TWD198931S - Part of the holding pad for substrate transportation - Google Patents
Part of the holding pad for substrate transportationInfo
- Publication number
- TWD198931S TWD198931S TW107305935F TW107305935F TWD198931S TW D198931 S TWD198931 S TW D198931S TW 107305935 F TW107305935 F TW 107305935F TW 107305935 F TW107305935 F TW 107305935F TW D198931 S TWD198931 S TW D198931S
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- design
- article
- case
- holding
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 7
- 239000004065 semiconductor Substances 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000007779 soft material Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
Abstract
【物品用途】;本設計的物品是在半導體製造裝置中，配置在搬運半導體晶圓之類的基板用的搬運支臂上來使用的保持墊。本物品，係如「使用狀態之參考圖」所示，為配置在搬運支臂的基板保持部，抵接於所搬運的基板之邊緣部而予以吸附保持，當搬運支臂動作時，可防止基板從保持位置偏移或脫落。本物品，係由橡膠之類的柔軟素材所製成，正面部為略圓錐狀，在其底部設置具有縫隙的環狀凸部。藉此，本物品，係如「使用狀態之參考剖面圖」所示，能夠使略圓錐狀部沿著基板面撓曲變形，將環狀凸部抵接在基板而予以吸附保持，也能確實地保持住反翹撓曲的基板。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分；圖式中一點鏈線所圍繞者，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。;「參考立體圖」中，施以薄墨的部分係為用來表現主張設計之部分。[Use of article] The article of this design is a holding pad used in semiconductor manufacturing equipment, placed on a transfer arm for carrying substrates such as semiconductor wafers. This article, as shown in the "Reference Picture of Used Conditions", is a substrate holding part arranged on the conveyance arm. It is in contact with the edge of the substrate being conveyed and is adsorbed and held. When the conveyance arm moves, it can prevent The base plate is displaced or detached from the holding position. This item is made of soft material such as rubber. The front part is slightly conical, and the bottom part is provided with an annular convex part with a gap. As a result, this article, as shown in the "Reference cross-sectional view of the use state", can bend and deform the slightly conical portion along the substrate surface, and can make the annular convex portion contact the substrate to absorb and hold it, and can also reliably Ground to hold anti-warp deflection of the substrate. ;[Design Description];The dotted line part disclosed in the drawing is the part of the design that is not claimed in this case; the one-point chain line in the drawing is surrounded by the scope of the intended claim in this case, and the one-point chain line itself is not claimed in this case part of the design. ;In the "reference three-dimensional drawing", the part with thin ink is used to express the proposed design.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2018-8792F JP1625995S (en) | 2018-04-20 | 2018-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD198931S true TWD198931S (en) | 2019-08-01 |
Family
ID=65519211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107305935F TWD198931S (en) | 2018-04-20 | 2018-10-08 | Part of the holding pad for substrate transportation |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD909603S1 (en) |
| JP (1) | JP1625995S (en) |
| TW (1) | TWD198931S (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD973609S1 (en) | 2020-04-22 | 2022-12-27 | Applied Materials, Inc. | Upper shield with showerhead for a process chamber |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1705915S (en) * | 2021-07-09 | 2022-01-25 | ||
| JP1705916S (en) * | 2021-07-09 | 2022-01-25 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD453000S1 (en) * | 2000-05-11 | 2002-01-22 | Yugenkaisha Shinjo Seisakusho | Clinch nut |
| USD451374S1 (en) * | 2000-05-18 | 2001-12-04 | Yugenkaisha Shinjo Seisakusho | Clinch nut |
| USD463968S1 (en) * | 2001-02-08 | 2002-10-08 | Emhart Llc | Deadbolt |
| USD559994S1 (en) * | 2005-03-30 | 2008-01-15 | Tokyo Electron Limited | Cover ring |
| USD560284S1 (en) * | 2005-03-30 | 2008-01-22 | Tokyo Electron Limited | Cover ring |
| USD559993S1 (en) * | 2005-03-30 | 2008-01-15 | Tokyo Electron Limited | Cover ring |
| USD642676S1 (en) * | 2006-10-27 | 2011-08-02 | Resmed Motor Technologies Inc | Flexible motor sleeve |
| JP4982608B2 (en) * | 2007-05-02 | 2012-07-25 | プレシジョン・メディカル・デバイスズ・エルエルシー | Non-pneumatic tourniquet device |
| USD679013S1 (en) * | 2008-05-02 | 2013-03-26 | Precision Medical Devices, Llc | Non-pneumatic tourniquet device |
| USD635246S1 (en) * | 2010-03-26 | 2011-03-29 | Oriel Therapeutics, Inc. | Dose disk for dry powder inhalers |
| US20110259457A1 (en) * | 2010-04-23 | 2011-10-27 | Wen-Tsung Lin | Joint Structure for Controlling Water Flow |
| USD736261S1 (en) * | 2012-11-29 | 2015-08-11 | Cummins Inc. | Shroud |
| USD705438S1 (en) * | 2013-03-14 | 2014-05-20 | Charles River Laboratories, Inc. | Base |
| USD738491S1 (en) * | 2013-11-08 | 2015-09-08 | Medline Industries, Inc. | Guide wire bowl |
| USD738935S1 (en) * | 2014-07-15 | 2015-09-15 | Henry C. Chu | Cap for air compressor |
| USD755038S1 (en) * | 2014-08-13 | 2016-05-03 | Luke Bolton | Multi-fit cover plate |
| TWD168721S (en) * | 2014-10-09 | 2015-07-01 | 台灣福興工業股份有限公司 | Escutcheon |
| JP1579613S (en) * | 2017-01-25 | 2017-06-19 | ||
| USD867576S1 (en) * | 2017-05-24 | 2019-11-19 | Christina Hewitt | Cap for medical breathing apparatuses |
| USD878548S1 (en) * | 2018-11-16 | 2020-03-17 | Brandi Lane | Side indent nasal airway |
-
2018
- 2018-04-20 JP JPD2018-8792F patent/JP1625995S/ja active Active
- 2018-10-08 US US29/665,837 patent/USD909603S1/en active Active
- 2018-10-08 TW TW107305935F patent/TWD198931S/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD973609S1 (en) | 2020-04-22 | 2022-12-27 | Applied Materials, Inc. | Upper shield with showerhead for a process chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| JP1625995S (en) | 2019-03-04 |
| USD909603S1 (en) | 2021-02-02 |
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