CN100425943C - 基于电容的位置传感器 - Google Patents

基于电容的位置传感器 Download PDF

Info

Publication number
CN100425943C
CN100425943C CNB031016022A CN03101602A CN100425943C CN 100425943 C CN100425943 C CN 100425943C CN B031016022 A CNB031016022 A CN B031016022A CN 03101602 A CN03101602 A CN 03101602A CN 100425943 C CN100425943 C CN 100425943C
Authority
CN
China
Prior art keywords
plate
electric capacity
pair
axle
along
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB031016022A
Other languages
English (en)
Chinese (zh)
Other versions
CN1497237A (zh
Inventor
D·J·法森
S·T·赫恩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of CN1497237A publication Critical patent/CN1497237A/zh
Application granted granted Critical
Publication of CN100425943C publication Critical patent/CN100425943C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
CNB031016022A 2002-01-11 2003-01-13 基于电容的位置传感器 Expired - Fee Related CN100425943C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/043970 2002-01-11
US10/043,970 US7142500B2 (en) 2002-01-11 2002-01-11 Sensor with varying capacitance based on relative position between objects

Publications (2)

Publication Number Publication Date
CN1497237A CN1497237A (zh) 2004-05-19
CN100425943C true CN100425943C (zh) 2008-10-15

Family

ID=21929857

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB031016022A Expired - Fee Related CN100425943C (zh) 2002-01-11 2003-01-13 基于电容的位置传感器

Country Status (8)

Country Link
US (1) US7142500B2 (enExample)
EP (1) EP1327861B1 (enExample)
JP (1) JP4143420B2 (enExample)
KR (1) KR101012981B1 (enExample)
CN (1) CN100425943C (enExample)
DE (1) DE60336282D1 (enExample)
SG (1) SG107623A1 (enExample)
TW (1) TWI284195B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI577974B (zh) * 2016-02-04 2017-04-11 台灣艾華電子工業股份有限公司 位置感測器及其可變式電容組件

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7075317B2 (en) * 2004-08-06 2006-07-11 Waters Investment Limited System and method for measurement of small-angle or small-displacement
KR100647724B1 (ko) * 2004-10-28 2006-11-28 주식회사알에프윈도우 이동형 무선 사설교환장치
US7343813B1 (en) * 2005-02-15 2008-03-18 Harrington Richard H Multicapacitor sensor array
US7893697B2 (en) * 2006-02-21 2011-02-22 Cyberoptics Semiconductor, Inc. Capacitive distance sensing in semiconductor processing tools
KR101259218B1 (ko) * 2006-02-21 2013-04-29 싸이버옵틱스 쎄미콘덕터 인코퍼레이티드 반도체 처리 툴의 용량성 거리 감지 장치 및 방법
US7808061B2 (en) * 2006-07-28 2010-10-05 Hewlett-Packard Development Company, L.P. Multi-die apparatus including moveable portions
KR101388304B1 (ko) 2006-09-29 2014-04-22 싸이버옵틱스 쎄미콘덕터 인코퍼레이티드 기판형 입자 센서
TW200849444A (en) * 2007-04-05 2008-12-16 Cyberoptics Semiconductor Inc Semiconductor processing system with integrated showerhead distance measuring device
GB2448821A (en) * 2007-04-24 2008-10-29 Seiko Instr Inc Differential capacitive proximity detector
JP2008292446A (ja) * 2007-04-24 2008-12-04 Seiko Instruments Inc 近接検出装置及び近接検出方法
US20090015268A1 (en) * 2007-07-13 2009-01-15 Gardner Delrae H Device and method for compensating a capacitive sensor measurement for variations caused by environmental conditions in a semiconductor processing environment
US7570066B2 (en) * 2007-11-01 2009-08-04 Seagate Technology Llc Simultaneous detection of in-plane and out-of-plane position displacement with capacitive sensors
US20090206846A1 (en) * 2008-02-14 2009-08-20 Sanchez Francisco J Capacitor-based position sensor for vehicle
EP2112518A1 (en) * 2008-04-25 2009-10-28 ALSTOM Technology Ltd Brush wear monitor
US7898266B2 (en) 2008-06-04 2011-03-01 Seagate Technology Llc Probe with electrostatic actuation and capacitive sensor
JP5522961B2 (ja) * 2009-03-17 2014-06-18 オリンパス株式会社 慣性駆動アクチュエータのキャリブレーション方法及び慣性駆動アクチュエータ装置
KR20110129407A (ko) 2009-03-19 2011-12-01 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. 3상 용량 기반 감지
US8272266B2 (en) * 2009-04-09 2012-09-25 Hewlett-Packard Development Company, L.P. Gyroscopes using surface electrodes
US9658053B2 (en) 2010-03-09 2017-05-23 Si-Ware Systems Self calibration for mirror positioning in optical MEMS interferometers
US8656778B2 (en) 2010-12-30 2014-02-25 Rosemount Aerospace Inc. In-plane capacitive mems accelerometer
JP5524170B2 (ja) * 2011-12-09 2014-06-18 株式会社東芝 記憶装置
US20130320466A1 (en) * 2012-05-31 2013-12-05 Analog Devices, Inc. Package for Damping Inertial Sensor
US9250143B2 (en) * 2012-09-19 2016-02-02 College Park Industries, Inc. Multicapacitor force/moment sensor arrays
WO2014117158A1 (en) * 2013-01-28 2014-07-31 Si-Ware Systems Self calibration for mirror positioning in optical mems interferometers
WO2014120206A1 (en) * 2013-01-31 2014-08-07 Hewlett-Packard Development Company, L.P. Sensor having particle barrier
KR102489065B1 (ko) * 2013-03-15 2023-01-13 어플라이드 머티어리얼스, 인코포레이티드 Ald 플래튼 서셉터의 위치 및 온도 모니터링
CN104677390B (zh) * 2013-11-26 2017-09-29 林立 电容式传感器及组合电容式位移测量传感系统
CN104238573B (zh) * 2014-08-21 2017-08-25 衡括流体动力实验室（北京）有限公司 动力提供装置及系统
CN104268967A (zh) * 2014-09-29 2015-01-07 深圳市爱普特微电子有限公司 基于电容式传感器的安全门禁方法和装置
TWI575232B (zh) * 2015-06-12 2017-03-21 財團法人工業技術研究院 感測裝置
US10702658B2 (en) * 2015-07-12 2020-07-07 Patients Pending Ltd. Cover for liquid delivery system with integrated plunger position sensing, and corresponding method
CN107462142B (zh) * 2016-06-03 2019-09-17 清华大学 电容式接触型位移测量传感器及传感系统
CN106705937B (zh) * 2016-12-13 2019-11-15 国家电网公司 基于差分电容的电压杆塔倾斜监测系统及其方法
CN109742998A (zh) * 2018-12-24 2019-05-10 维沃移动通信有限公司 振动组件、马达控制方法及终端
CN109916284A (zh) * 2019-03-01 2019-06-21 维沃移动通信有限公司 一种位置检测方法及终端设备
CN113116162B (zh) * 2019-12-31 2023-10-03 浙江苏泊尔家电制造有限公司 烹饪器具和烹饪器具的控制方法
CN112325756A (zh) * 2020-09-04 2021-02-05 山东休普动力科技股份有限公司 自由活塞发动机动子位移传感器、动子识别系统及方法
US20230143537A1 (en) * 2021-11-11 2023-05-11 Taiwan Semiconductor Manufacturing Company Limited Semiconductor processing tool and method of operation
CN117674536B (zh) * 2024-01-30 2024-06-04 基合半导体（宁波）有限公司 对焦马达、对焦马达的闭环控制方法及摄像设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2117588U (zh) * 1992-03-18 1992-09-30 水利部、能源部地质勘探机电研究所 平板电容式位移传感器
US5896032A (en) * 1995-06-12 1999-04-20 Hewlett-Packard Company Position detection device positioning device and moving medium-type memory device

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4879508A (en) * 1986-04-04 1989-11-07 Mitutoyo Corporation Capacitance-type measuring device for absolute measurement of positions
USRE34741E (en) * 1986-04-04 1994-09-27 Mitutoyo Corporation Electrode structure for capacitance-type measurement transducers
CH670306A5 (enExample) * 1986-11-13 1989-05-31 Hans Ulrich Meyer
US4893071A (en) * 1988-05-24 1990-01-09 American Telephone And Telegraph Company, At&T Bell Laboratories Capacitive incremental position measurement and motion control
CH685214A5 (fr) * 1991-10-15 1995-04-28 Hans Ulrich Meyer Capteur capacitif de position.
US5418771A (en) * 1993-02-25 1995-05-23 Canon Kabushiki Kaisha Information processing apparatus provided with surface aligning mechanism between probe head substrate and recording medium substrate
US5708367A (en) * 1995-07-10 1998-01-13 Tousson; Eliahou Digital position sensor
JPH1038508A (ja) * 1996-07-22 1998-02-13 Hewlett Packard Co <Hp> 位置検出装置及び位置決め装置
DE69621334T2 (de) * 1996-10-11 2003-01-09 Brown & Sharpe Tesa S.A., Renens Kapazitive Dimensionsmesseinrichtung
US5896232A (en) 1997-08-07 1999-04-20 International Business Machines Corporation Highly efficient and compact frontlighting for polarization-based reflection light valves
US6868726B2 (en) * 2000-01-20 2005-03-22 Analog Devices Imi, Inc. Position sensing with improved linearity
US6738336B2 (en) * 2001-05-16 2004-05-18 Hewlett-Packard Development Company, L.P. Data storage device
US6504385B2 (en) 2001-05-31 2003-01-07 Hewlett-Pakcard Company Three-axis motion sensor
US6509620B2 (en) * 2001-05-31 2003-01-21 Hewlett-Packard Company Flexure coupling block for motion sensor
US6776042B2 (en) 2002-01-25 2004-08-17 Kinemetrics, Inc. Micro-machined accelerometer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2117588U (zh) * 1992-03-18 1992-09-30 水利部、能源部地质勘探机电研究所 平板电容式位移传感器
US5896032A (en) * 1995-06-12 1999-04-20 Hewlett-Packard Company Position detection device positioning device and moving medium-type memory device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI577974B (zh) * 2016-02-04 2017-04-11 台灣艾華電子工業股份有限公司 位置感測器及其可變式電容組件
US9726471B1 (en) 2016-02-04 2017-08-08 Taiwan Alpha Electronic Co., Ltd. Position sensor and variable capacitor assembly thereof

Also Published As

Publication number Publication date
TWI284195B (en) 2007-07-21
EP1327861A1 (en) 2003-07-16
US20030133372A1 (en) 2003-07-17
EP1327861B1 (en) 2011-03-09
CN1497237A (zh) 2004-05-19
TW200301818A (en) 2003-07-16
KR20030061337A (ko) 2003-07-18
SG107623A1 (en) 2004-12-29
JP4143420B2 (ja) 2008-09-03
DE60336282D1 (de) 2011-04-21
KR101012981B1 (ko) 2011-02-10
US7142500B2 (en) 2006-11-28
JP2003214807A (ja) 2003-07-30

Similar Documents

Publication Publication Date Title
CN100425943C (zh) 基于电容的位置传感器
US5861754A (en) Position detection device
JP3625530B2 (ja) 位置検出装置及び位置検出方法
US6515489B2 (en) Apparatus for sensing position of electrostatic XY-stage through time-division multiplexing
US5053995A (en) Tunnel current data storage apparatus having separate lever bodies
US5134689A (en) Coordinate input system and input implement used in the system
US4956817A (en) High density data storage and retrieval system
US5075548A (en) Tunnel current probe moving mechanism having parallel cantilevers
US6657444B2 (en) Capacitance-based position sensor with integrating demodulator
CN102985832B (zh) 加速度计
Kimura et al. Capacitive-type flexible linear encoder with untethered slider using electrostatic induction
Wang et al. Design and characterization of a linear motion piezoelectric microactuator
US20030222661A1 (en) Capacitance-based position sensor with integrating demodulator
JP3053971B2 (ja) トンネル電流発生用三次元変位素子、該トンネル電流発生用三次元変位素子を用いたマルチ探針ユニット、および情報処理装置
Zhong et al. Trans‐scale precision positioning stage without guideway based on inertial stick–slip driving
JPH07191756A (ja) 微動駆動装置及びそれを用いた情報記録及び／又は再生装置
Wang et al. Design and characterization of a linear motion piezoelectric micropositioner
Zhu et al. Embedding and multiplexing large scale sensor arrays for Digital Clay
JPH0612710A (ja) カンチレバー型変位素子の駆動方法、走査型トンネル顕微鏡、情報処理装置、及びカンチレバー型変位素子
Jiang et al. Design of a Compact and Position Self-sensing Long-stroke Piezoelectric Actuator
Kotsopoulos et al. Tracking accuracy and stability of a sliding peak-filter based controller for spiral nanopositioning in probe storage systems
Kimura et al. Prototyping of flexible capacitive encoder with un-tethered slider using electrostatic induction
Pantazi et al. Track-follow Control for High-density Probe-based Storage Devices
KR20050090273A (ko) 캔티레버를 구비하는 전자기기
JPH06251434A (ja) 情報処理装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20081015

Termination date: 20130113

CF01 Termination of patent right due to non-payment of annual fee