KR101021375B1 - 멀티태스킹 알고리즘 패턴 발생기를 갖춘 반도체 테스트시스템 - Google Patents

멀티태스킹 알고리즘 패턴 발생기를 갖춘 반도체 테스트시스템 Download PDF

Info

Publication number
KR101021375B1
KR101021375B1 KR1020047017833A KR20047017833A KR101021375B1 KR 101021375 B1 KR101021375 B1 KR 101021375B1 KR 1020047017833 A KR1020047017833 A KR 1020047017833A KR 20047017833 A KR20047017833 A KR 20047017833A KR 101021375 B1 KR101021375 B1 KR 101021375B1
Authority
KR
South Korea
Prior art keywords
semiconductor devices
apg
multitasking
dut
time domain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020047017833A
Other languages
English (en)
Korean (ko)
Other versions
KR20050003411A (ko
Inventor
존 엠. 홀메스
Original Assignee
넥스테스트 시스템즈 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 넥스테스트 시스템즈 코포레이션 filed Critical 넥스테스트 시스템즈 코포레이션
Publication of KR20050003411A publication Critical patent/KR20050003411A/ko
Application granted granted Critical
Publication of KR101021375B1 publication Critical patent/KR101021375B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/31813—Test pattern generators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31926—Routing signals to or from the device under test [DUT], e.g. switch matrix, pin multiplexing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56004—Pattern generation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
    • G11C29/12—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
    • G11C29/18—Address generation devices; Devices for accessing memories, e.g. details of addressing circuits
    • G11C29/26—Accessing multiple arrays
    • G11C2029/2602—Concurrent test
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C2029/5602—Interface to device under test

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020047017833A 2002-05-06 2003-05-06 멀티태스킹 알고리즘 패턴 발생기를 갖춘 반도체 테스트시스템 Expired - Lifetime KR101021375B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US37848802P 2002-05-06 2002-05-06
US60/378,488 2002-05-06
PCT/US2003/014328 WO2003093845A2 (en) 2002-05-06 2003-05-06 Semiconductor test system having multitasking algorithmic pattern generator

Publications (2)

Publication Number Publication Date
KR20050003411A KR20050003411A (ko) 2005-01-10
KR101021375B1 true KR101021375B1 (ko) 2011-03-14

Family

ID=29401608

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020047017833A Expired - Lifetime KR101021375B1 (ko) 2002-05-06 2003-05-06 멀티태스킹 알고리즘 패턴 발생기를 갖춘 반도체 테스트시스템

Country Status (5)

Country Link
US (1) US7472326B2 (https=)
JP (1) JP2005528596A (https=)
KR (1) KR101021375B1 (https=)
TW (1) TWI278778B (https=)
WO (1) WO2003093845A2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7913002B2 (en) * 2004-08-20 2011-03-22 Advantest Corporation Test apparatus, configuration method, and device interface
JP2006179144A (ja) * 2004-12-24 2006-07-06 Fujitsu Ltd Ｉｃの高速試験方法及び装置
KR20130069853A (ko) * 2005-05-19 2013-06-26 넥스테스트 시스템즈 코포레이션 스마트 카드들을 테스트하기 위한 시스템 및 방법
JP4915779B2 (ja) * 2006-06-02 2012-04-11 株式会社メガチップス 装置間の接続方式および接続装置
WO2008020555A1 (en) * 2006-08-14 2008-02-21 Advantest Corporation Test device and test method
TWI436077B (zh) * 2010-11-24 2014-05-01 Etron Technology Inc 增加晶片預燒掃描效率的方法
US9514016B2 (en) * 2011-02-01 2016-12-06 Echostar Technologies L.L.C. Apparatus systems and methods for facilitating testing of a plurality of electronic devices
CN104425269B (zh) * 2013-08-27 2017-07-14 中芯国际集成电路制造(上海)有限公司 鳍式场效应晶体管及其形成方法
US10242750B2 (en) * 2017-05-31 2019-03-26 Sandisk Technologies Llc High-speed data path testing techniques for non-volatile memory

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0368294U (https=) * 1989-11-07 1991-07-04
US5572666A (en) * 1995-03-28 1996-11-05 Sun Microsystems, Inc. System and method for generating pseudo-random instructions for design verification
JP2000276367A (ja) 1999-03-23 2000-10-06 Advantest Corp データ書込装置、データ書込方法、及び試験装置
US6243665B1 (en) * 1995-12-27 2001-06-05 Duaxes Corporation Monitoring and control apparatus incorporating run-time fault detection by boundary scan logic testing

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1986004686A1 (fr) * 1985-01-31 1986-08-14 Hitachi, Ltd. Generateur de configurations de controle
JPH0750159B2 (ja) * 1985-10-11 1995-05-31 株式会社日立製作所 テストパタ−ン発生装置
JPH0754345B2 (ja) * 1986-07-30 1995-06-07 株式会社日立製作所 Ｉｃ試験装置
DE3752280T2 (de) * 1986-07-30 2000-02-03 Hitachi, Ltd. Mustergenerator
US5349587A (en) * 1992-03-26 1994-09-20 Northern Telecom Limited Multiple clock rate test apparatus for testing digital systems
JPH07198798A (ja) * 1993-12-28 1995-08-01 Hitachi Ltd アルゴリズミックパターン発生器
US5883905A (en) * 1997-02-18 1999-03-16 Schlumberger Technologies, Inc. Pattern generator with extended register programming
JPH10319095A (ja) * 1997-05-22 1998-12-04 Mitsubishi Electric Corp 半導体テスト装置
US6118304A (en) * 1997-11-20 2000-09-12 Intrinsity, Inc. Method and apparatus for logic synchronization
US6246250B1 (en) * 1998-05-11 2001-06-12 Micron Technology, Inc. Probe card having on-board multiplex circuitry for expanding tester resources
US6363510B1 (en) * 1999-08-31 2002-03-26 Unisys Corporation Electronic system for testing chips having a selectable number of pattern generators that concurrently broadcast different bit streams to selectable sets of chip driver circuits
US6571365B1 (en) * 1999-11-03 2003-05-27 Unisys Corporation Initial stage of a multi-stage algorithmic pattern generator for testing IC chips
US6314034B1 (en) * 2000-04-14 2001-11-06 Advantest Corp. Application specific event based semiconductor memory test system
US6754868B2 (en) * 2001-06-29 2004-06-22 Nextest Systems Corporation Semiconductor test system having double data rate pin scrambling
US6631340B2 (en) * 2001-10-15 2003-10-07 Advantest Corp. Application specific event based semiconductor memory test system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0368294U (https=) * 1989-11-07 1991-07-04
US5572666A (en) * 1995-03-28 1996-11-05 Sun Microsystems, Inc. System and method for generating pseudo-random instructions for design verification
US6243665B1 (en) * 1995-12-27 2001-06-05 Duaxes Corporation Monitoring and control apparatus incorporating run-time fault detection by boundary scan logic testing
JP2000276367A (ja) 1999-03-23 2000-10-06 Advantest Corp データ書込装置、データ書込方法、及び試験装置

Also Published As

Publication number Publication date
WO2003093845A3 (en) 2005-05-26
TWI278778B (en) 2007-04-11
WO2003093845A2 (en) 2003-11-13
TW200401227A (en) 2004-01-16
JP2005528596A (ja) 2005-09-22
US7472326B2 (en) 2008-12-30
US20040153920A1 (en) 2004-08-05
KR20050003411A (ko) 2005-01-10

Similar Documents

Publication Publication Date Title
US5127011A (en) Per-pin integrated circuit test system having n-bit interface
US5553082A (en) Built-in self-test for logic circuitry at memory array output
CN101163977A (zh) 集成电路测试模块
US7114114B1 (en) Dynamically reconfigurable precision signal delay test system for automatic test equipment
KR100634991B1 (ko) 디스크 기반 데이터 스트리밍을 구비한 집적 회로 시험기
US7003697B2 (en) Apparatus having pattern scrambler for testing a semiconductor device and method for operating same
US7035751B2 (en) Nonvolatile memory microcomputer chip, and a method for testing the nonvolatile memory microcomputer chip
KR101021375B1 (ko) 멀티태스킹 알고리즘 패턴 발생기를 갖춘 반도체 테스트시스템
US6891393B2 (en) Synchronous semiconductor device, and inspection system and method for the same
US6754868B2 (en) Semiconductor test system having double data rate pin scrambling
KR100513406B1 (ko) 반도체 시험장치
US7243278B2 (en) Integrated circuit tester with software-scaleable channels
US5917834A (en) Integrated circuit tester having multiple period generators
US4972413A (en) Method and apparatus for high speed integrated circuit testing
US7171611B2 (en) Apparatus for determining the access time and/or the minimally allowable cycle time of a memory
US20080080276A1 (en) Clock frequency doubler method and apparatus for serial flash testing
US6507801B1 (en) Semiconductor device testing system
US20080316846A1 (en) Semiconductor memory device capable of storing data of various patterns and method of electrically testing the semiconductor memory device
US8120977B2 (en) Test method for nonvolatile memory device
JP5068739B2 (ja) 集積回路試験モジュール
JPH04301300A (ja) 半導体メモリ装置

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

A201 Request for examination
AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

J201 Request for trial against refusal decision
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PJ0201 Trial against decision of rejection

St.27 status event code: A-3-3-V10-V11-apl-PJ0201

PB0901 Examination by re-examination before a trial

St.27 status event code: A-6-3-E10-E12-rex-PB0901

B701 Decision to grant
PB0701 Decision of registration after re-examination before a trial

St.27 status event code: A-3-4-F10-F13-rex-PB0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

FPAY Annual fee payment

Payment date: 20140221

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20150130

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20160127

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

FPAY Annual fee payment

Payment date: 20170201

Year of fee payment: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

FPAY Annual fee payment

Payment date: 20180202

Year of fee payment: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

FPAY Annual fee payment

Payment date: 20190201

Year of fee payment: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

FPAY Annual fee payment

Payment date: 20200130

Year of fee payment: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 12

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 13

PC1801 Expiration of term

St.27 status event code: N-4-6-H10-H14-oth-PC1801

Not in force date: 20230507

Ip right cessation event data comment text: Termination Category : EXPIRATION_OF_DURATION

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000