TWI278778B - Apparatus for testing semiconductor devices and method for use therewith - Google Patents

Apparatus for testing semiconductor devices and method for use therewith Download PDF

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Publication number
TWI278778B
TWI278778B TW092112502A TW92112502A TWI278778B TW I278778 B TWI278778 B TW I278778B TW 092112502 A TW092112502 A TW 092112502A TW 92112502 A TW92112502 A TW 92112502A TW I278778 B TWI278778 B TW I278778B
Authority
TW
Taiwan
Prior art keywords
semiconductor devices
test
apg
dut
coupled
Prior art date
Application number
TW092112502A
Other languages
English (en)
Chinese (zh)
Other versions
TW200401227A (en
Inventor
John M Holmes
Original Assignee
Nextest Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nextest Systems Corp filed Critical Nextest Systems Corp
Publication of TW200401227A publication Critical patent/TW200401227A/zh
Application granted granted Critical
Publication of TWI278778B publication Critical patent/TWI278778B/zh

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/31813—Test pattern generators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31926—Routing signals to or from the device under test [DUT], e.g. switch matrix, pin multiplexing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56004—Pattern generation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
    • G11C29/12—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
    • G11C29/18—Address generation devices; Devices for accessing memories, e.g. details of addressing circuits
    • G11C29/26—Accessing multiple arrays
    • G11C2029/2602—Concurrent test
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C2029/5602—Interface to device under test

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Tests Of Electronic Circuits (AREA)
TW092112502A 2002-05-06 2003-05-06 Apparatus for testing semiconductor devices and method for use therewith TWI278778B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US37848802P 2002-05-06 2002-05-06

Publications (2)

Publication Number Publication Date
TW200401227A TW200401227A (en) 2004-01-16
TWI278778B true TWI278778B (en) 2007-04-11

Family

ID=29401608

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092112502A TWI278778B (en) 2002-05-06 2003-05-06 Apparatus for testing semiconductor devices and method for use therewith

Country Status (5)

Country Link
US (1) US7472326B2 (https=)
JP (1) JP2005528596A (https=)
KR (1) KR101021375B1 (https=)
TW (1) TWI278778B (https=)
WO (1) WO2003093845A2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7913002B2 (en) * 2004-08-20 2011-03-22 Advantest Corporation Test apparatus, configuration method, and device interface
JP2006179144A (ja) * 2004-12-24 2006-07-06 Fujitsu Ltd Ｉｃの高速試験方法及び装置
KR20130069853A (ko) * 2005-05-19 2013-06-26 넥스테스트 시스템즈 코포레이션 스마트 카드들을 테스트하기 위한 시스템 및 방법
JP4915779B2 (ja) * 2006-06-02 2012-04-11 株式会社メガチップス 装置間の接続方式および接続装置
WO2008020555A1 (en) * 2006-08-14 2008-02-21 Advantest Corporation Test device and test method
TWI436077B (zh) * 2010-11-24 2014-05-01 Etron Technology Inc 增加晶片預燒掃描效率的方法
US9514016B2 (en) * 2011-02-01 2016-12-06 Echostar Technologies L.L.C. Apparatus systems and methods for facilitating testing of a plurality of electronic devices
CN104425269B (zh) * 2013-08-27 2017-07-14 中芯国际集成电路制造(上海)有限公司 鳍式场效应晶体管及其形成方法
US10242750B2 (en) * 2017-05-31 2019-03-26 Sandisk Technologies Llc High-speed data path testing techniques for non-volatile memory

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1986004686A1 (fr) * 1985-01-31 1986-08-14 Hitachi, Ltd. Generateur de configurations de controle
JPH0750159B2 (ja) * 1985-10-11 1995-05-31 株式会社日立製作所 テストパタ−ン発生装置
JPH0754345B2 (ja) * 1986-07-30 1995-06-07 株式会社日立製作所 Ｉｃ試験装置
DE3752280T2 (de) * 1986-07-30 2000-02-03 Hitachi, Ltd. Mustergenerator
JP2514223Y2 (ja) * 1989-11-07 1996-10-16 ミサワホーム株式会社 引違い障子を納めたサッシ
US5349587A (en) * 1992-03-26 1994-09-20 Northern Telecom Limited Multiple clock rate test apparatus for testing digital systems
JPH07198798A (ja) * 1993-12-28 1995-08-01 Hitachi Ltd アルゴリズミックパターン発生器
US5572666A (en) * 1995-03-28 1996-11-05 Sun Microsystems, Inc. System and method for generating pseudo-random instructions for design verification
EP1630566A2 (en) * 1995-12-27 2006-03-01 Koken Co., Ltd. Monitoring control apparatus
US5883905A (en) * 1997-02-18 1999-03-16 Schlumberger Technologies, Inc. Pattern generator with extended register programming
JPH10319095A (ja) * 1997-05-22 1998-12-04 Mitsubishi Electric Corp 半導体テスト装置
US6118304A (en) * 1997-11-20 2000-09-12 Intrinsity, Inc. Method and apparatus for logic synchronization
US6246250B1 (en) * 1998-05-11 2001-06-12 Micron Technology, Inc. Probe card having on-board multiplex circuitry for expanding tester resources
JP2000276367A (ja) 1999-03-23 2000-10-06 Advantest Corp データ書込装置、データ書込方法、及び試験装置
US6363510B1 (en) * 1999-08-31 2002-03-26 Unisys Corporation Electronic system for testing chips having a selectable number of pattern generators that concurrently broadcast different bit streams to selectable sets of chip driver circuits
US6571365B1 (en) * 1999-11-03 2003-05-27 Unisys Corporation Initial stage of a multi-stage algorithmic pattern generator for testing IC chips
US6314034B1 (en) * 2000-04-14 2001-11-06 Advantest Corp. Application specific event based semiconductor memory test system
US6754868B2 (en) * 2001-06-29 2004-06-22 Nextest Systems Corporation Semiconductor test system having double data rate pin scrambling
US6631340B2 (en) * 2001-10-15 2003-10-07 Advantest Corp. Application specific event based semiconductor memory test system

Also Published As

Publication number Publication date
WO2003093845A3 (en) 2005-05-26
WO2003093845A2 (en) 2003-11-13
TW200401227A (en) 2004-01-16
JP2005528596A (ja) 2005-09-22
US7472326B2 (en) 2008-12-30
KR101021375B1 (ko) 2011-03-14
US20040153920A1 (en) 2004-08-05
KR20050003411A (ko) 2005-01-10

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