TWI236936B - Baseplate surface cleansing apparatus - Google Patents

Baseplate surface cleansing apparatus Download PDF

Info

Publication number
TWI236936B
TWI236936B TW093121466A TW93121466A TWI236936B TW I236936 B TWI236936 B TW I236936B TW 093121466 A TW093121466 A TW 093121466A TW 93121466 A TW93121466 A TW 93121466A TW I236936 B TWI236936 B TW I236936B
Authority
TW
Taiwan
Prior art keywords
cleansing
baseplate
belt
crystal panel
panel plate
Prior art date
Application number
TW093121466A
Other languages
English (en)
Other versions
TW200510081A (en
Inventor
Shigeru Kimura
Original Assignee
Yodogawa Medec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yodogawa Medec Co Ltd filed Critical Yodogawa Medec Co Ltd
Publication of TW200510081A publication Critical patent/TW200510081A/zh
Application granted granted Critical
Publication of TWI236936B publication Critical patent/TWI236936B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/022—Cleaning travelling work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning In General (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
TW093121466A 2003-09-10 2004-07-19 Baseplate surface cleansing apparatus TWI236936B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003318385A JP2005081297A (ja) 2003-09-10 2003-09-10 基板表面清掃装置

Publications (2)

Publication Number Publication Date
TW200510081A TW200510081A (en) 2005-03-16
TWI236936B true TWI236936B (en) 2005-08-01

Family

ID=34417683

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093121466A TWI236936B (en) 2003-09-10 2004-07-19 Baseplate surface cleansing apparatus

Country Status (4)

Country Link
JP (1) JP2005081297A (zh)
KR (1) KR20050026852A (zh)
CN (1) CN1593793A (zh)
TW (1) TWI236936B (zh)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101140117B1 (ko) * 2005-04-01 2012-04-30 파나소닉 주식회사 기판 단자 세정 장치 및 기판 단자의 세정 방법
KR100796372B1 (ko) * 2006-03-24 2008-01-24 (주)와이티에스 디스플레이용 패널 세정장치
WO2007129790A1 (en) * 2006-05-10 2007-11-15 Ledtech Co., Ltd. Apparatus for cleaning planar object
KR20090051930A (ko) * 2007-11-20 2009-05-25 세메스 주식회사 기판 세정 장치 및 방법
JP5191785B2 (ja) * 2008-04-17 2013-05-08 紀伊産業株式会社 クリーニング装置およびクリーニング方法
KR100908270B1 (ko) 2008-05-20 2009-07-20 (주)에스알 아이텍 디스플레이용 투명소재 코팅장치 및 그 방법
KR100972210B1 (ko) * 2008-09-22 2010-07-26 (주)와이티에스 디스플레이 패널 세정용 연마벨트의 공기압 공급장치
KR100972211B1 (ko) * 2008-09-22 2010-07-26 (주)와이티에스 디스플레이 패널 세정용 연마벨트의 공기압 공급장치
JP2011039116A (ja) * 2009-08-06 2011-02-24 Hitachi High-Technologies Corp Ｆｐｄパネル実装装置及び実装方法
JP2011085642A (ja) * 2009-10-13 2011-04-28 Hitachi High-Technologies Corp Ｆｐｄパネル実装装置及び実装方法
WO2011055471A1 (ja) * 2009-11-04 2011-05-12 シャープ株式会社 拭取り清掃装置及び拭取り清掃方法
TWI408012B (zh) * 2010-02-15 2013-09-11 Bando Chemical Ind Clean device
KR100994641B1 (ko) * 2010-06-08 2010-11-15 이성주 접이식 수산물 박스 세척기
KR20140005939A (ko) * 2011-02-15 2014-01-15 반도 카가쿠 가부시키가이샤 클리닝 장치
JP5840847B2 (ja) * 2011-03-01 2016-01-06 スリーエム イノベイティブ プロパティズ カンパニー ガラス基板表面清掃方法及び清掃ベルト
CN103240244A (zh) * 2012-02-02 2013-08-14 林进诚 表面清洁装置与表面清洁方法
CN103364252B (zh) * 2012-04-10 2017-01-18 深圳迈瑞生物医疗电子股份有限公司 推片染色机的涂片推片洁净方法及装置
JP5710552B2 (ja) * 2012-07-27 2015-04-30 富士フイルム株式会社 ウエブの異物除去方法及び異物除去装置
KR102037265B1 (ko) 2014-12-12 2019-11-26 삼성전기주식회사 적층세라믹 커패시터 및 그 제조방법
JP2016140816A (ja) * 2015-01-30 2016-08-08 株式会社 ハリーズ 透明板清掃システム
CN104759422A (zh) * 2015-03-12 2015-07-08 上海工程技术大学 一种自洁式太阳能电池板除尘清洗装置
CN105081930B (zh) * 2015-08-12 2017-05-17 京东方科技集团股份有限公司 面板抛光装置和面板清洁设备
CN106000927B (zh) * 2016-05-10 2018-01-09 杭州电子科技大学 垫片清洗机
JP2019018127A (ja) * 2017-07-12 2019-02-07 株式会社 ハリーズ 清掃システム、透明基板の清掃方法及び電子部品の製造方法
CN107497758B (zh) 2017-09-11 2019-10-22 惠科股份有限公司 一种多尺寸玻璃基板清洗设备
CN108906766B (zh) * 2018-07-04 2023-02-24 中建材凯盛机器人（上海）有限公司 Cigs玻璃基板镀膜清洗系统
CN109226010A (zh) * 2018-09-28 2019-01-18 昆山市和博电子科技有限公司 一种基板清洗机及基板清洗系统
WO2020160231A1 (en) * 2019-01-31 2020-08-06 Applied Materials, Inc. Substrate cleaning devices and methods thereof
CN110095890A (zh) * 2019-05-05 2019-08-06 深圳市华星光电半导体显示技术有限公司 清洗装置及清洗方法
KR102036157B1 (ko) * 2019-08-06 2019-11-26 임인걸 Pcb의 청결성이 개선된 pcb용 세척장치

Also Published As

Publication number Publication date
KR20050026852A (ko) 2005-03-16
CN1593793A (zh) 2005-03-16
TW200510081A (en) 2005-03-16
JP2005081297A (ja) 2005-03-31

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