TWI256100B - Wafer processing apparatus capable of mapping wafer - Google Patents

Wafer processing apparatus capable of mapping wafer

Info

Publication number
TWI256100B
TWI256100B TW91134333A TW91134333A TWI256100B TW I256100 B TWI256100 B TW I256100B TW 91134333 A TW91134333 A TW 91134333A TW 91134333 A TW91134333 A TW 91134333A TW I256100 B TWI256100 B TW I256100B
Authority
TW
Taiwan
Prior art keywords
wafer
pod
processing apparatus
emitter
detector
Prior art date
Application number
TW91134333A
Other languages
English (en)
Chinese (zh)
Other versions
TW200409266A (en
Inventor
Hiroshi Igarashi
Tsutomu Okabe
Toshihiko Miyajima
Original Assignee
Tdk Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tdk Corp filed Critical Tdk Corp
Publication of TW200409266A publication Critical patent/TW200409266A/zh
Application granted granted Critical
Publication of TWI256100B publication Critical patent/TWI256100B/zh

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW91134333A 2001-05-28 2002-11-26 Wafer processing apparatus capable of mapping wafer TWI256100B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001158458A JP3953751B2 (ja) 2001-05-28 2001-05-28 ウェーハマッピング装置

Publications (2)

Publication Number Publication Date
TW200409266A TW200409266A (en) 2004-06-01
TWI256100B true TWI256100B (en) 2006-06-01

Family

ID=19002184

Family Applications (2)

Application Number Title Priority Date Filing Date
TW91134333A TWI256100B (en) 2001-05-28 2002-11-26 Wafer processing apparatus capable of mapping wafer
TW92134917A TWI226099B (en) 2001-05-28 2002-11-26 Wafer processing apparatus capable of mapping wafer

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW92134917A TWI226099B (en) 2001-05-28 2002-11-26 Wafer processing apparatus capable of mapping wafer

Country Status (2)

Country Link
JP (1) JP3953751B2 (enExample)
TW (2) TWI256100B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4669643B2 (ja) 2001-09-17 2011-04-13 ローツェ株式会社 ウエハマッピング装置およびそれを備えたロードポート
JP4027837B2 (ja) 2003-04-28 2007-12-26 Ｔｄｋ株式会社 パージ装置およびパージ方法
JP4012190B2 (ja) 2004-10-26 2007-11-21 Ｔｄｋ株式会社 密閉容器の蓋開閉システム及び開閉方法
JP4664264B2 (ja) * 2006-10-26 2011-04-06 東京エレクトロン株式会社 検出装置及び検出方法
JP5093621B2 (ja) * 2009-09-18 2012-12-12 Ｔｄｋ株式会社 ロードポート装置及び該ロードポート装置の排塵方法
JP7154986B2 (ja) * 2018-12-11 2022-10-18 平田機工株式会社 基板搬送装置及び基板搬送システム
JP7519822B2 (ja) * 2020-06-19 2024-07-22 東京エレクトロン株式会社 収納モジュール、基板処理システムおよび消耗部材の搬送方法
CN117594508B (zh) * 2024-01-18 2024-04-09 沈阳元创半导体有限公司 一种用于晶圆装载机的旋转开门装置

Also Published As

Publication number Publication date
JP2002353293A (ja) 2002-12-06
TWI226099B (en) 2005-01-01
JP3953751B2 (ja) 2007-08-08
TW200409275A (en) 2004-06-01
TW200409266A (en) 2004-06-01

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Legal Events

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