SG107623A1 - Capacitance-based position sensor - Google Patents

Capacitance-based position sensor

Info

Publication number
SG107623A1
SG107623A1 SG200206767A SG200206767A SG107623A1 SG 107623 A1 SG107623 A1 SG 107623A1 SG 200206767 A SG200206767 A SG 200206767A SG 200206767 A SG200206767 A SG 200206767A SG 107623 A1 SG107623 A1 SG 107623A1
Authority
SG
Singapore
Prior art keywords
capacitance
position sensor
based position
sensor
Prior art date
Application number
SG200206767A
Other languages
English (en)
Inventor
J Fasen Donald
T Hoen Storrs
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of SG107623A1 publication Critical patent/SG107623A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
SG200206767A 2002-01-11 2002-11-08 Capacitance-based position sensor SG107623A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/043,970 US7142500B2 (en) 2002-01-11 2002-01-11 Sensor with varying capacitance based on relative position between objects

Publications (1)

Publication Number Publication Date
SG107623A1 true SG107623A1 (en) 2004-12-29

Family

ID=21929857

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200206767A SG107623A1 (en) 2002-01-11 2002-11-08 Capacitance-based position sensor

Country Status (8)

Country Link
US (1) US7142500B2 (enExample)
EP (1) EP1327861B1 (enExample)
JP (1) JP4143420B2 (enExample)
KR (1) KR101012981B1 (enExample)
CN (1) CN100425943C (enExample)
DE (1) DE60336282D1 (enExample)
SG (1) SG107623A1 (enExample)
TW (1) TWI284195B (enExample)

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US7808061B2 (en) * 2006-07-28 2010-10-05 Hewlett-Packard Development Company, L.P. Multi-die apparatus including moveable portions
KR101388304B1 (ko) 2006-09-29 2014-04-22 싸이버옵틱스 쎄미콘덕터 인코퍼레이티드 기판형 입자 센서
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US8272266B2 (en) * 2009-04-09 2012-09-25 Hewlett-Packard Development Company, L.P. Gyroscopes using surface electrodes
US9658053B2 (en) 2010-03-09 2017-05-23 Si-Ware Systems Self calibration for mirror positioning in optical MEMS interferometers
US8656778B2 (en) 2010-12-30 2014-02-25 Rosemount Aerospace Inc. In-plane capacitive mems accelerometer
JP5524170B2 (ja) * 2011-12-09 2014-06-18 株式会社東芝 記憶装置
US20130320466A1 (en) * 2012-05-31 2013-12-05 Analog Devices, Inc. Package for Damping Inertial Sensor
US9250143B2 (en) * 2012-09-19 2016-02-02 College Park Industries, Inc. Multicapacitor force/moment sensor arrays
WO2014117158A1 (en) * 2013-01-28 2014-07-31 Si-Ware Systems Self calibration for mirror positioning in optical mems interferometers
WO2014120206A1 (en) * 2013-01-31 2014-08-07 Hewlett-Packard Development Company, L.P. Sensor having particle barrier
KR102489065B1 (ko) * 2013-03-15 2023-01-13 어플라이드 머티어리얼스, 인코포레이티드 Ald 플래튼 서셉터의 위치 및 온도 모니터링
CN104677390B (zh) * 2013-11-26 2017-09-29 林立 电容式传感器及组合电容式位移测量传感系统
CN104238573B (zh) * 2014-08-21 2017-08-25 衡括流体动力实验室（北京）有限公司 动力提供装置及系统
CN104268967A (zh) * 2014-09-29 2015-01-07 深圳市爱普特微电子有限公司 基于电容式传感器的安全门禁方法和装置
TWI575232B (zh) * 2015-06-12 2017-03-21 財團法人工業技術研究院 感測裝置
US10702658B2 (en) * 2015-07-12 2020-07-07 Patients Pending Ltd. Cover for liquid delivery system with integrated plunger position sensing, and corresponding method
TWI577974B (zh) * 2016-02-04 2017-04-11 台灣艾華電子工業股份有限公司 位置感測器及其可變式電容組件
CN107462142B (zh) * 2016-06-03 2019-09-17 清华大学 电容式接触型位移测量传感器及传感系统
CN106705937B (zh) * 2016-12-13 2019-11-15 国家电网公司 基于差分电容的电压杆塔倾斜监测系统及其方法
CN109742998A (zh) * 2018-12-24 2019-05-10 维沃移动通信有限公司 振动组件、马达控制方法及终端
CN109916284A (zh) * 2019-03-01 2019-06-21 维沃移动通信有限公司 一种位置检测方法及终端设备
CN113116162B (zh) * 2019-12-31 2023-10-03 浙江苏泊尔家电制造有限公司 烹饪器具和烹饪器具的控制方法
CN112325756A (zh) * 2020-09-04 2021-02-05 山东休普动力科技股份有限公司 自由活塞发动机动子位移传感器、动子识别系统及方法
US20230143537A1 (en) * 2021-11-11 2023-05-11 Taiwan Semiconductor Manufacturing Company Limited Semiconductor processing tool and method of operation
CN117674536B (zh) * 2024-01-30 2024-06-04 基合半导体（宁波）有限公司 对焦马达、对焦马达的闭环控制方法及摄像设备

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Also Published As

Publication number Publication date
CN100425943C (zh) 2008-10-15
TWI284195B (en) 2007-07-21
EP1327861A1 (en) 2003-07-16
US20030133372A1 (en) 2003-07-17
EP1327861B1 (en) 2011-03-09
CN1497237A (zh) 2004-05-19
TW200301818A (en) 2003-07-16
KR20030061337A (ko) 2003-07-18
JP4143420B2 (ja) 2008-09-03
DE60336282D1 (de) 2011-04-21
KR101012981B1 (ko) 2011-02-10
US7142500B2 (en) 2006-11-28
JP2003214807A (ja) 2003-07-30

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