TWI257436B - Method and vessel for the delivery of precursor materials - Google Patents

Method and vessel for the delivery of precursor materials Download PDF

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Publication number
TWI257436B
TWI257436B TW93124581A TW93124581A TWI257436B TW I257436 B TWI257436 B TW I257436B TW 93124581 A TW93124581 A TW 93124581A TW 93124581 A TW93124581 A TW 93124581A TW I257436 B TWI257436 B TW I257436B
Authority
TW
Taiwan
Prior art keywords
container
space
fluid
precursor
thermally conductive
Prior art date
Application number
TW93124581A
Other languages
English (en)
Chinese (zh)
Other versions
TW200525046A (en
Inventor
Charles Michael Birtcher
Richard J Dunning
Robert Daniel Clark
Arthur Kenneth Hochberg
Thomas Andrew Steidl
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Publication of TW200525046A publication Critical patent/TW200525046A/zh
Application granted granted Critical
Publication of TWI257436B publication Critical patent/TWI257436B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0391—Affecting flow by the addition of material or energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4891—With holder for solid, flaky or pulverized material to be dissolved or entrained

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
TW93124581A 2003-08-19 2004-08-16 Method and vessel for the delivery of precursor materials TWI257436B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US49618703P 2003-08-19 2003-08-19
US58729504P 2004-07-12 2004-07-12
US10/902,778 US7261118B2 (en) 2003-08-19 2004-08-02 Method and vessel for the delivery of precursor materials

Publications (2)

Publication Number Publication Date
TW200525046A TW200525046A (en) 2005-08-01
TWI257436B true TWI257436B (en) 2006-07-01

Family

ID=34069125

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93124581A TWI257436B (en) 2003-08-19 2004-08-16 Method and vessel for the delivery of precursor materials

Country Status (10)

Country Link
US (1) US7261118B2 (https=)
EP (1) EP1508631B1 (https=)
JP (1) JP4012181B2 (https=)
KR (1) KR100590463B1 (https=)
CN (1) CN100523289C (https=)
AT (1) ATE466969T1 (https=)
DE (1) DE602004026968D1 (https=)
IL (1) IL163536A0 (https=)
SG (2) SG130188A1 (https=)
TW (1) TWI257436B (https=)

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Also Published As

Publication number Publication date
SG109618A1 (en) 2005-03-30
US20050039794A1 (en) 2005-02-24
EP1508631A1 (en) 2005-02-23
CN1611636A (zh) 2005-05-04
KR100590463B1 (ko) 2006-06-19
JP4012181B2 (ja) 2007-11-21
SG130188A1 (en) 2007-03-20
CN100523289C (zh) 2009-08-05
IL163536A0 (en) 2005-12-18
EP1508631B1 (en) 2010-05-05
ATE466969T1 (de) 2010-05-15
US7261118B2 (en) 2007-08-28
TW200525046A (en) 2005-08-01
JP2005101564A (ja) 2005-04-14
DE602004026968D1 (de) 2010-06-17
KR20050020643A (ko) 2005-03-04

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