TWI269449B - Photo-electronic display device and the making method thereof - Google Patents

Photo-electronic display device and the making method thereof Download PDF

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Publication number
TWI269449B
TWI269449B TW94139441A TW94139441A TWI269449B TW I269449 B TWI269449 B TW I269449B TW 94139441 A TW94139441 A TW 94139441A TW 94139441 A TW94139441 A TW 94139441A TW I269449 B TWI269449 B TW I269449B
Authority
TW
Taiwan
Prior art keywords
film
electrode
photoresist pattern
source
layer
Prior art date
Application number
TW94139441A
Other languages
English (en)
Chinese (zh)
Other versions
TW200701468A (en
Inventor
Megumi Masuda
Toshio Araki
Terushige Hino
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of TWI269449B publication Critical patent/TWI269449B/zh
Publication of TW200701468A publication Critical patent/TW200701468A/zh

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Landscapes

  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Solid State Image Pick-Up Elements (AREA)
TW94139441A 2005-06-16 2005-11-10 Photo-electronic display device and the making method thereof TWI269449B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005176252A JP2006351844A (ja) 2005-06-16 2005-06-16 電気光学表示装置およびその製造方法

Publications (2)

Publication Number Publication Date
TWI269449B true TWI269449B (en) 2006-12-21
TW200701468A TW200701468A (en) 2007-01-01

Family

ID=37519703

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94139441A TWI269449B (en) 2005-06-16 2005-11-10 Photo-electronic display device and the making method thereof

Country Status (3)

Country Link
JP (1) JP2006351844A (enrdf_load_stackoverflow)
CN (1) CN1881593A (enrdf_load_stackoverflow)
TW (1) TWI269449B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI449129B (zh) * 2007-12-03 2014-08-11 Semiconductor Energy Lab 薄膜電晶體之製造方法及顯示裝置之製造方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2448174B (en) * 2007-04-04 2009-12-09 Cambridge Display Tech Ltd Organic thin film transistors
US8035107B2 (en) 2008-02-26 2011-10-11 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing display device
US7883943B2 (en) * 2008-03-11 2011-02-08 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing thin film transistor and method for manufacturing display device
EP2180518B1 (en) * 2008-10-24 2018-04-25 Semiconductor Energy Laboratory Co, Ltd. Method for manufacturing semiconductor device
US20120001179A1 (en) * 2010-07-02 2012-01-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP2014013299A (ja) * 2012-07-04 2014-01-23 Mitsubishi Electric Corp 薄膜トランジスタアレイ基板およびそれを用いた液晶表示装置
US11215891B2 (en) * 2019-05-24 2022-01-04 Sharp Kabushiki Kaisha Active matrix substrate and manufacturing method thereof
US20210028221A1 (en) * 2019-07-26 2021-01-28 Sharp Kabushiki Kaisha Imaging panel

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3208658B2 (ja) * 1997-03-27 2001-09-17 株式会社アドバンスト・ディスプレイ 電気光学素子の製法
JP2001339072A (ja) * 2000-03-15 2001-12-07 Advanced Display Inc 液晶表示装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI449129B (zh) * 2007-12-03 2014-08-11 Semiconductor Energy Lab 薄膜電晶體之製造方法及顯示裝置之製造方法

Also Published As

Publication number Publication date
CN1881593A (zh) 2006-12-20
JP2006351844A (ja) 2006-12-28
TW200701468A (en) 2007-01-01

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