * 2014-09-29 2015-01-07 深圳市爱普特微电子有限公司 基于电容式传感器的安全门禁方法和装置
TWI575232B (zh) * 2015-06-12 2017-03-21 財團法人工業技術研究院 感測裝置
US10702658B2 (en) * 2015-07-12 2020-07-07 Patients Pending Ltd. Cover for liquid delivery system with integrated plunger position sensing, and corresponding method
TWI577974B (zh) * 2016-02-04 2017-04-11 台灣艾華電子工業股份有限公司 位置感測器及其可變式電容組件
CN107462142B (zh) * 2016-06-03 2019-09-17 清华大学 电容式接触型位移测量传感器及传感系统
CN106705937B (zh) * 2016-12-13 2019-11-15 国家电网公司 基于差分电容的电压杆塔倾斜监测系统及其方法
CN109742998A (zh) * 2018-12-24 2019-05-10 维沃移动通信有限公司 振动组件、马达控制方法及终端
CN109916284A (zh) * 2019-03-01 2019-06-21 维沃移动通信有限公司 一种位置检测方法及终端设备
CN113116162B (zh) * 2019-12-31 2023-10-03 浙江苏泊尔家电制造有限公司 烹饪器具和烹饪器具的控制方法
CN112325756A (zh) * 2020-09-04 2021-02-05 山东休普动力科技股份有限公司 自由活塞发动机动子位移传感器、动子识别系统及方法
US20230143537A1 (en) * 2021-11-11 2023-05-11 Taiwan Semiconductor Manufacturing Company Limited Semiconductor processing tool and method of operation
CN117674536B (zh) * 2024-01-30 2024-06-04 基合半导体（宁波）有限公司 对焦马达、对焦马达的闭环控制方法及摄像设备

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US6072318A (en) 1996-10-11 2000-06-06 Brown & Sharpe Tesa S.A. Capacitive device for measuring dimension

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US5304937A (en) 1991-10-15 1994-04-19 Meyer Hans Ulrich Capacitive position sensor with an electrode array cursor and topographically featured scale
US6072318A (en) 1996-10-11 2000-06-06 Brown & Sharpe Tesa S.A. Capacitive device for measuring dimension

Also Published As

Publication number Publication date
CN100425943C (zh) 2008-10-15
TWI284195B (en) 2007-07-21
EP1327861A1 (en) 2003-07-16
US20030133372A1 (en) 2003-07-17
EP1327861B1 (en) 2011-03-09
CN1497237A (zh) 2004-05-19
TW200301818A (en) 2003-07-16
KR20030061337A (ko) 2003-07-18
SG107623A1 (en) 2004-12-29
JP4143420B2 (ja) 2008-09-03
DE60336282D1 (de) 2011-04-21
US7142500B2 (en) 2006-11-28
JP2003214807A (ja) 2003-07-30

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